CG1

,B6 D-C7,C8 D-C73C D-C80C D-G5 D-K5 D-G5NTL D-H7W D-H7F D-H7BAL D-B59W D-H7 D-H7C D-C73C D-C80C D-G5W, K59W D-G59F D-G5BAL Bore B 16 (24) 16 (24) 17 (25) 19.5 (28.5) 24 (36) 24 (36) 32.5 (46.5) 32.5 (46.5) B 20.5 (28. 5) 20.5 (28.5) 21.5 (29.5) 24 (33) 28.5 (40.5) 28.5 (40.5) B 17.5 (25.5) 17.5 (25.5) 18.5 (26.5) 21 (30) 25.5 (37.5) 25.5 (37.5) 34 (48) 34 (48) B 18 (26) 18 (26) 19 (27) 21.5

Fieldbus system EtherNet/IP TM compatible SI unit

If turned too far, it will become hard to remove the connector. (1) (2) (3) D-sub socket connection method is explained below. (1)Align the D-sub socket connector of the unit and the plug connector of the cable. (2)Insert the plug connector of the cable into the D-sub socket connector of the unit vertically.

Vacuum Unit

ZK2 CH A 2 04 L A KQ2P 06 Applicable stations 02 For 2 stations manifold 04 For 4 stations manifold 06 For 6 stations manifold 08 For 8 stations manifold 10 For 10 stations manifold d Models and Dimensions D Symbol Applicable size d A L D Weight [g] Note 06 6 18 35 8 1 White 08 8 20.5 39 10 2 White 07 1/4" 18 35 8.5 1 Orange 09 5/16" 20.5 39 10 2 Orange Connector type 1 D sub-connector (25

High Vacuum Angle Valve

Example) XLA-25H0-2M9NJLA-XAN1A 18 XLm Series Dimensions XLA/F (With D-M9mJm) C E E C E Fn D Heat-resistant auto switch H B A Heater G A [mm] Series Valve size A B C D E Fn G H 25 50 121 48 27 12 40 26 44 40 65 171 66 39 11 55 41 67 50 70 185 79 46 11 75 52 72 XLA XLF XLC/G25, 40 (With D-M9mJm) XLC/G50 (With D-M9mJm) C E C E E C E E C E Fn B A Fn D D Heat-resistant auto switch H J K H B A

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

Dimensions for Mounting of Auto Switch D-Z7/Z8 (Reed switch) D-Y5, D-Y6, D-Y7 (Solid state switch) A Dimension Bore size (mm) Auto switch model 10 15 20 25 32 6 A D-Y59A/Y7P/Y59B D-Y69A/Y7PV/Y69B D-Y7NWV/Y7PWV/Y7BWV D-Y7NW/Y7PW/Y7BW D-Y7BAL D-Z7, D-Z8 0.2 0.7 6.0 0.7 6.5 1.2 Mounting of Auto Switch When mounting and securing auto switches, they should be inserted into the cylinders switch

MY1

/Y7PV D-Y7W/Y7WV D-Y7BA D-Y59/Y69 D-Y7P/Y7PV D-Y7W/Y7WV D-Y7BA 5 5 5 5.5 5.5 5 5 5 5.5 5.5 Perpendicular electrical entry type and D-Y7BAL cannot be mounted on 16, 20, 50 and 63.

CE2

For detailed specifications, refer to page 10-20-1. 50 7 63 9 80 9.5 100 10.5 CV D-Z7/Z80 D-A3/A44 D-A3C, D-A44C D-A5/A6 D-B5/B64 D-A59W D-B59W D-Y5/Y6 D-Y7P/Y7PV D-Y7W/Y7WV D-Y7BAL D-F5/J5 D-F5W/J59W D-F5BAL/F5NTL D-F59F D-G5/K59 D-G5W/K59W D-G5NTL/G5BAL D-G59F D-G39/K39 D-G39C, D-K39C MVGQ Electrical entry (Fetching direction) D-A53/A56 D-A64/A67 D-B64 D-Z80 D-F59/F5P/J59 D-F59W/F5PW/J59W

Rotary Actuator

Single round shaft: ClRA1BT Double shaft (round shaft, with four chamfers): ClRA1BJ Double round shaft: ClRA1BK D D D H H H H UU UU M N 0 0.2 G D L 0 0.2 [mm] [mm] [mm] Size D (g6) H Size D (g6) G H M N UU L Size D (g6) H UU 30 8 25 50 15 36 63 17 41 80 20 50 100 25 60 30 8 6 25 10 8 75 7.8 50 15 11 36 20 15 118 14 63 17 13 41 22 17 139 16 80 20 15 50 25 20 167 19 100 25 19 60 30 25 202 24

PFxx-OMA1007

Recommended tightening torque Unit: Nm Applicable models AMS20 AMS30 AMS40 AMS60 Part No. of spacer with bracket Y200T-2-D Y300T-2-D Y400T-1-D Y600T-2-D Part No. of spacer Y200-D Y300-D Y400-D Y600-D Tightening torque 0.360.036 1.20.05 1.20.05 2.00.1 When the air management system is fixed on a wall with hexagon socket head cap screws, a hexagonal driver is recommended as a tool.

