TABLE OF CONTENTS

.T .

MLGP

P-80 (JT)

MLGP

P-80 (JT)

Environment

0 i o e r t q u !1 !2 !3 !

High Vacuum Angle Valve

A XLC e Pilot port direction q Flange size w Flange type Rear flange surface Size 16 25 40 50 63 80 Symbol Pilot port direction Nil Flange side K Left flange surface L Rear flange surface M Right flange surface Symbol Type Applicable flange size Nil KF (NW) 16, 25, 40, 50, 63, 80 D K (DN) 63, 80 Right flange surface Left flange surface Flange side r Temperature specifications/Heater t Auto

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

VZ1000-2A-1M SUP/EXH block assembly y Note) Block pin (2 pcs.) is attached for q, e, t, y.

CJ2

Component Parts No. q w e r t y u No. i o !0 !1 !2 !3 !

LEC-OM07605CN

(b) () () t t [Hz] [Hz] [Hz] [Hz] 3. 7.1.6 3 4.5Hz2250Hz [Pr. PB45 ] ()150ms (1) t t 7 12 7. (2) Pr. PB45 ] [Hz] [Pr.

XM, XY

Angle type In-line type q w e r t y u w Flange type q Flange size XMA Type KF (NW) K (DN) CF Symbol Nil D C XMA XYA Applicable flange size 16, 25, 40, 50, 63, 80 63, 80 16 (034), 40 (070), 63 (114) Size 16 25 40 50 63 80 XYA Nil D K (DN) KF (NW) 25, 40, 50, 63, 80 63, 80 e Indicator/Pilot port direction XMA Rear flange surface XYA Symbol Rear flange surface Right flange surface Indicator

IDX-OM-V020

[Terminal block] 11.3 Connection of power supply IDFA60/70/80/90 Series 11-2 IDX-OM-V020 Chapter 12 Option T Chapter 12 Option T Option T has terminal block for the output of operation and error signals and remote control. 12.1 Safety instructions for use Refer to the instructions below when handling the product.

IDX-OM-U010

[Terminal block] 10.3 Connection of power supply IDFC60/70/80/90 Series 10-2 IDX-OM-U010 Chapter 11 Option T Chapter 11 Option T Option T has terminal block for the output of operation and error signals and remote control. 11.1 Safety instructions for use Refer to the instructions below when handling the product.

IDX-OM-W094

/70/80/90 Series 12-1 IDX-OM-W094 T 12.3 AC230V z ON z A(4-5) B6-7 z A4-5A B6-7B z 3 5 /() z OFF 3 z OFF 6.2 IDFA60/70/80/90 Series 12-2 IDX-OM-W094 T 12.4 M3.5 1.01.3Nm M4.0 1.42.0Nm 6 5 4 1 2 3 PE N L 7 L,N PE B A IDFA60-23-T IDFA70-23-T IDFA80-23-T IDFA90-23-T M3.5 8.5mm M4.0 9.5Mm [3.2.5 ] IDFA60/70/80/90 Series 12-3 IDX-OM-W094 T 12.5 IDFA60/70-23-T A B AC 230V50Hz

C85

2 t !7 q !4 !1 w e !3 !

REA/REB

8 t !4 !5 @2 @1 #2 #4 #5 #7 #6 #8 Component Parts No. Description Cylinder tube No.

VFS

Max. 3.5 152 (3 position: 156.5) Applicable heavy-duty cord O.D. 6 to 8 (Y: 4.7 to 7) With light/surge voltage suppressor (EZ) 188 (3 position: 192.5) Light Manual override (Locking type) With light/surge voltage suppressor (DZ) Light Manual override (Locking type) Conduit terminal: VFS1220-T/TZ VFS1320-T/TZ VFS1420-T/TZ VFS1520-T/TZ Applicable heavy-duty cord O.D. 6 to 8 188 (3 position:

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Lead wire containment groove 8-15-80

C95Series

B TA ~ TL TU TC TX TE TO TR n TS TH TF Z " TOH10 MB-S03 32 46 62 45 8.5 62 50 74 12 7 13 10 35 47 89 12 g.070 MII-S04 40 52 80 60 10 80 63 97 17 9 17 12 45 60 93 16 +8-070 50 65 80 60 10 92 75 109 17 9 17 12 45 60 105 1 6gmo Mounting plate (Double clevis) MII-S06 63 75 100 70 15 11 0 90 130 20 11 22 14 60 80 105 201.084 80 95 100 70 15 130 11 0 150 20 11 22 14 50 80 129 20 1 1)84 Ma,510

Possible to transfer a workpiece at low-speed.

2 @1 @3 e u o t @2 !8 @0 @0 @3 !2 !9 e @0 @1 o t u !8 @0 @2 !1 !4 q w r y !5 !6 i w i !

REA/REB

0 t !8 u Parts list Description Material Description Material Note Note No. No.

0.4

Positive COM spec. 576 VQC Series Plug-in Unit Base Mounted T IP67 compliant VQC1000/2000 Series Kit (Terminal block box) VV5QC11 (L4) (L3) (5.25) L2 L1 103 Manual override 7 1 1.5 P = 10.5 28 13 (12) SV (5.5) 1.5 Indicator light D side U side SYJ A B A B A B A B A B A B A SZ 2 93.5 126 80 75 66 (35) VF (59) 4 x M4 mounting hole (40) VP4 n 1 2 3 4 5 6 7 8 2 x M5 mounting hole Stations U