MHZ Flat Type Fingers [3] D4-MM thread depth L (Thread for mounting attachment) 20K J A A D G B D B K J F C S W O (mm) Model Open Closed Weight (g) F G A W B C D J K MM L MHZ2-63 (1) 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 +1.2 0.8 2H9 2.5H9 3H9 4H9 5H9 6H9 +0.2 0 2 2.45 3.05 3.95 4.9 7.3 8.7 5 1 1.4 1.4 1.6 2 3 3 4 5 8 10 12 15 18 3.5 6 8 10 12 20 24 7.2 5.2 8.3 10.5 13.1 18 22 7.5
300 (mm/s) or Less 10 1 20 16 0.1 10 6 0.01 20 40 60 80 100 0 Overhang L (mm) 8-2-12 11 Compact Slide Series MXH Selection Graph (4) to (12) (Horizontal mounting) Maximum Speed 100 mm/s or Less Maximum Speed 500 mm/s or Less Maximum Speed 300 mm/s or Less Graph (10) Load Eccentricity 50 mm Graph (7) Load Eccentricity 50 mm Graph (4) Load Eccentricity 50 mm 10 1 10 1 0.1 MX Weight m (kg) Weight
2 Maximum speed 300(mm/s) or less 10 1 20 16 0.1 10 6 0.01 20 40 60 80 100 0 Overhang L(mm) 1 kg = 2.2046 lb 28 Compact Slide MXH Series Model Selection Method Selection Graphs 4 to 12 (Horizontal Mounting) Maximum speed 100mm/s or less Maximum speed 300mm/s or less Maximum speed 500mm/s or less Graph 4 Load eccentricity 50mm Graph 7 Load eccentricity 50mm Graph 10 Load eccentricity 50mm
Piston speed mm/s Piston speed mm/s Select the load mass from within the range of limits shown in the graphs.
M N C D 4-O T Q 2-P E B S K L U W AA A I AP R X AB Y + Stroke J V Z + Stroke AC AD 8-AF AE For standard stroke (mm) Bore size (mm) Stroke range (mm) AC E D AF G AE AD AB AA N M F L K B J AP C H I A 20 25 32 40 50 75, 100, 125, 150, 200 M5 x 0.8 depth 10 16.5 92 60 9.5 depth 6 30 75 11 12 45 25 5.5 80 60 55 108 M8 x 1.25 depth 14 25 24 30 99 M6 x 1 depth 12 16.5 113 65 11 depth 8 30 85 13
Applicable cylinder D G F H L I C E J K M N Part No.
0.025[J] 0.048[J] 0.081[J] 0.240[J] 0.320[J] 0.560[J] With internal shock absorber 0.039[J] 0.116[J] 0.116[J] 0.294[J] 1.100[J] 1.600[J] 2.900[J] Allowable Kinetic Energy (J) With external shock absorber (For low energy) 0.161[J] 0.574[J] 0.805[J] 1.310[J] With external shock absorber (For high energy) 0.231[J] 1.060[J] 1.210[J] 1.820[J] With adjustment bolt 0 to 190 Note2) With internal
only) Nil N Metric sizes Inch sizes Nil S Resin Stainless L LQ-GP 2 J 07 Tubing size symbol (refer to Table 1) Body class (refer to Table 1) Insert pin (single) Insert pin material (J/K type only) Type Nil S Resin Stainless LQ-GH J 07 Holder (single) Tubing size symbol (refer to Table 1) Type Note1) Replacement part type J shows the parts for LQ-GJ and LQ-GK.
Dimensions Meter-out type Meter-in type F E D B A C J G K H L B Model A MIN. MAX. MIN. MAX.
Piston speed Caution The cylinder speed upper limit that retains the particle generation grade is 400 mm/s. Back matter 5 Clean series: Common Precautions 3 Be sure to read before handling. Refer to the main text for detailed precautions for every series.
L LQ-GP 2 J 07 Tubing size symbol (Refer to Table 1) Body class (Refer to Table 1) Type Insert pin (single) Insert pin material (J/K type only) Nil S Resin Stainless steel LQ-GH J 07 Holder (single) Tubing size symbol (Refer to Table 1) Type Note1) Replacement part type J shows the parts for LQ-GJ and LQ-GK.
