Speed Controller with

Applicable model D5 L9 L10 L11 L12 L13 L14 L15 L16 L17 t1 AS-10L AS1002F3.4 14.8 18.3 11 27.5 19.5 3.4 4.9 7.3 12 1 AS-20L AS2002F 15.6 19.6 12.6 29 21 1.2 AS-25L AS2052F 4.5 19.6 24.6 17 38 28 4.5 6.5 9.5 15.5 AS-30L AS3002F 24.8 29.8 22 43 33 1.4 AS-40L AS4002F 25.7 30.7 28 49 39 3.5 18.2 23.2 11 3.5 18 11.3 1.6 AS-20D AS2002F 18.6 23.6 12.6 19.6 AS-25D AS2052F 4.5 4.4 22 27 17 4.4 25.8

Stroke Reading Cylinder and Counter

Cylinder Stroke Standard Stroke (mm) Bore size (mm) Manufacturable stroke range 25 50 100 75 125 150 175 200 250 300 400 500 12 25 to 150 20 25 to 300 32 25 to 400 40 25 to 600 50 25 to 600 63 25 to 600 The reading cylinder with a scraper is available as a special order.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Shock absorber model Applicable bore (mm) CLS ML1-A25H ML1-A32H ML1-A40H ML1C25 ML1C32 ML1C40 RB1412 101 90 25 20 11 72 67.3 12 31 39.5 Max. 16.5 4.5 3 120 107 30 25 16 93 73.2 15 38 49 Max. 20 5.5 6 CLQ RB2015 147 129 30 31 16 105.5 73.2 15 40.5 54.5 Max. 25 5.5 6 MLGP Side Support RLQ Side support A MLU ML1C D-X 20Data Side support B A B C D E F G H J Part no.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Shock absorber model Applicable bore (mm) CLS ML1-A25H ML1-A32H ML1-A40H ML1C25 ML1C32 ML1C40 101 90 25 20 11 72 67.3 12 31 39.5 Max. 16.5 4.5 3 RB1412 120 107 30 25 16 93 73.2 15 38 49 Max. 20 5.5 6 CLQ RB2015 147 129 30 31 16 105.5 73.2 15 40.5 54.5 Max. 25 5.5 6 MLGP Side Support RLQ Side support A MLU ML1C D-X 20Data Side support B A B C D E F G H J Part no.

Series MXP Precision Air Slide Table

MXP-AD12-25 MXP16-20 MXP-AD10-20 Non-rotating accuracy MXP16-30 MXP-AD12-25 Radial clearance Note) MXP16-20 and MXP10-20 are common.

7.4

Possible to drive cylinders: Up to 25 (300 mm/s) Base Mounted For details, refer to page 741. Power consumption: 0.35 W Flow rate characteristics C [dm3/(sbar)]: 0.39 Added 3-position closed center.

LEKF-OMZ0035

Slider type LEKFS series . 7 2.1 Specification . 7 2.2 How to Order . 9 2.3 Construction . 11 3.

Digital Flow Switches Series PF2A

Note 6) This product conforms to the CE mark. 4 Series PF2A Flow Characteristics (Pressure Loss) PF2A710, 510 PF2A750, 550 PF2A711, 511 3.0 1.0 10 2.5 0.8 8 Pressure loss (kPa) Pressure loss (kPa) Pressure loss (kPa) 2.0 6 0.6 1.5 0.4 4 1.0 0.2 2 0.5 5 2.5 7.5 0 100 10 25 50 75 0 5 10 15 20 25 30 40 35 45 50 0 1 10 Flow rate (l/min) Flow rate (l/min) Flow rate (l/min) PF2A751, 551 PF2A721

Process Pump

50 75 125 Purge air flow rate (L/min (ANR)) Note 3) Inlet air pressure (MPa) 0.7 Inlet air temperature (C) Inlet air saturation temperature (C) Ambient temperature (C) Dew point indicator purge air flow rate Port size (Nominal size B) 25 25 25 1 L/min (ANR) Note 1) No freezing Note 2) ANR represents the flow rate converted to the value under 20C at atmospheric pressure.

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

13.2 12 4.3 7.8 13 16 53.4 7.6 17.2 49 47.6 17 22.5 12 16.1 17 21.5 24 7.8 16.2 16.4 AS2052FS-09 5/16" 15.2 13.5 57.2 8.5 18.1 49.9 48.5 19 18.4 AS3002FS-07 1/4" 13.2 12 4.5 8 16.6 20 59 9.8 21.7 55.7 54.3 21.8 25 12 20.5 17 24.5 28.5 9.3 19.2 23.6 AS3002FS-09 5/16" 15.2 13.5 65 19 26 AS3002FS-11 3/8" 18.5 16 69.8 21 38.1 AS4002FS-11 3/8" 18.5 16 4.3 8 18.8 26 76.9 11.3 23.7 64.3 62.7

Ionizer Nozzle type IZN10 Series IZS

Refer to Cautions when using the IZN10-11(female threads for piping) on page 448.

