Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

Fittings & Tubing Air Cylinders Rotary Actuators DI BJ DH DJ 2 x JF depth JG HA BI WB effective depth WC FE (UV) 8 x WD depth WE (Circumference: 8 equivalents) 1 WA 1 XA 4 x JJ depth JK JA counterbore depth JB 2 x J through 22.5 (mm) DH DI DJ FE HA UV Size BE 1 27h8 27.5h8 14H8 8.2 13.5 29.5 XB effective depth XC WF 2 29h8 29.5h8 14H8 9.7 15.5 33.5 3 34h8 33h8 17H8 9.7 15.5 36 7 40h8 39h8

MLGC

EK: Kinetic energy of load (J) m: Load weight (kg) (Weight of load + Weight of moving parts) : Piston speed (m/s) (Average speed x 1.2) 2. The piston speed will exceed the average speed immediately before locking. To determine the piston speed for the purpose of obtaining the kinetic energy of load, use 1.2 times the average speed as a guide. 3.

3

Pin name 1 2 3 4 DC (+) OUT2 DC () OUT1 1 3 2 x Piping port Z U T S 4 x WX G 2 4 (35.5) 42 H For PF3W721 OUT IN AA G 4 x P K L 2 x Piping port G N DD PF3W504/520/540/511/521 Remote sensor unit Y A E J F 30 W B V 2 x Piping port Z S T U 4 x WX G H 42 (35.5) For PF3W521 IN OUT AA G 4 x P K L 2 x Piping port G N (mm) Bracket dimensions Model Port size A AA B D DD E F G H J K L N P (Rc, NPT,

Vacuum Unit Series ZK2

P Single unit Note 4) Vacuum pump system J N.C. None Note 5) Self-holding release valve linked For manifold Q R N.C. Note 7) N None None Silencer exhaust A Note 3) Only non-locking type is available for the manual override for K, J, R. Note 4) When J is selected for vacuum pump system, install a release valve or vacuum breaker.

HRS100/150

Heat generation amount by users equipment Q : Unknown [W] ([J/s]) Circulating fluid : Tap water* Example of current measurement units (Reference) Circulating fluid mass flow rate qm : (= x qv 60) [kg/s] Circulating fluid density : 1 [kg/L] Circulating fluid (volume) flow rate qv : 35 [L/min] Circulating fluid specific heat C : 4.186 x 103 [J/(kgK)] Circulating fluid outlet temperature

CV/MVGQ

For details, refer to page 10-20-61. 10-15-12 Valve Mounted Cylinder Single Acting, Spring Return/Extend Series CVJ3 Construction/Component Parts Single acting, Spring return RE A B REC CX CY MQQ M RHC MK(2) RS Q G Single acting, Spring extend RS H A RZQ MI W S CEP1 CE1 CE2 ML2B C J G5-S CV MVGQ CC Component Parts RB No. Description No.

3

H C37 3/4 20 J Stainless steel D 200 VAC E 230 VAC 6 25A N.C.

MXH

, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 18 21.5 46 47 20 23 5 20 6.5 6.5 5 NS 12.5 13 11 7.5 35 + Stroke 46.5 + Stroke 11.5 20 4-M4 x 0.7 Depth 6 5 + Stroke 12 (mm) Stroke (mm) NS LT J LA LB 5 14 10 49 4 10 49 14 10 4 15 59 24 4 20 20 24 59 4 20 25 30 30 69 4 30 69 30 30 4 40 79 45 20 6 20 50 55 89 6 25 25 60 60 30 30

Digital Flow Switch (Integrated display type) ( compatible)

No.PF-OMV0006-B PRODUCT NAME Digital Flow Switch (Integrated display type) ( compatible) MODEL / Series / Product Number PF3W7##-X445 Table of Contents Safety Instructions 2 Model Indication and How to Order 11 Summary of Product parts 13 Definition and terminology 15 Mounting and Installation 17 Installation 18 Piping 20 Wiring 23 Flow Setting 25 Simple Setting Mode 28 Function Setting 29

IP8001 Series

Simple balance current adjustment 22 4.Calibration 23 5.

