Specification: 21 (Copper, Fluorine & Silicon-free+Low Particle Generation, Relief Type), Bearing: L (Ball Bushing Bearing), Bore Size: 6mm, Stroke: 20mm

Specification: 22 (Copper, Fluorine & Silicon-free+Low Particle Generation, Vacuum Suction Type), Bearing: L (Ball Bushing Bearing), Bore Size: 6mm, Stroke: 20mm

Specification: 21 (Copper, Fluorine & Silicon-free+Low Particle Generation, Relief Type), Bearing: L (Ball Bushing Bearing), Bore Size: 10mm, Stroke: 20mm

Type: -, Connection Method: -, Compressed Air Quality: General Dry Air, Connection Type: [Rc (R)] Rc, Plumbing Thread Nominal: 3/8, Filtration Level: 0.01μm, Operating Environment: Standard, Operating Pressure Range(MPa): -, Flow Direction: [Right] From Left to Right, Drain Cock: [Manual] Manual, Bowl Material: [Metal] Aluminum Alloy, Bowl Guard: No, Size of Body: 350, Accessory: Bracket,

(with Plug), Compatible Model: N/A

(with Plug), Compatible Model: N/A

(with Plug), Compatible Model: N/A

(with Plug), Compatible Model: N/A

(with Plug), Compatible Model: N/A

(with Plug), Compatible Model: N/A

Type: [Related Components (Replacement Parts)] Related Components (Replacement Elements), Connection Method: -, Compressed Air Quality: -, Treatment Air Flow Rate(l/min): -, Connection Type: -, Plumbing Thread Nominal: -, Connecting Tube Diameter: -, Filtration Level: -, Operating Environment: -, Operating Pressure Range(MPa): -, Flow Direction: -, Drain Cock: -, Bowl Material: -, Bowl Guard

SUS304, Bowl Guard: No, O-Ring, Gasket Material: NBR, Type of Connection 2: -, Pressure Reducing Valve: -, ON/OFF Valve: -, Throttle valve: -, Set Pressure: -, Element length: 500, Element type: Cylinder-type, Element materials: SUS304, Element seal materials: -, Nominal filtration accuracy: -, Pressure gauge accessories: With Pressure Gauge (Liquid contact part: Brass), Compatible Model: N/A,

(with Plug), Compatible Model: N/A, Element Size: -, Tank Capacity(L): -

Type: -, Connection Method: -, Compressed Air Quality: General Dry Air, Treatment Air Flow Rate(l/min): 100, Connection Type: [One-Touch Plumbing] One-Touch Pipe, Plumbing Thread Nominal: -, Connecting Tube Diameter: Ø6, Filtration Level: 0.01μm, Operating Environment: Standard, Operating Pressure Range(MPa): null～0.7, Flow Direction: -, Drain Cock: -, Bowl Material: [Resin] Nylon Case, Bowl

Type: [Related Components (Replacement Parts)] Related Components (Replacement Elements), Connection Method: -, Compressed Air Quality: -, Treatment Air Flow Rate(l/min): -, Connection Type: -, Plumbing Thread Nominal: -, Connecting Tube Diameter: -, Filtration Level: -, Operating Environment: -, Operating Pressure Range(MPa): -, Flow Direction: -, Drain Cock: -, Bowl Material: -, Bowl Guard

Nominal: 2, Filtration Level: 100µm, Operating Environment: Standard, Operating Pressure Range(MPa): null～0.7, Flow Direction: [Right] Left→Down, Drain Cock: No, Bowl Material: [Metal] SUS304, Bowl Guard: No, O-Ring, Gasket Material: NBR, Element length: 500, Element type: Fiber (Honeycomb), Element materials: Polypropylene, Element seal materials: Non asbestos, Pressure gauge accessories: N/A

Nominal: 2, Filtration Level: 5μm, Operating Environment: Standard, Operating Pressure Range(MPa): null～0.7, Flow Direction: [Right] Left→Down, Drain Cock: No, Bowl Material: [Metal] SUS304, Bowl Guard: No, O-Ring, Gasket Material: NBR, Element length: 1,000, Element type: Fiber (Honeycomb), Element materials: Polypropylene, Element seal materials: Non asbestos, Pressure gauge accessories: N/A

Size: 4 [0.57m³/min (ANR), 20.13scfm], Voltage: 20 [200VAC (50Hz), 200/220VAC (60Hz), Single Phase], Option 1: A+C+L, Option 2: R+T

Size: 11 [1.82m³/min (ANR), 64.27scfm], Voltage: 20 [200VAC (50Hz), 200/220VAC (60Hz), Single Phase], Option 1: None, Option 2: T (Terminal Block for Run & Alarm Signal)

Size: 8 [1.32m³/min (ANR), 46.62scfm], Voltage: 20 [200VAC (50Hz), 200/220VAC (60Hz), Single Phase], Option 1: None, Option 2: T (Terminal Block for Run & Alarm Signal)