SMC Corporation of America
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DC+ 1 Brown q N.C. 2 Not used w DC 3 Blue e IN: 1 to 5 V 4 White r Power supply/Output connector (8P) Power supply/Output connector (accessory) i u y t r e w q Pin No. Pin no. Terminal 7 Green CH4_OUT1 8 Yellow N.C.

Calculation Example 1: MUB40-15S(T) Basic weight0.62kg 2 pcs. 5 10 15 15 Example 2: MUC50-5S(T) Basic weight1.06 Additional weight (mounting bracket)0.40 1.06 + 0.40 = 1.46 kg 1 pc. 5 5 10 15 Construction Component Parts No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !

Description Material Aluminum die-casted Note Body Platinum silver coated q Replacement Parts Material Part no. No.

(A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) ey q t wr ey q t wr A A i i P R P R u u Component Parts Replacement Parts Description Body Piston plate End cover Piston Spool valve ass'y Spool spring Description Sub-plate Pilot valve Note Zinc die cast Part No.

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The ZM series is an all-in-one vacuum generator, complete with internal suction filter, exhaust silencer, supply and break valve, and vacuum switch. Its dual-stage nozzle design increases suction flow by 40% over single-stage generators, yet its compact size makes it suitable for many different applications. ZM series generators also boast a strong vacuum break pressure for quick cycle times

The ZM series is an all-in-one vacuum generator, complete with internal suction filter, exhaust silencer, supply and break valve, and vacuum switch. Its dual-stage nozzle design increases suction flow by 40% over single-stage generators, yet its compact size makes it suitable for many different applications. ZM series generators also boast a strong vacuum break pressure for quick cycle times

The ZM series is an all-in-one vacuum generator, complete with internal suction filter, exhaust silencer, supply and break valve, and vacuum switch. Its dual-stage nozzle design increases suction flow by 40% over single-stage generators, yet its compact size makes it suitable for many different applications. ZM series generators also boast a strong vacuum break pressure for quick cycle times

The ZM series is an all-in-one vacuum generator, complete with internal suction filter, exhaust silencer, supply and break valve, and vacuum switch. Its dual-stage nozzle design increases suction flow by 40% over single-stage generators, yet its compact size makes it suitable for many different applications. ZM series generators also boast a strong vacuum break pressure for quick cycle times

The ZM series is an all-in-one vacuum generator, complete with internal suction filter, exhaust silencer, supply and break valve, and vacuum switch. Its dual-stage nozzle design increases suction flow by 40% over single-stage generators, yet its compact size makes it suitable for many different applications. ZM series generators also boast a strong vacuum break pressure for quick cycle times

The ZM series is an all-in-one vacuum generator, complete with internal suction filter, exhaust silencer, supply and break valve, and vacuum switch. Its dual-stage nozzle design increases suction flow by 40% over single-stage generators, yet its compact size makes it suitable for many different applications. ZM series generators also boast a strong vacuum break pressure for quick cycle times

The ZM series is an all-in-one vacuum generator, complete with internal suction filter, exhaust silencer, supply and break valve, and vacuum switch. Its dual-stage nozzle design increases suction flow by 40% over single-stage generators, yet its compact size makes it suitable for many different applications. ZM series generators also boast a strong vacuum break pressure for quick cycle times

Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 No. Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

: 10 or more The mean q Non-unidirectional airflow: at least two locations NL = A x 64/(10M) 0.5 q Number of sampling locations: 2 to 9 95% UCL of the mean and the mean of the averages w Number of sampling locations: 1, or 10 or more The mean Derive it from the area of the cleanroom or clean air controlled space.

: 10 or more The mean q Non-unidirectional airflow: at least two locations NL = A x 64/(10M) 0.5 q Number of sampling locations: 2 to 9 95% UCL of the mean and the mean of the averages w Number of sampling locations: 1, or 10 or more The mean Derive it from the area of the cleanroom or clean air controlled space.

: 10 or more The mean q Non-unidirectional airflow: at least two locations NL = A x 64/(10M) 0.5 q Number of sampling locations: 2 to 9 95% UCL of the mean and the mean of the averages w Number of sampling locations: 1, or 10 or more The mean Derive it from the area of the cleanroom or clean air controlled space.

SYJA 2(A) 2(A) Standard VZA (P)1 3(R) (P)1 3(R) i VFA 2(A) 2(A) 2(A) 3(R) VFRA o For vacuum (P)1 3(R) (P)1 3(R) VPA4 SYJA X VZA 1(P) VTA For vacuum u y t r e w q VGA VPA VPA VPA3 i 2(A) 3(R) o X Component Parts No.

3 o q q o !0 !1 !0 !1 !2 w !2 w !3 !4 !5 With reducer Tube extensions e t y r i u q o !1 !0 !2 w Component parts No.

Construction VHS20/30 VHS40/40-06/50 y i u w w t t r q IN OUT OUT IN q e o EXH. EXH. VM Component Parts No.

Drain outlet Evaporation thermometer Drain separator Volume control valve Capillary tube Compressor for refrigeration Pressure switch Condenser Fan motor Circuit for air, refrigerant 6 8 Series IDU E Dimensions IDU3E to 6E B E D A Q Illuminated switch Evaporation thermometer Ventilation air outlet Compressed air inlet F G Port size Compressed air outlet C Ventilation direction Ventilation