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

) AS22l1FSl-U02-11 3/8" 15.5 26.4 35.5 (35.8) 15.6 25 (26) AS32l1FSl-U02-07 1/4" 3/8 19 11.2 16.6 21.8 32.1 36.4 63.1 61.7 57.9 56.5 13.3 24.5 28.5 9.3 19.2 47 (48) AS32l1FSl-U02-09 5/16" 13.2 22.7 33 14.2 AS32l1FSl-U02-11 3/8" 15.5 26.7 37 35.9 15.6 48 (49) AS32l1FSl-U03-07 1/4" 3/8 19 11.2 16.6 21.8 32.1 28.7 55.4 54 50.2 48.8 13.3 24.5 28.5 9.3 19.2 36 (37) AS32l1FSl-U03-09 5/16" 13.2

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

DO Without connector Do not replace V111 (G, H, L, M, W) to V115 (DIN terminal) and vice versa when replacing pilot valve assembly only. 18 Series SYJ500 Body Ported [ ] for AC Grommet (G), (H): SYJ52G H -M5 With bracket: SYJ52G H -M5-F G: Approx. 300 H: Approx. 600 (Lead wire length) 55.6 [57.8] 37 M5 x 0.8 (A port) 33.5 2-3.5 (For mounting) 30 3.5 15.5 2.5 15 11 A 18 25 + Manual override

ZL3-OM00801

N.C. 24 No.ZL3-OM00801-A 11. ,, 11.1 25 No.ZL3-OM00801-A 11.2 11.3 (V),0, Pmax () (P1 Q1 ) (Qmax) 0() , 1L ZL3H ,-90kPa ,4.0 ,Pmax Qmax , 26 No.ZL3-OM00801-A 12. 12.1 12.2 0 27 No.ZL3-OM00801-A 13.

5 Port Air Operated Valve

25 25 25 1/4, 3/8 [1 (P), 5 (EA), 3 (EB) port] 43 43 81 81 3 position closed center/exhaust center/pressure center VFA3 40(-P) 02 03 3 4 5 33 28 1/4, 3/8 [4 (A), 2 (B) port] 13 22 1/8 (Pilot port: Upward) 46 81 1 36 20 4A 2B 26.4 35 42 B A 3EB 1P 5EA 2 x 4.3 (For mounting) 8.5 97 1/8 [Pilot port: Lateral (-P)] 64.5 Breathing hole 27 22 13 1/4, 3/8 [1 (P), 5 (EA), 3 (EB) port] 25 25 43 81

3 Port Air Operated Valve

Applicable manifold base model VP300-25-1A VV3PA3 Blanking plate assembly (With a gasket and two mounting bolts) VP700-25-1A VV3PA7 VP500-25-1A VV3PA5 1569 VPA300/500/700 Series How to Order Valve (With a gasket and two mounting bolts) VPA 3 4 4 1 A Type of actuation A B N.C. (Normally closed) N.O.

ITV0000

(For details, refer to "Specific Product Precautions 1" on Page 11.) 26.5 Bushing assembly 2.7 Note) For dimensions of the cable connector, refer to single unit on page 6. 7 Compact Electro-pneumatic Regulator Series ITV0 Dimensions Manifolds 20 40 20 40 4-M3 x 0.5 thread depth 3 Mounting hole 11 11 L2 Port position L1 25 No. 9.5 9.5 z x c 1 3 5 ITV00 EXH SUP OUT ITV009 PWR PWR PWR PWR ATM

AC Servo Motor Driver (Pulse input type)

Driver Servo amplifier 24VDC (Note 4, 12) Controller (Note 7) Positioning module CN1 QD75D (Note 7) 21 DICOM CN1 (Note 2) Trouble (Note 6) 20 46 DICOM 48 ALM RA1 14 13 Zero speed detection CLEARCOM DOCOM 23 ZSP CLEAR CR 41 RA2 (Note 12) Limiting torque RDYCOM 12 25 TLC RA3 READY 11 RD PP PG NP NG 49 10 11 35 In-position 24 INP 15 16 RA4 PULSE F PULSE F 10m max. 17 PULSE R PULSE R 18 36 4

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

Material Note PBT PBT Description Body A Body B Needle Seat ring Spring U seal Cassette Seal O-ring O-ring O-ring O-ring Gasket 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 1 2 3 4 5 6 7 8 9 10 11 12 13 14 Body A Elbow body Body B Needle Seat ring Spring U seal Cassette Seal O-ring O-ring O-ring O-ring O-ring Electroless nickel plated Electroless nickel plated Electroless nickel plated Brass

Shot Pin Cylinder

View A-A 50 100 (119.3) 11 0.1 11 0.1 30 0.03 4 surfaces 2 x 9 4 surfaces 2 x 6 F7 11 0.1 11 0.1 40 0.05 45 10 15 Coil scraper 68.5 55 127 + Stroke 45 0.03 95 9.5 26.5 A A 11 30 M12 connector (4 pin) 109 Protective plate 132.5 2 x 8 F7 depth 16 90 9.5 13.5 10.5 4 x M10 depth 16 (Helisert) 45 G, NPT1/4 (Max. 69) 10 5 CKZP71-m Rod extended 16.1 80 40 115 + Stroke 60 + Stroke 0.05 35.8 36 1