High Vacuum Angle Valve

Heater: 8 XLC Series Dimensions XLC: Air operated (b) E C Size 16, 25, 40 E C E Fn (KF flange) (a) D Auto switch (Option) Heater (Option) (c) H J B A G A (b) C E Size 50, 63, 80 E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) H J K B A G A [mm] Model A B C D E*1 Fn Fd G H J K XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-

Pneumatic Transfer System Series MF

G A 90 B 90 B G A D Note 1) 90 G A H X X X D Note 1) D Note 1) B B B F E F F E A H A G G RG RT RS B 296 305 C R310 R445 D 93 129 E 60 87 F 10 15 G 6 7 B 296 309 C R390 R495 D 93 129 E 60 87 F 10 15 G 6 7 B 299 307 C R350 R440 D 93 129 F 10 15 G 6 7 H 610 700 A 600 743 A 680 797 A 643 740 15 32 15 32 15 32 Y Note 2) Y Note 2) Y Note 2) X 558 to 573 685 to 708 X 518 to 533 558 to 581 X 541

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

M9 M9V F9W(V) B Electrical entry is in the direction C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

M9 M9V F9W(V) B Electrical entry is in the direction C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C

CNS

[Vertical] [Load in the direction of rod extension] [Load in the direction of rod retraction] Cylinder sliding resistance (N) Cam unlocking torque (standard) (Nm) Width across flats (mm) Socket Bore size (mm) W 125 140 160 JIS B 4636 + 2 point angle socket 16 16 18 21 961 1216 1579 68.6 78.4 156.8 SOL.C JIS B 4636 + 2 point angle socket 18 SOL.C JIS B 4636 + 2 point angle socket 21 4.

Stainless Steel One-touch Fittings Series KG

L B D MS-5H-4 MS-5H-6 15.5 16.5 6.5 8.5 2.1 4.0 2.5 3.7 7 8 7 8 1.8 2.5 Hose elbow: MS-5HLH-4, -6 B Effective orifice(mm 2) Weight (g) Part No.

ZPT/ZPX

63 B10 63 M10 x 1.5 80 B12 80 M12 x 1.75 100 100 125 125 B01 Vacuum entry Pad type Rc 1/8 HB Large bellows pad Material N NBR S Silicon rubber U Urethane rubber F Fluoro rubber E EPR 13-11-91 10 Series ZPX ZPX HB-B01-B (Female thread) 40 50 ZPX HB-B01-B (Female thread) 65 80 Rc 1/8 I I Rc 1/8 Hexagon width across flats 21 11 Hexagon width across flats 21 11 Width across flats 37 4-M4

Booster Regulator/Air Tank

END 1014 Booster Regulator VBA Series Working Principle The IN air passes through the check valve to booster chambers A and B. Meanwhile, air is supplied to drive chamber B via the governor and the switching valve. Then, the air pressure from drive chamber B and booster chamber A are applied to the piston, boosting the air in booster chamber B.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

N E J B (F) R 2-V PB PA A B Pilot port threaded type (mm) Dimensions A B C D E F G H J K L M N P Q R V Model LVD1-S LVD2-S LVD3-S LVD4-S LVD5-S 4 (5/32") 20 20 45 39 9.5 46 23 11.5 4.5 11 30 5 21 28 22.5 M5 x 0.8 30 30 54.4 56 11 67 28.5 13 4 20 44 7 23 31.5 17 M5 x 0.8 6 35 35 79.5 62 17.5 83 45.5 14.5 6 22 50 7 37 6 36 21 M5 x 0.8 35 35 82 62 20 93 48 14.5 6 22 50 7 39 6 36 21 M5 x 0.8

Compact

B When LECP1, LECP6 or LECPMJ is used.

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

Model Auto switch mounting Cushion Rubber Bore size (mm) Port size Lubrication Action Standard stroke Note 2) (mm) Long stroke (mm) Note 1) Note 2) Model Air 10-/21-CG120 10-/21-CG125 10-/21-CG132 10-/21-CG140 10-/21-CG150 10-/21-CG163 10-/21-CG180 10-/21-CG1100 11-/22-CG120 11-/22-CG125 11-/22-CG132 11-/22-CG140 11-/22-CG150 11-/22-CG163 11-/22-CG180 11-/22-CG1100 20 25 32 40 50 63 80 100

Thermo-chiller/Rack Mount Type

Circulating fluid return port When heating the circulating fluid, the high-pressure, high-temperature refrigerant gas is bypassed into the evaporator by expansion valve B to heat the circulating fluid. The combination of the precise control of expansion valve A for cooling and expansion valve B for heating allows for high temperature stability.

