CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

CJ216 16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Air cushion is not available for 21-/22-.

Mechanically Jointed Rodless Cylinder with Protective Cover Slide Bearing Guide Type, Cam Follower Guide Type MY1  W Series ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63

Also, when exceeding the air cushion stroke ranges on page 1346, the piston speed should be 100 to 200 mm per second. Note 2) The piston speed is 100 to 1000 mm/s for centralized piping. Note 3) Use at a speed within the absorption capacity range. Refer to page 1346.

Thermo-chiller

INFORMATION Thermo-chiller Air-cooled 460 V Type Standard Type (Pending for UL Standards) How to Order HRS 200 A 46 S Option Cooling capacity Nil None A With caster adjuster-foot 200 20.5 kW Cooling method A Air-cooled refrigeration K1 With uid ll port Pipe thread type 1 This is a manual fluid fill port that is different from the automatic fluid fill port.

® SEMI Thermo-chiller Series HRW Fluorinated Fluid Type

/200 to 208 VAC 10% Max. operating current (A) 26 Breaker capacity (A) 30 Communications Serial RS-485 (D-sub 9 pin) and Contact input/output (D-sub 25 pin) Dimensions Note 9) W15 in (380mm) x D26.2 in (665mm) x H33.9 in (860 mm) Weight Note 10) Approx. 220 lbs (100 kg) Approx. 198 lbs (90 kg) Safety standards UL, CE marking, SEMI (S2-0703, S8-1103, F47-0200), SEMATECH (S2-93, S8-95) Note

CJ2Y Series ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

Bore size (mm) Standard stroke (mm) Maximum manufacturable stroke (mm) 10 15, 30, 45, 60, 75, 100, 125, 150 400 16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 400 Symbol Specications -XAl Change of rod end shape -XC3 Special port location -XC9 Adjustable stroke cylinder/Adjustable retraction type Note 1) Manufacture of intermediate strokes at 1 mm intervals is possible.

Refrigerant R407C (HFC) Series IDF100FS/125FS/150FS Applicable Compressor Size: 100 kW, 125 kW, 150 kW (Max. inlet air temperature: 140°F (60°C) (Max. ambient temperature: 113°F (45°C)

Heat exhausting direction Voltage Symbol Description Nil Heat exhaust from the rear 1 Heat exhaust from the right Note) Symbol Voltage 30 Three-phase 200 VAC (50 Hz) 200/220 VAC (60 Hz) 2 Heat exhaust from the left Note) 3 Heat exhaust from the top Note) Note) The combination of 1, 2 and 3 is not available. (Heat exhausting face can be specied on one side only.)

NAMUR Interface 3 Port Solenoid Valve VFN200N Series [Option]

How to Order VFN212 02 N 5 F D Z CE marking NAMUR Interface Nil Q CE marked product Voltage Thread type 1 100 VAC, 50/60 Hz 2 200 VAC, 50/60 Hz 3 110 to 120 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz 5 24 VDC 6 12 VDC 7 240 VAC, 50/60 Hz Nil Rc (PT) F G (PF) N NPT Electrical entry Solenoid G Grommet E Grommet terminal T Conduit terminal D DIN terminal Nil Single solenoid D Double solenoid Manual

SYJ300

DC 5 6 V S R 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC Bracket Nil: Without bracket F: With bracket AC (50/60 Hz) 3 port 1 2 3 4 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] For type W, DC voltage is only available. Type of actuation Bracket 1 2 Normally closed Normally open (For manifold type 20, 20R) Bracket is mounted.

Clean Air Filter SFD Series

SFD100/200 AMG SFD200 only AFF Rc 1/4 NPT 1/4 G 1/4 Female thread SFD100/200 AM Different diameters for IN and OUT ports are Made to Order. For details, refer to page 326. AMD Relationship between Operating Temperature and Max.

V100

Rated voltage For DC 5 6 V S R 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC B: Locking slotted For AC (50/60 Hz) 1 2 3 4 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] Electrical entry 24 V, 12 V, 6 V, 5 V, 3 VDC/100 V, 110 V, 200 V, 220 VAC Grommet L plug connector M plug connector Indicator light and surge voltage suppressor G: 300 mm lead wire L: With 300 mm lead wire M: With 300 mm lead wire

5.0 MPa Pilot Operated 2 Port Solenoid Valve Series VCH40

5.0 MPa Pilot Operated 2 Port Solenoid Valve Series VCH40 How to Order Valve type 1 D G VCH4 1 06 Voltage N.C. 1 2 3 4 5 6 100 VAC 200 VAC Thread type (Conforming to ISO1179-1 on the pneumatic/hydraulic G thread) 110 VAC 220 VAC 1 24 VDC Port size 2(OUT) 1(IN) 12 VDC 06 10 3/4 Consult with SMC for other voltages. CE marking compliant products are only available with 50 VDC or less.

