Refer to page 5-11-4.) 2 position double 3 position exhaust center Not required Lubrication (2) Mounting orientation Free 300/50 Impact/Vibration resistance (m/s2) (3) Note 1) In case of single type, be certain that supply pressure within operating pressure range be supplied to supply port, because return pressure is introduced from supply port 1(P) for activation.
(For details, refer to "Specific Product Precautions 1" on Page 11.)
-X 20Data Table (1) 100 Total operation cycles (10,000) 50 40 30 20 10 100 200 300 400 500 700 1000 Stroke (mm) Inner Cover Holding Screw Tightening Torques [Nm] Tightening torque Model Screw size CYV15 0.3 M3 x 0.5 CYV32 2.45 M6 x 1 Plate Stroke adjustment screw (inner cover) Hexagon wrench Inner cover holding screw direction + direction 8-18-11
Copper, fluorine and silicone-free + Low particulate generation Action 21 22 Relief type Vacuum suction type D Double acting Rod end thread Nil M Standard (Rod end female thread) Rod end male thread Model Model Bore size (mm) Port size Relief port Action Standard stroke (mm) 10-/21-CQSB12 10-/21-CQSB16 10-/21-CQSB20 10-/21-CQSB25 11-/22-CQSB12 11-/22-CQSB16 11-/22-CQSB20 11-/22-CQSB25 12
RSH20, 32 Graphq Graphw 1.0 RSH32 RSH32 RSH32 Bore size 50, 63, 80/ m =0 Bore size 50, 63, 80/ m =0.1 RSH20 RSH20 RSH20 0.9 Operating pressure : P (MPa) 1300 1300 0.8 80 0.7 1200 1200 0.6 1100 1100 0.5 1000 1000 0.4 900 900 0.3 63 80 800 800 0.2 50 Weight : W (kg) Weight : W (kg) 700 700 0.1 600 600 100 200 300 400 500 0 63 500 500 Lateral load: W (N) 50 400 400 RSH50, 63, 80 300 300 1.0
Lights up during remote operation. 11 Changing pressure unit Pressure unit can be changed. MPa PSI t [RUN] lamp Lights up when the product is started, and goes off when it is stopped.
(In locations where strong electric fields, strong magnetic fields and surge voltage occur.) 11. In locations where static electricity occurs, or conditions which make the product discharge static electricity. 12. In locations where high frequency occurs. 13. In locations where damage is likely to occur due to lightning. 14.
Output specification Port size: (inch) Symbol Nil 1 2 Specification Series PF2D300 Series PF2D200/300 Series PF2D300 Applicable display unit (monitor) model 11 13 19 3/8 1/2 3/4 PF2D504 PF2D520 PF2D540 Output for display unit Output for display unit + analog output (1 to 5 V) Output for display unit + analog output (4 to 20 mA) Specifications for Sensor Unit Model PF2D504 PF2D520 PF2D540
/301 11 13 19 3/8 1/2 3/4 PF2D504 PF2D520 PF2D540 Specifications for Sensor Unit Model PF2D504 PF2D520 PF2D540 Measured fluid Liquid not to corrode nor erode deionized water and/or Teflon.
For LEFSH25RH-300, enter "LEFS25RH-300" and select LEFS25RH-300. For clean type (11-) or secondary battery (25A-) type actuator Search without entering 11or 25A-, and select the actuator for which the part number after 11or 25Amatches. e.g.) For 11-LEFSH16A-100BR, enter "LEFS16A-100" and select LEFS16A-100.
Grommet: G Conduit: C 300 V D D F Q F Q 280 300 VC Class H coil Broken line section C C G1/2 R R VDW VQ E E VX2 A H A H B B 2-P Port size 2-P Port size VX 2-M, thread depth N 2-M, thread depth N Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VX3 L L VXA K K VN
Standard Products IDFAE Series Air flow capacity (m3/h [ANR]) Outlet air pressure dew point Rated inlet condition Page Model Refrigerant Port size 3C 7C 10C IDFA3E 12 15 17 Rc 3/8 IDFA4E 24 31 34 Rc 1/2 IDFA6E 36 46 50 P. 92 to 94 R134a (HFC) IDFA8E 65 83 91 Rc 3/4 IDFA11E 80 101 112 35C 0.7 MPa IDFA15E1 120 152 168 Rc 1 IDFA22E 182 231 254 R 1 IDFA37E R 11/2 273 347 382 P. 95 to 97 R407C
Suction cover 1 9 PVF Sound absorbing material B ZL112-SP01 Front cover Without valve 2 10 PVF Sound absorbing material A (set no. for 9, 10 &11) End cover 3 11 PE Suction filter Body When ordering a vacuum pressure gauge or a digital vacuum pressure switch separately, use the part numbers shown in the option specifications on pages 5 & 6. 4 Vacuum sensor unit 5 Nozzle 6 Diffuser 7 Detent
Refer to LECYM Operation Manual,section 3.3.1. and 3.3.2. 11 - 2.3.1 I/O Signal (CN1) Names and Functions The following table shows the names and functions of I/O signals (CN1). (1) Input Signals Signal Pin No.
) () a b P1P2 2(A) 1(P) -13No.VEX-OMY0001 (7) (1) (2) (3) (4) (5) (6) (12) (7) (8) () (9) (5) (6) (14) (10) (P2) (5) (4) (11) (4) (13) DCAC (7) 14 No.VEX-OMY0001 o. (1) (2) (3) (4) (5) 1 ISO VG 32 (6) (7) (8) (9) (10) (11) (12) () (13) (14) ()() 15 No.VEX-OMY0001 C 2020.6 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81
Supply pressure (MPa) Suction flow (l /min (ANR)) 13-3-11 11 Series ZR Ejector exhaust Ejector supply P port Vacuum pad connection V port Ejector Unit Nozzle Dia./1.0, 1.3, 1.5, 1.8, 2.0 mm Circuit diagram 2 2 Adapter B Silencer Ejector indication Nozzle dia./1.0, 1.3, 1.5 mm ZR1-W 1 10 13 15 2 Ejector 1 1 1 1 (Mounting hole) 1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San
RQ MU DSpecifications Dimensions -X 11 3.5 The specifications are the same as those for the standard double acting type.
The tightening torque should be approximately 0.05 to 0.1 Nm. 8-17-11 11 Series CYP Specific Product Precautions 1 Be sure to read before handing. Operation Handling Caution Caution 1. Open the inner package of the double packaged clean series inside a clean room or other clean environment. 2.
Since M1 & M3 are not generated, review is unnecessary. = 0.96 [Nm] 2 = M2/M2 max = 0.96/4 = 0.24 M Guide shaft mounting surface L1 B We = 5 x 103 m g U = 5 x 103 1 9.8 300 = 14.7 [N] Me3 = 1/3 We (L2 + A) 103 3.
Since M1 & M3 are not generated, review is unnecessary. = 0.96 [Nm] 2 = M2/M2 max = 0.96/4 = 0.24 M Guide shaft mounting surface L1 B We = 5 x 103 m g U = 5 x 103 1 9.8 300 = 14.7 [N] Me3 = 1/3 We (L2 + A) 103 3.