Multistage Ejector Series ZL112/212 1

Note 2) Fixed unit: kPa Built-in silencer Port exhaust Nil P Vacuum pressure sensor Digital vacuum pressure switch specifications Nil GN G E EB EE None Adaptor Rc 1/8 With vacuum pressure gauge With digital vacuum pressure switch ZSE4 With digital vacuum pressure switch ZSE4B With digital vacuum pressure switch ZSE4E For E (ZSE4) EB (ZSE4B) 25 26 65 Lead wire length 0.6 (3.0) m Lead wire

Slit Valve

1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.

Guide Table Series MGF ø40, ø63, ø100 1

MGF40 MGF40 20MGF40 MGF40 10 10 10 MGF40 Data MGF40 10 5 4 3 5 4 3 2 2 5 5 1 10 20 30 40 50 100 200 300 400 1 5 4 10 20 30 40 50 100 200 300 400 5 10 50 100 10 50 100 Eccentric distance l (mm) Eccentric distance l (mm) Stroke (mm) Stroke (mm) l = 200 mm l = 300 mm Graph (3) Graph (4) v = 150 mm/s or less v = 200 mm/s or less Graph (7) Graph (8) 20 300 300 200 200 MGF100 MGF100 20 100 100

Compact Cylinder

Z A + Stroke B + Stroke L W E M K J 2 x P (Rc, NPT, G) (Port size) 100 Auto switch Minimum lead wire bending radius 10 H thread effective depth C 4 x N through F Q I E M Z A + Stroke B + Stroke L W G M K J Standard [mm] Bore size Stroke range Without magnet for auto switch With magnet for auto switch C D E F G H I J K L M N P Q W Z A B A B 50 10 to 50 37 29 42.5 34.5 15 18 57 9 M10 x 1.5

Compact Guide Cylinder

, depth OL WA Z XAH9 XB Section XX Section XX XA XL XC HA: T-slot for hexagon bolt Section XX details X 0.02 R T X 0.02 DB DA H VA VB U X PW b a e d c T-slot dimensions 2 x P XAH9 depth XL 2 x P (Plug) XAH9 depth XL S Q G J K PB GB GA [mm] FA PA + Stroke Bore size [mm] a b c d e FB A + Stroke B + Stroke C + Stroke 32 6.5 10.2 5.5 3.5 9.5 40 6.5 10.5 5.5 4 10 50 8.5 12.5 7.5 4 12.5 E The

Series 12-REA ø25, ø32, ø40, ø50, ø63 Sine Rodless Cylinder

25, 32, 40, 50, 63 Sine Rodless Cylinder Series 12-REA How to Order Clean series 12 Special treatment on sliding part Bore size (mm) 12 R E A 25 300 Cylinder stroke (mm) Type Port type Symbol Nil TN TF Rc NPT G Model Bore size (mm) Maximum manufacturable stroke (mm) Model Port size Lubrication Standard stroke (mm) 12-REA25 12-REA32 25 32 40 Rc1/8 NPT1/8 G1/8 Rc1/4 NPT1/4 G1/4 200, 250, 300

Series HAW Water Cooled Aftercooler 1

Description Housing Outside tube Body Flower fin tube assembly Material Note SGP, SS400 STK FC200 C1220T Flower fin Flower fin q w e r q w e r Water chamber cover FC200 t AFF AM Replacement Parts Replacement Parts Misc. HAW22 HAW55 HAW75 HAW37 HAW110 No. Description HAW2 HAW7 Material No.

LMU100/200 Series Mist Spray Unit

1Tank pressure gauge 272 272 153 238 153 238 e e 189.5 153 2 189.5 2 u u w r i w r i o o Material Note Main Parts List Part no. Spare Parts/Replacement Parts Part No. No. Description No. Qty.

Digital Gap Checker

Spacer 1 Stations Part no. 2 ISA-16-2 3 ISA-16-3 4 *1 ISA-16-4 5 ISA-16-5 6 *1 ISA-16-6 w Seal for extra station ISA-15 e Threaded plug with seal ISA-12-m 1 pc. Piping Part no. Rc1/8 ISA-12-A G1/8 ISA-12-C q Joint screws (2 pcs.) ISA-161 e Threaded plug with seal ISA-12*1: Spacers are included for 4 and 6 stations. Bracket ISA-14 DIN rail ISA-5-m L Stations Part no.