Coolant Valve Series SGH

NBR FKM Pressure range 0 to 7 MPa Rc G (ISO1179-1) NPT NPTF 3/8 1/2 3/4 1 Nil G N T Y u Pilot valve o Electrical entry T: Conduit terminal D: DIN terminal (Pitch between the terminals: 11 mm) W: M12 connector (4-pin type) Note 2) V: M12 connector (5-pin type) Note 3) DO: DIN terminal without connector Note 1) V116 i Rated voltage 1 2 3 4 5 6 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC [115

VEX5

VEX5511-062EZ-BG Body size 5, Select, External pilot solenoid Port size 3/4 200 VAC, Grommet terminal, with light/surge voltage suppressor OptionBracket, with pressure gauge 5 3 4 200 VAC 50/60 Hz 1 1 1 110 VAC 50/60 Hz 4 7 11 4 11 4 220 VAC 50/60 Hz 24 VDC 12 VDC 5 6 11 2 9 2 2 7 240 VAC 50/60 Hz Other 9 Option Threadtype Nil F N T Rc G(1) NPT NPTF Note 1) Not conforming to ISO1179-1.

3 Port Solenoid Valve Series VQZ100/200/300 Single Unit [Option]

3 Port Solenoid Valve Body Ported Series VQZ100/200/300 Single Unit [Option] Plug Lead Unit VQZ100 / How to Order Valve Series VQZ 1 1 5 5 M C6 1 PR CE compliant CE marked 1 VQZ100 body width 10 mm Nil Q Note) For CE compliant models, DC-type only. Type of actuation N.C.

Series VXK21/22/23 Direct Operated 2 Port Solenoid Valve with Built-in Y-strainer For Air/Single Unit How to Order (Single Unit) Specifications 2 21 01 1 G 0 R 1 VXK AC 0 2 21 01 1 G 5 VXK DC Model Bracket Orifice size Refer to the Table (1) None Nil Fo

conduit terminal and light TZ -With conduit terminal, surge voltage suppressor and light D -DIN terminal DS -DIN terminal with surge voltage suppressor DL -DIN terminal with light DZ -DIN terminal with surge voltage suppressor and light DO-For DIN terminal (without connector, gasket is included.) 6 7 8 J 1 2 3 4 5 12 VDC 240 VAC 50/60 Hz 48 VAC 50/60 Hz 230 VAC 50/60 Hz 100 VAC 50/60 Hz 200

WRF100 Frame Clamp Cylinder

Frame Clamp Cylinder WRF100 How to Order C T200 WRF100 Protective cover Nil C Without cover With cover Clamp arm T-type arms Symbol Symbol S-type arms 200 200 Unclamped position T200 S200 240 240 T240 S240 270 T270 Limit switch Clamped position Note) This product does not include the limit switch. (The limit switch should be prepared by the customer.)

Compact Vacuum Ejector Series ZA How to Order Ejector Unit ZA1 1 07 K1 P1 5 L 0 1 Nozzle nominal size Vacuum (V) port 05 ø0.5 Part no. Symbol Applicable tubing O.D. 07 ø0.7 KJS23-M5 ø3.2 (Straight) 1 Solenoid valve combination (Refer to Table (1).) KJS04-

Pilot valve symbol 1 2 3 4 5 6 100 AC 200 AC 110 AC 220 AC 24 DC 12 DC q w e r t y u i Nil Y Nil Y Nil Nil Nil Nil K1 K1 J1 J1 Q1 Q2 N1 N2 Combinations (1) to (8) in the above table are the only possible options. 850

Air Suction Filter ZFA Series

Air Suction Filter ZFA Series RoHS Model Prevents vacuum equipment trouble due to solid foreign objects Model Port size Recommended air flow (L/min (ANR)) Note) Weight (kg) Internal capacity (cm3) ZFA100 ZFA200 1 8 1 4 50 200 0.14 0.19 30 49 Solid foreign objects are collected in the element and do not remain in the case. Note) Flow rate when initial pressure drop is 3 kPa or less.

ZH

400 ---1 ---1 100 200 Air consumption Air consumption 0 0 0 0 0.0 0.1 0.2 0.3 0.4 0.5 0.6 0.0 0.1 0.2 0.3 0.4 0.5 0.6 Supply pressure [MPa] Supply pressure [MPa] ZH30-X185 ZH40-X185 3,500 5,000 ---7 ---7 Suction flow rate [L/min (ANR)] Note 1) Air consumption [L/min (ANR)] Discharge flow rate [L/min (ANR)] Suction flow rate [L/min (ANR)] Note 1) Air consumption [L/min (ANR)] Discharge flow

0.10.25/0.40 (at 20 l/min)20Approx. 22Approx. 17Rc 3/4Stainless steel, EPDM, Copper brazing (Heat exchanger), PPS, Silicone, Fluororesin10 to 250.3 to 0.718/23Rc 1/2Stainless steel, EPDM, Copper brazing (Heat exchanger), Silicone, Brass3-phase 200 VAC 50 Hz, 3-phase 200 to 208 VAC 60 Hz Allowable voltage fluctuation ?