SL5200 Single Stage Compact Regulator for Ultra High Purity Series SL5200 Sub-atmospheric pressure delivery option Springless design (No poppet spring in the wetted area) For UHP gas delivery Flow capacity Standard: to 30 slpm HF (option): to 130 slpm Body material: 316L SS secondary remelt Hastelloy internals available for corrosion resistance How to Order Port Number q w e SL52 S M FV4 FV4 02
Do not drop, bump or apply excessive impacts (300m/s or more for reed switches and 1000m/s or more for solid state switches) while handling. Although the body of the switch may not be damaged, the inside of the switch could be damaged and cause a malfunction. 2. Do not carry a cylinder by the auto switch lead wires. Never carry a cylinder by its lead wires.
Reduced outgassing Resin materials eliminated Laser marking is employed for the model designation. o u d t g e 2 a c s u s d i Reduction of outgassing due to surface treatment e n o u d t g R e g a 1 c s u s d i e n R g All the external parts (made of aluminum alloy) such as the body and slide table are electroless nickel plated.
D 1 F MHKL 2 20 S D 1 F M9N Long stroke type Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Number of auto switches Number of fingers Nil S 2 pcs. 1 pc.
W: Weight (kg) F: Load (N) FE: Load equivalent to impact (N) a: Average speed (mm/s) M: Static moment (Nm) : Collision speed (mm/s) L1: Distance to center of load gravity (m) ME: Dynamic moment (Nm) g: Gravitational acceleration (9.8m/s2) 1.4 100 =1.4 a(mm/s) FE= agW (4) 1 3 ME= FEL1=0.05aWL1(Nm) Note 4) Average load ratio (This is for averaging Max. load moment when stopper collides in case
Number of auto switches Nil S n 2 pcs. 1 pc. n pcs.
kit 16 stations 16 NKE Corp.: Uni-wire H System 1 to 8 stations SUNX Corp.: S-LINK System (16 output points) 8 SUNX Corp.: S-LINK System (8 output points) 1 to 4 stations 8 stations D side DeviceNet, CompoBus/D (OMRON Corp.) 16 16 stations 1 to 8 stations OMRON Corp.: CompoBus/S System (16 output points) OMRON Corp.: CompoBus/S System (8 output points) 8 8 stations 1 to 4 stations Mitsubishi
D 1 F Long stroke model MHKL 2 20 S 1 F F9NL D Number of auto switch Number of fingers S 2 pcs. 1 pc. 2 2 finger Bore size 12 16 20 25 12mm 16mm 20mm 25mm Actuation D S C Double acting Single acting (Normally open) Single acting (Normally closed) Finger material 1 Carbon steel Stainless steel Dust cover material F S Chloroprene rubber Fluoro rubber Silicon rubber Auto switch Without auto
Vacuuming Graphs Top cover Seal separator LJ1H10 Vacuuming flow characteristics Particle concentration (Particles/ft3) Particle concentration (Particles/ft3) 10 Speed: 400mm/s Dust seal 10 Speed: 600mm/s 10 Side cover 200 150 100 50 25 Vacuuming flow (l/min ANR) LJ1H20 Vacuuming flow characteristics 10 Speed: 500mm/s 10 Speed: 1000mm/s 10 200 150 100 50 25 Vacuuming flow (l/min ANR) Particulate
W : W max. value is from
Etfective Orifice (mm2) NPTF (Base mount type) 1 1 3 02=1h 03 = 3/s I .t 1 30 Q2=1/t 03=9e O4=1/z 1 45 03 =3/8 04=1/z 06=aa (Base mount type) 1 2 02=lL 03 = 3/s 8 4.5 4 ?.
Sine Rodless Cylinder Series REA High Speed Cylinder Up To 12in/s Smooth Deceleration Construction Designed To Transport Delicate Workpieces Semiconductor wafers Liquid crystal substrates Magnetic disks Ceramic products Glass products Allows rapid transport o Major improvement of throughput Rapid transport has been achieved with a maximum drive speed of 300mm/s (12in/s).
50 to 1000mm/s Base cylinder Rubber bumper Cushion Guides Built-in shock absorber (2 pcs.)
Male thread LDZB5L 196N 33mm/s LDZB5M 40,100,200 117N 100mm/s LDZB5H 72N 200mm/s Model Max. thrust Max. speed Lead screw Motor Stroke (mm) Mounting bracket Rod end thread Cover Auto switch Slide screw 8 Lead 2 25,40,100,200 LDZC3L 80N 33mm/s Slide screw 8 Lead 6 Slide screw 8 Lead 12 Slide screw 12 Lead 2 Slide screw 12 Lead 6 Slide screw 12 Lead 12 LDZC3M 43N 100mm/s LDZC3H 24N 200mm/s
There is no "S" type for AC, since the generation of surge voltage is prevented by a rectifier. With light/surge voltage suppressor (non-polar type) There is no "S" type for AC, since the generation of surge voltage is prevented by a rectifier. D and DO type DC specifications are 24VDC or 12VDC only. D and DO type are for SY5000/7000 only.
valves there is no S option.
Contact SMC regarding the specifications for psi unit and F. 229 Filter Regulator with Built-in Pressure Gauge with Backflow Function AWG20K/30K/40K Construction AWG20K AWG30K/40K B D P A A K U C C C S O P H L to K U C S O H L to B D D-D C-C A-A B-B !0 o !1 !0 o !1 y y !2 !
Max 1.25 9 80 92 108 8 M1 OX 1.S 15 18 M1 Oxl .5 9 63 103.5 MIOx l .S 11 99 116 13' 10 M1 6X2.0 21 22 M12xl .7S 11 123 Ml 2x 1.75 80 Clevis Mount: C0020P 0 -0 OM-DO Special cap bolt (mm) eo.. _ N CD CL ew ev A 0 R CU ex cz RR Ll H H Thread e I (mm) C Depth M8xl .2S M8x l .25 14 117 I .
Note 3) For the D-M9A(V) type auto switch, do not install the switch bracket on the indicator light. (1) BJ-1 is a set of a and b. (2) BM2-A(S) is a set of c and d. Band (c) is mounted so that the projected part is on the internal side (contact side with the tube).
Power consumption cost per year Annual air consumption Exhaust time Air consumption ZK2/With energy saving function 957 JPY/year 638 m3/year 0.6 s 58 L/min (ANR) Existing product 14,025 JPY/year 9,350 m3/year 6 s 85 L/min (ANR) Air unit 1.5 JPY/m3 (ANR), Annual operating cycles: 110 (Operating hours: 10 hours/day, Operating days: 250 days/year, 450 cycles/h, when 1 unit is used) Cost conditions