E/P Pressure Regulator

Noblesville, IN 46060 (800) SMC.SMC1 (762 7621) www.smcusa.com e-mail: sales@smcusa.com For International inquires: www.smcworld.com SMC Pneumatics (Canada) Ltd. www.smcpneumatics.ca All reasonable efforts to ensure the accuracy of the information detailed in this flyer were made at the time of publishing.

21- AF-A 10- Series Air Filter

Clean series 10 AF 03 A 30 F J B 21 AF 03 A 30 F J B Copper, fluorine and silicone-free + Low particle generation q w e r t Air filter Option/Semi-standard:Selectoneeachfora to e. Option/Semi-standardsymbol:Whenmorethanonespecificationisrequired,indicateinalphanumericorder.

IR1200-A/2200-A/3200-A

Regulator IR1200-A/2200-A/3200-A Series How to Order 0 2 0 IR 1 01 BG r t y u e w q A ARJ Option/Semi-standard: Select one each for a to e. Option/Semi-standard symbol: When more than one specication is required, indicate in alphanumeric order.

Cylinder Speed Checker IN574-95/-73

Refer to pages 1590 to 1649 for the auto switches (e, r) and Best Pneumatics No.1-1 for the M8/M12 connectors (t, y). 1676

Vacuum Gripper

ModelZPGU-7A-X2 ModelZPGC-7A-X2 (Suction cup formFlat type) (Suction cup formFlat type with ribs) Dimensions Dimensions Model A B D E F Y Model A B D E F Y ZPG10U-7A-X2 10 12 ZPG10C-7A-X2 10 12 1.7 17.5 22 3 17.5 22 13 ZPG13U-7A-X2 13 15 13 ZPG13C-7A-X2 13 15 1.8 ZPG16U-7A-X2 16 18 18 22.5 3.5 ZPG16C-7A-X2 16 18 18 22.5 1.2 ZPG20U-7A-X2 20 23 ZPG20C-7A-X2 20 23 1.7 19.5 24 4 19.5 24 15 ZPG25U

Suction cups with flange

ModelZPGU-7A-X2 ModelZPGC-7A-X2 (Suction cup formFlat type) (Suction cup formFlat type with ribs) Dimensions Dimensions Model A B D E F Y Model A B D E F Y ZPG10U-7A-X2 10 12 ZPG10C-7A-X2 10 12 1.7 17.5 22 3 17.5 22 13 ZPG13U-7A-X2 13 15 13 ZPG13C-7A-X2 13 15 1.8 ZPG16U-7A-X2 16 18 18 22.5 3.5 ZPG16C-7A-X2 16 18 18 22.5 1.2 ZPG20U-7A-X2 20 23 ZPG20C-7A-X2 20 23 1.7 19.5 24 4 19.5 24 15 ZPG25U

IDX-OM-W038

C( E) ( ) 1-1 3-2 ( ) 1-1 P. I. D3-3 5 P. I.

Air preparation filter

E) Remove the used element and O-ring from the bowl. In this operation, remove the support ring to make the replacement easier. D) E) Point O-ring for bowl Support ring Rotate approxim ately 10. Replacement should be performed while the bowl is held upright as the O-ring easily falls off. -18- Doc. no. AMX-OMU0058-C F) Remove the internal assembly which is mounted in the bowl.

Precision Regulator

Diaphragm( A) IN BLEED BLEED Flapper Nozzle Fixed orifice Exhaust valve Diaphragm(C) SUP side passage OUT SUP Main valve Valve guide Screw displ m Adjusting spring N/m Fixed or ific e SUP Force N Fo rc e N Nozzle flapper MPa/ m Diaph. (C) m2 Main valve MPa/ m (S) 1 1 Displ m Displ m Daiph (A) m2 press MPa Press Press. spring Compd. spring Compd.

SY3000/5000/7000 Series Plug-in Type

For this reason, use caution that the valves with external pilot specification cannot be pressurized from exhaust port [3/5(E)]. As compared with the types which do not integrate the back pressure check valve, C value of the flow rate characteristics goes down. Please contact SMC for details.