MY1

C D Side support B MY-SB 2 x J 2 x H C D A B A B C D E F G H J Applicable cylinder MY1W16 MY1W20 MY1W25 MY1W32 MY1W40 MY1W50 MY1W63 Model MY-S16A 61 71.6 15 26 4.9 3 6.5 3.4 M4 x 0.7 B MY-S20A 67 79.6 25 38 6.4 4 8 4.5 M5 x 0.8 B MY-S25A 81 95 35 50 8 5 9.5 5.5 M6 x 1 B MY-S32A 100 118 45 64 11.7 6 11 6.6 M8 x 1.25 B 120 142 MY-S40A M10 x 1.5 55 80 14.8 8.5 14 9 B 142 164 MY-S63A 172 202

CRBB-OM00004

Size: 15 28 Cross recessed round head screw 2 27 Switch holder 2 26 Cross recessed round head screw 1 25 Hexagon socket set screw 1 24 Cross recessed round head screw 2 23 Cross recessed round head screw 2 22 Cross recessed round head screw 2 28 21 Holding block (B) 2 27 20 Holding block (A) 2 20 19 Magnet 1 18 Magnet lever 1 Including No.19 17 Switch block (B) 1 16 Switch block (A) 1

CXT

D-A93V D-A96V D-F9NV, F9NWV D-F9PU, F9PWV D-F9BV, F9BWV Auto switch model MXS A B Hs A B Hs Symbol Standard stroke MXQ 12 16 20 25 32 40 19 21 24 26 29 32.5 4.5 4 7.5 9.5 9 11.5 5.5 6 10 11 12 16 17 19 22.5 24.5 27 30.5 0 0 3.5 5.5 5 7.5 1.5 2 6 7 8 12 MXF Bore size (mm) MXW MXP Long stroke 12 16 20 25 32 40 19 21 24 26 29 32.5 11 10.5 16 18 20.5 26.5 5 5.5 9 10 8.5 12 7 6 11.5 13.5 16.5

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

C D Side support B MY-SB 2-J 2-H C D A B J M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 C 15 25 35 45 E 4.9 6.4 8 11.7 F 3 4 5 6 H 3.4 4.5 5.5 6.6 G 6.5 8 9.5 11 A 61 67 81 100 120 142 172 D 26 38 50 64 B 71.6 79.6 95 118 142 164 202 Applicable cylinder MY1W16 MY1W20 MY1W25 MY1W32 MY1W40 MY1W50 MY1W63 Model MY-S16A B MY-S20A B MY-S25A B MY-S32A B M10 x 1.5 55 14.8 8.5 9 14 80 MY-S40A B M12 x 1.75 70

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

50 3-5 depth 10 +0.02 0 16h9 0 0.043 (A, B, C common view) Misc.

HRX-OM-M005

W&F Contact B OUT6 N/A Output signal: OFF (open) for normal operation 4 OUT1 to OUT6 Contact A, B Output signal A: Contact A, B: Contact B Same as above Used to display the 5 [Enter] key MESSAGE screen to accept the setting. Used to display the MESSAGE screen to initialize the settings of RUN, REMOTE, and 6 [Initial] key OUT1 to OUT6. 7 [Cancel] key Used to cancel the setting.

Nozzle Type Ionizer

Part A Part B 5. Avoid using in a place where noise (electromagnetic wave and surge) is generated. Please take into consideration that the One-touch fittings for supplying air, need enough space for the air tubing to be easily attached/detached.

VP4

Flow Characteristics/Weight 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Flow characteristics Weight (kg) Port size Model Type of actuation C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 3 8 1 2 3 4 3 8 1 2 3 4 3 8 1 2 3 4 3 8 1 2 3 4 4.5 5.1 5.6 4.5 5.1 5.6 4.0 4.5 5.0 4.2 (4.0) 4.8 (4.5) 5.5 (4.8) 0.33 0.28 0.28 0.33 0.28 0.28 0.29 0.23 0.23 0.29 (0.28) 0.24 (0.27) 0.23 (0.30) 16 19 21 16 19 21 15 18