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/ Construction 9 5 bn bn 4 8 1 3 2 bs A A' bl bq br bm bt bo bp bk 7 View A-A' 6 Material Note Parts list Material Note Parts list No.

DFSIIWDJ59W> lmm) DA59W DF5BA:DE5NT (mm) DF5BA A B A B A .B A B A B , 32 0.5 0 4.5 2 7 4.5 11 8.5 12 9.5 , 40 0.5 0 4.5 2 7 4.5 11 8 .5 12 9.5 , SO 1 0 5 2.5 7.5 5 11 .5 9 12.5 10 Ht H~ HI Hs 32 24.S 35 25 32.5 t 40 27.S 38.5 27.5 36.5 I SO 34.5 43.5 34 41 ; 80 4 2.5 6 6 .5 10.5 9 14.5 13 15.5 14 , 100 4 2.5 8 6.5 10.5 9 14.5 13 15.5 14 J 63 39.5 46.5 39 46 '. 63 1 0 5 2.5 7.5 5 11 .5 9 12.5

10 L/A IN L/A OUT 11 MSNS 12 13 14 15 -33No.EX-OMS0026CN EX600No. 1 LED OFF 1 2 LED () DXB DXC DXD 1 2 ON/OFF LED () ON/OFF ( EX600-DXC1) / 2 1 2 LED ST () 1 2 ON/OFF LED DXE DXF ST () ON/OFF ST / 1EtherNet/IP Web H.T. 2(62 ) -34No.EX-OMS0026CN EX600No. 1 2 LED () 1 2 LED ON/OFF () ON/OFF DYB / 3 1 2 LED ST () 1 2 LED ON/OFF ST () ON/OFF DYE DYF ST / 1 2 LED

DIN (SY ) 2 M12(5 ) 3 DIN (SY ) 3 7/8 (5 ) EX600-ED2EX600-ED3No. 1 / 2 3 DIN DIN 4 FE 5 () -21No.EX-OMQ0015CN (1)EX600-ED21 24V() 2 0V() 3 24V() 4 0V() 5 FE (2)EX600-ED31 0V() 2 0V() 3 FE 4 24V() 5 24V() 2 2 SI IP67 -22No.EX-OMQ0015CN EX600-ED2EX600-ED3M12(5 ) 7/8 (5 ) DC24 V10 Class22 A DC24 V108 A DC24 V+10/-5 Class22 A DC24 V+10/-58 A IP67() -1050 -2060 3585RH() AC500

Check the detailed specifications in the separate Product Spe cifications, and evaluate the compatibility of the thermocon with customer system. 2. Although a protection circuit as a single unit is installed, the user is requested to carry out a safety design for the whole system. 2. Do not let the inlet and outlet for radiation air get closed. 3.

5 ) 3 DIN (SY ) 3 7/8 (5 ) EX600-ED2EX600-ED3No. 1 / 2 3 DIN DIN 4 F.E. 5 () -29No.EX-OMN0029CN-D (1)EX600-ED21 24 V() 2 0 V() 3 24 V() 4 0 V() 5 FE (2)EX600-ED31 0 V() 2 0 V() 3 FE 4 24 V() 5 24 V() 2 SI IP67 -30No.EX-OMN0029CN-D EX600-ED2EX600-ED3M12(5 ) 7/8 (5 ) () DC24 V 10 Class22 A DC24 V 108 A () DC24 V +10/-5 Class22 A DC24 V +10/-58 A 1 IP67() -1050 -2060 3585%RH()

SMC Corporation R&D Center Product Development Division-6 Address: 4-2-2, KINUNODAI,TSUKUBAMIRAI-CITY , IBARAKI-KEN 300-2493, JAPAN Phone:+81-297-52-6 Fax:+81-297-20-5007 E-mail:kaihatsu_6_g3@smcjpn.co.jp Notice: The content of this manual can be revised without a previous notice. ii HEF002-A6 Contents Contents 1 PREPARATION FOR COMMUNICATION -1-1 2 OPTIONS OF COMMUNICATION METHOD -2-1 2.1

When conformity to UL is necessary the SI unit must be used with a UL1310 Class 2 power supply. The product is a UL approved product only if it has a mark on the body. Outline Dimensions 0 2 4 6 0 0 4 6 Bit No.

SMC Corporation R&D Center Product Development Division-6 Address: 4-2-2, KINUNODAI,TSUKUBAMIRAI-CITY , IBARAKI-KEN 300-2493, JAPAN Phone:+81-297-52-6 Fax:+81-297-20-5007 E-mail:kaihatsu_6_g3@smcjpn.co.jp Notice: The content of this manual can be revised without a previous notice. ii INR-244-831 Contents Contents 1 PREPARATION FOR COMMUNICATION -1-1 2 OPTIONS OF COMMUNICATION METHOD -2-1

til snal. rll-. c Qin^la rvl a..l .,-|.IE .eqFFr. 'w Double rod nd 90_ 90o 100 _100o 180 _ 1800 190_.190. W tu"b" -30mm: 90" or 180" onv Special order onfy stze-Nom (Torque) (mm) (inch) 30-13i16(16.5in-tbs) 50-2(80in-tbs) 63 _ 2 1/2 (150 in-tbs) 80 3 1/8 (270 in-lbs) tm-4(640in-tbs) Il*. @l lffi*",* With Auto Switch Capability t. qRAl?

til snal. rll-. c Qin^la rvl a..l .,-|.IE .eqFFr. 'w Double rod nd 90_ 90o 100 _100o 180 _ 1800 190_.190. W tu"b" -30mm: 90" or 180" onv Special order onfy stze-Nom (Torque) (mm) (inch) 30-13i16(16.5in-tbs) 50-2(80in-tbs) 63 _ 2 1/2 (150 in-tbs) 80 3 1/8 (270 in-lbs) tm-4(640in-tbs) Il*. @l lffi*",* With Auto Switch Capability t. qRAl?

PSI:1 Min. dISplay dilferenllal kgf/cm2 :O.02. bar:O.D2 kgf/cm2:O. 1, bar:O.1 mmHg:l 0. kPa:2. PSI:O.2 Can be programmed for a hysteresis mode, window comparator mode. or reversed output of these respective modes.

monitor signal Control signal power supply Pin no. 1 2 3 4 5 6 7 8 9 10 11 Symbol COM+ SRV-ON A-CLR CL GAIN DIV CWL CCWL ALM COIN SP A Driver model MSD5A1P1E MSD5A3P1E MSD013P1E MSD011P1E MSD023P1E MSD021P1E 35 Z phase output Z phase output Z phase output CW pulse input CW pulse input CCW pulse input CCW pulse input Frame ground 45 Command divider switching input CW drive suppression input

2 FGES L A FGES L B FGES L C 1) () (R) 12 (MPa) 0.7 () 80(60) 4 4 2)8 4 2)12 (mm) 6570250 6570500 (8 6570250) 6570750 (12 6570250) (MPa) 0.1 SUS304 SUS304 O FGESNBR FGELFKM SS400 (kg) 10 13 18 (L) 14 21 29 1) 2) 3) 3 1) (P5) ( ) 1 (2 ) /4 (1 ) () 2-1 2/12.5Nm / 2- 9/12 FGX-OM-L009-B 2) IN/OUT IN/OUT V P36 4 1) () 2) 0.1MPa() P910 5.