VDW

Model C [dm3/(sbar)] C [dm3/(sbar)] Av x 10-6 m2 Cv converted Cv converted b Cv b Cv N.O. N.C. 0.12 0.03 0.35 0.03 0.72 1 M5 1/8 (6A) 0.04 0.13 0.96 VDW200 0.52 0.04 1 0.31 0.08 0.45 0.09 1.9 1.6 0.52 0.16 0.52 0.16 3.8 2 1.8 1/8 (6A) 1/4 (8A) VDW300 0.13 0.38 1.0 3.1 0.28 0.52 0.30 0.50 0.12 6.7 3 1.5 0.44 0.49 0.46 11 4 17-2-75 16 Series VDW200/300 Construction VDW250 VDW350 i o !0 i !

ZFC Series

How to Order With bracket (standard) Air suction filter In-line type with One-touch fitting 100 04 B ZFC IN/OUT applicable tube O.D.

VDW Series

VDW 2 0 1 B 1 Series Lead wire length OUT (2) 1 2 3 10 20, 200 30, 300 300mm 600mm Nil L1 Note) Note) Type L1 is optional. (1) IN 2 port valve Voltage Type Note 1) Maximum operating pressure differential MPa (psi) 1 2 3 4 5 6 100VAC 200VAC 110VAC 220VAC 24VDC 12VDC Orifice size mm B C1 C2 20, 200 10, 30 300 Model Pressure port 2 Note 1) Pressure port 1 1 0.4 (58) 0.9 (130.5) VDW10 1.6 0.2

VFRA3000

51 (2.8) A, BEA, EB: 57.6 (3.2) [A, BEA, EB: 45 (2.5)] VFRA4311-04 3 8 VFRA4411-03 3 position exhaust center 1.2 1 8 PA, B: 51 (2.8) A, BEA, EB: 57.6 (3.2) [A, BEA, EB: 45 (2.5)] 1 2 VFRA4411-04 3 8 65 (3.6) [PA, B: 30.6 (1.7)] VFRA4511-03 3 position pressure center 1.2 1 8 VFRA4511-04 1 2 67 (3.7) [PA, B: 30.6 (1.7)] ( ): in case of normal position.

NCRAI seies

RIr-,rniTIi n"a I /'i\ v ' _ _ + _ (+) Elcrric Surue aboter D-FsBAUD-JsgW Il',A67 D-A64 D-A59W D-FsP, D.F7P, D-F7 PV D-F5PW D-F59, D-F79, O-F7NV t}F5NTL r+r B-6d Oulput @ I o Elack o L D-J51 r @ D-F59W D-F59F D-.J59, D"J79, Drr7gc, D-F7BV r l lf:r_ rlrtlH-r r-rad t l l l o{tsd OUT 1 output b Diagnoslic ouipul OUT D-472.O-472H D-480. D.A8OH fContu*-r box !

FSQ seies

4-dN through I-dO countelbore Widlh across llals: K B + Stroke With cancel cap/RSlODtl-:f f C ' Dimensions ol lhe model wilh a cancel cap are the same as those shown in the above drawings. s u ' Dirnensons lof lhe matimum energy absoption Fixed mounting l'reishtS9fieS RSQ ' D mere ons ohff than lhose sfswr in lli lab e beNalhe same 6lhedawinss below mm With locking mechanism M o d e l B N

10

A Applicable absorber B SR Dimensions RBC08C RBC10C RBC14C RBC20C RBC27C RJ08U 6.5 6.8 6 RJ10U 9 8.7 7.5 X RJ14U 12.5 12 10 16 18 20 RJ2015U 21 25 25 RJ2725U H B T 2 x D MM L Part no.

