Precision Regulator

2 Nozzle IR-A @2 w !2 Bleed Diaphragm (B) r !3 @4 Bleed Exhaust u IR IR !7 @3 !2 !5 !4 Diaphragm (C) e OUT (2) SUP (1) OUT (2) OUT (2) SUP (1) IRV SUP (1) @3 !8 Exhaust valve !6 @1 @1 !8 e VEX Main valve e @1 Exhaust tValve guide tValve guide tValve guide SRH IR2120 IR3120 SRP @0 !1 SRF @5 !1 ITV @0 @6 !

IZx-OMV0005

Ground connection . 19 3-2-4. AC adapter . 19 3-3. Timing chart . 20 4. Function . 21 4-1. Name of Parts . 21 4-2. Emitter maintenance alarm and cleaning . 21 4-3. Replacement of the emitter assembly . 22 4-4. Alarm function . 24 5. Performance . 25 5-1.Basic characteristics . 25 6. Dimensions . 28 7. Specifications . 33 8.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

2 !2 !3 !3 !4 !4 !5 !5 M5 port M5 port y y u u !7 !7 q w e r t q w e r t o o !0 !0 !1 !1 i i !4 !4 !2 !2 !3 !3 !6 !6 Component Parts Description Material Description Material No.

ASR

4 i y !0 !1 !2 !4 i !5 !6 Component Parts Note Material No. q w e r t y u i o !0 !1 !2 !3 Description No. !4 !5 !6 !7 !8 !

80

size of 4 (size 1 or 2) is used.

Compact and Lightweight

Rc1/8 Rc1/4 Rc1/4 ZH13DA NPT1/8 NPT1/4 NPT1/4 ZH13DA Rc1/4 Rc3/8 Rc3/8 ZH15DA NPT1/4 NPT3/8 NPT3/8 ZH15DA Rc3/8 Rc3/8 Rc3/8 ZH18DA NPT3/8 NPT3/8 NPT3/8 ZH18DA Rc3/8 Rc1/2 Rc1/2 ZH20DA NPT3/8 NPT1/2 NPT1/2 ZH20DA Screw-in VAC. Silencer and standard bracket are available. Easy identification of product type Shipped together with the product.

53

2 Circulating fluid outlet 1 User's equipment 2 2 Circulating fluid return port 3 4 8 Automatic fluid fill port (Option J) Fluid supply 9 Overflow port (Option J) Tank drain port To wastewater collection pit 5 No.

air-filter-e

Fiber Paper Micromesh Specifications Model 4 65 to 70 x L250 FGETB FGETC FGETA FGESA Note 1) FGESB Note 1) FGESC Note 1) FGELA Note 1) FGELB Note 1) FGELC Note 1) Number of elements 8 65 x L250 12 65 x L250 4 Note 2) 8 4 Note 2) 12 4 65 to 70 x L250 4 Note 2) 8 4 Note 2) 12 4 65 x L250 4 Note 2) 4 Note 2) 65 to 70 x L500 65 to 70 x L250 65 to 70 x L750 65 to 70 x L250 65 to 70 x L500 65 to

Air Preparation Equipment

Fiber Paper Micromesh Specifications Model 4 65 to 70 x L250 FGETB FGETC FGETA FGESA Note 1) FGESB Note 1) FGESC Note 1) FGELA Note 1) FGELB Note 1) FGELC Note 1) Number of elements 8 65 x L250 12 65 x L250 4 Note 2) 8 4 Note 2) 12 4 65 to 70 x L250 4 Note 2) 8 4 Note 2) 12 4 65 x L250 4 Note 2) 4 Note 2) 65 to 70 x L500 65 to 70 x L250 65 to 70 x L750 65 to 70 x L250 65 to 70 x L500 65 to

Cylinder with Lock Series CNS

(same side) (n 4) 2 (n 4) 2 25 + 55 135 + 55 125 + 55 BT-12 BT-12 BT-16 F5W/J59W/ F5BAL/F5F n = 2, 4, 6, 8 n = 4, 8, 12, 16 n = 4, 8, 12, 16 2 pcs.(different side, same side), 1 pc. D-F5W, J59W D-F5BAL D-F59F D-F5NTL 155 35 145 D-A3/A4/G39/K39 BS1-125 BS1-140 BS1-160 (n 4) 2 (n 2) 2 (n 4) 2 155 + 55 35 + 55 145 + 55 "n" pcs.

