Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors 1.5 2 x M4 DIN rail clamp screw 9 e d i s U e d i s D n 8 7 6 5 4 3 2 Stations 1 9 60 37 26 One-touch fitting [3(R), 1(P) port] Applicable tubing O.D.: 8 For top ported 4 4 4 4 4 4 4 4 3 R 7.5 13.1 29.6 (49.4) P 1 2 2 2 2 2 2 2 2 81.5 66.9 P=11.5 One-touch fitting, thread piping

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

This can cause a malfunction. -133No.EX-OMX1011 Accessories For the selection of accessories, refer to the catalog. (1)Valve plate EX600-ZMV1 Enclosed parts: Round head screw (M4 x 6), 2 pcs. Round head screw (M3 x 8), 4 pcs. EX600-ZMV2 (Specified for SY series) Enclosed parts: Round head screw (M4 x 6), 2 pcs.

MXU

tapped) l Model MXU6 MXU10 MXU16 Bolt Maximum tightening torque (Nm) M3 x 0.5 1.1 5 M4 x 0.7 2.5 7 M4 x 0.7 2.5 9.5 Top Mounting l Model MXU6 MXU10 MXU16 Bolt Maximum tightening torque (Nm) M3 x 0.5 1.1 4.8 M4 x 0.7 2.5 6 M4 x 0.7 2.5 6 Axial Mounting (Body tapped) l Model MXU6 MXU10 MXU16 Bolt Maximum tightening torque (Nm) M3 x 0.5 1.1 5 M4 x 0.7 2.5 6 M4 x 0.7 2.5 6 Operating Direction

Table of Contents

1 Hexagon socket head screw Steel M4 x 40 M4 x 40 M4 x 40 !2 Detent assembly VF4000-12A Refer to How to Order Pilot Valve Assembly on page 3-8-70. Pilot valve assembly !

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

x 0.7 depth 4 (Mounting screw) 2-M4 x 0.7 depth 5 (Mounting screw) ( ): M5 x 0.8 M plug connector: VF1120-M-M5 01 (Lead wire length) Light window (With light/surge voltage suppressor) 300 (PE port) Manual override (Non-locking) 3-M5 x 0.8, Rc 1/8 (P, A, B port) (EA, EB port) 2-M4 x 0.7 depth 5 (Mounting screw) (Mounting hole) 2-M4 x 0.7 depth 4 (Mounting screw) ( ): M5 x 0.8 3-4-8 9 5 Port

MXU

torque (Nm) M3 x 0.5 1.1 4.8 M4 x 0.7 2.5 6 M4 x 0.7 2.5 6 Axial Mounting (Body tapped) l Model MXU6 MXU10 MXU16 Bolt Maximum tightening torque (Nm) M3 x 0.5 1.1 5 M4 x 0.7 2.5 6 M4 x 0.7 2.5 6 Operating Direction with Different Pressure Ports OUT port (2 on both sides) OUT port l Model MXU6 MXU10 MXU16 Bolt Maximum tightening torque (Nm) M3 x 0.5 1.1 4.8 M4 x 0.7 2.5 6 IN port OUT port

5 Port Air Operated Valve

Gasket DXT144-13-3A Round head combination screw DXT031-44-1 (M4 x 39.5, With spring washer) VFA1000 DXT144-12-2 DXT031-38-5A VFA3000 DXT155-25-7 VF5000-70-1A Hexagon socket head cap screw AXT620-32-1 (M4 x 48, With spring washer) VFA5000 DXT156-9-6 Individual EXH spacer assembly Caution Tightening Torque for Mounting Screw M4: 1.4Nm Warning When mounting a valve or spacer on the manifold

Series SV

Material Note Die-cast aluminum (SV1000 is die-cast zinc) Body White 1 Adapter plate White Resin 2 Caution Pilot body White Resin 3 Piston Resin 4 Mounting screw tightening torques End plate White Resin 5 Spool valve assembly Aluminum/H-NBR 6 M2: 0.15Nm M3: 0.6Nm M4: 1.4Nm Molded coil Gray Resin 7 Replacement parts Description Part number Note No.

SY

Caution Mounting screw tightening torques Silencer with One-touch fitting M2: 0.15Nm M3: 0.6Nm M4: 1.4Nm Can be attached with one touch to the R (EXH) port of the manifold. Series Assembly part no.

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

M5 x 0.8 (Relief port) 2 x 2 x 6.5 counterbore M4 x 0.7 effective depth 8 (Piping port) 2 x 2 x M4 x 0.7 effective depth 7 Note 2) 38 2 x 3.5 through 8 29 20 0.5 Flat washer 6 10 4 4 20 27 + Stroke 3.5 29 30.5 + Stroke 20 2 x 2 x 9 counterbore M5 x 0.8 effective depth 7 18 5.5 2 x M5 x 0.8 M5 x 0.8 (Relief port) (Piping port) 5.5 2 x 2 x M6 x 1.0 effective depth 10 Note 3) 2 x 5.4 through

MQQ

H MM NN MQ10-M MQ16-M MQ20-M MQ25-M MQ28-M 10 10.5 M5 x 0.8 M3 x 0.5 16 11.5 M6 x 1.0 M4 x 0.7 20 13.5 M8 x 1.25 M5 x 0.8 25 16.5 M10 x 1.25 M6 x 1.0 28 22.5 M14 x 1.5 M8 x 1.25 Clevis pin d Dd9 m m l t L t Applicable bore (mm) Applicable snap ring Part no.