5.0 MPa Pilot Operated 2/3 Port Solenoid Valve & Check Valve Series VCH

m/s2 Note 2) Pressure [MPa] Impact/Vibration resistance Unrestricted Mounting orientation Mass Rated voltage Note 1) DC solenoid without a light/surge voltage suppressor Note 2) AC or DC solenoid with an indicator light: It will cause delays around 20 to 30 msec in the OFF response time. 1.9 kg 1.67 kg 12 VDC, 24 VDC, 100 VAC, 200 VAC (50/60 Hz) 10% of rated voltage DIN connector Class B

FEP Tubing (Fluoropolymer)

CAT.ES50-22 B FEP Tubing (Fluoropolymer) Inch size (Series TIH) is introduced. Heat resistance:200C It changes according to the operating pressure.

RSQ

B A Through-hole (Standard) Both ends tapped style RHC Note 1) Since 12 uses a common tube for both A and B, only B is used for part no. denotation.

Exhaust Cleaner for Clean Rooms AMP Series

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

Digital Flow Switch (Integrated display type)

The set values of auto-preset mode are calculated as follows Auto-preset set value Hysteresis mode Window comparator mode P_1 = A (A B)/4 H_1 = (A B)/2 (n_1 = B + P1L = B P1H = A H_1 = 5 digit 1 digit means the minimum set unit (In reversed output, P1L, P1H becomes n1L, n1H respectively) Set A B value 4 in reversed output mode) Refer to the list of output operations (page 26) for the setting

A B C D E(Option)Model Port size A B C D E(Option)Model Port size A B C D E(Option)Model Port size A B C D E(Option)Model Port size A B C D E(Option)Model Port

Port size A B C D E(Option)Model Port size A B C D E(Option)Model Port size A B C D E(Option)Model Port size A B C D E--Bracket dimensions----INA-11-4041 4, 3 8, 1 28017015

Port size A B C D E(Option)Model Port size A B C D E(Option)Model Port size A B C D E(Option)Model Port size A B C D EFG H JK--INA-11-4053/48518020

With Bracket, Gauge, 1/8" NPT Fitting $152.00 VMW-140-B-G-N02 With Bracket, Gauge, 1/4" NPT Fitting $154.00 VMW-140-B-G-N07 With Bracket, Gauge, 1/4" Push to Connect Fitting $71.00 VMW-140-B-G-N09 With Bracket, Gauge, 5/16" Push to Connect Fitting $71.00 VMW-140-G-N01 With Gauge, 1/8" NPT Fitting $151.00

With Bracket, Gauge, 1/8" NPT Fitting $152.00 VMW-140-B-G-N02 With Bracket, Gauge, 1/4" NPT Fitting $154.00 VMW-140-B-G-N07 With Bracket, Gauge, 1/4" Push to Connect Fitting $71.00 VMW-140-B-G-N09 With Bracket, Gauge, 5/16" Push to Connect Fitting $71.00 VMW-140-G-N01 With Gauge, 1/8" NPT Fitting $151.00

With Bracket, Gauge, 1/8" NPT Fitting $152.00 VMW-140-B-G-N02 With Bracket, Gauge, 1/4" NPT Fitting $154.00 VMW-140-B-G-N07 With Bracket, Gauge, 1/4" Push to Connect Fitting $71.00 VMW-140-B-G-N09 With Bracket, Gauge, 5/16" Push to Connect Fitting $71.00 VMW-140-G-N01 With Gauge, 1/8" NPT Fitting $151.00

With Bracket, Gauge, 1/8" NPT Fitting $152.00 VMW-140-B-G-N02 With Bracket, Gauge, 1/4" NPT Fitting $154.00 VMW-140-B-G-N07 With Bracket, Gauge, 1/4" Push to Connect Fitting $71.00 VMW-140-B-G-N09 With Bracket, Gauge, 5/16" Push to Connect Fitting $71.00 VMW-140-G-N01 With Gauge, 1/8" NPT Fitting $151.00

With Bracket, Gauge, 1/8" NPT Fitting $152.00 VMW-140-B-G-N02 With Bracket, Gauge, 1/4" NPT Fitting $154.00 VMW-140-B-G-N07 With Bracket, Gauge, 1/4" Push to Connect Fitting $71.00 VMW-140-B-G-N09 With Bracket, Gauge, 5/16" Push to Connect Fitting $71.00 VMW-140-G-N01 With Gauge, 1/8" NPT Fitting $151.00