Compact Cylinder with Air Cushion and Lock Series RLQ

YU-03 T1 B 2-D through 2-O counterbore (mm) Bore size (mm) B D E J M O Part No. 12 7 25 9 34 11.5 depth 7.5 YB-03 32, 40 12 9 32 11 42 14.5 depth 8.5 YB-05 50, 63 Joint Weight (g) Bore size (mm) T1 RS T2 V W Part No. K ( across flats) H (With locking) 80 9 6.5 10 18 50 YB-03 32, 40 120 11 6.5 12 22 60 YB-05 50, 63 d2 d1 L UT C UA (mm) UA C d1 d2 H k L UT Weight (g) 25 Part No.

IDX-OM-W023

.S 12 S 12-1 IDU8E15E1-10 IDU Series 12-1 IDX-OM-W023 12.S 12-2 L N PE M3 6.5mm 2 1.25mm 12-3 1-1 IDU Series 12-2 IDX-OM-W023 13 T 13 T 13-1 IEC 13-2 AC200V / 2A DC24V / 2A ( 20V / 5mA) 13-3 ON 3 () 5 /1 () IDU Series 13-1 13 1 IDX-OM-W023 13 T 13-4 1 PE L N 3 2 L,N: PE: LN PE M3 (0.63Nm) 6.5mm 1.25mm 17 17 2 () () IDU Series 13-4 13 2 IDX-OM-W023 13 T 13-5 IDU8E

AS-FPQ/AS-FPG

Note) Metric sizes 04 06 08 10 12 4 6 8 10 12 Elbow Control type 0 1 Meter-out Meter-in Note) For applicable tubing O.D. selection, refer to the Model on page 711.

AS-FPQ/AS-FPG

Note) Metric sizes 04 06 08 10 12 4 6 8 10 12 Elbow Control type 0 1 Meter-out Meter-in Note) For applicable tubing O.D. selection, refer to the Model on page 711.

Fluoropolymer Piping Equipment

Body Needle V seal Lock nut Adjustment handle Insert bushing Nut Collar A 1 2 3 4 5 6 7 8 PFA PCTFE PTFE PVDF PVDF PFA PFA PFA Body class 2 y u y u B Dimensions A (B) (max.S) D H Port A 2 x G SMC (J) SMC C E F K Port B E A B C D E F G H J K S Model 48 60 72 LVN20 LVN30 LVN40 24 30 36 12 18 22 88 110 124 34.5 43 52 6 9 11 4 5 6 14 25 25 20 26 33 18 24 30 2.4 7.5 8.0 940 LQ1/LQ3/LVN/LQHB Series

IDX-OM-W094

T . 12-1 12.1 . 12-1 12.2 . 12-1 12.3 . 12-2 12.4 . 12-3 12.5 . 12-4 13 V . 13-1 13.1 . 13-1 13.2 . 13-1 13.3 . 13-2 14 . 14-1 14.1 . 14-1 IDFA60/70/80/90 Series IDX-OM-W094 1 1.1 z z z z z z z z z () 6.2 z 1.1.1 3 IDFA60/70/80/90 Series 1-1 IDX-OM-W094 1.2 6 1.2.1 1.2.2 50 1.2.3 0 IDFA60/70/80/90 Series 1-2 IDX-OM-W094 1.2.4 IDFA60/70/80/90 Series 1-3 IDX-OM-W094

VCA

VCA20-12-1A VCA30-12-1A VCA40-12-1A Connector Mounting screws (2 pcs.)

Power Clamp Cylinder

Hexagon socket head plug 2 x NPT 1/4 G E B RB (mm) Bore size (mm) 50 63 80 C D E GA GB GC I J K L LA LB MM N NA NB NC NN P B 95 48 12 13.7 134.3 138.5 93 10 12 55 376.4 149.5 78.4 M10 x 1.5 19 13 36.5 10.3 M8 x 1.25 10 112 54 12 16.6 141.2 147.5 90.5 10 12 55 395.6 158.5 78 M10 x 1.5 22 13 36.5 15.8 M8 x 1.25 10 76 13 19.6 199 137.5 18 80 214 113.7 21 50 20.8 M10 x 1.5 12 154 185.8 12 530.9

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Depth JK Plug [P (port f)] WB WA TA TA WA R TB Plug TB R W [P (port d)] Inner cover Note 3) holding screw (mm) K 21 20 JK 10 12 J M6 x 1 M10 x 1.5 HT 19.5 39 HS 27 49.5 HP 44 73.5 HL 38.6 64.9 HI 23 39 HG 8.5 19 HB 8.5 19 HA 19.5 39 H 45 75 G 6.5 8.5 F 12.5 25 EK 4 6 ED 9.5 13 E 4H9 6H9 B 9.5 14 A 8 12 C 5.4 8.6 Model +0.030 0 +0.030 0 CYP15 CYP32 L 67 90 Z 118 155 Y 2.5 3.5 WB 17 27 WA 32

Digital Flow Switches Series PF2A

PF2A710, 750 60 82 98 67 58 6 1.6 17 Brown 1 Load Load OUT1 Main circuit Main circuit 4 Load Load Black FLOW SWITCH OUT2 12 to 24 VDC UP 2 + White 54 44 SET 3 OUT1 OUT2 Blue DOWN FOR AIR PF2A7--27(-M) 24 2-Port size 40 50 4-4.5 Brown 1 OUT1 4 Black Load Load (42.2) White OUT2 2 + 12 to 24 VDC Load Load 3 Blue PF2A7--67(-M) 42 4 43 2-3.4 Flow direction PF2A711, 721, 751 64 23 116 1.6 88