MHK2

MHKL2-16: Long stroke type D2014 2-M4 x 0.7 thread depth 5 (Mounting threads) 22 3H9 Depth 3 +0.025 0 17H9 depth 1.5 +0.043 0 2-M4 x 0.7 thread depth 8 (Mounting thread) 4-M4 x 0.7 thread depth 8 (Mounting thread) Bottom hole 3.4 through (Mounting hole) 0 0.1 5 Open 28.6 +1.2 0 4 10 12 0.02 22 56 54 34 24 0 0.2 28 Closed 14.6 3H9 depth 3 +0.025 0 15 38.5 15 63 23.6 0.05 83 Auto Switch Mounting

MQQ

H MM NN MQ10-M MQ16-M MQ20-M MQ25-M MQ28-M 10 10.5 M5 x 0.8 M3 x 0.5 16 11.5 M6 x 1.0 M4 x 0.7 20 13.5 M8 x 1.25 M5 x 0.8 25 16.5 M10 x 1.25 M6 x 1.0 28 22.5 M14 x 1.5 M8 x 1.25 Clevis pin d Dd9 m m l t L t Applicable bore (mm) Applicable snap ring Part no.

MHK2

MHKL2-16: Long stroke type D2014 2-M4 x 0.7 thread depth 5 (Mounting threads) 22 3H9 Depth 3 +0.025 0 17H9 depth 1.5 +0.043 0 2-M4 x 0.7 thread depth 8 (Mounting thread) 4-M4 x 0.7 thread depth 8 (Mounting thread) Bottom hole 3.4 through (Mounting hole) 0 0.1 5 Open 28.6 +1.2 0 4 10 12 0.02 22 56 54 34 24 0 0.2 28 Closed 14.6 3H9 depth 3 +0.025 0 15 38.5 15 63 23.6 0.05 83 Auto Switch Mounting

Wedge Cam Operation Provides

) 22 3H9 depth 3 +0.025 0 MHC2 17H9 depth 1.5 +0.043 0 2-M4 X 0.7 thread depth 8 (Mounting thread) 4-M4 X 0.7 thread depth 8 (Mounting thread) Bottom port 3.4 through (Mounting hole) 0 -0.1 MHT2 5 Open 28.6 +1.2 0 4 10 12 0.02 MHY2 22 56 54 34 24 MHW2 0 -0.2 28 Closed 14.6 MRHQ 3H9 depth 3 +0.025 0 15 38.5 15 63 23.6 0.05 Auto switch 83 4-M3 X 0.5 (Thread for mounting attachment) Groove

MQQ

H MM NN MQ10-M MQ16-M MQ20-M MQ25-M MQ28-M 10.5 M3 x 0.5 10 M5 x 0.8 11.5 M4 x 0.7 16 M6 x 1.0 13.5 M5 x 0.8 20 M8 x 1.25 16.5 M6 x 1.0 25 M10 x 1.25 22.5 M8 x 1.25 28 M14 x 1.5 Clevis pin part numbers d m m l Dd9 t L t Applicable bore size (mm) Applicable snap ring Part no.

3 Port Air Operated Valve Series SYJA300 1

Each valve is fixed on the manifold with two M4 mounting screws. Please tighten the screws properly when valves are reassembled. Screw tightening torque: 1.4 Nm 2. M4 or equivalent bolts should be tightened evenly to mount the valve onto the manifold base. 3. In the case of common exhaust type, pressurization or vacuum suction through R port is not possible. 4.

Dual Rod Cylinder/High Speed Specification Type Series CXS-XB19

x 0.7 (through) M4 x 0.7 x 14.5l and M4 x 0.7 (hexagon bolt) (hexagon nut) 7.5 2-M3 x 0.5 (through) 20 (Z) 4-M3 x 0.5 thread depth 4.5 (same on reverse side) 4-M5 x 0.8 thread depth 4.5 (piping port) (same on reverse side) 7 3 8.5 30 8 Model S ZZ Z SS CXS10-10-XB19 10 82 65 CXS10-15-XB19 15 87 70 30 (20) (Z) 2-M4 x 0.7 Thread depth 7 CXS10-20-XB19 20 92 75 CXS10-25-XB19 25 97 80 6 CXS10-

Wedge Cam Operation Gripper Series MHK2

position for auto switch mounting (2 positions) Adjustment needle for finger speed 13.6 S 0 3 13 13 4 8 0 -0.05 4 7 Note) When single acting, other port is used as bleed port. 7 18 2.3 M5 X 0.8 (Finger opening port) MHKL2-16 Long stroke model / 14 2-M4 X 0.7 thread 5 deep 22 3H9 3 deep +0.030 0 17H9 1.5 deep +0.043 0 2-M4 X 0.7 thread 8 deep 4-M4 X 0.7 thread 8 deep Bottom port dia. 3.4

Basic Type/Direct Mount Type

x 0.7 M10 x 1 M4 x 0.7 M20 x 1.5 CY1S M5 x 0.8 M26 x 1.5 M6 x 1 M26 x 1.5 CY1L M6 x 1 M32 x 2 0.007 0.037 M8 x 1.25 M8 x 1.25 CY1H M8 x 1.25 M10 x 1.5 P (Piping port) CY1F W X Y ZZ Model Mounting Nut/Included in the package (2 pcs).