Vacuum System Peripherals:

SUP/EXH block assembly mounting position U D side D B U side 2 to 10 stations OMRON Corp.: SYSBUS Wire System C SHARP Corp.: Satellite I/O Link System D Matsushita Electric Works, Ltd.: MEWNET-F System E NKE Corp.: Uni-wire System (16 points output) F1 2 to 15 stations Both sides Special specifications M SUP/EXH block assembly specifications When creating the special specifications, complete

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

B A C D A B C D Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 6 46 26 46 26 30 42 42 30 10 48 28 48 28 32 44 44 32 Electrical entry (Fetching direction) Type Model Features D-A90 D-Z80 D-Y69A D-Y69B D-Y7PV D-Y7NWV D-Y7PWV D-Y7BWV 50, 63 Grommet (In-line) Without

MG

C 0.2 C 0.2 B 0.2 B 0.2 A 0.2 A 0.2 D Bore size (mm) A (mm) B (mm) C (mm) Bore size (mm) A (mm) B (mm) C (mm) D (mm) (mm) Hexagon socket head cap screw Hexagon socket head cap screw MGPM MGPL 12 50 50 18 41 10 8 M4 x 0.7 140 50 116 32 M12 x 1.75 16 80 56 22 46 12 10 M5 x 0.8 214 66 170 47 M16 x 2 Connection thread size Proper tightening torque (Nm) a dimension 20 72 24 54 14 12 M5 x 0.8 25

CL

D C B H d Tube I.D.

CNA

switch Auto switch Ht 24.5 Ht 15 A 33 B A 33 B D-A3 D-G39/K39 D-A3C D-G39C/K39C G 1/2 (Applicable cable O.D. 6.8 to 9.6) Auto switch G 1/2 HW A 49 B (Applicable cable O.D. 6.8 to 9.6) Hs 49 Hs 34 56 S M C A U T O S W I T C H S M C A U T O S W I T C H A 36 B 36 Auto switch D-F5/J5 D-F5NTL D-F5W/J59W D-F5BA/F59F D-G5/K59 D-G5W/K59W D-G5BAL D-G59F/G5NTL Hs Auto switch Hs Auto switch Hs Ht 24.5

CNA

Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 49 Hs 34 56 S M C A U T O S W I T C H S M C A U T O S W I T C H A 36 B 36 Auto switch D-F5/J5 D-F5NTL D-F5W/J59W D-F5BA/F59F D-G5/K59 D-G5W/K59W D-G5BAL D-G59F/G5NTL Hs Auto switch Hs Auto switch Hs Ht 24.5 SMC SMC Ht A 30 (33) B 14 A

Large Bore Compact Cylinder Series CQ2

C A D Model D C Model D C Mounting bolt (mm) Mounting bolt (mm) M18 x 125 l M18 x 135 l 125 135 C (D) Q2B18010DC C (D) Q2B20010DC M18 x 135 l M18 x 145 l 135 145 C (D) Q2B18020DC C (D) Q2B20020DC M18 x 145 l M18 x 155 l 145 155 C (D) Q2B18030DC C (D) Q2B20030DC M18 x 155 l M18 x 165 l 36 155 39 165 C (D) Q2B18040DC C (D) Q2B20040DC M18 x 165 l M18 x 175 l 165 175 C (D) Q2B18050DC C (D) Q2B20050DC

Table of Contents

C D E F Dimensions Part no.

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

(in) Auto Switch Mounting Position (NCDMC-C, NCDME-C) (in) D-B5 D-B6 D-C7 D-C80 D-C73C D-C80C D-B5 D-B6 D-C7 D-C80 D-C73C D-C80C D-B59W D-H7 D-H7C D-H7W D-H7BAL D-H7NF D-B59W D-H7 D-H7C D-H7W D-H7BAL D-H7NF D-H7LF D-G59 D-K59 D-H7LF D-G59 D-K59 Auto switch model Auto switch model B 0.40 0.44 0.65 0.64 0.69 0.96 B 0.84 0.72 0.89 0.98 0.88 1.33 A 0.98 0.91 1.13 1.36 1.26 1.71 A 0.98 0.91 1.13

CLA

ack) 0-A54, D-B54, D-A44(C), D-A34(C) 0-A67 Zener <;Siode Reed SWitch , Blue b_ ~ue a, (black) <'ad) H Surge ab$Ol'bef D-A56 D-A33(C) :R~ ~tC h ---R;~~~r-: I-) ~: ( ';' ) L 0 ' , ' : Zener diode : ,--_.

