PF2D

Real-time switch output ( ) Unit switching Hysteresis mode Display Real-time flow rate l/min Accumulated flow l ZSE ISE ON YES OFF P-1 P-2 GPM gal (US) PSE Real-time flow rate GPM = gal (US)/min P Window comparator mode H: Hysteresis Z I SE3 Note) Fixed SI unit (l/min, l, m3 or m3 x 10) will be set for the type without the unit switching function.

3 Position Cylinder Series RZQ

A Graph 1 Graph 2 120 60 110 B 100 50 C P1 63 63 90 80 40 70 Regulator Circuit C Load weight (kg) Load weight (kg) P2 60 30 50 50 A 50 Regulator valve 40 20 40 40 30 B 32 32 20 10 C P1 10 0 0 0.4 0.3 0.3 0.5 0.6 0.7 Operating pressure (MPa) 0.4 0.5 0.6 0.7 Operating pressure (MPa) Selection example Confirmation of allowable kinetic energy Selection conditions: Transfer direction: Vertical

1

) 2 x 5.5 Without spacer With spacer 2 x M5 thread depth M 15 15 Spacer Grommet: GS Flat terminal: F Conduit: C 280 G F F G 11 300 G F Terminal part Flat terminal connector 11 23 9 H C 15 6.5 H C H C G1/2 Terminal: T DIN terminal: D F G Applicable cable O.D.: 6 to 12 F G Width across flats 22 G1/2 32 (44) H 31.5 25 C H C G1/2 J J Dimensions [mm] Model A B Bs C D E F L M P [inch] Grommet:

Electric Slide Table / High Precision Type 《 AC servo motor 》

]Absolute 22-bit encoder (Resolution: 4194304 p/rev) Encoder [LECSC-T]Absolute 18-bit encoder (Resolution: 262144 p/rev) Power Horizontal 45 65 consumption [W] *5 Vertical 145 175 Horizontal 2 Standby power consumption when operating [W] *6 Vertical 8 Max. instantaneous power consumption [W] *7 445 724 Type *8 Non-magnetizing lock specifications Lock unit Holding force[N] 131 255 157 308

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Do not connect the white wire of the sensor to c of the display unit.

Profile Design ISO/VDMA Air Cylinder Series CP95

65 12 33 11 30 32 45 45 12 12 63 15 16 9 52 67 14 37 11 35 40 50 50 12 15 80 18 16 11 66 86 18 47 12.5 40 50 60 63 14 15 100 18 20 11 76 96 20 55 13.5 50 60 70 71 15 19 Mounting type CR Rear clevis with ball joint A B C D EN ER F G E L M N P H R (mm) 0.2 maxi JS15H7 -0.1 maxi H11 H13 H13 0.5 0.5 0.5 32 32.5 10.5 22 10 14 15 30 10 6.6 45 10.5 5.5 5 40 38 12 25 12 16 18 35 10 6.6 55 11

MIW/MIS

D-F9WV D-F8 Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E 18.5 31 6.5 20.5 41 8.5 20.5 33 4.5 17 20.5 31 4.5 15 20.5 41 4.5 15 20.5 51 4.5 35 22.5 43 6.5 27 22.5 33 6.5 17 22.5 43 6.5 27 22.5 53 6.5 37 MIW12-12D MIW20-20D 6 4 4 2 18.5 29 6.5 20.5 31 8.5 MIS12-10D MIS20-10D 4 2 6 4 2.5 4 18.5 39 6.5 20.5 41 8.5 MIS12-20D MIS20-20D 6 4

Escapements Series MIW/MIS

D-F9WV D-F8 Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E 18.5 31 6.5 20.5 41 8.5 20.5 33 4.5 17 20.5 31 4.5 15 20.5 41 4.5 15 20.5 51 4.5 35 22.5 43 6.5 27 22.5 33 6.5 17 22.5 43 6.5 27 22.5 53 6.5 37 MIW12-12D MIW20-20D 6 4 4 2 18.5 29 6.5 20.5 31 8.5 MIS12-10D MIS20-10D 4 2 6 4 2.5 4 18.5 39 6.5 20.5 41 8.5 MIS12-20D MIS20-20D 6 4

Compact Vacuum Ejector Series ZQ

port) Note 4) (M3 x 0.5, piping not required) 71.9 (74.9) 66.9 (63.1) (M5 x 0.8) Vacuum port (V port) Note 4) 57.3 (M5 x 0.8) SM C 29.4 3 20.2 30.5 P 20.3 9.7 V Exhaust part 17.7 22.8 0.8 (Grommet type) 3 107 10 Note 1) The above dimensions are for ZQ11U-K1 -DC.

