Air Cylinder

8 63 109 40 Up to 300 24 21 48 22 37 14 32 9 9 44 8 M5 x 0.8 8 12 8 M14 x 1.5 18 1/8 62 114 45 Up to 300 24 21 52 22 41 14 32 9 9 44 8 M5 x 0.8 8 12 8 M14 x 1.5 18 1/8 62 114 50 Up to 400 35 32 60 27 45 18 38 10 9 55 11 M6 x 1 7 16 11 M18 x 1.5 18 1/8 63 129 56 Up to 400 35 32 65 27 50 18 38 10 9 55 11 M6 x 1 7 16 11 M18 x 1.5 18 1/8 63 129 63 Up to 400 35 32 70 27 55 18 38 6 11 51 11 M6

Main Line Filter

PART NAME QTY AFF75A AFF125A AFF150A AFF220A 1 CASE 1 2 COVER 1 3 GASKET 1 AL-33S AL-34S AL-35S ELEMENT (for FILTRATION RATING Symbol Nil ) 1 EC700-003N EC800-003N EC900-003N 4 ELEMENT ( for FILTRATION RATING Symbol X13 ) 1 EC700-X30NX0 EC800-X30NX0 EC900-X30NX0 5 HEX.BOLT(M12) 12 6 SPRING WASHER 12 7 PLUG(1/4) 2 8 PLUG(1/4) 2 -6- FGX-OM-P003-A 3.Specifications 1How to Order Filtration rating

Square Tube Type Air Cylinder Series MB1

8 Rc(PT)1/4 Rc(PT)1/4 Rc(PT)3/8 Rc(PT)3/8 Rc(PT)1/2 Basic type, Foot type, Front flange type, Rear flange type Single clevis type, Double clevis type Mounting bracket Note) When there is no air cushion, the unit is equipped with rubber bumpers.

VN-OMP0002

(P2) 10(P2) 10(P2) 12(P1)10(P2) 15A 211 420-04 1/2 B(12.7) 20A 311 500-06 3/4 B(19.1) 25A 411 600-10 1 B(25.4) 2 32A 511 800-12 1 1/4 B(31.8) VNA01 VNA02 VNA03 VNA1 40A 611 900-14 1 1/2 B(38.1) (P1) () 12 50A 711 900-20 2 B(50.8) (P2) () 10 (),12(P1) 10(P2) EXH , 6 VN-OMP0002 1 2 3 () 4 P2 5 6 7 8 9 10 11 O O 12 13 14 7 VN-OMP0002 No. 1 2 3 4 5 , 6 7 8 9 10 11 P2N.C.

Compact Cylinder with Lock Series CLQ

(Rail Mount) 157 245 403 629 982 1559 2514 3927 M5 x 0.8 Rc 1/8 Rc 1/4 Bore size (mm) Bracket no.

FGX-OMZ0008

1/2 06 3/4 8/12 FGX-OMZ0008 4.

Speed Controller with Uni One-touch Fitting Series AS Elbow Type/Universal Type 1

Metric size Inch size Type Elbow Universal 2 3 1 8" 5 32" 23 01 3.2 4 6 8 10 12 04 06 08 10 12 03 05 07 09 11 13 3 16" 1 4" 5 16" Control type Meter-out Meter-in 0 1 3 8" 1 2" Use 1/8" tube.

Table of Contents

1-2-7 Precautions 1 Be sure to read before handling.

Safety Speed Control Valve (SSC Valve) Series ASS 1

bracket 1 3 5 6 AK 8 3 B 3 4 1 Port size ASS Applicable series Port size 01 02 03 04 06 10 Type 1 8 ASS100/110 ASS300/310 ASS300/310 ASS500 ASS500/600 ASS600 ASR PAT.PEND 1 4 00 10 Meter-out control type Meter-in control type Meter-in type is available only for ASS110 and ASS310. 8 3 ASF 1 2 3 4 1 JIS Symbol Thread type Nil N F Rc NPT G Meter-out control Meter-in control Caution Be sure

α PneuAlpha HARDWARE MANUAL

Protection IP 20 Certications CE, UL/cUL Certications TV (AL-10MT-D, AL-10MR-D) Description Specication UL 508 EN60730-1 EN61010-1 EN50081-1 EN50082-1 EN50082-2 10 3.

