MLGC

176 125 165 160 Rc(PT) 86.5 104 110 75, 100, 125, 150, 200, 250, 300 88 4 16 9 62 15 9 M8 37 30 160 176 125 165 160 Rc(PT) 86.5 104 110 96 4 19 12 67 18 190 210 135 11 200 42 194 Rc(PT) 35 142 115 M10 95 J I GR GQ GL P Q U O T N S W K L M R V Bore size (mm) 20 25 32 40 60 35 4 4 5.5 M5 X 0.8 93 M6 X 1 16 25 26 50 80 50 12 53 105 112 70 40 7 7 9 M5 X 0.8 M8 X 1.25 20 32 31 60 95 60 12 63

Modular F.R.L. Unit

Optional specification Note 2) With barb fitting B With drain guide B Metal bowl B 85 123 166 166 200 200 276 292 293 Metal bowl with level gauge Model B AC10 AC20 AC25 AC30 AC40 AC40-06 AC50 AC55 AC60 161 161 195 195 272 287 288 160 160 194 194 271 286 287 186 186 220 220 296 312 313 4 F.R.L.

High Vacuum Angle Valve, XL Series

A Series XLA (mm) B mm Model Weight kg (lb) A mm Conductance l/s 40 XLA-16 XLA-25 XLA-40 XLA-50 Little heavy metal contamination The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers. 103 0.25 (0.55) 5 50 113 0.45 (0.99) 14 65 158 1.1 (2.43) 45 70 170 1.6 (3.53) 80 160

Series SV

GATEWAY UNIT EX500 SERIES PE SOL RUN MADE IN JAPAN BUS ERR COM TYPE 1 63 73 88 48.8 R2.6 COM D COM C COM B COM A 24VDC R2.6 160 37.9 136 46 10 10 EX500 Decentralized Serial Wiring Series SV Valve Manifold Common Specifications How to Order Input Manifolds How to Order Input Blocks Input unit manifold EX500 IE EEX500 IB1 E 8 1 Manifold Specification Sheets Valve Manifold Specifications Flat

XL

A Series XLA (mm) B mm Model Weight kg (lb) A mm Conductance l/s 40 XLA-16 XLA-25 XLA-40 XLA-50 Little heavy metal contamination The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers. 103 0.25 (0.55) 5 50 113 0.45 (0.99) 14 65 158 1.1 (2.43) 45 70 170 1.6 (3.53) 80 160

BP1000

No code 0 V3 L 1 H 2 4 No gauge port No pressure gauge Ports -30 in.Hg to 30 psig -30 in.Hg to 60 psig -30 in.Hg to 100 psig -30 in.Hg to 160 psig 0 to 200 psig 0 to 400 psig -0.1 to 0.2 MPa -0.1 to 0.4 MPa -0.1 to 0.7 MPa -0.1 to 1.1 MPa 0 to 1.4 MPa 0 to 3 MPa Code Ports 2 ports 3 ports 2PW 3PW Porting Configuration e w q w q 1) Other range available.

JIS Standard Hydraulic Cylinder

Applicable auto switches Amount No. 1 1 Size M4 x 0.7 x 8L Description Auto switch mounting screw BTBT-03, BT-04, BT-05 BT-06, BT-08, BT-12 D-A5, A6 D-F5, J5 D-Z7, Z8 D-Y5, Y6, Y7 BA4-040, BA4-063, BA4-080 BMB4-032, BMB4-050 2 Set screw M4 x 0.7 x 6L 2 BMB5-032 BA7-040, BA7-063, BA7-080 D-A9 D-M9 BBA1 D-A5, A6 D-F5, J5 BT-16, BT-18A, BT-20 BS4-125, BS4-160 BS4-180, BS4-200 BS5-125, BS5-160

39

Description Bore size (mm) Tightening torque (Nm) 50 63 130 to 150 160 to 200 Head cover Stopper bolt Angle display Seal washer Stopper bolt 135 6 Vertical clamping (CKZ3T only) When mounting the clamping arm in a vertical clamping position, note that the maximum angle will change.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

10.5 31.4 18.1 C3, C4, C6, M5 [4(A), 2(B) port] C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread C8 [1(P) SUP port] C8: 8 One-touch fitting 2 L n Dimensions Formula L1 = 10.5n + 44.5, L2 = 10.5n + 62.5 n: Station (Maximum 24 stations) 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 L1 L2 (L3) (L4) 65.5 76 86.5 97 107.5 118 128.5 139 149.5 160

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

CRJ CRA1 Allowable Kinetic Energy/Safe Range of Rotation Time CRQ2 Adjustable range of rotation time safe in operation Allowable kinetic energy MSQ Model Allowable kinetic energy (mJ) Cushion angle Note) Rotation time (s/90) Without cushion With cushion MRQ CRA1W30 10 0.2 to 1 35 CRA150 50 980 0.2 to 2 D35 CRA163 120 1500 0.2 to 3 35 20CRA180 160 2000 0.2 to 4 35 CRA1100 540 2900 0.2 to

