Swivels

PS1690202-16-16 4.32 3.46 2.16 1.62 1-11 1/2 1-11 1/2 109.8 mm 87.9 mm 54.9 mm 41.3 mm NPTF NPTF 3 Piece Design D Swivels A B D Part Number A B C D Wrench Flats Dia.

Plug-in Unit

2 1(P) port 4-G 1/2 Conduit port VQC SMC SMC SMC SMC SMC SMC SMC SQ 95.5 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 77.5 90 72 VQ0 13 55.5 42.7 43.5 20.5 VQ4 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 33.5 11.5 15.7 12 2-Rc 1/8 (Pilot exhaust port) VQ5 (6.5) 21.5 2-Rc 1/8 (External pilot port) 27 2n-Rc 1/4, 3/8, C8, C10, C12 <4(A), 2(B) port> Rc 1/4: 1/4" Female thread Rc 3/8: 3/8" Female thread C8 : 8 One-touch

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

0 2 4 (B) (A) 2 4 (B) (A) 3 5 1 (EB) (P) (EA) 3 5 1 (EB) (P) (EA) 4(A) 2(B) i 5(EA)/3(EB) 1(P) 3 position closed center/exhaust center/pressure center 3 position closed center 3 position exhaust center 2 4 (A) (B) 2 4 (B) (A) o t r e w y q !1 u !

High Purity Chemical Valve

LVA10 LVA20 LVA30 LVA40 LVA60 12 22 LVA50 Model Orifice diameter 2 4 8 20 Body material Note) Port size Stainless steel (SUS316) 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 1/2 3/4 1 PPS Valve type PFA Type Symbol Basic type N.C. PA PA PB N.O. A B B A B A PB Double acting N.O. Double acting N.C. With flow rate adjustment PA PA N.C. B A B A Double acting PB Double acting N.C. With bypass PA PA N.C.

Prevents Micro-Bubbles

LVA10 LVA20 LVA30 LVA40 LVA60 12 22 LVA50 Model Orifice diameter 2 4 8 20 Body material Note 1) Port size Stainless steel (SUS316) 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 1/2 3/4 1 PAX PPS Valve type PFA PB Type Symbol Basic type N.C. PA PB PA N.O. A B B A B A PB Double acting N.O. Double acting N.C. With flow rate adjustment PA PA N.C. B A B A Double acting PB Double acting N.C.

45

Flow Characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Flow characteristics Port size Model C [dm3/ (sbar)] b 1, 5, 3 (P, EA, EB) 4, 2 (A, B) Cv C [dm3/ (sbar)] b Cv SS5X3-45 SS5X5-45 C6 0.88 2.2 0.21 0.24 0.22 0.53 0.95 2.5 0.18 0.18 0.22 0.58 C8 C8 C10 Note) The value is for manifold base with 5 stations and individually operated 2 position type. 1-6-76 Base Mounted Series SX3000/5000

45

Flow Characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Flow characteristics Port size Model C [dm3/ (sbar)] b 1, 5, 3 (P, EA, EB) 4, 2 (A, B) Cv C [dm3/ (sbar)] b Cv SS5X3-45 SS5X5-45 C6 0.88 2.2 0.21 0.24 0.22 0.53 0.95 2.5 0.18 0.18 0.22 0.58 C8 C8 C10 Note) The value is for manifold base with 5 stations and individually operated 2 position type. 1-6-76 Base Mounted Series SX3000/5000

Speed Controller: Standard Type Series AS Elbow Type (Metal Body) 1

(N specifications) How to Order AS4200-04 AS3200-03 01 S AS 2 2 0 0 AS2200-02 AS2200-01 Option Body size AS1200-M5 None With seal Nil 1 2 3 4 M3, M5 standard S K N 1 8 1 4 , standard standard standard AS1400-M3 Hexagonal lock nut 8 3 Electroless nickel plated 2 1 If more than one option is required, write option part numbers in the order of S, K, N.

Manifold Specifications

2(B) port size 1(P), 3/5(R) port thread type 3/5(R) port 02 2 stations Rc 1/4 1 8 Rc Nil F N Z NPTE 01 Rc C6 One-touch fitting for 6 4(A), 2(B) port G 20 20 stations 1(P) port Rc 1/8, C6 NPT B7 One-touch fitting for 1/4" Rc 1/4 How to Order Type 43 VV5Z3 05 43 1 C4 1(P), 3/5(R) port thread type 4(A), 2(B) port size Stations 02 2 stations 3/5(R) port Nil F N Z NPTE Rc C4 One-touch fitting

Fieldbus system PROFIBUS DP compatible SI unit

-B Analogue output unit parameters (1) Parameter setting No.

90

Refer to Fig.1 ) 3) Remove the junction box B (top) for all stations using a precision screwdriver. (Refer to Fig.2 ) (Remove the junction box B from D side.) 4) Remove all connectors mounted to the junction box B.

Compact Vacuum Unit Ejector/ Vacuum Pump System

JIS B 8370: General rules for pneumatic equipment. JIS B 8361: General rules for hydraulic equipment. JIS B 9960-1: Safety of machinery Electrical equipment for machines. (Part 1: General requirements) JIS B 8433-1993: Manipulating industrial robots Safety, etc. *2) Labor Safety and Sanitation Law, etc.

