High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

5 6 6 6 6 No. 1 2 2 2 2 2 2 3 3 3 3 4 4 4 4 5 5 5 5 6 6 6 6 Class Applicable tubing size (mm) 4 x 3 3 x 2 6 x 4 4 x 3 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 12 x 10 10 x 8 19 x 16 12 x 10 19 x 16 12 x 10 25 x 22 19 x 16 25 x 22 19 x 16 Tubing O.D.

LEC-OM07605CN

PA_ _ ]) [] PA01 **STY _ _ _ x 0h _ _ x _ 0: (0) 0h _ x _ _ 0h x _ _ _ MR-J4(W)-B [AL.3E ]8 0: J3 (LECSS-) 1: J4 (LECSS2-T) 1h 5 12 5. [] PA02 **REG [AL.37] _ _ x x 00: 00h 100W 200W750W 02:LEC-MR-RB-032 03:LEC-MR-RB-12 _ x _ _ 0h x _ _ _ 0h 5 13 5. [] PA03 *ABS _ _ _ x 0: () 1:() 0h _ _ x _ 0h _ x _ _ 0h x _ _ _ 0h PA04 *AOP1 A-1 _ _ _ x 0h _ _ x _ 0h _ x _ _ 0(EM2EM1) 1(

energy saving effect

HRZ x V x C x iT it m x C x (T0 Tt) it Q = = HRZD 1 x 300 x 4.186 x 103 x 12 900 = = 16744 [J/s] 16.7 [kW] m x C x (T0 Tt) it x 860 x V x 60 x C x iT it x 860 HRW Q = = Cooling capacity = Considering a safety factor of 20%, 16.7 [kW] x 1.2 = HECR 1 x 300 x 60 x 1.0 x 103 x 12 15 x 860 20 [kW] = HEC Thermo-chiller Q x t: Heat capacity [kJ] 16744 [W] = 16.7 [kW] Water bath 20C HEB Cooling

Proposals for Energy Saving

4 1 x 4 0.75 x 4 0.9 x 8 1 x 4 8 8 10 10 10 12 12 14 14 14 14 14 17 17 17 24.3 24.3 24 24 24 16 16 17 17 17 KNS-08-075-4 KNS-08-100-4 KNS-10-075-4 KNS-10-090-8 KNS-10-100-4 2 H2 H1 L1 Low noise nozzle with male thread/KNS (mm) Model Nozzle size D Connection size L1 A Width across flats H1 0.75 x 4 1 x 4 0.9 x 8 0.75 x 4 0.9 x 8 1 x 4 1.1 x 8 R 1/8 R 1/8 R 1/8 R 1/4 R 1/4 R

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

H 8.5 14 M4 x 0.7 18.2 4.2 24 25 8.5 A 20 4-M5 x 0.8 4-M4 x 0.7, depth 4.5 Bottom hole diameter 4.2 19 1.5 W 22 0.05 32 0.5 0.05 B D Piping port 2-M5 x 0.8 33 10 J 5 12 9.5 Mounting base side B D Across AA MXP12-25 Without magnet and switch rail 2-M3 x 0.5, depth 3.5 2-M2 x 0.4, depth 3 For magnet mounting For rail mounting 8 5.7 3.5 6-M4 x 0.7, depth 4.5 20 20 L (mm) Model G M W H S Z

CQS

CQSKB125D 10D 15D 20D 25D 30D M3 X 30 l X 35 l X 40 l X 45 l X 50 l X 55 l M3 X 30 l X 35 l X 40 l X 45 l X 50 l X 55 l M5 X 30 l X 35 l X 40 l X 45 l X 50 l X 55 l X 60 l X 65 l X 70 l X 75 l M5 X 35 l X 40 l X 45 l X 50 l X 55 l X 60 l X 65 l X 70 l X 75 l X 80 l M3 X 25 l X 30 l X 35 l X 40 l X 45 l X 50 l M3 X 25 l X 30 l X 35 l X 40 l X 45 l X 50 l M5 X 25 l X 30 l X 35 l X 40 l X 45

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

8 1(IN), 2(OUT) port 17.5 17.5 2 x M5 x 6.5 15 15 2 x M5 x 6.5 CS: Conduit DS: DIN terminal DZ: DIN terminal with light Applicable cable 6 to 12 18 67 36 55.3 G1/2 48.9 500 18 36 NPT1/2 63 17.5 63 17.5 42.1 40.6 IN IN 8 8 28 30 30 28 2 x Rc, NPT1/8 1(IN), 2(OUT) port 2 x Rc, NPT1/8 1(IN), 2(OUT) port 2 x M5 x 6.5 15 2 x M5 x 6.5 15 15 Direct Operated 2-Port Solenoid Valve JSX Series Dimensions

MHZ

Flat Type Fingers [3] D4-MM thread depth L (Thread for mounting attachment) 20K J A A D G B D B K J F C S W O (mm) Model Open Closed Weight (g) F G MM L J K C D B A W MHZ2-63 (1) 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 +1.2 0.8 2H9 2.5H9 3H9 4H9 5H9 6H9 +0.2 0 26 55 115 235 420 4.45 5.8 7.45 8.9 14.8 17.7 M2 x 0.4 M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 3 5 6 8

MHZ

D4-MM thread depth L (Thread for mounting attachment) 20K K J J B A A D G D B F C S W O (mm) Model A B C D F G Open Closed Double acting Single acting J K L Weight (g) MM W MHZL2-103 MHZL2-163 MHZL2-203 MHZL2-253 +2.2 0 2H9 2.5H9 3H9 4H9 0 0.2 0 0.2 0 0.2 0 0.2 +0.025 0 5 8 10 12 0 0.05 0 0.05 0 0.05 0 0.05 70 145 290 505 M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 5 6 8 10 60 135 270 460 7 9

