Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 5 Port/Base Mounted Common SUP Common EXH, Stations: 20 Stations, A B Port Size: 5/32" One-touch Fitting NPTF, P R Port Thread: -

Process Pump Series PA3000/5000/PAX1000 Series PB1000

10 0 0 10 30 40 50 20 60 10 20 Discharge rate l/min Discharge rate l/min 1m = 3.28ft 1l/min = 0.035SCFM Selection from flow rate characteristic graphs (PA3000) Required specification example: 3.

20

VMG1-08-250-100 VMG1-08-300-100 VMG1-08-350-100 VMG1-08-250-150 VMG1-08-300-150 VMG1-08-350-150 VMG1-08-250-300 VMG1-08-300-300 VMG1-08-350-300 VMG1-08-250-600 VMG1-08-300-600 VMG1-08-350-600 Nozzle size 2.5 3 3.5 2.5 3 3.5 2.5 3 3.5 2.5 3 3.5 01 02 03 04 05 06 07 11 12 13 21 22 23 24 31 32 33 34 35 36 37 38 41 42 43 44 45 46 47 48 49 50 51 52 23.4 23 22.5 22.1 22 Nozzle length: 100 mm 98

With Factory Installed

O~ 0.2 0.3 04 05 0.6 O~ 08 09 00 1000 2000 Auto drain Flow rate /min (ANR) Inlet pressure MPa (Float type normally open) AW4001-04 AW4001 -04 OOrain line should be Bmm or more and should be less than Sm. Be sure not to have any upward turns in the drain line which would prevent drainage. -0.25 H---''t' .:c ' +-+-t---+--r--.

Table of Contents

(mm) Proper tightening torque (Nm) Cylinder stroke (mm) Model 5 10 15 20 25 30 40 50 6, 10 16 20, 25 32 M3 M4 M5 M6 1.08 10% 2.45 10% 5.10 10% 8.04 10% 22 (27) 25 (35) 28 (38) 31 (41) 34 (44) 37 (47) C(D)U6-D 36 (41) 40 (50) 44 (54) 48 (58) 52 (62) 56 (66) C(D)U10-D 50 (75) 56 (86) 62 (92) 68 (98) 74 (104) 80 (110) C(D)U16-D 95 (128) 106 (143) 117 (154) 128 (165) 139 (176) 150 (187)

One-touch Fittings

KQ2W06-03GS1 17 10.4 9.7 12 10 15.5 35.7 35.8 13.3 10.9 8.6 4.5 47.4 D2 A L2 1/8 KQ2W08-01GS 10 13.2 13 10 16.4 32.4 35.9 14.2 10.9 10.9 4.5 12.2 1/8 *3 KQ2W08-01GQS 12 13.2 13 12 17.2 42.4 45.9 14.2 20.5 14.2 6 23.7 V H 8 1/4 KQ2W08-02GS 14 13.2 13 12 17.2 39.1 41 14.2 20.5 14.2 6 40 V 3/8 KQ2W08-03GS 17 13.2 13 12 17.2 39.2 40.7 14.2 20.5 14.2 6 47 V 10 1/4 KQ2W10-02GS 17 15.9 15.6

Compact Manifold Regulator Series ARM5

Option: Pressure gauge G15-10-01 How to Order NARM2000-4A2-N01G G15 P10 01 Symbol Units Nil MPa P PSI Common IN Individual IN IN M5 x 0.8 .39 (10) Max. pressure indication 10 150PSI (1.0MPa) .59 (15) IN OUT OUT *Pressure gauge for 30psig (0.2MPa) is not available.

Compact Vacuum Unit

Supply from one side 8 10 10 M5 x 0.8 Supply from both sides 10 12 12 Note) These values are obtained under the standard supply pressure.