IDX-OM-Y002

Wiring of signal cable (operation / error / remote operation) . 3-5 3.2.6 Cooling water piping . 3-6 3.3 Cautions about Reinstallation . 3-7 Chapter 4 Operation/ Shutdown . 4-1 4.1 Check points before operation . 4-1 4.2 Operation . 4-1 4.3 Stop . 4-2 4.4 Cautions for re-start . 4-2 4.5 Check points before restart . 4-2 4.6 Cautions when the product is shut down for an extended period of

SMC CORPORATION OF JAPAN

Direct Programming .4-1 4.1 Block Availability . 4-1 4.2 Connecting Blocks . 4-1 4.2.1 To connect the blocks from the left block to right block. . 4-1 4.2.2 To connect the blocks from the right block to left block. . 4-2 4.3 Disconnect Two Blocks . 4-2 4.4 Methods to Create a Function Block . 4-3 4.4.1 New FB . 4-3 4.4.2 AddFB . 4-3 4.5 Function Block Editing . 4-3 4.5.1 Setup Function Block

Thermo-con

Contents 1 1 200 to 220 VAC 100 to 240 VAC 2 2 200 to 220 VAC 100 to 240 VAC PE 2 1 3 3 PE HRG HRS HRZ HRZD HRW HEC HEB HED Technical Data Related Products 2. Communication connector (RS-232C or RS-485) D-sub 9 pin (socket) Holding screw: M2.6 Signal contents 3 2 Pin No. RS-232C RS-485 5 4 1 1 Unused BUS+ 2 RD BUS 3 SD Unused 4 Unused Unused 5 SG SG 6-9 Unused Unused 9 8 7 6 3.

Air Cylinder Series MB

0.5 9.5 8.5 4.5 2 1 1.5 0 40 12 11 7 4.5 0 0.5 3.5 4 0.5 9.5 8.5 4.5 2 1 1.5 0 50 12.5 11.5 7.5 5 0 1 4 4.5 1 10 9 5 2.5 1.5 2 0 63 12.5 11.5 7.5 5 0 1 4 4.5 1 10 9 5 2.5 1.5 2 0 80 15.5 14.5 10.5 8 2.5 4 7 7.5 4 14 13 9 6.5 5.5 6 2.5 100 15.5 14.5 10.5 8 2.5 4 7 7.5 4 14 13 9 6.5 5.5 6 2.5 125 17.5 16.5 12.5 10 6 6 9 9.5 6 17.5 16.5 12.5 10 9 9.5 6 Types without air cushion have different

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Type (mm) 1in = 25.4mm PA3000 115 68 85 105 4-7 7.5 FLUID OUT 3/8 5.5 AIR SUP (P1) 1/4 FLUID OUT PROCESS PUMP P1 2 90 74.5 FLUID I N P2 44.5 3 AIR SUP (P2) 32 1/4 100 130 FLUID IN 3/8 PA5000 179 4-9 90 90 FLUID OUT 1/2, 3/4 AIR SUP (P1) 1/4 112 56 165 56 RESET PROCESS PUMP FLUID OUT 167 P1 132.5 FLUID I N 125.5 103.5 P2 58.5 48.5 202 114 3.5 3 AIR SUP (P2) FLUID IN 1/2, 3/4 1/4 10 Series

High Vacuum Angle Valve, XL Series

Table 1: Model, Fitting size, Orifice Solenoid valve model (fitting size) Orifice symbol (diameter) 1 (2) 4 (6) 3 (4.5) 2 (3) XSA1 XSA2 XSA3 2(1/4) 2(1/4) 2(1/4) 3(3/8) Table 3: Spacer part nos. Table 2: Voltage, Electrical entry, Electrical options Electrical entry D, T Model Part No.

Process Valve

(mm) Symbol 1 2 3 Note 2) Port size Rc 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz 1 2 3 Note 1) 4 Symbol Nil: Non-locking push type N.C. 1 MPa N.C. 0.5 MPa N.O. 1 MPa C.O. 1 MPa Note) 4 Note 2) A: Non-locking push type A (projecting) 1 6A 8A 10A 1 8 1 4 3 8 5 6 Note 2) 7 Valve size 1 to 4 7 Note 2) 11 15 11 10A 3 8 B: Slotted locking

VHK

(mm) M5 M5 4 4 Port size R Port size R 1 8 1 8 6 6 1 4 1 4 8 8 3 8 3 8 10 10 1 2 1 2 12 12 Flame Resistant Type (UL-94 Standard V-0 equivalent) 1(P): One-touch fitting 2(A): One-touch fitting 1(P): Male thread 2(A): Male thread 2(A) 2(A) Port size R Applicable tubing O.D. (mm) 1 8 1 4 3 8 1 2 1(P) 4 6 8 10 12 1(P) Applicable tubing O.D.

IDX-OM-X011

Wiring of signal cable (operation / error / remote operation) . 3-6 3.3 Cautions about Reinstallation . 3-7 Chapter 4 Operation/ Shutdown . 4-1 4.1 Check points before operation . 4-1 4.2 Operation . 4-1 4.3 Stop . 4-2 4.4 Cautions for re-start . 4-2 4.5 Check points before restart . 4-2 4.6 Cautions when the product is shut down for an extended period of time . 4-2 4.7 Signal output . 4-

CEx-OMG0106

Contents Chapter 1: Read Before Use 49 Chapter 2: General 2-1. Features 10 2-2. Position Control 11 2-3. Positioning at Cylinder Rod 11 2-4. Minimum Interval 11 Chapter 3: System Configuration 3-1. System Checking Flow Chart 1213 3-2. System Configuration 14 3-3. Pneumatic Circuit 1516 Chapter 4: Selection Method 4-1. Selection Procedure 17 4-2. Selection Information 1819 4-3.