Digital Flow Switch Series PFA For Air Series PFW For Water

PFA7--27(-M) FLOW SWITCH UP 34 54 44 SET Brown OUT1 OUT2 DOWN FOR AIR Main circuit OUT1 Black + 12 to 24VDC LED Green 24 2-Port size OUT2 Load White Load 4-4.5 40 50 LED Red Blue PFA7--67(-M) (41.5) Brown Load Load Black LED Green + OUT1 12 to 24VDC Analog output White LED Red Blue PFA71--28(-M) 42 Brown 4 OUT1 Black + 2-3.4 12 to 24VDC LED Green 43 Analog output Load White Load Flow

Suction Guard (Produced upon receipt of order) FHG Series

W (mm) 1/2B (04) 3/4B (06) 1B (08) 1 1/4B (10) 1 1/2B (12) 2B (16) 2 1/2B (20) 3B (24) 22.2 27.7 34.5 43.9 49.1 61.1 77.1 90.0 47 47 47 50 50 50 50 50 70 70 70 85 85 85 105 105 9 9 9 9 9 9 9 9 62 62 62 65 65 65 65 65 3.5 3.5 3.5 6.2 6.2 6.1 11.9 11.9 Port size Weight (kg) E J P Q Port size Weight (kg) E 69 69 74 80 80 85 R 70 70 70 85 85 85 1/2B (04) 3/4B (06) 1B (08) 1 1/4B (10) 1 1/2B (

Air Cylinder

A AL B B1 C D E F G H H1 J K KA M MM N P S ZZ 32 Up to 300 22 19.5 42 17 31 10 24 8 9 38 6 M5 x 0.8 5.5 8 8 M10 x 1.25 18 1/8 63 109 40 Up to 300 24 21 48 22 37 14 32 9 9 44 8 M5 x 0.8 8 12 8 M14 x 1.5 18 1/8 62 114 45 Up to 300 24 21 52 22 41 14 32 9 9 44 8 M5 x 0.8 8 12 8 M14 x 1.5 18 1/8 62 114 50 Up to 400 35 32 60 27 45 18 38 10 9 55 11 M6 x 1 7 16 11 M18 x 1.5 18 1/8 63 129 56 Up to

Suction Filter with Case FH99 Series

A (mm) A B C D E F G H I J K L M N O P Q R Model FH990-04 FH990-06 FH990-08 FH990-10 FH990-12 FH990-16 FH991-20 FH991-24 FH991-28 FH991-32 1/2B M10 x 1.5 Thread depth 22 M10 x 1.5 Thread depth 22 1B 150 75 80 164 112 40 40 52.4 26.2 22.2 47.6 16.5 6 16.5 3/4B 1B M12 x 1.75 Thread depth 23 M12 x 1.75 Thread depth 23 1 1/2B 200 110 95 186 126 50 70 69.9 35.7 30.2 58.7 16.5 8 16.5 1 1/4B 1 1

Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

Fd up to 1000 FY B up to 1000 CJ1 up to 1000 up to 1000 FX CJP FT FE FZ CJ2 CM2 Rear flange/(G) C85 Port Cushion valve 4-FD Rear flange (mm) CG1 Bore size (mm) Stroke range ZZ FZ FY FX FT FD B FY B MB 32 40 50 63 80 100 141 145 164 164 202 202 79 90 110 120 153 178 32 36 45 50 63 75 64 72 90 100 126 150 10 10 12 12 16 16 7 9 9 9 12 14 up to 500 up to 500 up to 600 up to 600 up to 750 up

IDX-OM-U010

Option V . 12-1 12.1 SAFETY INSTRUCTIONS FOR USE . 12-1 12.2 SPECIFICATIONS . 12-1 12.3 MAINTENANCE . 12-2 Chapter 13 Inspection record . 13-1 13.1 INSPECTION RECORD . 13-1 IDFC60/70/80/90 Series IDX-OM-U010 Chapter 1 Safety Instructions Chapter 1 Safety Instructions 1.1 Before Using Air Dryer.

VXD21/22/23

50 95 97 97 62 64 64 160 170 180 135 140 155 67.5 70 77.5 168 (185) 182 (197) 194 (209) 51.5 54.5 59 100 105 120 36 42 53 23 25.5 25.5 35 40 40 12 14 14 41.5 44.5 44.5 ( ): N.O. 17-3-41

Ejector Valve Unit Series ZYY/ZYX 1

2 Aluminum Diffuser t Stainless steel Needle y Aluminum Spool u Resin Piston i 13-8-11 12 Series ZYY/ZYX Exhaust Characteristics/Flow Characteristics The flow rate characteristics correspond to a supply pressure of 0.45 MPa.

Series 11-/12-, 21-/22- CXSJ Dual Rod Cylinder/Compact Type

Fittings & Tubing Air Cylinders Rotary Actuators Clean series 11 12 Vacuum suction type Relief type (with specially treated sliding parts) CXSJM, CXSJL CXSJL CXS 6 50 J 11 L M9B S 21 CXS L J 6 50 M9B S Number of auto switches Nil S n 2 pcs. 1 pc. n pcs.

Copper-free Actuators

(mm) Name of CAD file Page in Vol.2 Standard Copper-free 6 8 12 (10) 16 (15) 20 25 32 40 50 63 80 100 Series/Variation Floating joint Series JA 5.2-2 SJAl JA Standard For compact cylinder SJBl 5.2-10 JB RB Shock absorber/ Series RB J 5.1-2 SRBl 20-RB O.D. thread M8/M10/M14/M20/M27 D 5.1-7 SRBLl 20-RBL O.D. thread M10/M14/M20/M27 -X 20Technical Data 5.5-5 6, 10, 16, 20, 25, 32, 40, 50, 63