SMC Corporation of America
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01 Work piece Vacuum regulator Body size 1 2 3 IRV1000 type IRV2000 type IRV3000 type Leak tester Pressure transducer Solenoid valve Solenoid valve Work piece Vacuum pump IRV Filter Thread type Nil N F Rc NPT G Optional Inspection equipment Port size Solenoid valve Application IRV Work piece Tank Vacuum pump Filter Symbol Bore IRV1000 IRV2000 IRV3000 01 02 03 04 1/8 1/4 3/8 1/2 Flow meter

(A)4 2(B) (A)4 2(B) 4(A) 2(B) (EA)5 1 3(EB) (EA)5 1 3(EB) (P) (P) 3-position pressure center 5(EA) 3(EB) 1(P) (A)4 2(B) N.O. valve x 2 pcs. 2(B) 4(A) (EA)5 1 3(EB) (P) 3(EB) 5(EA) 1(P) N.C. valve, N.O. valve x 1 pc. of each 2(B) 4(A) 3(EB) 5(EA) 1(P) Component Parts No.

Set pressure with a flat head screw driver. 42 Base Mounted Type Series VQ5000 Plug-in Unit Metal seal type Rubber seal type (A) 4 (B) 2 VQ5101 (A) 4 (B) 2 VQ5100 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5201 (A) 4 (B) 2 (A) 4 (B) 2 VQ5200 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5301 VQ5300 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5401 VQ5400 (A) 4 (B) 2 (A) 4

) Load (kN) 126 Technical Data 2 Series CH2E, CH2F, CH2G, CH2H Stroke range limit charts: Bore sizes 50, 63, 80, 100 Bore size 50 B-rod C-rod 5 2 4 8 3 7 2 4 8 3 7 5 2000 6 1 6 1 1000 Stroke (mm) 500 100 50 0.5 1 5 10 20 30 0.5 1 5 10 20 30 Load (kN) Load (kN) Bore size 63 B-rod C-rod 2000 1 2 8 5 4 3 7 6 1 2 3 5 4 8 7 6 1000 Stroke (mm) 500 100 50 0.5 1 5 10 20 50 0.5 1 5 10 20 50 Load (

Upstream pressure MPa 41 Base Mounted Type Series VQ5000 Plug-in Unit Metal seal type Rubber seal type (A) 4 (B) 2 VQ5101 (A) 4 (B) 2 VQ5100 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5201 (A) 4 (B) 2 (A) 4 (B) 2 VQ5200 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5301 VQ5300 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5401 VQ5400 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3

B port D B C G1 U G2 U If B port of Body (B) is machined, the port is plugged with Rc 1/8.

ti n ti a g g n o a r ti a t e a e o n t t o g o r 1 1 Key e r r y 0 9 y y e 2 0 + 4 0 0 e e K 8 + 4 0 K K 0 + 4 0 + 4 0 0 0 Key Key 1 (40) e Key g n a r n o ti a t o r y e K (85) (40) (40) A port B port A port B port A port B port A port B port Direct Mounting of Body L 4 screws Model CRB1BW50 CRB1BW63 CRB1BW80 CRB1BW100 L Screw M6 48 M8 52 M8 60 M10 80 11-4-4 70 Series CRB1 Rotary

B port D B C G1 U G2 U If B port of Body (B) is machined, the port is plugged with Rc 1/8.

ISO size 1 Series VQ7-6 ISO size 1 Max. 10 stations 0.43n + 0.49 (n: Stations) 1/4 3/8 Bottom Note) When equipped with control unit, 1 or 2 stations are used for mounting. 3-10-11 12 Series VQ7-6 DIN Terminal Type VV71-100 80 100 2n-1/4, 3/8 80 23 37 9 14 9 15 U side U side Manual override R4.5 R4.5 Indicator light P = 43 53.5 P = 43 53.5 B B B B 9 9 B 23 20 SMC SMC SMC 9 A PA A B B A PA

Rc1/4 Rc3/8 Bottom Note) When equipped with control unit, 1 or 2 stations are used for mounting. 6 Series VQ7-6 DIN Connector Type VV71-100 80 2n-Rc1/4, 3/8 100 80 9 37 9 23 14 U side 15 R4.5 Manual override Indicator light R4.5 53.5 P=43 9 9 53.5 P=43 20 9 23 38 B B B B B B B B B SMC SMC SMC A PA PA PA PA A A A A B A L1 L2 L2 L1 B A B SMC A B A 4n-Rc1/4, 3/8 (ports A, B) PA L side R side

(For B: Basic) CM2 Bore size GA P Bore size GA P 20 14 M5 x 0.8 50 (14) (Rc 1/4) 25 13 M5 x 0.8 63 (14) (Rc 1/4) 32 (12) (Rc 1/8) 80 (20) (Rc 3/8) 40 (13) (Rc 1/8) 100 (20) (Rc 1/2) 2 x P GA CM3 CG1 CG1 * When female thread is used, use a washer, etc. to prevent the contact part at the rod end from being deformed depending on the material of the workpiece. ( ): Same as the standard model.

