Magnet: Built-in, Mounting: Rear Flange, Style: Aluminum Tube, Bore Size: 80mm, Thread: NPT, Stroke: 600mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewied Connector: 0.5m Cord Length, M12-4 Pin Connector, Number: -

Magnet: Built-in, Mounting: Rear Flange, Style: Aluminum Tube, Bore Size: 80mm, Thread: NPT, Stroke: 100mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: A54--Reed, DC Volt >5<24, AC Volt <200, LED, Lead Wire or Prewied Connector: 3m, Number: -

Magnet: Built-in, Mounting: Rear Flange, Style: Aluminum Tube, Bore Size: 80mm, Thread: NPT, Stroke: 150mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: A54--Reed, DC Volt >5<24, AC Volt <200, LED, Lead Wire or Prewied Connector: 3m, Number: -

Magnet: Built-in, Mounting: Rear Flange, Style: Aluminum Tube, Bore Size: 80mm, Thread: NPT, Stroke: 150mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: A54--Reed, DC Volt >5<24, AC Volt <200, LED, Lead Wire or Prewied Connector: 3m, Number: 3 pcs.

Magnet: Built-in, Mounting: Rear Flange, Style: Aluminum Tube, Bore Size: 80mm, Thread: NPT, Stroke: 200mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: A54--Reed, DC Volt >5<24, AC Volt <200, LED, Lead Wire or Prewied Connector: 3m, Number: -

Magnet: Built-in, Mounting: Rear Flange, Style: Aluminum Tube, Bore Size: 80mm, Thread: NPT, Stroke: 350mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: A54--Reed, DC Volt >5<24, AC Volt <200, LED, Lead Wire or Prewied Connector: 3m, Number: 3 pcs.

Magnet: Built-in, Mounting: Rear Flange, Style: Aluminum Tube, Bore Size: 80mm, Thread: NPT, Stroke: 75mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: A54--Reed, DC Volt >5<24, AC Volt <200, LED, Lead Wire or Prewied Connector: 3m, Number: -

Magnet: Built-in, Mounting: Rear Flange, Style: Aluminum Tube, Bore Size: 80mm, Thread: NPT, Stroke: 300mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: A54--Reed, DC Volt >5<24, AC Volt <200, LED, Lead Wire or Prewied Connector: 5m, Number: 4 pcs.

3 Port Solenoid Valve SYJ300/500/700 Series

3 Port Solenoid Valve SYJ300/500/700 Series Low Power Consumption (0.5W) Interchangeable with the NVJ and NVZ Vacuum Applicable Base Mounted/Body Ported Configurations P R O D U C T S Q Q Q Table of Contents Q Q Q Q Features & Benefits .pages 4-5 Q Preferred Option Program.page 7 Q Specifications.page 9 Q SYJ300 .pages 10-12 SYJ500 .pages 13-15 SYJ700 .pages 16-18 Q

Direct Operated, 2 Port Solenoid Valve, For Water, Oil, Steam, Air, Series VX

For Air Upstream pressure of valve P1 1.0 MPa 1.0 Downstream pressure of valve (P2) MPa Downstream pressure of valve (P2) MPa 0.8 Subsonic Critical pressure 0.9 0.6 0.7 0.8 Sonic 0.4 0.6 0.5 0.4 0.2 0.3 0.2 0.1 0 VX211 VX22 VX23 VX2 4 VX2 5 VX2 60-02 VX2 602 50 100 150 200 250 300 350 3 100 200 300 400 500 600 4.5 200 400 600 800 1,000 1,200 3 2 3 2 3 2 3 2 03 04 6 500 1,000 1,250 8 500

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Actuators -ARP20/ARP20K 10 21 -ARP30/ARP30K 10 21 -ARP40/ARP40K 10 21 Clean room compliant, copper-free, fluorine-free, silicone-free Air Preparation Equipment Clean room compliant Description Symbol Body size Body size 30 20 40 20 40 30 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting + Semi-standard Nil R Flow direction d

Series HAW Water Cooled Aftercooler 1

Accessory (Option) Basic size (Applicable compressor kW) F With screw flange D With auto-drain Port size Symbol 2 Screw type Reciprocating type 2.2 7.5 15 22 37 55 75 04 06 14 20 30 Rc 1 2 Rc 3 4 Rc 1 1 2 Rc 2 3B flange HAW2 HAW7 HAW22/37 HAW55/75 HAW110 Caution on Design 7 22 22 Warning 1.

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Actuators -ARP20/ARP20K 10 21 -ARP30/ARP30K 10 21 -ARP40/ARP40K 10 21 Clean room compliant, copper-free, fluorine-free, silicone-free Air Preparation Equipment Clean room compliant Description Symbol Body size Body size 30 20 40 20 40 30 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting + Semi-standard Nil R Flow direction d

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Applications) Direct Operated Precision Regulator with Backflow Function (For Special Applications) Series ARP20K to ARP40K 10 20 2110 20 21-ARP20/ARP20K 10 20 21 -ARP30/ARP30K 10 20 21 -ARP40/ARP40K 10 20 21 Description Symbol Body size 20 30 40 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting + Semi-standard Nil R Flow direction d

EX250-SCA1A_eng

Before Use Fieldbus device EX250-SCA1A : Output numbers are assigned to stations from side D to U of manifold in order. (Refer to manual of each valve manifold for the directions of side D and U). : Standard manifold is wired in double. Output numbers are assigned to side A and B alternatively. In case of single solenoid valve, output on side B is free.

EX245-FPS1_2_3_eng

Red ON Power source From US2 Installation Pin allocation of M12 4-pins (D-code) Socket for EX245-FPS3 The operation manual is intended for those who have knowledge of machinery using pneumatic equipment, and have sufficient knowledge of assembly, operation and maintenance of such equipment. Only those persons are allowed to perform assembly, operation and maintenance.

PFxx-OMO0007CN

NPN(1 )+ (15 V) PF2A7--29--X560 NPN(1 )+ (420 mA) 22 PF2A7--68--X560 PNP(1 )+ (15 V) PF2A7--69--X560 PNP(1 )+ (420 mA) / ZS-37-A () 3 m 100 g ZS-37-B (L ) 3 m 100 g ZS-29-T 4 (312 ) 40 g -11No.PF-OMO0007CN (IN ) 1 DC(+) 2 OUT2 3 DC(-) (OUT ) 4 OUT1 INOUT (UP) (SET) (DOWN) LED (OUT1) (OUT2) (OUT1) LED (OUT1) OUT1 ON (OUT2) OUT2 ON (UP) ON/OFF (SET) (DOWN) ON/OFF -12No.PF-OMO0007CN D

PF-OMN0011_C

[F 2] OUT2 -37No.PF-OMN0011CN-C d. ([ tP]) 4. [F 2] OUT2 e. ([ tPL]) [ tPH] or [ tnH] ([ tPH]) 4.

LEC-T1_C

115 - 5 () 116 - 9.3 50mm 9.4 ( ) 117 - 9.5 9.6 D 100 9.7 118 - 10.

Clean Rodless Cylinder Series CYP

e f g Nil Reed switch L R Solid state switch S h Nil L R S Operating direction Left Right a b h g d c f e Note) Lead wire length symbols 0.5m .