SMC Corporation of America
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hd'd.3 p, (1)n at'r@. duodel l l (1) d.r 1s, (2) d.r9, {2) rbr 10, & 0 ) .rr 3 sc0001 6B &l4ilcpssy indLd6ep, (1) 6*.drcn-l@kir'9 opoErord6r r2, (r ) d6r r 5, {2) d6r 9, {2}d6t 10, & sc@02 6C &lsFrd ep *Ey indude. c.p, (1) ruhbr.c.* plugd.l 1 1, 11) hdr.iorrishtsl. dst 13 a 14, (1) (h 1s, {2) .bi 9, l2) d.t 10. & d ) de13 tld@tvos t"t sc 0@3.)o( a0 So|mij ep aEy. indld6 @p, (l ) Eesd M]oding

8 U-side C10 3(R) port 2-C12 3(R) port DIN rail clamp screw 0 76.5 1 10 (12) 60 49.5 30 25 13.5 C10 1(P) port 25 (7.5) 45 P = 16 2-C12 1(P) port 2n-C4, C6, C8 C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting (mm) Formulas: L1 = 16n + 57, L2 = 16n + 102 n: Stations (maximum 16 stations) n L L1 L2 L3 L4 1 73 118 137.5 148 2 89 134 150 160.5 3 105 150 175 185.5 4 121 166

P N Ground ball screw Rolled ball screw Specifications Combinations other than the above cannot be manufactured.

m 100 L/4000 cm2 Pure water cleaning Others Note 1) Filtration accuracy: tested with ultrapure water, flow rate at P = 0.01 MPa.

m 100 L/4000 cm2 Pure water cleaning Others Note 1) Filtration accuracy: tested with ultrapure water, flow rate at P = 0.01 MPa.

1 P 2 P ( ) N ( ) ( 1 ) MCCB MC U U L 1 ( 2 ) 2 V V L 2 M W W L 3 CHARGE TR ( 3 ) B1 RA L 11 B DC24V L 21 B2 CN2 LEC-MR-J3BAT MR-J3BAT USB D/A CN4 I/F ( ) CN1A CN1 B CN5 CN 3 ( 2 ) I/O USB 1.LECSS-S5 2.

Fig. 10 Control wiring, ND9000F/P, Ex ia for Zone 0 / Division 1 7 ND90 71 en 19 N O I T A C O L S U O D R A Z A H N O I T A C O L S U O D R A Z A H N O N ND9000F/P Valve Positioner FISCO ic Power Supply / Barrier Fieldbus Input X102 Ui (Vmax) = 32 V Ii (Imax) = 380 mA Pi (Pmax) = 5.32 W Li = 10 uH Ci = 5 nF + 1 Uo (Voc) 32 V Io (Isc) 380 mA Po 5.32 W 2 NOTE 1 NOTE 1 NOTE 1 3 SHD Earthing

steel Body material: PPS N G A G A D L Non-locking type Locking type 60 K 4-M Non-locking type Locking type C (H1) (H2) 60 A B E C (H1) (H2) 2-P B Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com SMC A B E L J B 2-P 2-F K Body material: PFA N G A D L K 4-M Non-locking

>Aiv EJ E) =:-:H8 I 10 l 1 I : i/b.a $n a ltfllon!. @nl6l t dory. DITENSIONS A B c D E F o H J t( T N o P B s r u 3.43 (87) 2.

or less Ionic state silica (SiO2) [mg/L] 50 or less Iron (Fe) [mg/L] 1.0 or less Copper (Cu) [mg/L] 0.3 or less Sulfide ion (S2) [mg/L] Should not be detected Ammonium ion (NH4+) [mg/L] 1.0 or less Residual chlorine (Cl) [mg/L] 0.3 or less Free carbon (CO2) [mg/L] 4.0 or less Reference item 6.

I N I n / N l / . \ I n i r N l a / N l ^ l : , ! . : ' : ) ' , + . .