3 4 5 5 6 7 l\caut ion l n s t a l l a t i o n l n s t a l l a t , I D G s * M ( V ) i o n . r o n i n l e t s i d e 0 f m e m b l a n e a i r J i u t t , s u r e l v i n s t a l l m i s t s e p a r a t 0 r a n d m i c r o m i s t s e P a r a t o r ' t w i f n o u t t t r e m , i t d 0 e s n o t p e r f o r m ' w e l l b e c a u s e v a t e r a n d o i l f l o w i n ' l t F I u s h P j P
Nm N M1 M M3 W W2 W W4 ML2B25 10.0 1.2 3.0 200.0 58.0 65.0 100.0 ML2B32 20.0 2.4 6.0 300.0 80.0 96.0 150.0 ML2B40 40.0 4.8 12.0 500.0 106.0 140.0 250.0 ML2B25 ML2B32 ML2B40 J 0.43 0.68 1.21 18 ML2B/M1 ML2B/W1 ML2B/W1 0 0 0 Nm 0 0 0 N N 0 m/s m/s m/s ML2B/M2 ML2B/W2 ML2B/W2 N m N N m/s ML2B/M3 m/s m/s 20 ML2B/W3 ML2B/W3 10 Nm 5 3 2 1 N N m/s m/s m/s ML2B/W4 500 N 00 N
VG32 4 4-1 1 2 3 14 4-2 MHS2 MHS3 MHS4 C O O MHS2MHS4 MHS3 15 MHSJ3 C J O O J J J 16 MHSH3 C A O O O A A 17 / / C S (P) P O O S O P P C / ; ; ; ; C 18 4-3 3 MHS2 MHS3 MHS4 1 C C 4 2 5 mm Nm 16 M30.5 2.5 0.6 20 M30.5 2.5 0.6 25 M40.7 3 1.4 32 M50.8 4 5.1 40 M50.8 4 5.1 50 M61 5 8.6 63 M81.25 6 21.6 80 M101.5 8 24 100 M121.75 10 42.2 125 M142 12 67.7 19 MHSJ3
mounting groove (4 locations) Width across flats 8 (4 locations) 18.2 M5 x 0.8 (Finger closing port) 4 x M5 x 0.8 (Piston rod thread and rack thread) 5.5 2 x M5 x 0.8 Vacuum port H 7 8.4 16.8 0.5 7 9 7 12.5 8 6 6 O S 15 31 (46) 20 K 12.4 15 15 7 7 4 4 20 When open F 10 4 x M4 x 0.7 through (Thread for mounting attachment) 34 10 When open G (mm) J 24 39 57 H 116 158 196 G 92 134 172 F 72
-,I T _ I I 1sri61 @ll: p ( j iPilot ExH) (63.5) 2.58( Ll : with indicator light and surge voltage suppres6or e . [ o l a ' l s 1 6 e ' 9 r , p , . 1 4 . ; 116 17 l!
J A + Stroke M M Rod end male thread CHKDB20, 25 CHKDB32 to 100 Water resistant type S N g C B + Stroke h + Stroke A + Stroke Rod end male thread (mm) B C D E F G H J K L M P Q R A Bore size (mm) 20 51 43 8 12 10 M8 x 1.25 10 6 30 5.5 9.5 depth 5.4 43 1/8 16.5 6 25 53 45 8 14 12 M10 x 1.5 12 6 36 5.5 9.5 depth 5.4 49 1/8 17 8 32 61 51 10 18 14 M12 x 1.75 15 7 47 6.6 11 depth 6.5 63 1/4 19.5
Selecting Conditions/Table 1 Vertical Upward facing Downward facing Horizontal l = Eccentric distance l = Distance between the plate and load center of gravity m Mounting orientation m m l = Eccentric distance Maximum load speed V Graph (Slide bearing type) Graph (Ball bushing type) 50 to 200mm/s 201 to 400mm/s 50 to 200mm/s 201 to 400mm/s 50 to 200mm/s 201 to 400mm/s 1 , 2 3 , 4 1 3, 1 4
Selecting Conditions/Table 1 Vertical Upward facing Downward facing Horizontal l = Eccentric distance l = Distance between the plate and load center of gravity m Mounting orientation m m l = Eccentric distance Maximum load speed V Graph (Slide bearing type) Graph (Ball bushing type) 50 to 200mm/s 201 to 400mm/s 50 to 200mm/s 201 to 400mm/s 50 to 200mm/s 201 to 400mm/s 1 , 2 3 , 4 1 3, 1 4