IZ-OMU0031-CN

8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433-1993: 2) : 1. 2. 3. 1. 2. 3. 4

HRX-OM-R016

If foreign objects with a size of 20 m or more are likely to enter, install the particle filter. 6 Filter Rc1/2 20m Note FQ1011N-04-T020-B-X61 Note) The filter shown above cannot be directly connected to the thermo-chiller.

HRX-OM-O021

DO NOT k i id hi d l h b i d HRX-OM-O021 Chapter 1 Safety Instructions 1.3.4 Locations of Hazard Labels There are various warning labels on the product to show the potential hazards.

XL-OMV0002

8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433-1993: *2) 1. 2. 3. 2 XL-OMV0002 1. 2. 3. 4., / 1 1.5 *3) *3)1 1 () 3 XL-OMV0002 1.1 A6063SUS316LSUS304 FKM XLC-80,XLC-100,XLC-160 :Y-VAC2 60 XLC-16,XLC-25,XLC-40 0.3MPa0.5MPa XLC-50,XLC-63,XLC-80,XLC-100,XLC-160 0.4MPa0.5MPa 245250Hz 30m/s (/H0 H4 H5) 4 XL-OMV0002 510 O 0.1mm0.2mm Assy O 5 P11 O 6 (P12P14) 5 XL-OMV0002 2.2

High Vacuum L Type Valve

Step 6 Bolt b 3 Tightening torque of bolt b Nm 1 2 Valve Tightening 4 size torque Handle assembly XLH-16 0.7 -25 1.5 -40 2.5 -50 6 Tightening torque of bolt a Nm Bolt a Valve Tightening size torque Body All sizes 0.3 Cover Heater Tighten Bolt b in numerical order to assemble the Body and the Handle assembly with the valve opened a little in numerical order.

XMC/XYC Series

XMC Exterior dimensions C D L1 L2 Fn Fc C (Fc) (KF Flange) (CF Flange) J H B A G A Unit:mm Model A B C D Fn Fc G H J P.C.D L1 L2 XMC-16 40 110 38 1 30 34 17 40 26 P.C.D 27 6x4.4 XMC-25 50 120 48 1 40 26 39 28 XMC-40 65 171 66 2 55 70 41 63 36 P.C.D. 58.7 6x6.6 C D L1 L2 Fn Fd Fc C (Fc) (KF Flange) (K Flange) (CF Flange) H J K B A G A Unit:mm Model A B C D Fn Fc Fd G H J K P.C.D L1 L2 XMC-

XG_-OMV0028

11 27 13 12 9 2A 2 2B 2 12 18 2 7 - 3-4 2B2C A 16 17 12 18 2 8 9 13 B 11 9 10 17 A 16 12 18 2 2 O 3 19 12 27 12 14 27 15 12 12 3-5 2C2B OPENCLOSE 9 B 11 10 A 16 18 2 2 12B 11 9 27 13 12 14 27 15 9 B 11 12 13 2 19 3-6 2B 2A 2 18 12 9 2 21 23 3-7 20 22 24 8 8 - 4. 4-1.

CEU1

L 2 3 4 5 0 1 2 3 4 8 8 8 8-2 2 2 2 LCD ON OFF ON OFF A B (+) (-) (+) (-) (+) () (-) () 100ms LCD 100ms ON + 100ms ON A B (+) (-) () (-) () () () (-) LCD ON ON +ON ON A B () () () () () () () () [MODE] LCD SET LCD ROM ROM CPU RAM RAM CPU E ROM E ROM6.5 E ROM OUT 0.0 0.0 (100ms) MODESHIFTSET DATA No.SET MODE No.

MONOSASHI-KUN WITH BRAKE CONTROLLER

Resolution 0.1mm/pulse Accuracy 0.2mm Note 1) Output Type Open Collector (30V, 50mA) Output signal Phase A & B with Differential Output Max.

Rotary Actuator

If air pressure is applied from the B port side, the shaft rotates counterclockwise.

