NVEPA|VEFseies

Prassuro 1s0 PSIG (9.9 Kgflcm ) Prool Pr333ure 225 PSIG (15 Kgr cm ) Amblnl Temp. 40 120"F (5 50"C) Responsg Tlme 30 ms Max. 50 ms Max. 30 ms Max. 50 ms Max, Hysteresls 3% F.S. Repeatablllty 3/. Sensitivity o.5/.

lVFl 10

Six station manifrcld ass'y: sta. 1-4) NVF'I'10-5G-017 sta. 5-6) NVF1 10-3G-017 NW3F1 -30-061-017 No. ot Stgliorg I l 5 I F Mounting Brackets tPoding 01 ,d' NPIF DltrlENSlON D E F G H J x ll ta o P n s T u w x z AA BB 3.78 (96) 3.41 1.77 (,r5)0.39 (10) o.59 (15) 0.20 (5) 0.63 (16) 1.O2 (28t 3.50 (89) 1 . 1 8 (30) 0.59 (15) 2.76 (70) o.87 (21) o_20 {5) 1 . 1 8 {30} 0.67 ltTl 0.59 (ls) o.32

NVKF

089) 1 0 1 1 1 5 1 7 1 8 19 20 1 . 4 6 {37) 2.20 2.95 (56) (75) (94) 4.45 5.2 ( 1 1 3 ) 0 3 2 ) 5.94 ( 1 5 1 1 6.7 ( 1 7 0 ) 8.19 8.94 l2o8) (227J 9.69 {2461 1 0 . 4 3 1 1 . 1 a (265) (284) 1 1 . 9 3 (303) 12.68 \322) 13.43 (341) '14.17 14.92 (360) (379) 15.67 (398) 1 . 0 6 l27l 1.81 2.56 {46) L (6s) 3.31 (84) 4_06 (103) 4.8 1122) 5.55 ( 1 4 1 ) 6.3 (160) 7.O4 079) 7.A 8.54 (198) (2r7) (2361

NVZseies

:i Vollage lakage Qaality of Operating Fluid O,A filtsr of about 5 microns is preiErred. OLRemow drain trom the system periodically. A lsrge quantity ot drainage can lead to product maltunction as well aa environmntal contamination. For added convenienoe, the use of an auto drain is rcommended. provided with a protection reaKaqe.

Adsorption Plate

Particle diameter Adsorption surface size A B C Standard (0.3) 1 2 3 4 5 6 50 x 50 mm 100 x 100 mm 150 x 150 mm 200 x 200 mm 250 x 250 mm 300 x 300 mm 0.2 0.4 When particle diameter and port position are both standard, neither of them are specified.

/

(mm) 4 x 2.5 6 x 4 8 x 5 10 x 6.5 12 x 8 Symbol Color Black White Red Blue Yellow Green Symbol Length 20 m roll 100 m roll B W R BU Y G 20 100 1 Wear Resistant Tubing Series TUZ Reference Data: Abrasion due to Flexible Protection Tube Test Conditions L TUZ0604, TU0604 Test tube 5 pcs. for each Quantity of tube tested 1500 mm/sec Operating speed Flexible protection tube 90 c.p.m Operating

Thermo-chiller Series HRZ Fluorinated Fluid Type

5 6/6 15/22 18/23 3/4 5/6 9/10 13/14 6/7 13/14 Rc 1/2 Stainless steel, EPDM, Copper brazing (Heat exchanger), Silicone, Brass 3-phase 200 VAC 50 Hz, 3-phase 200 to 208 VAC 60 Hz Allowable voltage fluctuation 10% 20 14 30 23 30 20 25 60 46 Refer to page 94.

MRQ

Nil L Z N (Example) A73C (Example) A73CL (Example) A73CZ (Example) A73CN 0.5 m 3 m 5 m None Since other auto switches are available other than those listed above, refer to page 350 for details on other applicable auto switches. Auto switch is shipped together (not assembled).

Digital Flow Switch Series PFMB7 2-Color Display ® (200 L type only)

Option 1 W Nil DIN Rail Mounting Bracket (Order Separately) With lead wire with connector (2 m) Connector cover (Silicone rubber) ZS 33 R With lead wire with connector (2 m) ZS-33-F S Stations ZS-33-D ZS-33-D S 1 2 3 4 5 1 station 2 stations 3 stations 4 stations 5 stations IN IN N Note) If an accessory is required, order separately using ZS part numbers.

Vacuum Module: Ejector System Series ZX

voltage suppressor Red 5 6 V S R Diode Note) Analog output is available only on grommet type.

