3

X MKF16-Z 393 MK Series Dimensions: 20, 25 The outline dimensions shown are when the rod is retracted.

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

9@0 Seal kit MHY10-PS MHY16-PS MHY20-PS MHY25-PS <16, 20, 25> !7!8!9@0 MHY2-D MHY2-D2 MHY-A1001 MHY-A1601 MHY-A2001 MHY-A2501 Finger assembly ro MHY-A1001-2 MHY-A1601-2 MHY-A2001-2 MHY-A2501-2 <10, 16> e!2 Joint assembly MHY-A1002 MHY-A1602 MHY-A2002 MHY-A2502 <20, 25> e!2!

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

D2012-10-9 9 Series MHY2 Construction Closed condition Size 10 Size 16 Size 20, 25 r o !8 e w !7 t r o !8 e w @0 !7 t r o !8 e w @0 !7 t !5 !5 !5 !6 !6 !0 u !2 i q !1 y !9 !0 u !2 i q !1 y !9 !0 u !3 !2 i q !1 y !9 !4 !4 !

Compact Cylinder with Air Cushion Series RQ

25 have through holes and double end taps in common.

VQ4000

For other kits, order E type control unit.

Title not found

Refer to the dimensions on page 20 for the mounting dimensions. (35) (25) 5.5 1.25 L Dimensions No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 23 35.5 48 60.5 73 85.5 98 123 148 173 198 223 248 L dimension 110.5 135.5 160.5 185.5 210.5 235.5 260.5 40 No. 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 273 298 323 348 373 398 423 448 473 498 L dimension 285.5 310.5 335.5 360.5

MHL2

6@6 <16 to 25> eo!0!4!6@6#0 <32, 40> ei!4!

CJ2

Component Parts No. q w e r t y u No. i o !0 !1 !2 !3 !

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Flange size XMH Symbol Nil C XMH V V V V XYH V V V Type KF (NW) CF Applicable flange size 16, 25, 40, 50 16 (034), 40 (070) Size 16 25 40 50 XYH Nil KF (NW) 25, 40, 50 3.

76

Trace the arrow mark from the intersection D to obtain the intersection E. 4. The intersection E is the dew point under pressure 102 psi (0.7 MPa) with an ambient temperature 86F (30C) and a relative humidity 60%. The value for E is 144F (62C). 5. Trace the intersection E upward, and trace from the intersection D leftward to obtain the intersection C. 6.

ML2B

-X 20Data 10-13-6 10-13-7 5 Stroke Reading Rodless Cylinder with Brake Series ML2B 25, 32, 40 How to Order ML2B 25 500 L Y7BW Number of auto switch Applicable counter/Controller Basic type Series CEU1 Series CEU5 Series CEU2 Nil S n 2 pcs. 1 pc. n pcs.

ML2B

TA 7 12 12 FH 12 16 16 FF 6 6 6 FC 13 17 17 FB 33 43 43 FA 46.7 67.3 67.3 EY 53.5 67 81.5 EC 6.5 8.5 9.5 EB 20 25 31 ED 60 74 94 EA 10 12 15 h 3.5 4.5 4.5 Applicable cylinder ML2B25 ML2B32 ML2B40 10-13-15 13 Series ML2B Dimensions Side support A MY-SA 2-G F E 2-H C D A B Side support B MY-SB 2-J C D A B (mm) A 61 70 87 B 75 84 105 C D E F G H J Part no.

CXS

socket head set screw) D 1 L Z I M 1 G 0.2 (G) A H P 6.3 5 NN OO (Hexagon head bolt) PP (Hexagon nut) E N X (Hexagon socket head cap screw) F (Through) V (Opposite side: Same) (L) (Z) TT QQ (G) T Q U R UU (Piping port) (Opposite side: Same) (I) (L) (Z) N W C (mm) M N OO A B C D E G H I J K L NN P F Model 2-5.5 through 2-9.5 counterbore with depth 5.3 2-M4 x 0.7 with depth 6 64 25 62 23 11.5

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

105.5 76 25 114 65 17.5 8 32 64 7 52 6 38.5 25 M5 x 0.8 17-5-48 7 Series LVD Integral Fitting Type (Hyper Fittings) With flow rate adjustment (Max.

Short Stroke Electric Actuator Series LX

35 (6) 8 (15) 1 0.2 31 Photo micro sensor wire (300mm) 5H9 +0.030 0 depth 5 10 13 1.5 [5.5] 6 Motor wire (300mm) 25 (4) 30.5 10 (39.5) E Stroke + 135 The dimension inside [ ] shows the location at which the home position switch operates.

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

2 i r i t y w w e !0 !0 !2 !5 o !0 !4 q q y u !1 !3 r t !1 M5 type U10/32 type M5 type U10/32 type !1 y !2 u !4 !3 i !5 u e r r t w e o !0 i o q q t y !0 !2 w !

1.63

size (mm) A E Bore size (mm) A E 25 st or less Over 25 st 100 st or less Over 100 st 25 st or less 50 st or less Over 25 st 100 st or less Over 50 st 100 st or less Over 100 st Over 100 st 50 st or less Over 50 st 100 st or less Over 100 st D20 25 32 40 50 63 57.5 53.5 62.5 55.5 37.5 33.5 42.5 35.5 20.5 16.5 21.5 14.5 109.5 109.5 123 123 89.5 89.5 103 103 53.5 61.5 70.5 77.5 94.5 96.5 9

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

(Including insulating material) 1.27 mm 2.35 mm Connection type Screw tightening Rated current 4 A 8 A 9 A Rated voltage 60 V 600 V 250 V Contact resistance 5 mW or less Insulation resistance 100 MW or more Withstand voltage 1.0 kV 1.4 kV 4 kV Rating/Performance temperature Connector 25 to +90C 25 to +80C 25 to +85C Cable 25 to +80C 10 to +105C Ambient Min. bending radius (Fixed) 59 mm

7ND9071en

_/I41 (* -50 to +85 C Note *) Not allowed with external junction box (J, -40 C) ND9_E1/I09 ND9...E1/I45 -25 to +60 C -25 to +75 C -25 to +85 C ND9_E1/I56 -25 to +60 C -25 to +75 C -25 to +80 C ND9_E1/I32 -25 to +60 C -25 to +70 C -25 to +70 C Table 14 Ambient temperatures, ND9_U 9.2 Installation on a valve controller Variant type IS Class I, Division 1, Groups A, B, C, D, T4...T6 IS Class

Power Clamp Cylinder

2 u y e i For Asia For North America For Europe For France Special r w !1 Replaceable Kits List Table 1 Contents Kit no. Bore size (mm) Description Code Opening angle 30 H e Switch holder y Proximity switch u Parallel pin i Sheet gasket !2 Cover cap screw 45 G 40 CKZT-S040 Note 1) T P Switch cassette 60 F 75 E 90 D q Stay o Spring washer !