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

Tubing size Symbol 03 04 03 04 05 06 07 06 08 10 07 11 10 12 11 13 12 13 19 Body class Tubing O.D. 1/8", 3 4 1/8" 4 3/16" 6 1/4" 6 8 10 1/4" 3/8" 10 12 3/8" 1/2" 12 1/2" 3/4", 19 Body class 1 Symbol 1 2 3 4 5 Body class 1 2 3 4 5 Type of part Symbol U B N Type of part Nut & Insert bushing Insert bushing Nut 2 3 4 5 505 Applicable Fluids Material and fluid compatibility check list for High

2/3 Port Valve for Various

VXA223 VXA224 VXA225 VXA226 VXA226 0.5 1.0 1.0 170 0.5 1.0 0.6 0.2 0.1 1.0 0.6 0.2 0.1 0.1 4.5 15 0.61 2.5 10.45 0.75 1 4 250 (8A) 26 41 46 15 26 41 58 58 1.1 1.7 1.9 0.61 1.1 1.7 2.4 2.4 3.3 6.4 8.8 2.5 3.3 6.4 11 11 0.50 0.40 0.40 0.45 0.50 0.40 0.38 0.38 1.1 1.8 2.3 0.75 1.1 1.8 2.8 2.8 6 8 1.5 0.4 340 10 4.5 6 8 250 1.0 3 8 (10A) 340 0.4 10 10 1 2 (15A) 420 Note) Refer to Glossary on

CM2

8 75 60 4 7 18 13 37 34 8 62 15.5 13 26 30 5 8 28 5 M8 x 1.25 15 24 M20 x 1.5 1/8 116 20 0 0.033 25 45 8 75 60 4 7 22 13 41 40 10 62 19.5 17 32 37 6 8 33.5 5.5 M10 x 1.25 15 30 M26 x 1.5 120 1/8 26 0 0.033 32 45 8 75 60 4 7 22 13 41 40 12 64 19.5 17 32 37 6 8 37.5 5.5 M10 x 1.25 15 34.5 M26 x 1.5 122 1/8 26 0 0.039 40 50 11 82 36 66 5 7 24 16 45 52 14 88 21 22 41 47.3 8 10 46.5 7 M14

Soft Start-up Valve

of the rated voltage 12 V 10% of the rated voltage 100 V 10% of the rated voltage 110 V*1 [115 V] 10% of the rated voltage [15% to +5% of the rated voltage] 200 V 10% of the rated voltage 220 V*1 Allowable voltage fluctuation AC [230 V] 10% of the rated voltage [15% to +5% of the rated voltage] Power consumption [W] DC 0.35 (With light: 0.4) 0.35 (With light: 0.45) 100 V 0.78 (With light

Soft Start-up Valve

of the rated voltage 12 V 10% of the rated voltage 100 V 10% of the rated voltage 110 V*1 [115 V] 10% of the rated voltage [15% to +5% of the rated voltage] 200 V 10% of the rated voltage 220 V*1 Allowable voltage fluctuation AC [230 V] 10% of the rated voltage [15% to +5% of the rated voltage] Power consumption [W] DC 0.35 (With light: 0.4) 0.35 (With light: 0.45) 100 V 0.78 (With light

Flame Resistant (Equivalent to UL-94 Standard V-0) Speed Controller with One-touch Fittings Elbow Type AS Series

x 0.8 13.2 6 19 17 31 23.9 13.4 15.2 R 1/8 8 21 18.5 32.4 36.4 31.4 33.3 28.3 25.3 12 10 14.2 18.5 10 23 21 39.2 15.2 32.1 13.2 6 34 17 34.4 25.2 17.7 15.2 17 8 36 12 18.5 36.4 41.1 36.1 35.6 30.6 27.2 18.5 18.5 10 38 21 18.3 44.5 35.3 13.2 6 R 1/4 63 17 39.3 27.8 15.2 8 65 18.5 41 29.5 21.3 49.9 44.9 44.4 39.4 18.5 10 67 21 43.1 31.5 20.9 12 69 22 44.3 32.8 19 14 23 13.2 6 58 17 39.3 27.8