LOCK UP VALVE 3-PORTS

Spare Parts List 290301 Diaphragm Assy NBR 1 Part number Part name Material Quantity 29038 Diaphragm NBR 1 29063#1 Valve NBR 1 JIS B 2401, P3 O ring NBR 2 JIS B 2401, P7 O ring NBR 1 JIS B 2401, P10 O ring NBR 1 JIS B 2401, P34 O ring NBR 1 -9- #1 -9-10-10- Revision A Format change and content review B Drawing update 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249

Magnet Gripper

Width across flats Tightening torque for nut B (Nm) Holding force Adjustment bolt Nut A Nut B adjustment range Model Adjustment bolt Nut A Nut B MHM-16D1 2 10 6 1.5 5 MHM-25D1 3 14 8 5.2 5 MHM-32D1 3 14 8 5.2 5 MHM-50D1 5 24 17 42 5 15 - Caution 1. Do not apply external forces to the holding force adjusting part other than for the purpose of holding force adjustment.

HEAVY DUTY STOPPER CYLINDER

B Sealant tape Expose approx. 1 thread Figure-3 3-3.

IZ-OMK0015

They are all important notes for safety and must be followed in addition to ISO 4414*1, JIS B 8370*2 and other safety regulations. *1) ISO 4414: Pneumatic fluid power Recommendation for application of equipment to transmission and control systems * 2) JIS B 8370: Pneumatic fluid power General rules relating to systems Caution Operator error could result in injury or equipment damage.

Clean Gas Filter

MPa 0.1 MPa B IN 0.01 AM 0.7 MPa AMD A 0.001 AMH 0.5 MPa A B Model Connection SFA102-02 SFA202-02 SFA302-02 76 96 120 89 93 101 TSJ 1/4 Tube Swage Joint AME AMF 0.0001 1000 1 10 100 ZFC SFA103, SFA203, SFA303 Flow rate L/min (ANR) SF SF 2 x UOJ 1/4 SFA30 SFD 7 9.5 6.5 0.1 LLB B Inlet pressure IN 0.3 MPa AD Max. flow rate line Pressure drop MPa 0.1 MPa 0.01 GD A 0.7 MPa A B Model Connection

Clean Exhaust Filter

Hold the end of the tubing and insert it all the way in. 840 Clean Exhaust Filter SFE Series Dimensions SFE11 Gasket M5 9 4 25 SFE42/52/53/73 Dimensions (mm) C A Model A B C D SFE42 10 62 16.5 R1/8 SFE52 10 71 20.5 R1/8 SFE53 17 75 20.5 R1/4 SFE73 17 84 24 R1/4 D B SFE3A 4 13.5 59 SFE4B/5C/7D AN A C Dimensions (mm) AMC Model A B C SFE4B 6 73 16.5 SFE5C 8 84 20.5 SFE7D 10 94 24 B AMV AMP SFE

CJP

CJP B 15 H4 10 Rod end thread Pin cylinder B With thread Without thread Mounting Panel mounting Plug mounting B S Hose nipple (Applicable to panel mounting style) Bore size H4 H6 Tube size 4/2.5 Tube size 6/4 6 10 15 6mm 10mm 15mm Stroke (mm) 6, 10, 15 5, 10, 5 Specifications Single acting spring return Action Plug Mounting Style Panel Mounting Style 0.7MPa Max. operating pressure 6 0.2MPa

Dedicated Controller

(B contact) 3 wire GXL-N12FTB Switch specifications (SUNX Corporation) GXL-N12FT(B) Part no.

Switches

(B contact) Standard GXL-8FB 3 wire N.C. (B contact) Varying frequencies GXL-8FIB 2 wire N.O. (A contact) Standard GXL-8FU 2 wire N.C. (B contact) Standard GXL-8FUB Switch specifications (SUNX Corporation) GXL-8F(I)(B) GXL-8FU GXL-8FUB Part no.

Speed Controller: Standard Type Series AS Large Flow In-line Type 1

Description Material AS800 AS900 y u i JIS B 2401 P-7 JIS B 2401 P-7 AQ NBR O-ring u O-ring O-ring Spring NBR NBR Stainless steel JIS B 2401 P-12 JIS B 2401 G-50 14115 JIS B 2401 P-16 JIS B 2401 G-65 14124 JIS B 2401 P-48 JIS B 2401 P-38 NBR O-ring ASV i AK ASS Dimensions: AS420/500/600 Dimensions: AS800/900 ASR ASF 2-Port size 2-Port size Dimensions Dimensions L1 L2 L4 Min.