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Display accuracy 2% F.S. 1 digit or less (at ambient temperature of 25 3C) Operation indicator light Green LED (OUT1: Lights when ON), Red LED (OUT2: Lights when ON) Output voltage: 1 to 5V Output voltage: 1 to 5V 2.5% F.S. or less (in rated pressure range) 5% F.S. or less (in rated pressure range) Linearity: 1% F.S. or less Analog output (Note 2) Linearity: 1% F.S. or less Output impedance

Exhaust Cleaner for Clean Rooms AMP Series

4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5

AS

Note) AS-FP Metric size Inch size Meter-out Meter-in 0 1 01 02 23 2 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 03 05 07 09 11 13 AS-FM 04 06 08 10 12 AS-D AS-T With One-touch fitting ASP Thread type M3 Port size Note) For applicable tubing O.D. selection, refer to the Model on page 484. Use 1/8" tube.

Residual Pressure Release Valve

temperature Nylon, Soft nylon, Polyurethane, FEP, PFA Air 0 to 1 MPa 5 to 60C (No freezing) 5 1 3 1 2 2 1 4 2 3 2 1 AS 2 1 3 1 2 Nylon Polyurethane AS-FE 13.1 mm2 26.1 mm2 18.0 mm2 41.5 mm2 29.5 mm2 58.3 mm2 13.1 mm2 Effective area AB 46.1 mm2 12 Residual pressure release effective area 1.8 mm2 KE KE Easy operation with a push button.

-S-02T subplate, 1/4 npt, VQZ3000 VALVE, SOL 4/5-PORT*** $12.07 Add to Quote Add To Cart Add to Cart SMC VQZ3000-S-03 subplate, VQZ300 VALVE, SOL 3-PORT*** $9.93 +

AS-FPQ/FPG

Port size M5 01 02 03 04 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 With One-touch fitting Clean specifications Metal parts material Q G Brass (electoless nickel plated) Stainless steel 304 Needle Valve/Flow Rate Characteristics Note) The flow rate characteristics are representative values.

P-E00-1A Models to accommodate a wide variety of applications Electric Actuators CAT. E101 A

16-4 Shimbashi, Minato-ku, Tokyo 105-0004, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2000 SMC CORPORATION All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer.

AS-R/AS-Q

Thread type G adopts face seal method. 02 1/4 03 3/8 04 1/2 Only meter-in type is available. The meter-out version is not available and therefore is not shown in this How to Order. 10

ASD

Metric size Inch size With One-touch fitting 04 06 08 10 12 01 03 05 07 09 11 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" Thread type Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT AS N ASP Bore size ASN M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 M5 U10/32 01 02 03 04 AQ ASV AK ASS Needle Valve/Flow Characteristics (Inlet Pressure: 0.5 MPa) ASR ASD230F ASD330F ASD430F ASF 100 200 400 Flow

Model: 22, Port Size: 2 (Rc1/4), Thread Type: N (NPT), Base/Seal Material: S (Stainless Steel, NBR Seal), Suffix: Standard, Number of Manifolds: 3 Stations

Flow Range: 0.5~4 l/min, Thread: Rc, Port Size: 3/8, Wiring Specification: 3m Lead Wire w/Connector, Output Specification: Pulse Output + Analog Output (1~5V)

Flow Range: 2~16 l/min, Thread: Rc, Port Size: 3/8, Wiring Specification: 3m Lead Wire w/Connector, Output Specification: Pulse Output + Analog Output (1~5V)

Size: No.2, Port Size: 1/4, Manifold Base: Common Pressure, Stations: 3 Stations

Size: No.1, Port Size: 1/8, Manifold Base: Common Pressure, Stations: 3 Stations

Size: No.1, Port Size: 1/4, Manifold Base: Common Pressure, Stations: 3 Stations

Flow Range: 10~100 l/min, Thread: Rc, Port Size: Port Size 3/8, Wiring Specification: 3m Lead Wire w/Connector, Output Specification: Pulse Output + Analog Output (1~5V)

Flow Range: 20~200 l/min, Thread: Rc, Port Size: Port Size 3/8, Wiring Specification: 3m Lead Wire w/Connector, Output Specification: Pulse Output + Analog Output (1~5V)

Applications: 0.05~0.70MPa Operating Pressure Range, Thread: None, Port Size: 3/8, Accessory: w/o Accessory, Option: 1000cm3 Tank

Applications: 0.05~0.20MPa Operating Pressure Range, Thread: None, Port Size: 3/8, Accessory: w/o Accessory, Option: 1000cm3 Tank

Size: 1/2, Reverse Flow: Regulator, Standard, Thread: M Thread, Rc(PT), Port Size: 3/8, Accessory: None, Option 1: 0.02~0.2MPa Setting, Option 2: -