RQ

Hs A B A B Proper Auto Switch Mounting Position Auto Switch Mounting Height D-A7H D-A80H D-F7 D-A7H, A80H D-A73C, A80C D-F7, F7V D-F79F, J79 D-J79C, F7W D-F7WV, J79W D-F7BAL, F7BAVL D-J79W D-F7BAL D-F79F D-F7NTL D-F7V D-A7 D-A80 D-A73C D-A80C D-J79C D-A79W D-F7WV Bore size (mm) D-A7, A80 D-A79W D-F7NTL Bore size (mm) D-J79 D-F7W D-F7BAVL Hs Hs Hs Hs Hs Hs 20 A B A B A B A B 25 20 32 25 31.5

Stopper Cylinder

D-X 571 B RSQ Series Auto Switch Mounting Auto Switch Proper Mounting Position (Detection at stroke end) and Mounting Height D-M9/M9V D-M9W/M9WV D-M9A/M9AV D-A9/A9V 12 Hs B B A B B A 16, 20 B A Hs B Hs B A Hs B A Hs B A 32 to 50 A A B A A B A Hs D-A7 D-A80 D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F79F D-F7NT D-F7BA D-A73C D-A80C D-J79C D-A79W D-F7WV D-F7V D-F7BAV 16, 20 B A Hs B A Hs

SMC Pneumatic Clean Series

With air cushion 4-FD E-0.05 0 FT F FX0.15 B (mm) Bore size 40 B 61 E 25 F 2 FX 46 FD 6.6 FT 8 50 63 76 92 30 32 2 2 58 70 9 11 9 9 Note) End boss is machined on the flange for E.

LEC-OM07605CN

b . A b . A b . A 1 2 3 1 b012 Ab. 0 1 b b . A b .

MQQ

8 48 56 25 10 to 50,75,100 70.5 48.5 5.5 8 54 62 28 25, 28 Bore size (mm) FZ L M FV 55 18 10 60 20 16 FT FX 64 20 20 FZ 65 22 34 25 L B + Stroke 72 22 40 28 4-FD A + Stroke Rear flange type/MQQTG 10, 16, 20 25, 28 2-FD 4-FD (mm) Bore size (mm) Stroke range (mm) A L FV FV M 10 to 40 45 8 10 B + Stroke L FT FX 10 to 60 52 10 16 FZ FX A + Stroke 10 to 60 55.5 10 20 FZ 10 to 50,75,100 62 12

SFOD-OMT0009CN

2) 7. 512 2048 / 0 1 0 1 1 4 1 4 11 () 12 () 1 2 1 11 [] 14096 1 LEY16C-300 2.5mm 1/1 2 LEY16B-300 5mm 25/50 3 LEY16A-300 10mm 25/100 1 2 3 800 2.5mm 12 =1 /2 3 =2.5mm/5mm (2.5mm/10mm) =25/50 (25/100) 17 No.SFOD-OMT0009CN-B download 18 No.SFOD-OMT0009CN-B (3) View(V) Step Data Step No. 7.4 19 No.SFOD-OMT0009CN-B 3.7 JOG (1) ON ON (SVRE ON ) View(V) Status SVRE

JXCx-OMU0004

1 2 A A-1 1 LE-CP-1 L B B-2 6 1 1.5m B A-2 5 COM-A/COM B-3 3 3 3m COM-B/ A-3 4 5 5m Shield Vcc B-4 12 GND A-4 13 A B-5 7 A A-5 6 S B B-6 9 B A-6 8 3 14.2 2 1 8 14) B1 A1 17.7 6 5 2 1 18 B6 A6 16 15 L 11 30.7 11.2 [820m] A B-1 2 A A-1 1 LE-CP-1 L B B-2 6 B A-2 5 8 8m* COM-A/COM B-3 3 COM-B/ A-3 4 A 10m* Shield B 15m* Vcc B-4 12 C 20m* GND A-4 13 A B-5 7

MY1

D-Y69A, D-Y69B, D-Y7PV D-Y7NWV, D-Y7PWV, D-Y7BWV ( ) MY1CW 25, 32, 40, 50, 63 B A Solid state switch D-Y59 , D-Y69 , D-Y7P(V) D-Y7NW(V), D-Y7PW(V), D-Y7BW(V) A B A B Reed switch D-Z73, D-Z76, D-Z80 D-Y7BAL 63 50 40 32 25 Mounting position 40 32 25 Mounting position 25 Mounting position 32 40 50 63 A 323.5 278.5 157.5 127.5 97.5 157.5 127.5 97.5 97.5 127.5 157.5 278.5 323.5 A A B 136.5 121.5

MK

3 25, 25: 2 Qty.

LVQ

Inch sizes 4 8 10 16 22 LVQ 03 05 07 11 13 19 25 1/8 3/16 1/4 3/8 1/2 3/4 1 Millimeter 6 10 12 19 25 Inch Valve type LQ Type Symbol 1/4 3/8 1/2 3/4 1 Basic type N.C. LVN N.C. PB PA PA TI/ TIL N.O. PB B A B A B A Basic size With reducer N.C. N.O. Double acting Double acting N.O. Double acting PA With flow rate adjustment PA PAX N.C. B A PB N.C. Double acting With by-pass PA PA N.C.