HRS100/150

HRZ x V x C x iT it m x C x (T0 Tt) it Q = = HRZD 1 x 150 x 4.186 x 103 x 10 900 = = 6977 [J/s] 7.0 [kW] m x C x (T0 Tt) it x 860 x V x 60 x C x iT it x 860 HRW Q = = Cooling capacity = Considering a safety factor of 20%, 7.0 [kW] x 1.2 = HECR 1 x 150 x 60 x 1.0 x 103 x 10 15 x 860 8.4 [kW] = HEC Q x t: Heat capacity [kJ] Thermo-chiller 6977 [W] = 7.0 [kW] Water bath HEB Cooling capacity

Integrated Controller

M4 x 0.7 thread depth 7 M5 x 0.8 thread depth 10 25.5 0.5 10.5 B + Stroke A + Stroke 25.5 34 35 4 x M4 x 0.7 thread depth 7 35 Rod end male thread 6 x M4 x 0.7 thread depth 5.5 3 H9 (+0.025 0 ) depth 3 M8 x 1.25 Width across fats 174 16 23 MD XX 5 Width across fats 22 15 MC ML + Stroke 13 14 24.5 Required Space5 [mm] 4 3 H9 (+0.025 0 ) 3 Cable connector type J Straight 115 XX (2:1) 1 The

High Vacuum Angle Valve

1010 (FKM) 1.3 x 1011 (FKM) A w, e, r 1.3 x 108 1.3 x 109 B w, e 1.3 x 108 1.3 x 109 C r 1.3 x 1010 (FKM) 1.3 x 109 D w 1.3 x 108 1.3 x 1011 (FKM) E w, r 1.3 x 108 1.3 x 109 Seal material Symbol Seal material Compound no.

VFR

Material Steel Part no. q Description Connection fitting B Connection fitting A VVFS3000-5-2 VVFS3000-5-1A Steel NBR w e Gasket r NBR Gasket VVFS3000-7-1 VVFS3000-8 19.8 x 16.6 x 1.6 (for end plate) 20 x 16 x 2 (for manifold block) 6.2 x 3 x 1.6 VVFS3000-6A y NBR O-ring t NBR O-ring u NBR O-ring i Terminal assembly VVFS3000-4AStations AZ738-22AStations For 01T For 01SU Junction cover assembly

Slider Type/Ball Bushing Bearing

D 1.6 x P 0.1 x Wcos + Wsin D 5.0 x P 0.1 x W + W D 5.0 x P W W > Wv P > Pv Determination of allowable load mass & pressure Inclined operation (For vertical operation, refer to page 1515.)

MY1

M3E 1 3 1 3 M3E = x FE x Y = x 179.1 x 29.6 x 10 3 = 1.77 (Nm) MY1 HT Load factor 5 = M3E/M3Emax = 1.77/5.7 = 0.31 MY1 W MY1 W MY2C 6 Sum and Examination of Guide Load Factors = 1 + 2 + 3 + 4 + 5 = 0.67 1 MY2 H/HT The above calculation is within the allowable value, and therefore the selected model can be used.

MB

1.0 M6 x 1.0 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 6 6 7 7 10 10 15 21 21 21 30 30 16 16 16 16 16 16 4 4 5 5 5 5 M10 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 -W Stroke range (mm) Bore size (mm) MO N NB P RF S V W WL ZZ S ZZ 32 40 50 63 80 100 to 500 to 500 to 600 to 600 to 800 to 800 19 19 19 19 23 23 27 27 31.5 31.5 38 38 35 40 43.5 43.5 56 56 1/8 1/4 1/4 3/8 3/8 1/2 11

SYJ3000/5000/7000

Load factor: ( (Load weight x 9.8)/Theoretical force) x 100% Conditions Series CJ2 Series CM2 6 x 1 m AS3301F-06 8 x 1 m AS3301F-08 AN110-01 Series MB/CA2 Series CJ2 Series CM2 4 x 1 m Series MB/CA2 Body ported Tubing bore x Length Speed controller Silencer Base mounted Tubing bore x Length Speed controller Silencer AS2301F-04 6 x 1 m 4 x 1 m AS1301F-04 AN120-M5 SYJ5120-M5 SYJ5140-01 AN101

MXS

Combination of Options v: Possible X: Not possible Functional option F R P FR FP Adjuster option v v v v v v v (3) v (3) v (3) AS v v v X X X X AT v v v (3) X X X X A v X X X BS v v v X X X X BT v v X X X X X B v Note 3) For combination of buffer mechanism style and stroke adjuster at extension end style, the buffer stroke is shortened by the adjusted length with the stroke adjuster at extension

Auto Switch Guide

2.5 Auto switch Hexagon socket head cap screw (M3 x 16 l) RZQ Switch mounting screw Round head Phillips screw with spring washer M3 x 0.5 x 16 l MI W S 1.

SYJ300/500/700

P, R port thread type S 20 20 stations A A X port (External pilot type) M5 x 0.8 A port size Nil Rc X P R A port M5 x 0.8, C4 R port M5 M5 x 0.8 + + + + F G 1/8 C4 4 One-touch fitting A A P port X P R N NPT P port 1/8 N3 5/32" One-touch fitting 1/8 T NPTF X port (External pilot type) M5 x 0.8 R port A port M5 x 0.8, C4 Note) For more than 8 stations, supply/exhaust air to/from both sides