NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

e : 3 : P tg E t 3 : i fI : With indicator light and surge voltage suppressor o NVZ3000 / 8 Positian Double Solenoid Base Mounted DIN conn.c.tor (D)/ N\Z324GODOO-017 crommet/NvZ324O-OG NV23240-OH 8 3 o i o . , 1 . . ] M type plug connector./Nvz324o-Ou L type plug connector/NVZ3240-OL t a L:l : with indictor light and surge voltage suppressor NVZ3OOO Base Mounted.

3 Port Solenoid Valve Series VQ100 1

Stations U side D side 2 stations 02 VVQ1000-10A-2 Stations4321 20 stations 20 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Port size and thread M5, Rc 1/8 NPT 1/8 NPTF 1/8 PF 1/8 Nil 01N 01T 01F Only thread port size 1/8 type, (Type 2U, P/E port) has choice

AR20-B to AR60-B

F J K H J H J H J H J AR10-A M5 x 0.8 1/16 25 47.4 11 12.5 M18 x 1 12.5 26 26 AR20(K)-B 1/8, 1/4 1/8 40 67.4 26.5 28.5 M28 x 1 28.5 2 *2 28 29.5 27.8 40 37.5 65 37.5 66 AR25(K)-B 1/4, 3/8 1/8 53 71.9 28 27.5 M32 x 1.5 27.5 0 28 28.5 27.8 39 37.5 64 37.5 65 AR30(K)-B 1/4, 3/8 1/8 53 85.6 30.7 29.4 M38 x 1.5 29.4 3.5 28 30.4 27.8 40.9 37.5 65.9 37.5 66.9 AR40(K)-B 1/4, 3/8, 1/2 1/8 70 91.7

Series KC Self-seal Fittings

L1 D L2 A Rc(PT)1 8 KBS1-R1 KBS2-R2 KBS3-R3 KBS4-R4 28.0 33.5 38.5 39.0 13.6 17.6 25.2 27.0 17.8 28.5 33.8 57.1 14 17 19 24 11.0 14.0 17.0 20.0 25.0 30.0 34.5 35.0 3 8 Rc(PT)1 4 Rc(PT) Rc(PT) 1 2 85 Series KB Piping Module 3 Other Piping Material Nipple: KBN Weight (g) L A D Part No.

HRX-OM-O021

Control, Inspection and Cleaning . 8-1 8.1 Control of Circulating Fluid Quality . 8-1 8.2 Inspection and Cleaning . 8-2 8.2.1 Daily check . 8-2 8.2.2 Monthly check . 8-3 8.2.3 Inspection every 3 months . 8-4 8.2.4 Inspection every 6 months . 8-5 8.2.5 Inspection for winter season . 8-6 8.3 Consumables . 8-6 8.4 Stop for a Long Time . 8-7 8.4.1 Discharge of the circulating fluid and facility

Electromagnetic Digital Flow Switch

The straight piping length shall be 5 times (5D) or more of the piping size to achieve the stable measurement. 3 Accuracy change [% F.S.] 2 [mm] 1 Model Straight piping length D 5D LFE1 11 55 LFE2 21 105 LFE3 27 135 [Port size] [Measurement conditions] Fluid: Tap water Pressure: 0.2 MPa 0 D 2D 3D 4D 5D LFE1: 3/8 inch LFE2: 3/4 inch LFE3: 1 inch 0 Straight piping length Operating Pressure

CG1-OM0227

D-H7BALD-H7NF D-G59WD-G5PWD-K59W D-G59FD-G5NT D-C73CD-C80C D-B54D-B64D-B59W 3. 4. () () (M4 1~1.2Nm (M3 0.6~1Nm 11 <> D-M9NM9PM9BM9NM9PVM9BV D-M9NWM9PWM9BWM9NWM9PWVM9BWV D-M9NAM9PAM9BAM9NAM9PAVM9BAV D-A90A93A96A90VA93VA96V 5. <> 6080 D-M9A(V) M3M3 0.60.7Nm (M2.5) (M2.5)0.050.1Nm 56mm 1)(M2.5) 2)M3 BMA3 A 12 4 1) (BMA2-A)(BJ5-1/) () 2) (BMA2-AS/)(BJ4-1/) D-M9A(V) () BBA3:D-B5,

PSxx-OMU0008CN

Rc1/8 M50.8 5 G1/4 A2L B2L URJ1/4 TSJ1/4 -82No.PS-OMU0008CN-D A -83No.PS-OMU0008CN-D C -84No.PS-OMU0008CN-D () 43.602 0.5~7 ()+ 43.602 0.5~7 -85No.PS-OMU0008CN-D () 1~5 -86No.PS-OMU0008CN-D ()+ 1~5 -87No.PS-OMU0008CN-D () 2 (n ) <> 31n +3.5n -1 -88No.PS-OMU0008CN-D <> -89No.PS-OMU0008CN-D () 2 (n ) <> 36n +4n -1 -90No.PS-OMU0008CN-D Revision history A [2018 7 ] B [2020 2 ] C [2021