High Power Cylinder Series RHC

d D D C C H H B B (mm) Material: Carbon steel (mm) Material: Carbon steel B Part No.

VQ4000

D side Standard type (1 W) Low wattage type (0.5 W) External pilot Nil Y R (1) (2) 3 m 2-5-11 Base Mounted 12 Series VQ4000 Kit (D-sub connector kit) F Applicable connector: D-sub connector (25P) (Conforming to MIL-C-24308) 70 38 2-Rc 1/8 (Pilot EXH port) 18 18 17.5 PE 30 42 R2 R1 P 1 3 5 2n-Rc 1/4, 3/8, C8, C10, C12 4(A), 2(B) port SMC 6-Rc 1/2 Rc 1/4: Rc 1/4 thread 1(P), 5(R1), 3(R2) port

Series KDM Rectangular Multi-connector

O f o r e b m u N g n i t c e n n o c s e b u t h c n I h c n I h c n I c i r t e M c i r t e M c i r t e M 8 / 1 1 0 P 0 1 M D K 1 0 S 0 1 M D K 2 . 3 3 2 P 0 1 M D K 1 0 S 0 1 M D K e u l B 2 3 / 5 3 0 P 0 1 M D K 3 0 S 0 1 M D K 4 4 0 P 0 1 M D K 3 0 S 0 1 M D K 0 1 d e R 4 / 1 7 0 P 0 1 M D K 7 0 S 0 1 M D K 6 6 0 P 0 1 M D K 7 0 S 0 1 M D K 6 1 / 5 9 0 P 0 1 M D K 9 0 S 0 1 M

IDU/IDF

dryer Applicable dryer Port size Rc E D D C A B Part No.

CXS

B A C D-Z7, D-Z8, D-Y7W D-Y5, D-Y7 D-Y6, D-Y7V D-Y7WV D-Y7BAL Bore size (mm) B A C D C D C D 20 36.5 (35) 2.5 (1) 38.5 4 30.5 3.5 6.5 40.5 25 38 (36.5) 4 (2.5) 40 5.5 32 2 8 42 32 48.5 (47) 5.5 (4) 50.5 7 42.5 0.5 9.5 52.5 Auto switch mounting and mounting dimensions are same as those for the standard type.

CE

bore size (mm) D C d H B C D Part no.

CE

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 30 d Applicable bore size (mm) D C d D C B H Part no.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

C L2 (KF flange) Fn Fd Fc C (Fc) L1 (K flange) (CF flange) A B K S M J H G A (mm) Model A 123 170 183 217 256 B 48 66 79 100 117 C 1 2 2 3 3 D 40 55 75 87 114 Fn 95 110 Fd 70 114 Fc 26 41 52 70 83 G 41 63 68 72 98 H J K P.C.D L1 6-6.6 8-8.4 L2 XMD-25 XMD-40 XMD-50 XMD-63 XMD-80 50 65 70 88 90 16 20 20 20 20 7.5 15 17.5 19.5 26.5 P.C.D 58.7 P.C.D 92.1 C D XYD/In-line type G Fd C (

MGG

R Y + Stroke View D-D' 63 to 100 Reinforcing bracket Mounted in case of 301mm or longer strokes Front mounting flange Width across flats HT B HS C D View C-C' HU D' C' A R Y + Stroke View D-D' Auto switch mounting position Auto switch mounting height (mm) (mm) D-A72, A7H, A80H D-A73C, A80C D-F7, F7V, F7W D-F7WV, F7BAL D-J7 D-A7H, J79W D-A80H, F7BAL D-F7, F7F D-J79, F7NTL D-F7W D-A7, A8 D-F7V

SZ3000

D Side U Side C Switch specifications w How to Order Valves Nil J Without switch With switch Enter the symbols for the required specifications in the blanks below.