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P: PTFE F: FKM For VCS30 OR-2380-130P P: PTFE F: FKM For VCS40 OR-2600-180P P: PTFE F: FKM Manifold For VCS20 e OR-1400-178P P: PTFE F: FKM OR-2670-178P r P: PTFE F: FKM Wave washer For VCS30, 40 When the loosened clip is pulled out in direction e using pinchers, etc., the coil can be removed and replaced in direction r.

Symbol x 50 001 005 010 020 050 075 100 002 004 006 013 q q w w 0.01 0.01 e r e 0.005 0.005 r 0.002 5 10 50 100 0.002 10 50 100 Flow rate l/min (ANR) Flow rate l/min (ANR) Note) The recommended flow rate is the rate for an initial pressure drop of 0.01 to 0.02 MPa. 2 Series FQ1 How to Order Filters Element and Seal Part Numbers 1.

A A afll-'h s-zl;lh P R P R (external pilot type) A A , A;Tt-Zb gzt;]ri! , P R P R Model Specifications Air and inert 20-100 PSI (1.5"7kgf/cm,) VAC-1 10Torr 20-1OoPS|(15-7ksflcm'?) N,lax. 120'F (50'C) 20 ms or less (7OPS|) 600 cpm , Slotted Knob locking type Individual, Common Not (Use turbine oil # 1 (lSO VG32) if lubrication is Drovided.)

A A afll-'h s-zl;lh P R P R (external pilot type) A A , A;Tt-Zb gzt;]ri! , P R P R Model Specifications Air and inert 20-100 PSI (1.5"7kgf/cm,) VAC-1 10Torr 20-1OoPS|(15-7ksflcm'?) N,lax. 120'F (50'C) 20 ms or less (7OPS|) 600 cpm , Slotted Knob locking type Individual, Common Not (Use turbine oil # 1 (lSO VG32) if lubrication is Drovided.)

P #Vacuum Ejector or Pump and Number of Vacuum Pads Ejector and number of pads Vacuum pump and number of pads Vacuum line Tank P P P P P P P P P Ideally, one pad should be used for each line. When more than one pad is attached to a single vacuum line, take the countermeasures listed below.

A44 PLC Terminal conduit 12V 100V, 200V Relay, PLC DIN terminal P P P P P P A59W F59 F5P J51 J59 Diagnostic indication (2 color) Grommet p p p p 3 wire (NPN) 5V, 12V 24V IC 3 wire (PNP) Grommet P P P P 100V, 200V 2 wire 12V P P G39 K39 5V, 12V 3 wire (NPN) IC Terminal conduit 12V 2 wire P P P P P P P P P P F59W F5PW J59W F5BA F5NT F59F Relay, PLC p p p p p p 3 wire (NPN) 5V, 12V IC Diagnostic

T I O N S ( I F A P P L I C A B L E ) XB5 _ For information on Bore Size, Rod and Rod Thread , please see How To Order Series NCA1 Replacement Parts.

P.3, 12 P.3, 12 D-sub connector D-sub connector 25 pins 26 pins Terminal block is compactly arranged on one side. ( ( ) ) ( ) ( ) ( ) Conforming to MIL D-sub connector P.3, 13 P.3, 13 F kit Flat ribbon cable Flat ribbon cable Conforming to MIL flat ribbon cable connector P.3, 15 P.3, 15 P kit Series VS 8-2/VS 8-4 S R S R Conforms to ISO 15407-2 Standard 5 Port Solenoid Valve/Plug-in Type

pressure P2 [MPa] 0.9 MPa 0.7 Critical pressure Subsonic 0.8 MPa 0.6 0.7 MPa 0.6 MPa 0.5 0.5 MPa 0.4 Sonic 0.4 MPa 0.3 0.3 MPa 0.2 0.2 MPa 0.1 0.1 MPa 0 VXB215 A D(H) 100 300 400 200 VXB215 B E(H) 100 300 400 500 600 200 VXB215 C F(H) 100 300 400 500 600 700 800 200 Flow rate Q [kg/h] How to read the graph The sonic range pressure to generate a flow rate of 300 kg/h is P1 0.3 MPa for the

Power consumption 2 W DC, 2.2 W (With indicator light) Piping 100 VDC: 2.4 W, 2.6 W (With indicator light) Port Passage R Exhaust side (Plug, in case of 2 port valve) P A N.C. Inlet Outlet Continuous duty type: VG342---E Use Continuous duty type if energizing the valve for a long time. Exhaust side (Plug, in case of 2 port valve) N.O.

HRS 100/150 HRSH 090 The product will be delivered in the packaging shown below.

V = over 400 mm/s; up to 100 mm stroke 14 15 CXSJM CXSJL Graph V = over 400 mm/s; up to 75 mm stroke 1 1 Weight m (kg) Weight m (kg) 32 32 0.1 0.1 25 25 20 20 10 15 15 0.01 0.01 0 20 40 100 60 80 0 20 40 100 60 80 Overhang L (mm) Overhang L (mm) 6 Series CXSJ Construction: Standard Piping CXSJM (Slide bearing) CXSJL (Ball bushing bearing) CXSJM6 CXSJL6 !

Regarding VP435 (3 position closed center type) Be aware that when the cylinder is in an intermediate stop state, if the supply pressure to the P port is discharged or decreased, this valve is constructed so that the pressure in the cylinder will be discharged to the P port, causing the cylinder to move. 7.

T I O N S ( I F A P P L I C A B L E ) XB5 _ For information on Bore Size, Rod and Rod Thread , please see How To Order Series NCA1 Replacement Parts.

Values for double types are when the switch is ON. 4 position dual 3 port valve (A) (A) 4 (B) 2 3 (R2) 5 (R1) 1 (P) N.C. N.C. 4 position dual 3 port valve (B) (A) 4 (B) 2 3 (R2) 5 (R1) 1 (P) N.O. N.O. 4 position dual 3 port valve (C) (A) 4 (B) 2 3 (R2) 5 (R1) 1 (P) N.C.

S07B5 4(A) 2(B) 5(R1) 3(R2) 1(P) 5 (R1) 4 (A) 1 (P) 2 (B) 3 (R2) y t N.O. + N.O. Component Parts S07C5 2(B) No.

0.5MPa 0.5MPa 0.5MPa 0.4MPa 0.4MPa 200 200 300 300 0.4MPa 0.4MPa 0.3MPa 150 150 0.3MPa 0.3MPa 200 200 0.3MPa 100 100 0.2MPa 0.2MPa 0.2MPa 0.2MPa 100 100 50 50 0.1MPa 0.1MPa 0.1MPa 0.1MPa 50 100 150 200 50 100 150 200 0 0 40 80 120 160 200 40 80 120 160 200 0 0 Holding point R (mm) Holding point R (mm) Holding point R (mm) Holding point R (mm) 2.2-3 Wide Opening Air Gripper Series MHL2 Example