MXH Series Compact Slide

22 D-A9 D-F9 D-F9 W B W 20 (22) A D-A9 V D-F9 V D-F9 WV W B Dimension inside ( ) is for model D-A9 V.

ISE70/75/75H

Note Bracket B and the bracket assembly make up one set. DOWN OUT1 U P SET ZS-31-A Bracket Note: Mounting screws are not included.

Series AS-FM/AS-M/ASD-FM

L4 L4 L5 A L5 D3 D3 T T D2 L1 D2 L1 L2 L2 Metric sizes A M1 L5 Max.

EXxx-OMN0029CN

code2 mSPEEDCON PCA-1564930 M12 B code6 mSPEEDCON PCA-1564943 M12 B code2 mSPEEDCON PCA-1564969 M12 B code6 mSPEEDCON (9)DeviceNet PCA-1557633 M12 A code5 mSPEEDCON PCA-1557646 M12 A code5 mSPEEDCON (10) PCA-1557769 M12(4 )3 m PCA-1557772 M8(3 )3 m -78No.EX-OMN0029CN-D Revision history A B () C D 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298

HRX-OM-O021

Facility having a small installation area (that can not vent the air naturally) Make a forced air exhaust vent on a wall at a high level and an air vent on a wall at a low level.

Dedicated Controller

(A contact) 3 wire GXL-N12FT LTF Standard N.C. (B contact) 3 wire GXL-N12FTB Switch specifications (SUNX Corporation) GXL-N12FT(B) Part no.

AMG

Options J: With drain guide M Mounting Dimensions Model Port Size (Nominal size B) A G F E D C B S 1.6 2.0 2.0 2.3 2.3 3.2 3.2 4.5 4.5 R 4.5 5 5 5 5 9 9 10 12 Q 26 28 28 34 34 50 50 60 76 P 70 84 84 100 100 110 110 130 180 O 54 66 66 80 80 88 88 102 136 N 35 40 40 50 50 55 55 65 85 L 9 12 12 14 14 14 14 16 20 K 5 8 8 8 8 10 10 10 15 J 15 20 17 22 19 25 21 30 40 I 56 66 66 80 80 90 90 100

Series LQ3 High Purity Fluororesin Fitting

A B A B C A B C A B C A B C 1/8" 1/8" 1/4" 1/8" 1/4" 3/8" 1/4" 3/8" 1/2" 3/8" 1/2" 3/4" 1/2" 3/4" 1" Tubing Connection E 1A LQ3 Size Combination Class Fitting Style Symbol E T P U Combination 1 2 3 4 5 6 Tube Size (Inch) 1/8" x 0.086" 1/4" x 5/32" 3/8" x 1/4" 1/2" x 3/8" 3/4" x 5/8" 1" x 7/8" Style Elbow Union Tee Union Panel Union Straight Union A A A A A A Series LQ3 Dimensions Straight

Air Slide Table Series MXQ

Weight g 65 65 25 15 15 B side traveling parallelism to A side Refer to Graph 1.

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

The cylinder should be operated using a connection method which allows for shaft alignment variations and deflection due to the cylinder's own weight. A drawing of a recommended mounting method is shown in Figure 1.

INFORMATION For material handling and clamping of small workpieces 34 mm Power Clamp Cylinder Compact Type New New ø25, ø32 Lightweight Compact 53 mm High clamping force Lock function Lightweight Weight : 580 g (ø25) 192.4 mm Width : 34 mm Compact Heigh

B) In the state of A), attach the workpiece and the arm side block, and adjust the shim so that there is a space of about 0 mm. During this step, theoretically, there is no clamping force pressing down on the workpiece. C) In order to generate a clamping force from the state described in step B), insert an additional shim.

Process Gas Diaphragm Valve

Construction Diaphragm Seat Body 1112 B Diaphragm Valve for Ultra High Purity Manually operated type Series AZ3652 & 4652 inch (mm) Dimensions AZ3652 & 4652 Ports: 2PW (Welded) Ports: 2P (Machined) 1.5 (38) 1.5 (38) BAR STOCK BODY Note) FORGED BODY 0.44 (11.2) 2.17 (55) 2.17 (55) 0.44 (11.2) A A B A A Connections: MV, FV Connections: MV B A A A A Connections: TW Connections: TW 1.0 (25.4)

Foot Pedal Type

11 Symbol B A (A) 4 (B) 2 2 x Rc1/8 (Port 2, 4) 38.2 26.2 2 x M5 x 0.8 (Port 3, 5) 12 14 Rc1/8 (Port 1) 3 (EB) 1 (P) 5 (EA) Total Travel (T.T.) 2.5 Full Operating Force (Reference value)(F.O.F.) 55 N (at 0.5 MPa) 530.2 1590.2 Safety Instructions Be sure to read Handling Precautions for SMC Products (M-E03-3) before using.

