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5 u q y e t !2 w i A CJ1 CJP CJ2 A Cylinder tube sectional view A-A !0 o CM2 CG1 Component Parts MB No. q w e r t y u i o !0 !1 No.

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3 Port Solenoid Valve Series VQ100 1

VZ 1 (P) 3 (R) VS VFN Latching type (A) 2 1 (P) 3 (R) Clean Series Clean series is available for both standard and option specifications.

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S 1 p c . n n p c s . L Long leads uountng B Front Nose Mount C -Rear Pivot E -Double End K -Non-Rotating Rod R -Block Mount W-Double Rod Auto.Switch 853. D-853 Gsg D-G59 B54. D-854 K59 D-K59 864 .

CS1

Bore size (mm) 125 140 160 180 200 250 300 Refer to p.1.10-7 for How to Order Auto Switches Style.

.: 01 (ø1/8"), Port Size/Applicable Tubing O.D.: 35 (NPT1/4), Thread Material/Surface Treatment: N (Brass + Electroless Nickel Plated), Sealant: P (Face Seal), Release Button: 1 (Oval Type)

Rated Flow Range: 01 (10 to 1000 l/min), Output Specifications: L4 [Out: IO-Link, Switch Output (N/P); Func: Analog Current Output <-> External Input; Monitor Unit Model: PFG310 Series], Lead Wire: w/Lead Wire and M12 Connector, 3m, Unit Specification: Units Selection Function, Calibration Certificate: A (Yes)

Manifold with Stainless Steel Plate: S, Model: 51S (EX260), SI Unit: DA (Positive Common, NPN; EtherCAT®; 32 Outputs; M12 Connector), Wiring Type: S (All Single Wiring), Valve Stations: 24 (24 Stations, All Single Wiring), Port Size: 01 [4(A)/2(B) Port: 1/8; 1(P)/3(EB), 5(EA) Port: 1/4]

Pressure Range: 1 (0.05~0.30MPa), Thread: N (NPT), Port Size: 01 (1/8), Option: P (Panel Nut)

Body Size: 20, Thread: N (NPT), Port Size: 01 (1/8), Option: w/o Mounting Option, Purge Port Fitting: P (w/One-Touch Fitting), Flow Direction: Flow Direction: Left to Right), Unit: Z (Product Label in Imperial Units: psi)

Nozzle Type: 01 (Energy Saving Static Neutralization Nozzle), Input/Output Specifications: P (PNP Input/Output), Port Size: 07 [ø6.35 (1/4), Inch Size], Power Supply: N (w/o Power Supply Cable)

Series: 1 (VFA1000), Actuation: 2 (2 Position Double), Body: 30, A, B Port Size: 01 (1/8), Thread: Rc, Bracket: w/o Bracket, Pilot Port Direction: P (Lateral)

Series: 1 (VFA1000), Actuation: 2 (2 Position Double), Body: 20, A, B Port Size: 01 (1/8), Thread: Rc, Bracket: w/o Bracket, Pilot Port Direction: P (Lateral)

Model: 50 (Side Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 1 (Upward), Wiring Specification: S (All Single Wiring), Valve Stations: 10 Stations, P,E Port Location: B (Both Sides), A,B Port Size: 01 (1/8), Thread: N (NPT)

Pressure Range: 1 (0.05~0.30MPa), Thread: F (G(PF)), Port Size: 01 (1/8), Option: P (Panel Nut)

Stations: 01 (1 Station), Piping: D (U Side: Closed; D Side: Open), Thread Type: N (NPT), Supply Unit Components: P (w/o Flow Adj. Valve; w/Stop Valve), Return Unit Flow Range: 40 (5 to 40 L/min), Supply/Return Port Size: 06 (3/4)

Output Specification: S (NPN Open Collector 2 Outputs + Analog Current Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: 01 (R 1/8), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: None, Operation Manual: K (Operation Manual, Calibration Certificate)

.: 01 (ø1/8"), Port Size/Applicable Tubing O.D.: 02 (R1/4), Thread Material/Surface Treatment: A (Brass), Sealant: P (Face Seal)

Speed Controller with One-touch Fittings Series AS In-line Type 1

Metric size Inch size P . 15-11-3 3.2 With One-touch fittings 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" Use 1/8" tube. 23 04 06 08 10 12 01 03 05 07 09 11 13 4 6 8 10 12 Flow Direction Symbols on Body JIS Symbol Symbol 15-9-10

Manifold with Stainless Steel Plate: S, Model: 51S (EX260), SI Unit: EAN (Negative Common, PNP; EtherNet/IPâ„¢; 32 Outputs; M12 Connector), Wiring Type: All Double Wiring, Valve Stations: 12 (12 Stations, All Double Wiring), Port Size: 01 [4(A)/2(B) Port: 1/8; 1(P)/3(EB), 5(EA) Port: 1/4], Thread Type: N (NPT)