ZQ

None Vacuum switch electrical entry Connector type Lead wire length: 0.6 m C Pilot valve (Refer to Table (1).)

Air Cylinder RSQ Series Stopper Cylinder

Lad sire Oi ptool \inyt. @3.4, o.2mn1, 2 w1r6 (red, b ack). 0.5m ' . lmpacl sistance J00m/s: {30 6G) . hsu aron resistance ---50Mo or more underl6sr vo tage soovDc (belw6n case and cabre) . w thsland vo tage l500VAC 1 min (between case aid bte) .Ambiontlemperalure 50 140"F (10-60"C) ' Polecton skucture lEC529 spec.lP67, warelprcoj (JtS C 0920), oibrcoj ' Suffx L lor the modelwlth a 3m long

FSQ seies

Lad sire Oi ptool \inyt. @3.4, o.2mn1, 2 w1r6 (red, b ack). 0.5m ' . lmpacl sistance J00m/s: {30 6G) . hsu aron resistance ---50Mo or more underl6sr vo tage soovDc (belw6n case and cabre) . w thsland vo tage l500VAC 1 min (between case aid bte) .Ambiontlemperalure 50 140"F (10-60"C) ' Polecton skucture lEC529 spec.lP67, warelprcoj (JtS C 0920), oibrcoj ' Suffx L lor the modelwlth a 3m long

PSxx-OML0002CN

C4L 4mm5/32 inch C6L 6mm B N7L 1/4 inch D + N NPN1 P PNP1 A NPN2 B PNP2 C NPN1+ D NPN1+ E PNP1+ F PNP1+ 1 L (2 m) 1 (2 m 1 G 1 M SI2 P (psi)1 1NP3 4 1 2kPaMPa -8No.PS-OML0002CN-G / A ZS-38-A1 (M35 L 2 ) B ZS-38-A2 (M35 L 2 ) C ZS-38-A3 (M35 L 2 ) ZS-27-C (M38 L 2 ) + ZS-27-D (M38 L 2 ) ZS-38-3L 3 1 2m ZS-38-4L 4 2 2m ZS-38-3G 3 1 2m ZS-38-4G 4 2 2m ZS-38-5L 3 1m ZS-38-U

Micro-Mist Separator with Prefilter Series AMH

---Ht-t---t-+-H I--i IN o I w c.

Micro Mist Separator with Prefilter AMH Model Model AMH250 AMH350 AMH450 AMH550 AMH650 AMH850 AMH150 Series AMH can separate and (1) remove aerosol state oil mist in 500 1000 2000 3500 6000 12000 200 Rated flow (l/min(ANR)) compressed air and remove Po

Symbol Order Made P.4.6-21 4.6-15 Micro Mist Separator with Prefilter Series AMH AMH150 to AMH850 How to Order AMH 250 03 J B Body size Options J Drain guide 1/4B female thread R IN/OUT reversal 150 1 8 250 1 4 350 3 8 450 1 2 550 3 4 650 1 850 11 2 Accessories(Options) Description None Bracket Symbol T Element service indicator B N.C.auto drain C N.O.auto drain D Note) Refer to p.4.7-7

5 Port Air Operated Valve Series VFA3000 1

+ 0.1) to 0.9, P: Operating pressure 0.1 to 0.9 3 position 0.15 to 0.9 Ambient and fluid temperature (C) 10 to 60C (No freezing.

70astamb1

/s) 50 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 C85 -XC3 Special port location 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 -XC4 With heavy duty scraper C95 80 1400 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Heat resistant cylinder (110 C) -XC5 100 1500 25, 50, 75, 100, 125, 150, 175

mb1

/s) 50 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 C85 -XC3 Special port location 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 -XC4 With heavy duty scraper C95 80 1400 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Heat resistant cylinder (110 C) -XC5 100 1500 25, 50, 75, 100, 125, 150, 175

MQQ

P-80 (N)

CXT

Operating pressure P (MPa) P 0.7 MPa MTS 4.