Series 10-VQD1000 [Option] 4 Port Direct Operated Poppet Solenoid Valve

Series 10-VQD1000 [Option] 4 Port Direct Operated Poppet Solenoid Valve How to Order Valve Clean series Valve option Nil Standard (2 W) V Vacuum (2 W) U For large flow (3.2 W) W For large flow, Vacuum (3.2 W) Energy saving type Rated voltage 5 24 VDC 6 12 VDC Body type 2 Body ported (Single unit) 3 Body ported (Manifold) 5 Base mounted 10 V Q D 1 1 5 1 U 5 L M5 Electrical entry CE-compliant

Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Slider Type Ball Screw Drive Secondary Battery Compatible 25A-LEFS Series LEFS16, 25, 32, 40

5 8 8* A 10* B 15* C 20* LEPY LEPS LER *1 The standard cable should be used on xed parts.

AS-FM

AS1201FM, AS1211FM AS1301FM, AS1311FM AS2201FM-01, AS2211FM-01 AS2301FM-01, AS2311FM-01 AS2201FM-02, AS2211FM-02 AS2301FM-02, AS2311FM-02 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 20 10 50 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 40 30 10 5 20 10 0 5 20 10 10 0 5 0 10 Number of needle rotations Number of needle rotations Number

Series CDU 10-/11- 21-/22- ø6, ø10, ø16, ø20, ø25 Free Mount Cylinder

Model Cushion Bore size (mm) 6 10 16 Action Standard stroke (mm) Auto switch mounting Port size Lubrication Model Rubber Air 10-/21-CDU6 10-/21-CDU10 10-/21-CDU16 Relief type Vacuum suction type 5, 10, 15, 20, 25, 30 10-/21-CDU20 20 5, 10, 15, 20, 25, 30, 40, 50 10-/21-CDU25 25 Non-lube Double acting Single rod M5 x 0.8 6 10 16 11-/22-CDU6 11-/22-CDU10 11-/22-CDU16 5, 10, 15, 20, 25, 30

Series GS40 Digital Pressure Sensor

(Full span) or less Hysteresis Pressure switch with digital display and self-contained solid state sensor 3% F.S. (5 to 40C), 5% F.S. (5 to 60C) Accuracy AF 12 to 24 VDC (Ripple 10% or less) Voltage Minimum allowable pressure indicator on digital display AR Open collector 30 V, 80 mA or less Output Light turns ON when pressure drops below the set minimum.

PF2D Series Digital Flow Switch For Deionized Water and Chemical Liquids

(at 25C water) Temperature characteristics 5% F.S. (0 to 50C, based on 25C) Pulse output, N channel, open drain, output for monitor unit PF2D 300/301 (Specifications: Maximum load current of 10 mA; Maximum applied voltage of 30 V) Pulse output Output Voltage output Note 5) 1 to 5 V Accuracy: 2% F.S., Min. load impedance: 100 k (Output impedance: 1 k) Analog specifications Current output Note

LEL LECP6 LECP1 Model Selection Step Motor (Servo/24 VDC) Specific Product Precautions LEL25 Series LEL Electric Actuator/Guide Rod Slider Belt Drive Step Motor (Servo/24 VDC)

1 Made to Order Nil 1 3 5 Without cable 1.5 Nil D Screw mounting DIN rail mounting1 Nil X5 Standard product With magnet/switch rail 3 1 Only available for the controller types 6N and 6P 2 DIN rail is not included. Order it separately. 5 When Without controller is selected for controller types, I/O cable length cannot be selected.

Thermo-chiller

Model HRS200-Am-46-mS Cooling method Air-cooled refrigeration Refrigerant R410A (HFC) Refrigerant charge kg 1.65 Control method PID control Ambient temperature/Altitude1, 7 C Temperature: 5 to 45, Altitude: less than 3000 m Circulating uid1, 2 Tap water, 15% Ethylene glycol aqueous solution, Deionized water Set temperature range1 C 5 to 35 Cooling capacity3, 7 kW 20.5 Heating capacity4 kW

LFE

/min 612 V V gal/min 712 V gal/min Port size Symbol Port size Applicable model LFE1 LFE2 LFE3 3 3/8 V 4 1/2 V 6 3/4 V 8 1 V 1 Options 4, 5, 6, and 7, which are not in SI units, are not for use in Japan due to the New Measurement Law. 2 Options 4, 5, 6, and 7 cannot be selected when the output specication is J or K.

Air Operated Type Integral Fitting Type (Hyper Fittings) Series LVC How to Order Valves (Single Type) LVC LVA LVC 2 0 06 S LVH Option Body class Nil None LVD 1 With flow rate adjustment Body class Orifice dia. Symbol 2 With bypass ø4 2 2 Valve type LQ2

Air Operated Type Integral Fitting Type (Hyper Fittings) Series LVC How to Order Valves (Single Type) LVC LVA LVC 2 0 06 S LVH Option Body class Nil 1 2 3 4 None With flow rate adjustment With bypass With flow rate adjustment & bypass With indicator LVD Body class 2 3 4 5 6 Orifice dia. 4 8 10 16 22 Symbol 2 3 4 5 6 Valve type LQ2 integral fitting LVQ N.C. N.O.