NCQ2/CQ2

Basic Style CQ2 NCQ2 CQ2 NCQ2 A B Bore size (mm) 5 st 36.5 39 41 42.5 H1 C C F K M D S V E H L N O U 10 st 38 40.5 41.5 42.5 5 st 33 35.5 36.5 37.5 10 st 41.5 44 46 47.5 inch 12 16 20 25 #8-32UNC #8-32UNC #10-32UNF 1/4-28UNF 6 8 7 12 5.4 5.4 7 10 6 8 10 12 32 38 47 52 6.5 5.5 5.5 5.5 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 5 6 8 10 3.5 3.5 4.5 5 22 28 36 40 3.5 3.5 5.5 5.5 6.5 depth 3.5 6.5 depth

CM2

8 32 41 32 52 20 36 20 33.5 M10 X 1.25 19.5 17 32 6 M26 X 1.5 15 5.5 30 10 22 9 13 10 8 40 45 40 60 25 40 26 34.5 37.5 M10 X 1.25 19.5 17 32 6 M26 X 1.5 15 5.5 12 22 9 13 10 8 40 45 40 60 32 40 26 21 M14 X 1.5 21.5 M32 X 2 44.5 42.5 46.5 22 41 8 7 14 24 10 16 11 11 53 50 53 77 40 32 Dimensions by stroke Boss-cut Built-in One-touch fitting (mm) (mm) Stroke Stroke 1 to 50 51 to 100 101 to

CQ2

A A1 L1 MM RR1 U1 NZ L A1 MM U1 L1 E1 10 12 16 20 22 28 38 44 +0.048 0 5 6.4 8 10 18 22 28 32 0.2 0.4 0.1 0.3 0.2 0.4 0.2 0.4 0.3 0.5 0.3 0.5 0.3 0.5 0.3 0.5 +0.048 0 5 6.5 8 10 18 22 28 32 21.5 28 34 41 42 56 71 79 10 21.5 32 34 41 42 56 71 79 6 8 8.5 10.5 14 18 21 21 16 25 25 30 30 40 50 55 M5 X 0.8 M6 X 1 6.3 8.1 10.3 12.8 12 16 21 24 7 14 11.5 14 14 20 27 31 6 11 8.5 16

Pressure Relief 3 Port Valve With Locking Holes

44 63 43 5.5 26 10 4.2 VHS5510 3/4, 1 1/2 134.3 53 90 76 26 76 61 53 81 50 6.5 31 12 4.2 Model Optional Specifications With bracket Built-in silencer N Q R S T U V W X Y AA BB VHS2510 5.4 8.4 27 40 75.4 31.3 25.3 53.3 30 2.3 3 12 VHS3510 6.5 10 36.5 53 90.9 40 33 67 41 2.3 3 14 VHS4510 8.5 19 43.5 70 119.4 53 44 79 50 2.8 3 19 VHS4510-06 8.5 19 43.5 70 123.4 55 46 79 50 2.8 4 22 VHS5510

VXA21/22

11 0.50 0.40 0.40 0.45 0.50 0.40 0.38 0.38 1.1 1.8 2.3 0.75 1.1 1.8 2.8 2.8 6 8 1.5 0.4 340 10 4.5 6 8 250 1.0 3 8 (10A) 340 0.4 10 10 1 2 (15A) 420 Note) Refer to Glossary on page 17-3-15 for details of max. operating pressure differential and max. system pressure.

asilltr

(Applicable to all models) (Ex.)A731 D-A731 Ac ces s sorie sl Part s Li st 056 (e^6) 075 (3/4) 106 0n/16) 150 (1-1/2') 2OO (2') 25O (2-1t2',) 300 (3') 400 (4"' Jam Nd JM.O1 JM-02 JM-03 JM.O4 JM.O5 JM-05 JM-08 JM-10 Single Rod Clevis RCS-015 BCS-02 RCS-03 RCS-04 HCS-o5 RCS-05 RCS-08 RCS-10 Double Rod Clevis RDS-o15 RDS-02 RDS-03 RDS-04 RDS-05 RDS{5 RDS.08 RDS-10 w/ dn(l). rcteinino rin6{21