C95

2 100 80 63 50 40 32 80, 100 Description Material Qty. Note Component Parts No. No.

TABLE OF CONTENTS

.T .

Modular F.R.L. Unit

L2 61 76 76 99 104 124 AC10B AC20B AC25B AC30B AC40B AC40B-06 AC50B AC55B AC60B S V T SV TV L3 57 74 74 95 102 Attachment Model L1 41.5 55 55 72.5 77.5 L2 43 57 57 75 80 L1 41.5 55 55 72.5 77.5 L2 43 57 57 75 80 L1 41.5 55 55 72.5 77.5 L2 43 57 57 75 80 L3 43 57 57 75 80 L1 41.5 55 55 72.5 77.5 L2 43 57 57 75 80 L1 41.5 55 55 72.5 77.5 L2 43 57 57 75 80 L3 61 76 76 99 104 AC20C AC25C AC30C

MLGP

P-80 (JT)

MLGP

P-80 (JT)

Environment

0 i o e r t q u !1 !2 !3 !

High Vacuum Angle Valve

A XLC e Pilot port direction q Flange size w Flange type Rear flange surface Size 16 25 40 50 63 80 Symbol Pilot port direction Nil Flange side K Left flange surface L Rear flange surface M Right flange surface Symbol Type Applicable flange size Nil KF (NW) 16, 25, 40, 50, 63, 80 D K (DN) 63, 80 Right flange surface Left flange surface Flange side r Temperature specifications/Heater t Auto

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

VZ1000-2A-1M SUP/EXH block assembly y Note) Block pin (2 pcs.) is attached for q, e, t, y.

Air Slide Table

23 58 135.5 4 2 103.5 118 MXQ16A-50Z 40 27 80 28 63 145.5 6 3 113.5 128 MXQ16A-75Z 46 23 58 52 80 34 88 176.5 6 3 144.5 159 MXQ16A-100Z 44 39 102 44 80 53 113 220.5 8 4 188.5 203 MXQ16A-125Z 44 20 127 44 80 53 138 245.5 10 5 213.5 228 35 Air Slide Table/Double-ported Type MXQA Series Dimensions: MXQ 16A [Adjuster Option] MXQ 16A-m With adjuster option (16) Double-ported type MXQA Metal

CJ2

Component Parts No. q w e r t y u No. i o !0 !1 !2 !3 !

LEC-OM07605CN

(b) () () t t [Hz] [Hz] [Hz] [Hz] 3. 7.1.6 3 4.5Hz2250Hz [Pr. PB45 ] ()150ms (1) t t 7 12 7. (2) Pr. PB45 ] [Hz] [Pr.

Bernoulli Gripper

4 e r t y u q With stoppers i u w 30 40 Basic type With vibration suppression cover: Resin u t y r u q With stoppers i !0 w e 40, 60 20, 30, 40, 60, 80 Basic type With vibration suppression cover: Stainless steel q u t y r With stoppers o i w e u !0 !1 9 Bernoulli Gripper ZNC Series 80 Basic type e !2 q u t y With stoppers o i r w e Component Parts No.

XM, XY

Angle type In-line type q w e r t y u w Flange type q Flange size XMA Type KF (NW) K (DN) CF Symbol Nil D C XMA XYA Applicable flange size 16, 25, 40, 50, 63, 80 63, 80 16 (034), 40 (070), 63 (114) Size 16 25 40 50 63 80 XYA Nil D K (DN) KF (NW) 25, 40, 50, 63, 80 63, 80 e Indicator/Pilot port direction XMA Rear flange surface XYA Symbol Rear flange surface Right flange surface Indicator

IDX-OM-V020

[Terminal block] 11.3 Connection of power supply IDFA60/70/80/90 Series 11-2 IDX-OM-V020 Chapter 12 Option T Chapter 12 Option T Option T has terminal block for the output of operation and error signals and remote control. 12.1 Safety instructions for use Refer to the instructions below when handling the product.

IDX-OM-U010

[Terminal block] 10.3 Connection of power supply IDFC60/70/80/90 Series 10-2 IDX-OM-U010 Chapter 11 Option T Chapter 11 Option T Option T has terminal block for the output of operation and error signals and remote control. 11.1 Safety instructions for use Refer to the instructions below when handling the product.

IDX-OM-W094

/70/80/90 Series 12-1 IDX-OM-W094 T 12.3 AC230V z ON z A(4-5) B6-7 z A4-5A B6-7B z 3 5 /() z OFF 3 z OFF 6.2 IDFA60/70/80/90 Series 12-2 IDX-OM-W094 T 12.4 M3.5 1.01.3Nm M4.0 1.42.0Nm 6 5 4 1 2 3 PE N L 7 L,N PE B A IDFA60-23-T IDFA70-23-T IDFA80-23-T IDFA90-23-T M3.5 8.5mm M4.0 9.5Mm [3.2.5 ] IDFA60/70/80/90 Series 12-3 IDX-OM-W094 T 12.5 IDFA60/70-23-T A B AC 230V50Hz

C85

2 t !7 q !4 !1 w e !3 !

REA/REB

8 t !4 !5 @2 @1 #2 #4 #5 #7 #6 #8 Component Parts No. Description Cylinder tube No.

VFS

Max. 3.5 152 (3 position: 156.5) Applicable heavy-duty cord O.D. 6 to 8 (Y: 4.7 to 7) With light/surge voltage suppressor (EZ) 188 (3 position: 192.5) Light Manual override (Locking type) With light/surge voltage suppressor (DZ) Light Manual override (Locking type) Conduit terminal: VFS1220-T/TZ VFS1320-T/TZ VFS1420-T/TZ VFS1520-T/TZ Applicable heavy-duty cord O.D. 6 to 8 188 (3 position:

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Lead wire containment groove 8-15-80