2 stroke MA A K F GA GB H + Q + l 2 x Rc P R J MM RR TDe9 D E e Width across flats G Air release TT C Air release Air release 10 f l NA T B TX TY0.3 TY0.3 NB SS + Q + l + 1/2 stroke S + Stroke M H ZZ + Stroke ZZ + Q + l + Stroke TZ (mm) With rod boot Stroke range (mm) Bore size (mm) J e RR B C F GA GB M NA NB P R S T SS TD TT TX TY TZ l f Q B-rod C-rod B-rod C-rod 1 32 M10 x 1.25 25 to

12.5 ([5m ] (a) (b) L E C P * B -* A B-1 2 A A-1 1 L B B-2 6 B A-2 5 1 1.5m COM-A/COM B-3 3 3 3m COM-B/ A-3 4 (c) 5 5m Shield Vcc B-4 12 GND A-4 13 A B-5 7 A A-5 6 B B-6 9 B A-6 8 3 (d) S 4 + B-1 5 A-1 1 + B-3 2 A-3 (8) (a) (b) (14.2) B1 A1 (17.7) 2 1 (14) (18) 6 (10.2) B6 5 A6 2 1 B1 A1 B3 A3 (d) (5.7) 15 16 (c) L (11) (30.7) 12.6 ([820m] (a) (b) LE CP * B A B-1

1 Digital Pressure Sensor Series GS40 Specifications F.R.L. Multiple features Pressure sensor and switch in one compact body; Economical use of space; Simplified operation; Combined functions. Model GS40-M5 GS40-01 GS40-02 AV Air/Inert gas Fluid AU 3% F.S.

1 Digital Pressure Sensor Series GS40 Specifications F.R.L. Multiple features Pressure sensor and switch in one compact body; Economical use of space; Simplified operation; Combined functions. Model GS40-M5 GS40-01 GS40-02 AV Air/Inert gas Fluid AU 3% F.S.

A 1-B 1-C 2-A 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 6 1/8, 1/4 500 1.5 0 1,000 2,000

45 50 B1 13 17 17 22 BZ GB 8 8 8 11 GQ 4 7 7 8 B 40 47 47 54 D 8 10 12 14 H2 8 8 8 10 GD 55 GL 6 9 9 11 B2 26 32 32 41 GA GR 4 7 7 7 H1 5 6 6 8 20 25 32 40 1/8 1/8 1/8 1/8 1/8 1/8 1/8 1/8 63.5 73.5 to 400 to 450 to 450 to 500 CXS 64.5 74.5 83.5 64.5 70 74.5 80 83.5 CXT 100.5 90.5 (mm) MX Bore 20 25 32 40 K 5 5.5 5.5 7 LC 4 4 4 4 LD 6.8 6.8 6.8 7 NA 24 30 NN P 1/8 1/8 1/8 1/4 LS 167 177 179

0.75 0.63 0.5 1 0.06 5 Rod Jam Nut NJ-12 3/4-16 1.97 2.91 0.5 1.13 1.13 0.94 0.81 1.13 0.06 5 Part No A B C D Across Across Flats Corners (max) (max) (max) JM-045 0.69 0.79 0.26 7/16-20UNF Part No A B C D E F G H J K JM-10 1.12 1.30 0.42 3/4-16UNF NCA1-AC800 1-14 2 3/4 3 1/16 1 1/2 1 5/8 1 1/4 1 1/8 1 1/4 9/16 2 JM-800 1.62 1.73 0.57 1-14UNF NCA1-AC1000 1 1/4-12 3 1/2 4 2 2 1 1/2 1 1/4 1

0.75 0.63 0.5 1 0.06 5 Rod Jam Nut NJ-12 3/4-16 1.97 2.91 0.5 1.13 1.13 0.94 0.81 1.13 0.06 5 Part No A B C D Across Across Flats Corners (max) (max) (max) JM-045 0.69 0.79 0.26 7/16-20UNF Part No A B C D E F G H J K JM-10 1.12 1.30 0.42 3/4-16UNF NCA1-AC800 1-14 2 3/4 3 1/16 1 1/2 1 5/8 1 1/4 1 1/8 1 1/4 9/16 2 JM-800 1.62 1.73 0.57 1-14UNF NCA1-AC1000 1 1/4-12 3 1/2 4 2 2 1 1/2 1 1/4 1

level gauge B B B B B B B Dimensions B Barb fitting Applicable tubing: T0604 Model Standard specifications Optional specifications Bracket mount P M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 A 25 40 53 70 75 90 95 B 77 115 142 176 176 250 268 C 26 36 38 40 38 41 45 D 12.5 20 26.5 35 35 45 47.5 E 30 38 38 45 G 35 60 80 110 110 110 110 J 12.5 20 26.5 35 35 45 47.5 M 30 41 50