VQZ100/200/300

Rubber seal 10.8 (0.6) VQZ232 20 or less 15 or less 58 VQZ200 Metal seal 7.2 (0.4) VQZ222 18 or less 14 or less N.O. Rubber seal 10.8 (0.6) VQZ242 20 or less 15 or less Metal seal 14.4 (0.8) VQZ312 22 or less 17 or less N.C. Rubber seal 16.2 (0.9) VQZ332 33 or less 25 or less 92 VQZ300 Metal seal 13.5 (0.75) VQZ322 22 or less 17 or less N.O.

ISO Interface

Operating Note 3) 2-position 8-6:5, 8-8:6, 8-10:5 8-6:20, 8-8:15, 8-10:10 frequency cycle/sec. 3-position 8-6:3, 8-8:3, 8-10:2 8-6:10, 8-8:10, 8-10:20 Lubrication Not Required Manual override Non-locking push type Protection structure Dust Proof Coil rated voltage 100VAC, 110VAC, 200VAC, 220VAC, 24VDC Allowable voltage range % -15~ +10% of rated voltage Coil insulation Class B or equivalent

Air Suction Filter In-line Type with One-touch Fittings Series ZFC 1

Refer to pages 13-15-3 to 13-15-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to page 13-1-5 for Precautions on every series. Selection Handling of One-touch Fittings 1. Do not use in lines where a pressurized condition is maintained, as the body may be damaged. Warning Caution 1.

W2M/4M

Conduit Current Type 2-wire: 4-20mA Current Type 2-wire: DIN cuffir tp6 2-'n6 qr: rlplr .rsmr and por alpdy or {-2oln^l Voltage 3-wire: 0-5V,0-10V Input impedance: 30(KQ) Voltage 3-wire: Input signal oI 0-5,0-10(V) Power supply of 12-15(V) xPlease be sur !

,,: ,.

KQ2C Caps P Plugs Q Cartridge KR Fitting Boot . . . . . . . .6 .7 .7 .7 P .8 .8 .9 .9 o 't0 1 0 1 0 1 1 1 1 1 1 1 2 Spucial [nnlhunilions Page 14 IIU lrlylon lltliltg Page 15 Bmss Phe tittittg$ pase N i p p l e s . . . . . . . . . 1 7 Cdinlinars -. -14 Bushings Aalaolers 1 8 '18 1 q Ts6s .20 .20 Pftr^q 21 SAE 45" Flares . -..22-23 .24 General Assembly..,.. lmoortant Oo's and Dont's Chemical

NVEPA|VEFseies

Prassuro 1s0 PSIG (9.9 Kgflcm ) Prool Pr333ure 225 PSIG (15 Kgr cm ) Amblnl Temp. 40 120"F (5 50"C) Responsg Tlme 30 ms Max. 50 ms Max. 30 ms Max. 50 ms Max, Hysteresls 3% F.S. Repeatablllty 3/. Sensitivity o.5/.

lVFl 10

Six station manifrcld ass'y: sta. 1-4) NVF'I'10-5G-017 sta. 5-6) NVF1 10-3G-017 NW3F1 -30-061-017 No. ot Stgliorg I l 5 I F Mounting Brackets tPoding 01 ,d' NPIF DltrlENSlON D E F G H J x ll ta o P n s T u w x z AA BB 3.78 (96) 3.41 1.77 (,r5)0.39 (10) o.59 (15) 0.20 (5) 0.63 (16) 1.O2 (28t 3.50 (89) 1 . 1 8 (30) 0.59 (15) 2.76 (70) o.87 (21) o_20 {5) 1 . 1 8 {30} 0.67 ltTl 0.59 (ls) o.32

FSQ seies

Example) Boll M5 x 65L frzr,r 4 bolts Diagram 1 D agram 2 Lever (with shock absober) Roller/round bar/non-rotaling Mounling bolt 50 40 30 25 20 15 ' 2 0 E 6 6 B r n 10 5 1 0 2 0 Load speed v (m/m n) Lateral load and operating pressure at Flush piping thoroughly beiore connection in orderlo preventdustorchipsf rom entedng the cylinder. Do not mark or damage lhe piston rod.

, Ambient and fluid temperature: -10 to 50 C, VALVE, COMPACT, CLEAN ROOM, VALVE, VQ100 SOL VALVE 3-PORT, 15, VQ100 OTHER SIZE RATING, .02904 lb

737, 15 lb

10%, 12 to 15 VDCPower supply voltage 24 VDC type: 0.12 A or less Power supply voltage 12 to 15 VDC type: 0.18 A or less0 to 5 VDC, 0 to 10 VDC4 to 20 mA DC, 0 to 20 mA DCApproximately 10 k Approximately 250 1 to 5 VDC (Load impedance: 1 k or more) Output accuracy: Within ?6% (Full span)Within ?1% (Full span)Within 0.5% (Full span)Within ?0.5% (Full span)Within 0.2% (Full span)Within ?

