2/3 Port Valve

55 63 74 1 4 1 2 1 1 2 VND50D-32A VND60D-40A VND70D-50A Flange/32F, 40F, 50F Port size VX VN VQ Model Pilot port Rc(PT) Applicable flange A B C D E F G H J 8 10 12 50 40 32 1 8 1 4 1 4 130 150 180 211.5 227 251 135 140 155 135 147 163.5 20 24 24 100 105 120 36 42 54 12 12 14 VND50D-32F VND60D-40F VND70D-50F 4.2-41 VND Precautions Be sure to read before handling.

CE

6-2 5,6, 12 5 5,12 10 ?

HRX-OM-W032

PV SV HRS Series 5.21 Communication Function 5-75 HRX-OM-W032 Chapter 5 Display and Setting of Various Functions 30. Perform setting for the contact input signal 1 with [] key or [] key, and press [SEL] key to enter.

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

Series MXP/MXPJ6 11226, 10, 12, 16 Air Slide Table How to Order Clean series 11 Vacuum suction type MXP 11 12 15 M9N MXP 22 12 15 M9N Copper, fluorine and silicone-free + Low particle generation Number of auto switches Nil S n 2 pcs. 1 pc. n pcs. 22 Vacuum suction type Bore size Stroke (mm) Auto switch 6 10 12 16 5, 10 10, 20 15, 25 20, 30 Nil Without auto switch Refer to the table below

WRF100

15 60 108 15 80 600.05 +0.015 0 2 x 8H7( ) depth 12 (2 x 4 x M5 x 0.8 through) For limit switch mounting C B A0.5 55 55 1000.3 Switch mounting bracket Note 2) 12 70 12 Fulcrum 13 40 15 10 F 2 x 4 x M10 x 1.5 depth 12 107 Note 3) 70 2 x 2 x 8H7 +0.015 0 ( ) depth 12 60 1 52 (58.7) (70) 95 700.05 85 75 330 270 0.3 193 (173) 133 25 100 100 (10) Rc1/ 4 Unclamp side port 306 (30.2) (30.2) 360

Digital Flow Switch Series PFA For Air Series PFW For Water

PFA7--27(-M) FLOW SWITCH UP 34 54 44 SET Brown OUT1 OUT2 DOWN FOR AIR Main circuit OUT1 Black + 12 to 24VDC LED Green 24 2-Port size OUT2 Load White Load 4-4.5 40 50 LED Red Blue PFA7--67(-M) (41.5) Brown Load Load Black LED Green + OUT1 12 to 24VDC Analog output White LED Red Blue PFA71--28(-M) 42 Brown 4 OUT1 Black + 2-3.4 12 to 24VDC LED Green 43 Analog output Load White Load Flow

Series KV2 Fittings

(g) Bag/Box Quantity L 5/32 1/4 3/8 1/2 5/8 5/32 1/4 3/8 1/2 5/8 KV2E03-00 KV2E07-00 KV2E11-00 KV2E13-00 KV2E15-00 1/2-20 9/16-18 7/8-14 1-12 1 1/8-12 17.46 17.46 25.40 28.57 33.33 32.1 34.1 42.1 44.1 50.0 16 17 21 22 25 16 17 21 22 25 13.5 15.0 23.0 26.0 29.0 1.6 3.5 5.4 8.5 9.8 32 30 87 117 191 100/400 100/400 100/100 100/100 50/50 Female Bulkhead Connector KV2E_ _-_ _ L1 L2 M Thread H1

Soft Start-up Valve

Without light SY100-61-1 With light Rated voltage Voltage symbol Part number 24 VDC 24 V SY100-61-3-05 12 VDC 12 V SY100-61-3-06 100 VAC 100 V SY100-61-2-01 200 VAC 200 V SY100-61-2-02 110 VAC 110 V SY100-61-2-03 220 VAC 220 V SY100-61-2-04 Without light SY100-82-1 Caution With light Rated voltage Voltage symbol Part number 24 VDC 24 VN SY100-82-3-05 12 VDC 12 VN SY100-82-3-06 100

EXxx-OMW0014CN

. 12.1. . 12-1 . 12-1 EX245-EA2-1 . 11-1 EX245-SPN1A/SPN2A/SPN3A n 0 1 2 3 4 5 6 7 8 L 113.6 167.6 221.6 275.6 329.6 383.6 437.6 491.6 545.6 L = 54n + 113.6(8 ) mm 80 No.EX-OMW0014CN-A 13. 13.1.

