Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

The G thread is unavailable. If it is required, select the R thread type (Nil) instead. Please contact SMC regarding the connection thread NPT and pressure gauge supply for psi unit specifications. Note 3) Includes one O-ring and 2 mounting screws. [ ]: Pressure gauge cover only.

Series CQ2

IEC529 standard IP67, watertight (JISC0920) Weight Table Unit: g (oz.)

Microspeed Cylinder

Bore size 12 16 20 25 L F G D 12mm 16mm 20mm 25mm Cushion/Rod end threads Standard (rod end female threads) With rubber bumper Rod end male threads Combination of the above specifications is possible.

AMP

Flow direction Right Down With element service indicator AMP220 Rc NPT AMP320 AMP420 G Features 1 Exhaust Cleaner for Clean Rooms Series AMP How to Order AMP 2 0 2 03 Optional specifications Body size None Flow direction RightDown With element service indicator Nil R T 2 3 4 1/4 standard 3/8 standard 1/2 standard Element construction Accessories (optional) Nil None 2 2 stage B With

Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25

Bore size 6 10 16 20 25 6 mm 10 mm 16 mm 20 mm 25 mm Port thread type Nil M thread Rc NPT G 6 to 16 TN TF 20, 25 Series MQM is not auto switch capable. Mounting Bracket/Accessories L: Foot Note F: Front flange G: Rear flange C: Single clevis D: Double clevis Mounting bracket B: Basic (1 pc.) (1 pc.) (2 pcs.) (1 pc.)

IDX-OM-W020

: inch (mm) 10mm N 3/8 B Q E D A G C F 1 J 31.5 [820] P L K M N H (L=2800) IDFB4E/6E/8E/11E-11 1. : inch (mm) 10mm N 3/8 A B E D Q G C F 1 J 31.5[800] H N M 4-0.5 (L=2800) [4-13] 6-3 6 3 IDFB Series IDX-OM-W020 6 IDFB15E-11 1. : inch (mm) 10mm N 3/8 E D B A Q G C F (820) K L P N M H J 4-13 (L=2800) (inch [mm]) A B C D E F G H J K L M N P Q IDFB3E 3/8 8.9 16.1 18.6

IDX-OM-W035

] (M10) Unitinch [mm] A B C D E F G H J K L M N P Q R 31.5 34.2 IDFB55E 2 1.4 [800] [868] 18.5 33.7 5.0 17.9 4.3 9.8 2 0.5 19.70.1 3.0 27.60.04 20.7 20.40.2 [470] [855] [128] [455] [110] [250] [50] [13] [5002] [75] [7001] [526] [5195] [36] 35.4 38.1 IDFB75E 2 [900] [968] IDFB Series 6-3 6-2 IDX-OM-W035 6 6-4 IDFB22E-11 IDFB22E/37E-23 R GFCI GFCI R GFCI R GFCI L N PE R TB1 PE N L 1 2

ZFC Series

L O L G H F K J E D I A B C 2-4.5 A B C D E F G H I J K L Model 4 ZFC100-04 6 ZFC100-06 53.2 9.1 30 14.1 10 18 11.6 19.5 23 20 29 5/32" ZFC101-03 1/4" ZFC101-07 6 ZFC200-06 8 ZFC200-08 67 15.5 34 17.5 14 22 15.6 23.1 27 24 35 1/4" ZFC201-07 5/16" ZFC201-09 Element Replacement Element replacement procedure 1) Stop operation and reduce the filter's internal pressure to atmosphere. 2) Turn cover

NCRAI seies

q NC G RA1B with Auto swllch cap"ou,O J T With Auto Swllch Capsbiliry J | | D-withbuin-inmasner J I &-*"-l See above Bor See above ,f The stsrda|d liead wire length is 18 inches. "L' is addecl for 10loot long lead wire.

NVEPA|VEFseies

UJ I 2-Forled \bBion DIMENSIONS A B c o E F G H J K M P R s T 1.57 (40) 2.52 (64) 2.20 (56) 1.77 (45) 4.80 (1221 1.97 {50} 0.98 (25) 1 . 1 0 (28) 0.51 (13) 4.45 (113) ?

It is equivalent IP40 without cover.Built-in sensor type, External sensor type Note 3)10 years when deenergized (EEPROM)M5 female (built-in sensor type)Enclosure: POM Display: PC Gasket: NBRPanel mount adapter: POMDisplay protective cover: PCApprox. 330 g (Built-in sensor type)Approx. 345 g (External sensor type)

It is equivalent IP40 without cover.Built-in sensor type, External sensor type Note 3)10 years when deenergized (EEPROM)M5 female (built-in sensor type)Enclosure: POM Display: PC Gasket: NBRPanel mount adapter: POMDisplay protective cover: PCApprox. 330 g (Built-in sensor type)Approx. 345 g (External sensor type)

It is equivalent IP40 without cover.Built-in sensor type, External sensor type Note 3)10 years when deenergized (EEPROM)M5 female (built-in sensor type)Enclosure: POM Display: PC Gasket: NBRPanel mount adapter: POMDisplay protective cover: PCApprox. 330 g (Built-in sensor type)Approx. 345 g (External sensor type)

It is equivalent IP40 without cover.Built-in sensor type, External sensor type Note 3)10 years when deenergized (EEPROM)M5 female (built-in sensor type)Enclosure: POM Display: PC Gasket: NBRPanel mount adapter: POMDisplay protective cover: PCApprox. 330 g (Built-in sensor type)Approx. 345 g (External sensor type)

It is equivalent IP40 without cover.Built-in sensor type, External sensor type Note 3)10 years when deenergized (EEPROM)M5 female (built-in sensor type)Enclosure: POM Display: PC Gasket: NBRPanel mount adapter: POMDisplay protective cover: PCApprox. 330 g (Built-in sensor type)Approx. 345 g (External sensor type)

It is equivalent IP40 without cover.Built-in sensor type, External sensor type Note 3)10 years when deenergized (EEPROM)M5 female (built-in sensor type)Enclosure: POM Display: PC Gasket: NBRPanel mount adapter: POMDisplay protective cover: PCApprox. 330 g (Built-in sensor type)Approx. 345 g (External sensor type)

It is equivalent IP40 without cover.Built-in sensor type, External sensor type Note 3)10 years when deenergized (EEPROM)M5 female (built-in sensor type)Enclosure: POM Display: PC Gasket: NBRPanel mount adapter: POMDisplay protective cover: PCApprox. 330 g (Built-in sensor type)Approx. 345 g (External sensor type)

It is equivalent IP40 without cover.Built-in sensor type, External sensor type Note 3)10 years when deenergized (EEPROM)M5 female (built-in sensor type)Enclosure: POM Display: PC Gasket: NBRPanel mount adapter: POMDisplay protective cover: PCApprox. 330 g (Built-in sensor type)Approx. 345 g (External sensor type)

It is equivalent IP40 without cover.Built-in sensor type, External sensor type Note 3)10 years when deenergized (EEPROM)M5 female (built-in sensor type)Enclosure: POM Display: PC Gasket: NBRPanel mount adapter: POMDisplay protective cover: PCApprox. 330 g (Built-in sensor type)Approx. 345 g (External sensor type)

It is equivalent IP40 without cover.Built-in sensor type, External sensor type Note 3)10 years when deenergized (EEPROM)M5 female (built-in sensor type)Enclosure: POM Display: PC Gasket: NBRPanel mount adapter: POMDisplay protective cover: PCApprox. 330 g (Built-in sensor type)Approx. 345 g (External sensor type)