HRX-OM-R005

Facility having a small installation area (that can not vent the air naturally) Make a forced air exhaust vent on a wall at a high level and an air vent on a wall at a low level.

EXxx-OMN0035CN

JIS B 8370: JIS B 8361: JIS B 9960-1: -(1 :) JIS B 8433-1993: *2 : : : 1, 2 3 1 2 3 4 -3No.EX-OMN0035CN-A / 1 1.5 *3) *3) 1 1 () -4No.EX-OMN0035CN-A () () () () -5No.EX-OMN0035CN-A /, , () * UL UL1310 Class2 0V -6No.EX-OMN0035CN-A * IP67 / *() ,, SI SI SI * IP67 M12M8 () -7No.EX-OMN0035CN-A CE , * 20-23 PLC PLC * -8No.EX-OMN0035CN-A , SI 1 SI 32 10 SI SI ON/OFF PNP

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

(or within 3 kPa ) 1/8 ARP ARP 1/4 For 0.2 MPa setting With backflow function (ARP20K/30K/40K) 3/8 IR-A 1/2 Installable between a solenoid valve and a cylinder : Standard : Semi-standard IR Direct operated precision regulator now available as a series!! (ARP20/30/40) IRV VEX SRH Applications Applications SRP a Apply a constant pressure to fluid. b Adjust the blow-line pressure.

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

(or within 3 kPa ) 1/8 ARP ARP 1/4 For 0.2 MPa setting With backflow function (ARP20K/30K/40K) 3/8 IR 1/2 Installable between a solenoid valve and a cylinder : Standard : Semi-standard IRV Direct operated precision regulator now available as a series!! (ARP20/30/40) VEX SRH SRP Applications Applications SRF a Apply a constant pressure to fluid. b Adjust the blow-line pressure.

New New Process Gas Diaphragm Valve For wide variety of applications from semiconductor to general. Multiple port available in various configurations Compression, Rc, R, NPT Cleaned for O2 service Air Operated Type Series AK3542/4542  Compact and light

Dimensions inch (mm) AK3652 & 4652 1.50 (38) 2.17 (55) 2 x Compression 2 x R, NPT male 2 x Rc, NPT female 0.44 (11.2) B B A A A Connections: 4T, 6T Connections: N, BRN Connections: 4, 6, BR 4 6 4 6 4 6 25.4 45 Ports A B Connections inch (mm) inch (mm) 4T 2.56 (65.0) 1.12 sq. (28.4) 1/4 inch compression 4BR 1.70 (43.2) Rc 1/4 4BRN 2.32 (58.9) 1.12 sq. (28.4) R 1/4 4 1.70 (43.2) NPT 1/4

3

L/min 2100 L/min PFMC7202 Rated flow range Set flow rate range Displayable range Analog Output Flow/Analog Output Output A B C Voltage output 1 V 1.04 V 5 V C Current output 4 mA 4.16 mA 20 mA Model Minimum flow of rated flow range Maximum flow of rated flow range PFMC7501 5 L/min 500 L/min PFMC7102 10 L/min 1000 L/min PFMC7202 20 L/min 2000 L/min B A 0 Flow Minimum flow of rated flow range

Air Cooled Aftercooler Series HAA 1

Model A B C A B C A B C A B C 500 1000 1500 1000 2200 3000 2000 3300 4000 4000 5700 7000 34.5 38 40 33 36.5 38 34 36 37 34 35 36 35 40 44 35.5 40 42 37 40 41.5 38 40 42 35.5 42.5 47.5 36 42.5 44 38.5 42.5 45 39 43 45 HAA7 HAA15 HAA22 Maintenance HAA37 Caution 1. Inspect the cooler at least once a week and clean it to prevent it from becoming obstructed. 2.