Series 10-, 21- AW-B Filter Regulator

1.5 1.2 3.2 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1/8 1/8 1/8 1/8 1/8 M28 x 1 M38 x 1.5 M42 x 1.5 M42 x 1.5 26 29.4 37.3 37.3 43.3 Note) The dimension of C is the length when the filter regulator knob is unlocked. 1081 A 1021-AW K-B Regulator with Backflow Function Dimensions J J D M N T AW20K-B 1021Bracket (Option) S U Panel fitting dimension Air Preparation Equipment Pressure Control

Rotary Table

Recommended tightening torque Auto switch model Recommended tightening torque [Nm] D-M9 0.05 to 0.15 D-M9A (Water resistant) 0.05 to 0.10 Fig. 8 D-F8 0.10 to 0.20 Set screw Auto switch 29 - Auto switch proper mounting position at rotation end Table 11 Auto Switch Rotation range / Actuation / most sensitive position A A A A B B B B D-M9 D-F8 Magnet Operation range at optimum set position (

LECA6_C

7 + + + + + + 8 I/O (NPN/PNP) 9 10 FG () 12 - 3.3. 1LECA6 2DIN LECA6D 13 - 3.4. 1 DIN 2 LECA6 DINLECA6D DIN 2M4 DIN DIN A DIN ADIN 2 M4 M4 14 - D (100 ) 2mm 2 D 3 40 30mm 50mm ()60mm 0mm (LE)10mm 25 LEH () 30mm 60mm 30mm 50mm DIN ) 15 - 4.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

8 Note) 3/16", 3/8" and 1/2" are made of stainless steel 303.

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

Note 5) 3/16", 3/8", 1/2"are made of brass AS131F (3.2, 4, 6, 1/8", 5/32, 1/4), AS231F-01(3.2, 4, 6, 1/8", 5/32) are POM. 15-9-5 5 Series AS Elbow Type M3 port M5 port U10/32 port Applicable tubing O.D. d (Hexagon width across flats) Applicable tubing O.D. d (Hexagon width across flats) Metric Size Inch Size Applicable tubing O.D. d 1/8" Applicable tubing O.D. d A(2) Weight (g) T D1 H(1)

S Couplers

81.7 H KKA6S-03M-1 R 3/8 51.4 44.9 138.3 L -04M-1 1/2 R 1/2 11.4 81.6 54.4 46.4 149.6 30 30.7 -06M-1 R 3/4 56.4 46.9 174.0 Female thread type (mm) Body size H Width across flats Min. bore size Model T Connection port size Weight g Effective area mm2 L D KKA3S-01F-1 Rc 1/8 44.5 37.6 T 17 -02F-1 1/8 Rc 1/4 18.5 6.1 23.4 44.8 41.2 -03F-1 Rc 3/8 49.9 43.1 19 D KKA4S-02F-1 Rc 1/4 46.1 92.2 22

Copper-free Actuators

Pin Cylinder Series C(D)JP 1.2-2 20-CJP Double acting SCJPl 1.2-8 20-CJP Single acting Large bore size cylinder Series C(D)S1 Standard SC51l 1.10-2 20-CS1N Fine lock cylinder Series C(D)L RB Standard SCLAl 3.1-33 20-CLA J Cylinder with lock Series C(D)NA D SCNAl Standard 20-C(D)NA 3.3-1 -X End lock cylinder Series C(D)B 20Standard 20-CBM2 SCBM2l 3.4-4 Standard 20-CBA1 SCBA1l 3.4-12 Plate

α PneuAlpha HARDWARE MANUAL

Hardware Specication 2.1 Available Models PneuAlpha Hardware Specification 2 ECC-PNAL-20MT-D 12 TRANSISTOR 8 ECC-PNAL-10MT-D 6 TRANSISTOR 4 (0.70)* ECC-PNAL-20MR-D ECC-PNAL-20MR-A 100 240V AC~ 100 240V AC~ 12 RELAY 8 124.6 x 90 x 55 ECC-PNAL-10MR-D ECC-PNAL-10MR-A 6 RELAY 4 ECC-PNAL-6MR-A 100 240V AC~ 100 240V AC~ 4 RELAY 2 71.2 x 90 x 55 Model Power Supply * Without Special Connection Modules

VXR21/22/23

Solenoid Specifications Apparent power (VA) Inrush Holding Power consumption (W) (Holding) Temperature rise (C ) (Rated voltage) Frequency (Hz) 50 25 12 60 20 8 Model Power source 5 50 3.5 35 6 50 8 55 6.5 45 8 50 0.5 60 9.5 50 11.5 55 Note) They are values in an ambient temperature of 20C 5C and application of rated voltage.

70pvvna

T) 72.5 (DIN terminal: D) Bracket 2-M4 x 0.7 depth 7 Main port Rc Model VNA1-6A VNA1-8A VNA1-10A 1 8 1 4 3 8 In the case of EZ or TZ, the length is longer by 10 mm.

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Solid state switch Model D-F8 Series Variations Bore size (mm) Rod end configuration Stroke (mm) Clean room series 4 6 8 10 15 20 Action Series Auto switch Double acting Male thread Without thread Nil 4 Single acting (spring return) Double acting 6 Single acting (spring return) CUJ Solid state switch D-F8 D-F9 Female thread Double acting 8 Male thread Single acting (spring return) Double

Speed Controller with Residual Pressure Release Valve with One-touch Fitting AS  FE Series

10 6 8 10 12 12 10 6 8 10 Tubing O.D.