10%, 12 to 15 VDCPower supply voltage 24 VDC type: 0.12 A or less Power supply voltage 12 to 15 VDC type: 0.18 A or less0 to 5 VDC, 0 to 10 VDC4 to 20 mA DC, 0 to 20 mA DCApproximately 10 k Approximately 250 1 to 5 VDC (Load impedance: 1 k or more) Output accuracy: Within ?6% (Full span)Within ?1% (Full span)Within 0.5% (Full span)Within ?0.5% (Full span)Within 0.2% (Full span)Within ?

10%, 12 to 15 VDCPower supply voltage 24 VDC type: 0.12 A or less Power supply voltage 12 to 15 VDC type: 0.18 A or less0 to 5 VDC, 0 to 10 VDC4 to 20 mA DC, 0 to 20 mA DCApproximately 10 k Approximately 250 1 to 5 VDC (Load impedance: 1 k or more) Output accuracy: Within ?6% (Full span)Within ?1% (Full span)Within 0.5% (Full span)Within ?0.5% (Full span)Within 0.2% (Full span)Within ?

10%, 12 to 15 VDCPower supply voltage 24 VDC type: 0.12 A or less Power supply voltage 12 to 15 VDC type: 0.18 A or less0 to 5 VDC, 0 to 10 VDC4 to 20 mA DC, 0 to 20 mA DCApproximately 10 k Approximately 250 1 to 5 VDC (Load impedance: 1 k or more) Output accuracy: Within ?6% (Full span)Within ?1% (Full span)Within 0.5% (Full span)Within ?0.5% (Full span)Within 0.2% (Full span)Within ?

15 to +10% of rated voltageEquivalent to B type (130C)5.6 VA (50 Hz), 5.0 VA (60 Hz)3.4 VA (2.1 W)/50 Hz, 2.3 VA (1.5 W)/60 Hz1.8 WGrommet, Type D DIN terminal, Type Y DIN terminalIndicator light/Surge voltage suppressor (2)Non-locking push type (Flush),Locking type (Tool required), Locking type (Lever)

15 to +10% of rated voltageEquivalent to B type (130C)5.6 VA (50 Hz), 5.0 VA (60 Hz)3.4 VA (2.1 W)/50 Hz, 2.3 VA (1.5 W)/60 Hz1.8 WGrommet, Type D DIN terminal, Type Y DIN terminalIndicator light/Surge voltage suppressor (2)Non-locking push type (Flush),Locking type (Tool required), Locking type (Lever)

15 to +10% of rated voltageEquivalent to B type (130C)5.6 VA (50 Hz), 5.0 VA (60 Hz)3.4 VA (2.1 W)/50 Hz, 2.3 VA (1.5 W)/60 Hz1.8 WGrommet, Type D DIN terminal, Type Y DIN terminalIndicator light/Surge voltage suppressor (2)Non-locking push type (Flush),Locking type (Tool required), Locking type (Lever)

15 to +10% of rated voltageEquivalent to B type (130C)5.6 VA (50 Hz), 5.0 VA (60 Hz)3.4 VA (2.1 W)/50 Hz, 2.3 VA (1.5 W)/60 Hz1.8 WGrommet, Type D DIN terminal, Type Y DIN terminalIndicator light/Surge voltage suppressor (2)Non-locking push type (Flush),Locking type (Tool required), Locking type (Lever)

15 to +10% of rated voltageEquivalent to B type (130C)5.6 VA (50 Hz), 5.0 VA (60 Hz)3.4 VA (2.1 W)/50 Hz, 2.3 VA (1.5 W)/60 Hz1.8 WGrommet, Type D DIN terminal, Type Y DIN terminalIndicator light/Surge voltage suppressor (2)Non-locking push type (Flush),Locking type (Tool required), Locking type (Lever)

15 to +10% of rated voltageEquivalent to B type (130C)5.6 VA (50 Hz), 5.0 VA (60 Hz)3.4 VA (2.1 W)/50 Hz, 2.3 VA (1.5 W)/60 Hz1.8 WGrommet, Type D DIN terminal, Type Y DIN terminalIndicator light/Surge voltage suppressor (2)Non-locking push type (Flush),Locking type (Tool required), Locking type (Lever)