Speed Controller with One-touch Fitting 2 1/2 4 Fluororesin (TLM, TILM Series) (TH, TIH Series) 1/8 2 R 1/4 3/8 3 NPT 1/2 4 2 1/8 2 2 2 1/4 Gasket seal Uni Brass/Steel wire 1/4 3 3/8 2 1/2 4 1 Without sealant type can be selected as a standard option. 2 Universal type is not available.
1(P), 3/5(R) port Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 VZ One-touch fitting for 4 C4 Port size 4(A), 2(B) port One-touch fitting for 6 C6 M5 x 0.8 VF One-touch fitting for 5/32" B3 One-touch fitting for 1/4" B7 Flow Characteristics VFR Flow characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B R) Port size 1(P), 5/3(R) port Manifold 2(B), 4(A) port C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv VP4 VV5Z3-40
Alarm was generated in order of (1) -> (5) 6030h (1) 0-7 Alarm 1 6030h (2) 0-7 Alarm 2 Alarm 1 (Latest) (1) (2) (3) (4) (5) 6030h Alarm 2 0 (1) (2) (3) (4) (3) 0-7 Alarm 3 Alarm 3 0 0 (1) (2) (3) Alarm 4 0 0 0 (1) (2) (1) to (5) in the table indicate the alarm codes which are generated. 6030h Refer to 15.2.
) 1 +COM(US2_24V) 2 n+1 2 n+1 3 -COM(US2_0V) 3 +COM(US2_24V) 4 n 4 n * -COM is connected to 0V (US2) and +COM to 24V (US2) inside the product as shown in the circuit diagram below.
4 0.54 0.8 13 1/4 (8A) 3/8(10A) 1/2(15A) 1/4 : 0.42 3/8 : 0.40 1/2 : 0.49 VCB3 3 5 0.80 0.5 3.0 19 7 1.4 0.2 33 10 2.1 0.1 50 3 0.35 3.0 8.4 1/4 (8A) 3/8(10A) 1/2(15A) 3/4(20A) 1/4 : 0.58 3/8 : 0.55 1/2 : 0.62 3/4 : 0.78 4 0.60 1.3 14 5 0.85 0.7 20 VCB4 3.0 4 7 1.4 0.3 33 10 2.1 0.12 50 Note 1) Refer to model selection on page 329 regarding port size and orifice diameter combinations.
3 @9 #0 $4 !4 o !5 !1 @7 @0 #6 #5 $1 @6 r $2 #7 !7 #4 @8 !8 !9 #8 @2 #1 #2 y $0 #9 t @4 @3 @5 @1 !6 e !0 $3 i u w q Extension locking (F) #3 @9 #0 !3 $2 $4 !4 !5 o !1 @7 @0 #5 #6 $1 @6 r @2 #7 !7 #4 @8 !8 !9 #1 #2 !2 y $0 #9 t #8 w $6 $7 $5 !0 $3 q !6 i u e @4 @3 @5 @1 Description Component Parts No. No.
Body size 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Type M5 Port size Elbow Universal 2 3 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 Universal type 01 02 03 04 Applicable tubing O.D.
MPa 0.1 Nominal filtration rating*1 m 1 (99% filtered particle size) Water droplet removal ratio*2 % 99 Compressed air purity class*3 ISO 8573-1:2010 [ 4 : 7 : 4 ]*4 Max. flow capacity*5 L/min (ANR) 300 750 1500 2200 3700 Port size 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4, 1 1 Weight kg 0.19 0.39 0.79 1.23 1.46 Bowl material Polycarbonate Stainless steel Bowl guard Semi-standard (Steel) Standard
Side 4(A), 2(B) D side 1 16 VS4 16 stations Max. 16 stations.
Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 CH1 abnormal low tank fluid level 1 CH1 low tank fluid level 2 CH2 Abnormal low tank fluid level 3 CH2 low tank fluid level 4 Reservation 5 Fan failure *1 Alarm flag 1 6 Air exhaust fan failure *2 7 Reservation 8 CH1 abnormal rise of circulating fluid
1/4, 3/8, 1/2 AF + ARG ACG20B ARG20 AF20 1/8, 1/4 ACG30B ARG30 AF30 1/4, 3/8 ACG40B ARG40 AF40 1/4, 3/8, 1/2 AF + AFM + ARG ACG20C ARG20 AF20 AFM20 1/8, 1/4 ACG30C ARG30 AF30 AFM30 1/4, 3/8 ACG40C ARG40 AF40 AFM40 1/4, 3/8, 1/2 AWG + AFM ACG20D AWG20 AFM20 1/8, 1/4 ACG30D AWG30 AFM30 1/4, 3/8 ACG40D AWG40 AFM40 1/4, 3/8, 1/2 INDEX Air Combination Regulator with Built-in Pressure Gauge
. 3-6 Chapter 4 Installation . 4-1 4.1 Installation, Transport and Transfer . 4-1 4.1.1 Transport and Transfer . 4-1 4.1.2 Environment . 4-1 4.1.3 Set-up in Clean Room . 4-2 4.1.4 Installation . 4-2 4.2 Piping . 4-3 4.2.1 Preparation of Facility Water . 4-4 4.2.2 Preparation of Recirculating Fluid . 4-5 TOC-1 A_HEC-OM-K001-1.7 Contents 4.2.3 Purge . 4-6 4.3 Wiring . 4-7 4.3.1 Circuit Breaker
Note 4) Based on ISO8573-1:2010 Compressed air Part 1: Contaminants and purity classes. The compressed air quality class on the inlet side is [7:4:4]. -15- 4. How to Order 4-1. AC20-D to AC60-D 30 03 DE AC D Symbol Description Body size 20 30 40 50 60 Nil Rc Thread type N NPT F G 01 1/8 02 1/4 3/8 Port size 03 1/2 04 06 3/4 10 1 Nil Without auto drain a Float type C N.C.
N03 T03 NPTF 1/4 Threads Rc 1/4 Threads G 1/4 Threads NPT 1/4 Threads P11 P11F Compact, lightweight (Without foot) P11N P11T PAP331 (Assembled in clean room) NPTF 1/4 Threads Rc 1/4 Threads G 1/4 Threads NPT 1/4 Threads P13 P13F 140 mm 120 mm P13N P13T NPTF 1/4 Threads 110 mm Option Reset button Weight: 2.1 kg Air operated type is also standardized.
14 1 2b 2b 2b 2b 2b 40 3 2a 2a 2a 2a 2a One-touch fitting [1(P), 3(E) port] 11.4 5.7 L1 Applicable tubing O.D: 4 6 5/32" 1/4" (8.9) If the fittings are mounted on side.
2 to 20 stations Valve Rc Rc Rc 1 4 1(P), 3/5(R) port 4(A), 2(B) port 1 8 , C6, C8 1 8 Port size Flow Characteristics Flow characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B R) Port size Manifold C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv 1(P), 5/3(R) port 2(B), 4(A) port VV5Z5-20-01 VV5Z5-20-C6 VV5Z5-20-C8 VV5Z5-21-01 VV5Z5-21-C6 VV5Z5-21-C8 1/8 C6 C8 1/8 C6 C8 0.55 0.49 0.51 0.54 0.50 0.50
( 5 8 . 6 1 ) 9 4 4 ( 8 6 . 7 1 9 T L A ) 4 3 2 ( 1 2 . 9 ) 8 0 1 ( 5 2 . 4 ) 0 3 ( 8 1 . 1 ) 7 ( 8 2 . ) 1 2 1 ( 6 7 . 4 ) 7 3 1 ( 9 3 . 5 ) 8 5 2 ( 6 1 . 0 1 ) 0 4 ( 7 5 . 1 ) 2 2 4 ( 1 6 . 6 1 ) 2 7 4 ( 8 5 . 8 1 S I 9 T L A ) 4 3 2 ( 1 2 . 9 ) 8 0 1 ( 5 2 . 4 ) 0 3 ( 8 1 . 1 ) 7 ( 8 2 . ) 1 2 1 ( 6 7 . 4 ) 7 3 1 ( 9 3 . 5 ) 8 5 2 ( 6 1 . 0 1 ) 0 4 ( 7 5 . 1 ) 2 2 4 ( 1 6 . 6 1 ) 2
(Define 1 = 0.) Find the load factor of the load weight 1. Wa = K Wmax Workpiece mounting coefficient K: Fig. (3) Allowable load weight coefficient : Graph (1) Max. allowable load weight Wmax: Table (2) 1 = W/Wa Wa = 1 x 1 x 4 = 4 K = 1 = 1 Wmax = 4 1 = 1/4 = 0.25 Load Factor of the Static Moment 3-2 Rolling Yawing Examine My.
PC Connector model M83 pin M84 pin M124 pin 1 2 1 4 Pin arrangement 1 2 Solid state switch Standard part no. 3 4 4 3 3 For the applicable auto switch model, refer to the table below.