OMR0032

(1.25 10-3) = 9600 [pulses/s] Acceleration time: 12 120 = 100 [ms] Deceleration time: 12 60 = 200 [ms) 63 - Step Data setting example I/O output setting example Load mass Signal name Description Value Step No.

5 Port Air Operated Valve

(-F)(-P) VFA1220-01(-F)(-P) (16.6) (16.6) (Distance between ports) (Distance between ports) 38 1/8 [4 (A), 2 (B) port] 12 11.5 1/8 [4 (A), 2 (B) port] (4) 26.4 5 5 B 2 B 2 26.4 12 12 1/8 (Pilot port: Upward) 1/8 (Pilot port: Upward) 4 A 4 A 5 (1.6) 11.5 45.5 (6) 40.5 55.5 1502 VFA1000/3000/5000 Series 5 Port Air Operated Valve Body Ported/Single Unit Dimensions: VFA3000 Series/Body Ported

70pvpump

PAP: Clean room LVH Note 1) 1 to 12 l for 3/8" tubing type. Note 2) The above values are for a normal temperature and using clean water. LVD Refer to the separate pamphlet P-E00-5A for further details.

IDX-OM-U010

Option V . 12-1 12.1 SAFETY INSTRUCTIONS FOR USE . 12-1 12.2 SPECIFICATIONS . 12-1 12.3 MAINTENANCE . 12-2 Chapter 13 Inspection record . 13-1 13.1 INSPECTION RECORD . 13-1 IDFC60/70/80/90 Series IDX-OM-U010 Chapter 1 Safety Instructions Chapter 1 Safety Instructions 1.1 Before Using Air Dryer.

3

Note 2) Cable O.D.: 6 to 12 mm Note 3) For an outside cable diameter of 9 to 12 mm, remove the internal parts of the rubber seal before using. Assembly 1. Insert the cable into the conduit terminal. 2.

Magnetic Separator FHM Series

Micromesh element Element size Description Model Port size Micromesh element (With relief valve) EM040-12 3/8, 1/2 55 x L90 FH34 FH44 FH54 FH64 (Refer to P. 511.) EM910-12 3/4, 1 74 x L117 EM140-12 Line filter 1 1/4, 1 1/2 74 x L195 EM930-12 2 88 x L282 EM240-12 2 1/2, 3 119 x L280 EM810-12 3/4, 1 65 x L95 EM910-12 1 1/4, 1 1/2 74 x L117 FH100 (Refer to P. 518.)

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

1122Series MXP/MXPJ6 Air slide table 6, 10, 12, 16 How to Order Clean series 11 Vacuum suction type MXP 11 12 15 M9N MXP 22 12 15 M9N Copper, fluorine and silicon-free + low particle generation Number of auto switches Nil s n 2 pcs. 1 pc. n pcs. 22 Vacuum suction type Bore size Stroke mm Type of auto switch 6 10 12 16 5, 10 10, 20 15, 25 20, 30 Nil Without auto switch Refer to the table

Slide Tables MX Series

MXQ 6 MXQ 8 MXQ12 MXQ16 MXQ20 MXQ25 2.1{21.4} 2.1{21.4} 4.4{44.9} 7.4{75.5} 7.4{75.5} 18{180} 8 8 10 12 12 16 M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 2. Side through hole mounting These conditions could lead to malfunctions.

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

\u/ (6oomm) Lead wire length :12 inch (300mm) L: L type plug connector with lead wire H"rt#'" mhrin*n" : 12 inch | ll-l.r :12 inch (3oomm) "!

VXF

VXF(A)2160 Tank 41l 6 x 6 pcs. 10 x 12 pcs. 10 x 12 pcs. Without tube (VXF2280) Without tube Without tube (VXF2280) Flow rate Q (Nl) 10 x 12 pcs. 10 x 8 pcs. 10 x 12 pcs. 10 x 8 pcs. VXF(A)2280 Tank 70l 10 x 8 pcs. VXF(A)2280 Tank 70l 10 x 8 pcs. 10 x 10 pcs. 10 x 10 pcs. 100 mm 100 mm 10 x 10 pcs. 10 x 10 pcs. 10 x 8 pcs. 10 x 8 pcs.

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\u/ (6oomm) Lead wire length :12 inch (300mm) L: L type plug connector with lead wire H"rt#'" mhrin*n" : 12 inch | ll-l.r :12 inch (3oomm) "!