2–4

B A Through-hole (standard) Both end tapped (32 to 50) 12 mm 16 mm 20 mm 25 mm 32 mm 40 mm 50 mm Note 1) Cylinder bodies of 12 to 25 are common for both B (through hole) and A (both end tapped) types. Symbol to order is unified to B for those sizes. Note 2) Contact SMC for the other mounting types.

A

Model Port size A B C D E F G H J K L M N P B B S Y M B O L S NAC1000 M5X0.8 91 84.5 25.5 25 26 25 33 20 4.5 7.5 5 17.5 16 38.5 86.5 NAC2000 18 14 140 125 38 40 56.8 30 50 24 5.5 8.5 5 22 23 50 120.5 NAC3000 38 181 156.5 38 53 60.8 41 64 35 7 11 7 34.2 26 70.5 182 NAC4000 12 238 191.5 41 70 65.5 50 84 40 9 13 7 42.2 33 88 217 NAC5000 34 300 271.5 48 90 75.5 70 105 50 12 16 10 55.2 40

VM

, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4-11 132 300 223 M15 x 1.5 15 151 150 48 25 4-Rc 3/4, 1 3 (R) 40 5-8-12 7 Hand Valve Series VH Dimensions: Panel Mounted VH21-02 VH31-02/03 ( ): Long handle type 4 (B) 2 (A) 25 25 (32) 25 4 (B) SA 1 (P) 3 (R) 1 (P) 74 62 62 49 VA 2 (A) SA 49 4-5.5 4-6.6 VA 62 VM Courtesy of Steven Engineering

VQ7-6/7-8

25 25 X (PE) port 1/8 A, B port 2-/4, 3/8 9 1/8 R1, R2 port 2-3/8 P port 1/4, 3/8 Y(PE) port 2 position double : VQ7-6-FG-D double (Reverse pressure): VQ7-6-YZ-D 3 position closed center : VQ7-6-FHG-D exhaust center : VQ7-6-FJG-D pressure center: VQ7-6-FIG-D 155 145 68.5 86.5 76.5 68.5 50 50 50 50 13 (A port) 13 (B port) 13 (A port) 13 (B port) Manual override Manual override A B A B B B

MNB

A B B A A B A B A 32.5 25 24.5 35 8.5 32 32 4.5 9.5 12 8 5.5 0 1.5 2 13 36.5 27.5 27.5 38.5 8.5 40 40 4.5 9.5 12 8 5.5 0 1.5 2 13 41 34 34.5 43.5 9 50 50 5 10 14 10 7.5 0 3.5 2.5 15 46 39 39.5 48.5 9 63 63 5 10 14 10 7.5 0 3.5 2.5 15 52.5 46.5 46.5 55 13 80 80 9 14 15.5 11.5 9 2.5 5 6.5 16.5 59.5 55 55 62 13 100 100 9 14 15.5 11.5 9 2.5 5 6.5 16.5 12 Series MDNB Auto Switch Internal Circuits

VFS

Tightening torque for terminal: 0.6 Nm Series VFS4000/5000 Model Terminal block marking A + A side A side A A side A side B + B VFS 100 VFS 200 VFS4 00 VFS5 00 4 5 4 5 B side B side 3 4 3 4 A side A side B side B side Applicable terminal: 1.25-3.5M, 1.25Y-3L, 1.25Y-3M There is no polarity.

SX

141.1 99.2 99.2 19 42.9 (Lead wire length) 19 42.9 Polarity indication 13.6 13.6 A B A B B A A COM B + A B A B A B A Manual override (Push and turn for locking type) 42 31.4 Manual override (Press and turn for the locking type) 42 31.4 84.9 B: Green A: Orange 2-4.2 84.9 B: Green A: Orange 2-4.2 2-One-touch fittings (Mounting holes for manifold) (A, B port) (A, B port) 2-One-touch fittings

High Vacuum Angle Valve

Inrush Current Flow Time (Reference) 200 V Current 100 V 0 5 15 10 20 25 30 Time [Second] 2 Mounting position of the heater Heater symbol XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 H4 (100C) (a) (a) (b), (c) (a), (b), (c) H5 (120C) (a) (b), (c) (b), (c) (a), (b), (c) (b), (c) (b) (a) (c) Heater (Option) 17 Aluminum High Vacuum Angle Valve: With Heat-resistant Auto Switch XLm Series Made to

Compact

High speed transfer Workpiece direct mounting Long stroke Light load transfer Combining with external guide Long stroke LEC S LEC SS-T Size Work load [kg] Size Work load [kg] Size Work load [kg] Size Work load [kg] 25 25 25 25 6 10 10 10 LEC Y 32 32 32 32 11 20 20 20 Motorless LAT LZ Size Size Size Size 25 32 25 32 25 32 25 32 LC3F2 Stroke [mm] Stroke [mm] Stroke [mm] Stroke [mm] 2000

VQ7-6/7-8

(port B) Manual override R1 R2 P A B 14 11 9 50 62 38 50 62 A 12 Prewired connector (M12) (L approx. 500) R1 P R2 A B 13 13 2-Rc1/8 2-6.5 Mounting hole Indicator light 42.5 42.5 3-Rc1/4, 3/8 (P, A, B) 34 34 Bottom port drawing SMC (ports A, B) 93 12 Y 25 (port X) 5 3 37 22 14 25 14 1 25 9 25 2-Rc3/8 Ports R1, R2 Rc1/4, 3/8 Port P Rc1/8 Port Y (PE) 2-Rc1/4, 3/8 Ports A, B Rc1/8 Port X (PE