XLGV/With solenoid valve Q Port R (exhaust port) N N With double solenoid P K M L (mm) L 6.5 6.5 6.5 11 11 11 K 9 9 9 11 11 11 N 14 Model K L M N P Q M 17 15 2 6 Q 16.5 16.5 17.5 28 29 29 P Model XLGV-16 XLGV-25 XLGV-40 XLGV-50 XLGV-63 XLGV-80 3 3 3 6.5 6.5 6.5 16 With single solenoid Port P (pressure port) 29 26 32 45 Other dimensions are the same as XLG. 19 Series XLD, XLDV Smooth Exhaust

They should be used only to provide support. l 50 m 40 (450) 30 MY2C40 l l 20 (380) MY2C25 MY2C16 10 0 2000 1000 mm 1500 500 Support spacing l 17 Mechanically Joint Type Rodless Cylinder Series MY2H/2HT High Precision Guide Type/16, 25, 40 How to Order H High Precision Guide Type MY2 G 16 300 L F9N Number of auto switches Guide type 2 pcs. 1 pc. "n" pcs.

l X 60 l X 65 l X 70 l X 75 l X 80 l M5 X 40 l X 45 l X 50 l X 55 l X 60 l X 65 l X 70 l X 75 l X 80 l X 85 l 6.5 6.5 CDQSKB165D 10D 15D 20D 25D 30D 6.5 6.5 CDQSKB205D 10D 15D 20D 25D 30D 35D 40D 45D 50D 6.5 6.5 CDQSKB255D 10D 15D 20D 25D 30D 35D 40D 45D 50D 8.5 8.5 Note) The appropriate plain waher must be used for through-hole. 2.2-27 Series CQSK Dimensions/12 to 25 *Refer to P.2.2-38

1 (IN), 2 (OUT) port 2 x M5 Thread depth N B 2 x P 1 (IN), 2 (OUT) port 2 x M5 Thread depth N K K J H J H Conduit terminal DIN terminal F Cable 6 to 12 Q D D S G1/2 Qp2 F 34 (44) 31.5 32 R 25 T C K C R E E Sp2 A A B1 2 x P 1 (IN), 2 (OUT) port B1 2 x P 1 (IN), 2 (OUT) port B B 2 x M5 Thread depth N 2 x M5 Thread depth N K J H J H G1/2 (mm) Grommet Grommet (with surge Dimensions Size Port

Contact SMC regarding the specifications for psi unit and F. 229 Filter Regulator with Built-in Pressure Gauge with Backflow Function AWG20K/30K/40K Construction AWG20K AWG30K/40K B D P A A K U C C C S O P H L to K U C S O H L to B D D-D C-C A-A B-B !0 o !1 !0 o !1 y y !2 !

Contact SMC regarding the specifications for psi unit and F. 229 Filter Regulator with Built-in Pressure Gauge with Backflow Function AWG20K/30K/40K Construction AWG20K AWG30K/40K B D P A A K U C C C S O P H L to K U C S O H L to B D D-D C-C A-A B-B !0 o !1 !0 o !1 y y !2 !

Unit switching Real-time switch output ( ) ZSE ISE For Air Hysteresis mode Display Real-time flow rate l/min Accumulated flow l ON PSE YES CFM x 102, CFM x 101 ft3 x 101 OFF P-1 P-2 High flow rate Z I SE3 CFM = ft3/min P Window comparator mode H: Hysteresis High Flow Rate Type (For Air) PS H H Display Real-time flow rate l/min Accumulated flow l, m3, m3 x 103 ON Z I SE1 2 NO OFF P-1 P-

Cylinder port 4-J M MM BZ GB R TY TDe8 D EA E W FA AL C B A K F N N M TT S + Stroke H BY TX TZ ZZ + Stroke BW With rod boot 180, 200, 250 Z1+ l + 1/2 stroke BV BZ BG BE e 4-MA Effective thread depth MB (To attach eyebolt) f l 15 h + l ZZ1 + l + Stroke Bore size (mm) Stroke range (mm) J M AL B C E F FA GA K KA N A BA BB BC BD BG BE BZ BV BW BP D EA GB GC H MM P BY MB MA 125 140 160 180 200

(Excludes when the stroke exceeds 2000 mm) Table Displacement (Reference Value) 0.08 EQFS32 (L = 30 mm) W L EQFS40 (L = 37 mm) 0.06 Displacement [mm] EQFS25 (L = 25 mm) 0.04 EQFS16 (L = 20 mm) 0.02 0 0 100 200 300 400 500 Load W [N] This displacement is measured when a 15 mm aluminum plate is mounted and fixed on the table. Check the clearance and play of the guide separately.