Title not found

D-859W D-B53, D-A53 0-A64. D-864 surgeabsolber D.A54, D-854, D-A44(C), D-A34(C) D-467 Feed switch D-A33(C) Solid State Type Internal Circuit D-F59, D-G59, D-G39(C) D-FsPW D-GsPW o Lalch typ d agnos s oinput Biue o D-FsP, D-GsP D.FsBAL, D.GsBAL, D-K59W, D-J59W D-F5NTL, D-GsNTL @ D-J59, D-K59, D-K39(C) ffit*' iffil.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Unit: g Model D-M9N D-M9B D-M9P 0.5 8 7 8 Lead wire length m 3 41 38 41 Auto Switch Dimensions Auto Switch Internal Circuit D-M9 M2.5 x 4l mounting hole Slotted set screw Indicator light D-M9B, N, P D-M9N DC(+) Brown 2.6 Main circuit of switch Main circuit of switch Main circuit of switch OUT Black 2.7 2.8 4 22 DC(-) Blue 3.2 D-M9N, P (3-wire) D-M9P Most sensitive position 6 DC(+) Brown 22

Air Cylinder CLA Series Fine Lock Model

D-859W D-B53, D-A53 0-A64. D-864 surgeabsolber D.A54, D-854, D-A44(C), D-A34(C) D-467 Feed switch D-A33(C) Solid State Type Internal Circuit D-F59, D-G59, D-G39(C) D-FsPW D-GsPW o Lalch typ d agnos s oinput Biue o D-FsP, D-GsP D.FsBAL, D.GsBAL, D-K59W, D-J59W D-F5NTL, D-GsNTL @ D-J59, D-K59, D-K39(C) ffit*' iffil.

Heavy Duty Stopper Cylinder

Note 5) Dimensions other than those marked (LA) are the same as the basic type (no locking type). 598 RS2H Series Auto Switch Mounting 1 Auto Switch Proper Mounting Position (Detection at Stroke End) D-M9 D-M9W D-M9AV D-M9V D-M9WV D-M9A D-A9 D-A9V A B Auto switch Auto Switch Proper Mounting Position (mm) Auto switch model D-M9 D-M9W D-M9AV D-M9V D-M9WV D-M9A D-A9 D-A9V A 9.0 B 23.5 A 11.0

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

121.5 110.5 95.5 80.5 Operating range Note) Operating range Note) 8 8 8 5.5 5 5 5 5.5 11.5 11.5 12 12 12 Operating range Note) Perpendicular electrical entry is not available for 50 and 63. ( ) D-Y69A, D-Y69B, D-Y7PV D-Y7NWV, D-Y7PWV, D-Y7BWV MY1CW25/32/40/50/63 B A Reed Switch Solid State Switch D-Z73, D-Z76, D-Z80 (mm) D-Y7BAL (mm) D-Y7NW(V), D-Y7PW(V), D-Y7BW(V) D-Y59 , D-Y69 , D-Y7P(

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

D-Y69A, D-Y69B, D-Y7PV D-Y7NWV, D-Y7PWV, D-Y7BWV ( ) MY1CW 25, 32, 40, 50, 63 B A Solid state switch D-Y59 , D-Y69 , D-Y7P(V) D-Y7NW(V), D-Y7PW(V), D-Y7BW(V) A B A B Reed switch D-Z73, D-Z76, D-Z80 D-Y7BAL 63 50 40 32 25 Mounting position 40 32 25 Mounting position 25 Mounting position 32 40 50 63 A 323.5 278.5 157.5 127.5 97.5 157.5 127.5 97.5 97.5 127.5 157.5 278.5 323.5 A A B 136.5 121.5

Mist Separator

Semi-standard: "-" Standard Port thread Part No. type Rc C2SF-C-D G Rc C2SF-D G NPT C2SF-C(Z)-D NPT C2SF(-Z)-D Appearance and part No. Semi-standard: "6C" Standard Port thread type Part No.

240

Mounting Position (Detection at Stroke End) and Its Mounting Height D-M9 D-M9W D-M9A D-A9 A 22 [24] (24.5) W B [ ]: Value of the D-M9A ( ): Value of the D-A90/A93 D-M9V D-M9WV D-M9AV D-A9V A 20 (22) W B ( ): Value of the D-M9AV/A9V (mm) D-A9, D-A9V D-M9W, D-M9 D-M9WV, D-M9V A 16.5 15.0 22.0 30.0 D-M9A A 16.5 15.0 22.0 30.0 D-M9AV A 16.5 15.0 22.0 30.0 Bore size (mm) 6 10 16 20 B 2.5 7.5

Micro Mist Separator

Semi-standard: "-" Standard Port thread Part No. type Rc C2SF-C-D G Rc C2SF-D G NPT C2SF-C(Z)-D NPT C2SF(-Z)-D Appearance and part No. Semi-standard: "6C" Standard Port thread type Part No.

MQQ

MK(2) b) Type B mounting (When using the cylinder tube threads) RS Q G RS H A RZQ MI W S CEP1 CE1 CE2 ML2B E t E t C J G5-S Compatible Mounting Bolt Dimensions CV Model Type A mounting Type B mounting E (mm) D: Bolt length (mm) C (mm) Mounting bolt size Mounting bolt size MVGQ MQQTB10-D MQQTB16-D MQQTB20-D MQQTB25-D MQQTB28-D MQQLB10-D MQQLB16-D MQQLB20-D MQQLB25-D MQQLB28-D 8 to 11 M3 x

MQQ

MK(2) b) Type B mounting (When using the cylinder tube threads) RS Q G RS H A RZQ MI W S CEP1 CE1 CE2 ML2B E t E t C J G5-S Compatible Mounting Bolt Dimensions CV Model Type A mounting Type B mounting E (mm) D: Bolt length (mm) C (mm) Mounting bolt size Mounting bolt size MVGQ MQQTB10-D MQQTB16-D MQQTB20-D MQQTB25-D MQQTB28-D MQQLB10-D MQQLB16-D MQQLB20-D MQQLB25-D MQQLB28-D 8 to 11 M3 x