LECA6_C

CN5I/O . 23 6.1 . 23 6.2 (NPNPNP ) . 23 (1) I/O (NPNPNP ) . 23 (2) I/O . 23 6.3 . 24 6.4 I/O . 27 7. . 28 7.1 . 28 7.2 . 31 7.3 . 33 8. . 34 8.1 . 34 8.2 . 34 8.3 . 35 (1) . 35 (2) (). 35 (3) . 35 8.4 . 36 8.5 . 36 9. (). 37 9.1 . 37 9.2 . 38 10. . 39 10.1 . 39 10.2 I/O . 39 (1) . 39 (2) . 40 (3) . 41 (4) HOLD. 42 (5) . 42 2 - 6 . 42 (7) . 43 11. . 44 11.1 . 44 11.2 (). 45 11.3 I/O . 46 11.4

LECP6_C

CN5I/O .23 6.1 /.23 6.2 /(NPNPNP ).23 (1) I/O (NPNPNP ).23 (2) I/O .23 63 /.24 64 I/O .27 7 .28 71 .28 72 .31 73 .33 8 .34 81 .34 82 .34 83 .35 1 .35 2 (.35 3 .35 84 .36 85 .36 9 .37 91 .37 92 .38 10 .39 101 .39 102 I/O .39 1 .39 2 .40 3 .41 4 HOLD.42 5 .42 2 - 6 .42 7 .43 11 .44 111 [5m ].44 112 [820m].44 113 [5m ].45 114 [820m] .45 115 I/O .46 116 .46 117 .47 12. .48 12.1 .48 12.2 .49 13

ø6, ø8, ø12, ø16, ø20, ø25 Series MXQR Air Slide Table/Reversible Type

23 30 315 250 210 170 140 385 23 25 23 35 30 47 745 490 450 380 340 335 655 40 45 40 60 53 75 1400 1250 835 735 670 610 605 1000 65 80 65 115 120 170 2900 2650 2350 1400 1200 1100 1100 1100 1750 110 130 110 180 140 220 4700 4300 3450 2400 1950 1750 1750 1750 2750 2

VXF

45 63 35.5 40 57 32.5 38 49 20 20 23 30 30 35 23 23 25 72 86 114 33 37 55 1 1 1 2 17-3-78 9 The VX series will be revised shortly.

Profile Design ISO/VDMA Air Cylinder Series CP95

Key Page Index Page Available Specifications .4 How to Order . 4-5 Technical Specifications . 6, 13 Dimensions (Cylinders). 9-12, 15-17 (Mounting Accessories) .18 Auto Switches .19-22 Guide Units.23-25 Safety Instructions.30-34 Main Index.35 1.8-3 Series CP95 ISO/VDMA Air Cylinders Specifications Type Model Bore Stroke end Rod specifications cushioning Upon receipt of order as standard Standard

Drain Separator for Vacuum Series AMJ 1

ZCU OUT IN AMJ Misc. 2port size Q B Maintenance space 20 Rc 1/8 Drain (mm) A B Note) C D With drain guide R Note) Bracket mounting dimensions Model Port size Q E F G H J K L M 158 (160) 2.3 53 8 6.5 23 40 41 16 53 14 169 (171) 53 1/4, 3/8 AMJ3000 194 (195) 2.3 70 10.5 8.5 26 54 50 17 70 18 205 (206) 70 3/8, 1/2 AMJ4000 273 (274) 3.2 90 13 11 35 66 70 23 90 24 284 (285) 90 3/4, 1 AMJ5000 Note

Drain Separator for Vacuum Series AMJ

Discharge Q B ZM Drain guide (-J) ZH ZU Maintenance space 40 R ZL P Rc 1/8 Drain 1/4 female thread without valve function ZY Hexagon width across flats 24 ZQ AMJ5000 L A F ZF Bracket (Option) G K M ZP D J C E ZCU OUT IN AMJ Misc. 2port size Q B Maintenance space 20 Rc 1/8 Drain (mm) A B Note) C D With drain guide R Note) Bracket mounting dimensions Model Port size Q E F G H J K L M 169 (

Smooth Cylinder

Dimensions/40 to 100 Basic/CA2YB 4-J 2-P (Rc, NPT, G) MM Width across flats KA G G D E H1 AL B1 K A N F N B C M S + Stroke H ZZ + Stroke (mm) Bore size (mm) 40 50 63 80 100 Stroke range Up to 500 Up to 600 Up to 600 Up to 700 Up to 700 B C A AL B1 D E F G H H1 J K KA M MM N P S ZZ 30 35 35 40 40 27 32 32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10

AMD

Air Flow (page 14-20-23).

Special Specifications:

Series AM, AMD, AMH, AMG 150 CA AM AMD AMH AMG Thread type (3) Nil Rc F G N NPT Body size Accessory (Option) A With drain cock (1) Note 3) Corresponds to attachment symbols C, D, and J. Select according to the type of threads used on the body. C With N.O. auto-drain D With drain guide (2) 150 250 350 450 550 650 850 With N.C. auto-drain J Note 1) 850 size comes with a ball valve.