Magnetic Separator FHM Series

dimensions 055 55 x t20 100 200 100 x t30 200 x 140 x t40 Magnetic separator Magnetic separator Fluid Iron Content Elimination Performance by Iron Particle Concentration FHMN-055 FHM-100 FHM-200 Fluid: Hydraulic fluid Fluid: Hydraulic fluid Fluid: Hydraulic fluid 100 90 80 70 60 50 40 30 20 10 0 1 5 10 50 100 100 90 80 100 90 80 70 60 50 40 30 20 10 0 100 200 300 400 500 100 200 300 400 500

Series 12-REA Sine rodless cylinder

Series 12-REA Sine rodless cylinder 25, 32, 40, 50, 63 How to Order Clean series 12 Special treatment on sliding part Bore size (mm) 12 REA 25 300 Cylinder stroke (mm) Type Port type Symbol Nil TN TF Rc NPT G Model Bore size (mm) Maximum manufacturable stroke (mm) Model Port size Standard stroke (mm) Lubrication Rc1/8 NPT1/8 G1/8 Rc1/4 NPT1/4 G1/4 12-REA25 12-REA32 25 32 40 200, 250, 300

MGC

timer Grommet 3 wire(NPN) IC 5V, 12V G59F With diagnostic output (2 color) 4 wire(NPN) Latch with dianostic output (2 color) H7LF *Lead wire length 0.5m (Example) B80C 5m Z (Example) B80CZ 3m Z (Example) B80CL N (Example) B80CN * : Manufactured upon receipt of order Stroke Long stroke (mm) Standard stroke (mm) Model Bearing Bore size (mm) 20 25 32 40 50 75, 100, 125, 150, 200 250, 300

Direct Operated Precision Regulator Modular Style Series ARP3000 1

0.25 0.25 0.20 0.20 AMR 0.15 0.15 ITV 0.10 0.10 IC 0.05 0.05 0 0 50 100 150 200 250 300 350 400 450 500 0 0 50 100 150 200 250 300 350 400 450 500 VBA Flow rate (/min (ANR)) Flow rate (/min (ANR)) VE VY1 G Pressure Characteristics PPA Inlet pressure: 2.0 MPa Outlet pressure: 0.8 MPa Flow rate: 60 /min (ANR) Inlet pressure: 2.0 MPa Outlet pressure: 0.3 MPa Flow rate: 60 /min (ANR) AL ARX20

With Factory Installed

When speCllylng mor e than one option, please tisl numerically Ihen atphabetically.

2.0

LPV22 (N.O.) y y r r t i t u u o e e w w q q Component Parts No.

High Speed Pilot Operated

Description Material 1 Body Aluminum die-casted 2 (B) 4 (A) 2 Spool assembly Aluminum/FKM e 3 Plug (For the -X1) Steel 1 High Speed Pilot Operated Solenoid Valve DXT1215 Series How to Order Valves DXT1215 T 5 Wm U 01 N X1 w y e r t u q q Coil type w Rated voltage e Electrical entry M8 connector1 T With power-saving circuit 5 24 VDC Wm WO With straight connector cable Without connector cable

Suction Filter with Case FH99 Series

Flow Rate Characteristics FH99 e Element replacement When the pressure difference reaches 24 kPa during filter operation (actuating the differential pressure indicator), stop operation and either wash or replace the element. If any scratches or damage are found on the O-ring during assembly/disassembly, replace with a new O-ring.

PF-OMN0009_C

DC(+) DC(-) 40 (21) -26No.PF-OMN0009CN-F LED 110% POWER FLOW 10110 POWER POWER FLOW POWER FLOW POWER FLOW POWER FLOW -27No.PF-OMN0009CN-F () PF3W504 PF3W520 PF3W540 PF3W511 PF3W521 (3 mPas(3 cP)) 1 0.54 L/min 216 L/min 540 L/min 10100 L/min 50250 L/min 070 090 () ( ) 3F.S. 2F.S. 5%F.S.(25 ) 2 2 3 1 s 15 V 1 k 420 mA DC12 V 300 DC24 V 600 () DC1224 V10 30 mA

HRX-OM-R005

e 40 40 32 32 1000 1000 25 25 20 20 5 500 5 500 0 0 5 10 15 20 25 30 35 40 5 10 15 20 25 30 35 40 Circulating fluid temperature Circulating fluid temperature 60Hz 50Hz Fig. 9-5 Heating capacity(HRS060-A-20-(BJM)) 9.5.2 HRS060-W-20-(BJM) 2000 2000 Ambient Ambient temperatur temperatur Heating capacityW Heating capacityW 1500 e e 1500 40 32 25 20 5 40 32 25 20 5 1000 1000 500 500 0 0 5 10 15

Heavy Duty Stopper Cylinder Series RSH/RS1H

80 300 300 1.0 RS1H80 RS1H50 200 200 RS1H63 0.9 Operating pressure P [MPa] 0.8 100 100 0.7 10 20 30 40 10 20 30 40 0 0 0.6 Transfer speed [m/min] = 0 Transfer speed [m/min] = 0.1 0.5 0.4 Graphe Graphr Bore size 20, 32/ = 0 Bore size 20, 32/ = 0.1 0.3 0.2 0.1 80 80 0 5000 1000 2000 3000 4000 Lateral load F [N] 32 70 70 60 60 50 50 32 40 40 30 30 20 20 20 20 10 10 0 0 10 20 30 40 10 20