ASP-X352

Body size Metric size Inch size 3 4 5 6 1/8 1/4 3/8 1/2 07 09 11 13 06 08 10 12 6mm 8mm 10mm 12mm 1/4 5/16 3/8 1/2 Thread size Universal type 01 02 03 04 1/8 1/4 3/8 1/2 With One-touch fitting Uni-fit thread form Dimensions Models TUBE O.D. d L3 Applicable tubing O.D.

5 Port Solenoid Valve Series SV

SV B00 SOL.b SOL.a 3(EB) 5(EA) 1(P) 4(A) 2(B) N.C. valve N.O. valve SOL.b SOL.a 1 2 SV C00 3(EB) 5(EA) 1(P) External pilot specification is not available for 4 position dual 3 port valves.

Speed Controller with One-touch Fittings Series AS In-line Type 1

M5 standard 1/8 standard 1/4 standard 3/8 standard 1/2 standard 100 200 205 300 400 Applicable tubing O.D. Metric size Inch size P . 15-11-3 3.2 With One-touch fittings 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" Use 1/8" tube. 23 04 06 08 10 12 01 03 05 07 09 11 13 4 6 8 10 12 Flow Direction Symbols on Body JIS Symbol Symbol 15-9-10

Clean Regulator/Fluororesin Type SRF Series

Metric size Inch size Applicable model SRF10 SRF30 SRF50 Applicable model SRF10 SRF30 SRF50 Applicable tubing size Applicable tubing size Symbol Symbol 4 x 3 6 x 4 8 x 6 10 x 8 12 x 10 19 x 16 04 06 08 10 12 19 03 05 07 11 13 19 1/8" x 0.086" 3/16" x 1/8" 1/4" x 5/32" 3/8" x 1/4" 1/2" x 3/8" 3/4" x 5/8" : Basic size : With reducer : Basic size : With reducer Note) Tubing size is interchangeable

AS

1/8" 03 5/32" 07 1/4" 09 5/16" 11 3/8" 13 1/2" -X214 Restrictor (Without check valve) 04 4 06 6 08 8 10 10 12 12 With One-touch ttings Example) AS2002F-04A-X214 10Clean Series Example) 10-AS2002F-04A 1 For selecting applicable tubing O.D., refer to the Model shown above. 2 Use 1/8" tubing. 1 Fluorine grease is used. 2 The cleanliness class (ISO class) is 5.

PF2A

Rc NPT G M12 3 m lead wire with connector Without lead wire Symbol N Note) Fixed units: Real-time flow rate: l/min Accumulated flow: l Port size Output specification Port size Applicable model Flow rate (l/min) Symbol Symbol Output specification 100 200 500 50 10 01 02 03 04 1/8 1/4 3/8 1/2 27 NPN open collector 2 outputs PF2A710/750 PF2A711/721 PF2A751 67 PNP open collector 2 outputs

Speed Controller with One-touch Fittings In-line Type/Panel Mount Type AS  1F-3 Series

Note) Metric size 23 04 06 08 10 12 Inch size 3.2 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 4 6 8 10 12 Made to Order (For details, refer to page 622.)

Heatless Air Dryer Series ID 1

(Inlet air pressure: 0.7 MPa, Inlet air temperature: 20C) HA How to Order AT ID 20 02 0 ID AMG ID400 Option B Bracket Z Adsorbent for low dew point Basic size AFF 20 30 40 60 Port size AM ID200 02 B 04 06 1 4 B 1 2 B 3 4 Nil Rc Thread type Misc.

PF2D Series Digital Flow Switch For Deionized Water and Chemical Liquids

For Deionized Water and Chemical Liquids Digital Flow Switch PF2D Series RoHS How to Order Remote Type Sensor Unit PF2D5 13 20 1 C Flow rate range Option (Refer to page 391.) 04 20 40 None e-con connector x 1 pc. Nil C 0.4 to 4 L/min 1.8 to 20 L/min 4 to 40 L/min The cable and connector are shipped unassembled.

Safety Speed Control Valve (SSC Valve) Series ASS 1

bracket 1 3 5 6 AK 8 3 B 3 4 1 Port size ASS Applicable series Port size 01 02 03 04 06 10 Type 1 8 ASS100/110 ASS300/310 ASS300/310 ASS500 ASS500/600 ASS600 ASR PAT.PEND 1 4 00 10 Meter-out control type Meter-in control type Meter-in type is available only for ASS110 and ASS310. 8 3 ASF 1 2 3 4 1 JIS Symbol Thread type Nil N F Rc NPT G Meter-out control Meter-in control Caution Be sure