SY3000V-OMY0001

C 4(A)2(B) 4(A)2(B) , [D ] SY 90 [E ] 60 MAX.

Unit Size: 7 (75mm), Cup Flange Shape: N (without Flange), Manufacturer: 01 [UR: 3(e), 5(e), 10(e), 16(e)], Cup Series: ZP3P (Bellows Type for Film Packaging Workpieces), Cup Diameter: 25 (ø25), Cup Form: JT5 (5.5 Bellows), Cup Material: SF (Silicone Rubber, Blue), Attachment: with (Guide) Attachment

Series M Miniature Fittings M3, R(PT) 1/8, M5

A B Effective orifice(mm2 Weight (g) ) E H M-5H-4 M-5H-6 15.5 16.5 8.5 9.5 7 8 1.8 2.5 7 8 2.1 4.0 2.7 3.9 6.5 8.5 91 Series M Miniature Fittings M3, R(PT) 1/8, M5 Series M5 Hose elbow: M-5HL-4, -6 Part No. Effective orifice(mm2 Weight (g) ) F E D C B A M-5HL-4 M-5HL-6 6.5 8.5 1.4 2.4 4.4 5.2 1.8 2.5 7 8 8.5 9.5 12.5 13.5 16.5 17.5 Hose elbow: M-5HLH-4, -6 Part No.

ITV2-OM00112_E

ITV2-OM00112-C P R O D U C T N A M E E/P Regulator (10bit digital input type) MODEL/ Series/ Product Number ITV1000/2000/3000/2090-60* Series Install and operate the product only after reading the Operation Manual carefully and understanding its contents. Specifically, read the safety instructions carefully. Keep this operation manual available whenever necessary.

Lock-Up Valve IL201/211/220 Series

0 Exhaust portr Adjusting springe Upper diaphragmw Upper diaphragm chamberq SIG Lower diaphragmy Lower diaphragm chambert OUT IN1 Springo Valvei Pistonu IN2 171 A IL201/211/220 Series Construction 2 12 IL211 IL201 1 r r e t e !2 !2 u t u w w i !9 i !9 q q !7 !7 IN OUT IN1 OUT1 !0 !6 !3 o !3 q !8 !6 IN2 OUT2 !8 !7 !6 o IL220 !3 r e !2 w u y i !9 !5 @1 OUT IN1 !1 q @2 @0 IN2 !

LIQUID CANISTERS

. :: 8055 E.

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Sft{; ~RE E S ITt -380 Non-corrosive stainless steel is used for diaphragm (SUS630) and fitting (SUS304) . ~Hg ~ PRESSURE SWITCH rt3 , Po Atmospheric pressure detection and vacuum pressure measurement for load lock chamber in semiconductor production equipme~ nt ~ .

Unit Size: 7 (75mm), Cup Flange Shape: A (42mm x 42mm), Manufacturer: 01 [UR: 3(e), 5(e), 10(e), 16(e)], Cup Series: ZP (Basic), Cup Diameter: 25 (ø25), Cup Form: C (Flat with Rib), Cup Material: N (NBR), Attachment: with (Guide) Attachment

Unit Size: 7 (75mm), Cup Flange Shape: A (42mm x 42mm), Manufacturer: 01 [UR: 3(e), 5(e), 10(e), 16(e)], Cup Series: ZP (Basic), Cup Diameter: 08 (ø8), Cup Form: U (Flat), Cup Material: N (NBR), Attachment: with (Guide) Attachment

Unit Size: 7 (75mm), Cup Flange Shape: A (42mm x 42mm), Manufacturer: 01 [UR: 3(e), 5(e), 10(e), 16(e)], Cup Series: ZP (Basic), Cup Diameter: 20 (ø20), Cup Form: U (Flat), Cup Material: N (NBR), Attachment: with (Guide) Attachment