PF2A/PF2W

size (Rc, NPT, G) 3/8 1/2 1/8, 1/4 Note 1) The system accuracy when combined with PF2A3.

DOC1003626

DOC1003626 Contents Contents Read before using . 1-1 1.1 Operation mode and operation method . 1-2 1.2 Change of operation mode . 1-3 1.3 Communication port . 1-5 1.4 Touch panel flow . 1-6 Contact input/output communication / Analog output communication . 2-1 2.1 Precautions for communication . 2-1 2.1.1 Precautions wiring communication . 2-1 2.1.2 Precautions after wiring and before communication

Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Slider Type Ball Screw Drive Clean Room Specification 11-LEFS Series LEFS16, 25, 32, 40

How to Order 11 LEFS 100 B 1 1 S K 6N 16 w e r t u y o i !0 !1 !2 !

Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Slider Type Ball Screw Drive Secondary Battery Compatible 25A-LEFS Series LEFS16, 25, 32, 40

How to Order 25A-LEFS 25 H R B 200 S 1 6N 1 q r w e t u y i o !0 !1 !

VM100F

Metric size: Light gray Inch size: Orange 1 Refer to the table on page 2 for combinations of actuator type and sufx. Construction Side ported Bottom ported t y w u q q w u y t 3(R) (3-port only) 3(R) (3-port only) Non-actuated Non-actuated !4 i !0 2(A) 1(P) r o e !3 !1 !2 !3 e o r !0 i !1 !2 2(A) 1(P) Actuated Actuated 2(A) 1(P) 2(A) 1(P) Component Parts No.

Series 12-REA ø25, ø32, ø40, ø50, ø63 Sine Rodless Cylinder

R.

pa

N03 T03 NPTF 1/4 Threads Rc 1/4 Threads G 1/4 Threads NPT 1/4 Threads P11 P11F Compact, lightweight (Without foot) P11N P11T PAP331 (Assembled in clean room) NPTF 1/4 Threads Rc 1/4 Threads G 1/4 Threads NPT 1/4 Threads P13 P13F 140 mm 120 mm P13N P13T NPTF 1/4 Threads 110 mm Option Reset button Weight: 2.1 kg Air operated type is also standardized.

CM2

Axial foot style (2) Rod side flange style (1) Head side flange style (1) CJ1 Clevis integrated style (1) (1) Single clevis style CJP (1) (3) Double clevis style Rod side trunnion style (1) (2) CJ2 (2) Head side trunnion style (1) CM2 Boss-cut basic style (1) Boss-cut flange style (1) CG1 Boss-cut trunnion style (1) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San

HRX-OM-Z015

HRLE Series HRX-OM-Z015 Chapter 1 Read before using Contents Chapter 1 Read before using . 1-1 1.1 OPERATION MODE AND OPERATION METHOD . 1-1 1.2 CHANGE OF OPERATION MODE . 1-2 1.3 COMMUNICATION TERMINAL BLOCK . 1-3 1.4 OPERATION DISPLAY PANEL FLOW . 1-4 Chapter 2 Contact input / output communication . 2-1 2.1 PRECAUTIONS FOR COMMUNICATION . 2-1 2.1.1 Precautions wiring communication . 2-1

MXS

1 !0 !6 CL MLGC r CNA !2 !3 t !

Compact Vacuum Unit

switch (r).

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

2 3 4 5 Case Cover Element Seal Bracket 1 2 1 2 1 One-touch fittings w Replacement Element Part No. e q Part no.

Manually Operated Integral Fitting Type/Threaded Type Series LVH

8, 1/4, NPT 1/8, 1/4 27 22 22 76.5 75 33 30 (SUS) Stainless steel 19 13 81 Rc 1/4, 3/8, NPT 1/4, 3/8 37 26 37 112.5 110.5 47 36 M6 x 1 20.5 16 99 Rc 3/8, 1/2, NPT 3/8, 1/2 50 33.5 47.5 142 138 60 46 M8 x 1.25 44 10 11 55 3.5 Rc 1/4, NPT 1/4 27 37 20 4 77 75.5 36 30 56 19 15 80 5.5 Rc 3/8, NPT 3/8 37 46 34 7.5 111.5 109.5 47 36 PPS 68 20.5 22 99.5 5.5 Rc 1/2, NPT 1/2 50 57 42 8 142.5

EXxx-OMV0017-D

software again. 1.

F/ISE

Proper tightening torque N.m Nominal thread size 1/6 rotation after tightening by hand M5 13.6N.m R 1/4, NPT 1/4, G 1/4, URJ 1/4, TSJ 1/4 3. Apply wrench only to the metal part of the main housing when installing the pressure switch onto the system piping.

High Power Cylinder Series RHC

3 y r t !1 A A Enlarged view of A Component Parts Description No.

Rotary Cylinder Series MRQ

Description No. r i !

Digital Pressure Switch

Internal circuit and wiring example Z/ISE80Output specification -N NPN open collector output type Max. 28 V, 80 mA Residual voltage 1 V or less -P PNP open collector output type Max. 80 mA Residual voltage 1 V or less -S/-R (Analogue output mode) Switch output NPN open collector output type 2 output Max. 28 V, 8 mA Residual voltage 1 V or less R: Analogue output 1 to 5 V Output impedance

CLS

0 i o @1 @0 @3 y u !1#1 @9 #4^2^7^5^1 ^3 ^6 ^4 8%2 %3 %4 %6 q !9 w %7 $1 $2 $3 $6 $8 $9 $0 #3 #0 @5 #2 $5 $4 %0 %1 t y !2 !1 !3 CL u !4 !6 CL1 !7 !5 MLGC CNG e ^0 ^2 !

CQS

1 15.5 20 25.5 28 3.5 3.5 5.4 5.4 Note 1) For basic style 20 and 25 with 5 stroke, through-hole is threaded over the entire length.