VK3000

Refer to the above drawing for DIN terminal dimensions. n L 1 50 27 2 69 46 3 88 65 4 107 84 5 126 103 6 145 122 7 164 141 8 183 160 9 202 179 10 221 198 11 240 217 12 259 236 13 278 255 14 297 274 15 316 293 16 335 312 17 354 331 18 373 350 19 392 369 20 411 388 L1 L2 3-2-10 5 Port Direct Operated Poppet Solenoid Valve Rubber Seal Series VK3000 Precautions Be sure to read before handling

VK3000

Refer to the above drawing for DIN terminal dimensions. n L 1 50 27 2 69 46 3 88 65 4 107 84 5 126 103 6 145 122 7 164 141 8 183 160 9 202 179 10 221 198 11 240 217 12 259 236 13 278 255 14 297 274 15 316 293 16 335 312 17 354 331 18 373 350 19 392 369 20 411 388 L1 L2 1428 VK3000 Series Specific Product Precautions Be sure to read this before handling the products.

7

8 x 18 S Q D F U V E DIN terminal G1/2 Cable 6 to 12 C (44) 31.5 R T A SMC IN OUT N B 8 x 18 S Q D F (mm) Electrical entry Model Grommet (with surge voltage suppressor) DIN terminal Grommet Applicable flange A B C E F N Q R S D T T U U 90 (98) V T 76 (84) 179.5 (187.5) 90.5 (98.5) 98.5 (106.5) 85 (93) 192.5 (200.5) 96 (104) 104 (112) 90.5 (98.5) U 168 (176) 67.5 82 (90) 7 E VXD2 32A 35 160

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

Silicon rubber Urethane rubber Fluororubber 40 161 EPR 39 160 40 50 63 80 100 125 1 0 89 158 2 0 56 156 3 0 55 396 6 0 155 347 12 1 121 345 22 3 120 580 118 531 116 529 How to Order ZPT 40 HB N A14 Mounting thread diameter (Vacuum entry) Pad diameter (mm) Pad diameter Thread dia.

MY2

Order Made 12 Series MY2C Theoretical Output Weights Unit: kg Unit: N Piston area (mm2) Operating pressure (MPa) Bore size (mm) Stroke adjusting unit weight (per unit) Additional weight per 50mm of stroke Side support bracket weight (per set) 0.2 0.3 0.4 0.5 0.6 0.7 0.8 Basic weight Bore size (mm) 200 40 60 80 100 120 140 160 16 L unit H unit 490 98 147 196 245 294 343 392 25 16 1256 251

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Area: (800) 258-9200-www.stevenengineering.com CRA1 Allowable Kinetic Energy/Safe Range of Rotation Time CRQ2 Adjustable range of rotation time safe in operation Allowable kinetic energy MSQ Model Allowable kinetic energy (mJ) Cushion angle Note) Rotation time (s/90) Without cushion With cushion MRQ CRA1W30 10 0.2 to 1 35 CRA150 50 980 0.2 to 2 D35 CRA163 120 1500 0.2 to 3 35 20CRA180 160

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

CE1 0.5 MPa 240 0.5 MPa 400 0.4 MPa 0.4 MPa CE2 0.3 MPa Lateral load F (N) Lateral load F (N) Lateral load F (N) 200 0.3 MPa 120 0.2 MPa ML2B 300 0.2 MPa 160 C J G5-S 80 120 200 CV 80 40 MVGQ 100 40 CC 40 120 100 80 60 180 140 100 60 240 200 160 120 80 RB Point of application L (mm) Point of application L (mm) Point of application L (mm) J D-X 20Data 10-11-7 7 Escapements Series MIW/MIS

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

Order Specifications Refer to pages 8-13-31 to 8-13-33 for details. 8-13-15 16 Series MY2 Theoretical Output Weight Unit: kg Unit: N Piston area (mm2) Operating pressure (MPa) Bore size (mm) Stroke adjusting unit weight (per unit) Additional weight per 50mm of stroke Side support bracket weight (per set) 0.2 0.3 0.4 0.5 0.6 0.7 0.8 Bore size (mm) Basic weight 16 200 40 60 80 100 120 140 160

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

160 2.4 0.62 0.45 0.15 0.13 0.15 0.4 JSX11-S Cm201 160 160 1/8 3.2 1.35 0.48 0.35 0.30 0.35 0.7 JSX21-S Cm301 320 330 * The list shows the compatibility between general fluids and the seal materials.

Integrated Controller

300 400 500 600 700 800 0 0 Speed: V [mm/s] Speed: V [mm/s] EQY25HB Horizontal/Lead 6 Vertical/Lead 6 70 25 60 20 Work load: W [kg] Work load: W [kg] 3000 mm/s2 50 15 3000 mm/s2 40 30 10 20 5000 mm/s2 5 10 10 mm/s2 0 100 200 300 400 500 0 100 200 300 400 500 0 0 Speed: V [mm/s] Speed: V [mm/s] EQY25HC Horizontal/Lead 3 Vertical/Lead 3 120 40 35 30 25 20 15 10 5 0 20 40 60 80 100 120 140 160