ZQ-OM01401

-Electrical equipment of machines (Part 1: General requirements) ISO 10218: Manipulating industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: (1 : ) JIS B 8433: 2) 1) 2) 3) 1. 2. 3. 4) 1. 2. 3. 4. 2 - No.ZQ-OM01401-B /ZQA / *3) 1)1 1.5 2) 3) *3) 1 1 () 3 - No.ZQ-OM01401-B () -() 4 - No.ZQ-OM01401-B 1.

IDG

Applicable model 25 25 25 1l/min (ANR) {In case of Inlet air pressure 0.7 MPa} Inlet air temperature (C) Inlet air saturation temperature (C) Ambient temperature (C) BM59 IDG3, 5 BM61 IDG10 Dew point indicator purge air flow rate Port size (Nominal size B) Weight (kg) (With bracket) BM63 IDG20 1/4 1/4, 3/8 1/8, 1/4 1/2 3/8, 1/2 BM64 IDG30/50 0.11 0.25 (0.31) 0.43 (0.51) 0.66 (0.76) 0.74 (

SMC Wireless System EtherNet/IP ® compatible

Input Output EX600-W### (32 points) 0 1 4 EX600-W### (24 points) 01 3 Wireless unit WEN WSV EX600-W### (16 points) 01 2 EX600-W### (8 points) 01 1 EX600-W### (0 point) 0 1 0 EX600-DX#B (8 points) 1 0 EX600-DX#C (8 points) 1 0 EX600-DX#C1 (16 points) 2 0 Digital input unit DX EX600-DX#D (16 points) 2 0 EX600-DX#E (16 points) 2 0 EX600-DX#F (16 points) 2 0 EX600-DY#B (8 points) 0 1 EX600-DY

Modular Type Air Filters Series AF

B B B B B N.O.: Black Dimensions B B B N.C.: Gray O S O S M5 x 0.8 1/8 1/4 Barb fitting Applicable tubing: T0604 10 one-touch fitting Width across flats 17 Width across flats 14 Model Standard specifications Optional specifications Bracket mount With auto drain P A B C D E G J M N Q R S T U V B AF10 AF20 AF30 AF40 AF40-06 AF50 AF60 M5 x 0.8 25 67 7 12.5 25 12.5 85 AC 1/8, 1/4 40 97 10 20

SMC Wireless System PROFINET compatible

Input Output EX600-W### (32 points) 0 1 4 EX600-W### (24 points) 01 3 Wireless unit WPN WSV EX600-W### (16 points) 01 2 EX600-W### (8 points) 01 1 EX600-W### (0 point) 0 1 0 EX600-DX#B (8 points) 1 0 EX600-DX#C (8 points) 1 0 EX600-DX#C1 (8 points) (with broken line sensor) 1 0 Digital input unit DX EX600-DX#D (16 points) 2 0 EX600-DX#E (16 points) 2 0 EX600-DX#F (16 points) 2 0 EX600-DY#

Series VXK21/22/23 Direct Operated 2 Port Solenoid Valve with Built-in Y-strainer For Air/Single Unit How to Order (Single Unit) Specifications 2 21 01 1 G 0 R 1 VXK AC 0 2 21 01 1 G 5 VXK DC Model Bracket Orifice size Refer to the Table (1) None Nil Fo

Solenoid valve (Port size) Orifice symbol (Diameter) 1 (2 mm) 2 (3 mm) 3 (4.5 mm) 4 (6 mm) Model VXK21 VXK22 VXK23 DC 01 (1/8) 02 (1/4) Port symbol (Port size) Option S, Z are not available because a surge voltage suppressor is integrated into the AC/Class B, built-in fullwave rectifier type as a standard. 02 (1/4) 03 (3/8) 02 (1/4) 03 (3/8) Table (4) Bracket Part No.

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

value 0..3 Unit No. 0..8 0 4..7 Parameter type 1 1 0..7 Unit ID EX600-DX#B: 01 (Hex) EX600-DX#C: 03 (Hex) Unit parameter 0 Monitor short circuit (power) 0: disable, 1: enable 1 Reserved 0 2 Inrush current filter 0: disable, 1: enable 2 3 Reserved 0 4..5 Input filtering time 0: 0.1 ms, 1: 1 ms, 2: 10 ms, 3: 20 ms 6..7 Input extension time 0: 1 ms, 1: 15 ms, 2: 100 ms, 3: 200 ms Channel parameter

AZ1000

1 to 10 psig (0.007 to 0.07 MPa) 1 to 30 psig (0.007 to 0.2 MPa) 2 to 60 psig (0.014 to 0.4 MPa) 2 to 100 psig (0.014 to 0.7 MPa) 5 to 150 psig (0.034 to 1.0 MPa) Connections (Inletq, Outletw) Bonnet option 01 02 06 10 15 Connections 1/4 inch face seal (Female) 1/4 inch face seal (Male) 3/8 inch face seal (Female) 3/8 inch face seal (Male) 3/8 inch tube weld Code Code Bonnet Standard Panel