Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

Auto switches / Proper mounting position for stroke end detection Electrical entry direction: Inward Electrical entry direction: Outward B D C A (mm) D-Z73 D-Y59A,D-Y59B A B C D Bore size D 0.5 4 0.5 3 5 5 C 16.5 23 34 46 46.5 56 6 20.5 27 38 50 50.5 60 -1 2.5 -1 1.5 3.5 3.5 32 15 21.5 32.5 44.5 45 54.5 4.5 8 4.5 7 8.5 9 10 15 20 25 Note 1) The above mentioned values are indicated as a guide

3 Port Air Operated Valve VPA3145/3165/3185 Series

C[dm3/(sbar)] C[dm3/(sbar)] 1(IN), 2(OUT) 3(EXH) b Cv b Cv 19 0.43 5.5 18 0.47 5.4 23 0.32 6.2 42 0.39 5.8 28 0.36 7.6 26 0.35 7.0 1.0 3 8 1 2 3 4 VPA3145 3 4 SYA SYJA Port size Effective area (mm2) Valve model Weight (kg) 12(INOUT) 23(OUTEXH) 1(IN), 2(OUT) 3(EXH) VZA 3 4 1 230 280 280 310 310 330 570 650 650 670 650 670 2 2 1.5 VPA3165 11 4 VFA 11 4 11 4 11 2 VFRA VPA3185 2.3 VPA4 SYJA Dimensions

High Vacuum Angle Valve

Secure the lead wire of the switch so that it has sufficient slack, without any excessive force applied to it. 23 XL Series Specific Product Precautions 4 Be sure to read this before handling the products. Refer to the back cover for safety instructions.

IDG

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com HA AT ID AMG AFF AM Misc. 14-19-23 20 Series IDG Single Unit/Standard Dew Point 40C Specifications How to Order 03 IDG 50 L Option Flow rate by size None (Standard) With fitting for purge air discharge Flow direction (Right Left) Nil P R Outlet air

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

Since this will make it impossible to satisfy the specifications, operate with adjustment within the range of maximum values. 11-5-23 23 Series MSUB Dimensions These drawings indicate the condition when the B port is pressurized.

RSH

Stroke (mm) MTS Standard stroke Bore size (mm) 20 15 CC 32 20 50 30 63 30 80 40 Weight (kg) Bore size (mm) Action Weight Rod end configuration 20 0.41 Double acting 32 0.75 Lever with built-in shock absorber 50 Single acting 2.03 63 3.56 Double acting with spring 80 6.33 Applicable Auto Switch Model Model Electrical entry/Function Auto Switch Page Reed switch D-Z7l/Z80 Grommet (In-line) 5.3-23

CC

.: 0.5 MPa Operating oil: Additive turbine oil Class 1 (ISO VG32) Oil piping length: 1 m RE A B Flow control valve Flow control valve Throttle valve Throttle valve Stop valve REC CX CCVS20/21/22/23 CCVS02 CCVS10/11/12/13 CY Piping bore Piping bore Piping bore Cylinder driving speed (mm/s) Cylinder driving speed (mm/s) Cylinder driving speed (mm/s) MQQ M Courtesy of Steven Engineering, Inc

ML2B

BB 30 35 40 AA 106 133 164 B 220 280 340 C 206 264 322 D 42 51 59 E 138 168 204 F 93.5 107.5 130.5 II 16 19 23 I 76.5 91 110 Model ML2B25 ML2B32 ML2B40 MM 16 21.5 24.5 MA M5 x 0.8 M6 x 1 M8 x 1.25 NN 22 26 37.5 LC 9.5 12 12 LB 9.5 16 15 LD 5.5 6.5 8.5 MC M5 x 0.8 M6 x 1 M8 x 1.25 PA Rc 1/8 Rc 1/8 Rc 1/4 MD 9 11 14 KK 15 16 17.5 ND 5.6 6.8 8.6 MB M6 x 1 M8 x 1.25 M10 x 1.5 LL 28 30.5 37.5

MQQ

CE1 CE2 20, 25 (Non-integrated type) ML2B +0.058 0 0.040 0.076 9 hole H10 Shaft d9 25 C J G5-S CV CI MVGQ CC +0.2 +0.1 14 10 RB S + Stroke 19 30 H Z + Stroke 9 J ZZ + Stroke D-X 20Bore size (mm) S CI Z H ZZ Data 20 24 97.5 168 40.5 177 25 30 102.5 177 44.5 186 10-5-23 23 Series MQM Accessory Bracket Dimensions Mounting nut Rod end nut d d C C B H B H Material: Carbon steel Material: Carbon

CQS

For details, refer to pages 7-9-23 and 7-9-21. 7-4-45

MLGC

Q R Bore size (mm) 20 25 32 40 M8 x 1.25 depth14 80 5.5 60 3.5 93 35 4 4 25 26 M5 x 0.8 54 50 14 105 M6 x 1 M10 x 1.5 depth18 95 9 70 4 103 40 7 7 32 31 M5 x 0.8 62 125 60 M8 x 1.25 14 M10 x 1.5 depth18 95 9 70 4 104 40 7 7 32 38 Rc 1/8 Rc 1/8 62 60 13 125 M8 x 1.25 M12 x 1.75 depth 21 115 11 82.5 4 115 45 8 8 38 47 67 75 14 150 M8 x 1.25 WH W X Y U W T V Z Bore size (mm) 20 25 32 40 30 23

RLQ

For more information, refer to page 9-12-23. 9-12-6 7 Series RLQ Compact Cylinder with Air Cushion and Lock Cylinder Specifications 32 40 50 63 Bore size (mm) Fluid Proof pressure Maximum operating pressure Minimum operating pressure Ambient and fluid temperature Lubrication Rod end thread tolerance Stroke length tolerance Piston speed Port size (Rc, NPT, G) Air 1.5 MPa 1.0 MPa 0.2 MPa Note

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

arc on each side for high rigidity and high precision (zero clearance) MImproved moment resistance Improved Dynamic Allowable Moment 4-row circular arc Steel ball rotation center Work load [kg] (Overhang: 300 mm) Size Moment direction High rigidity guide LEKFS LEFS Rail guide (Rolling contact surface) 7.5 (10% increase) 6.8 25 Pitching (Mep) 32 18 (35% increase) 13.3 40 37 (61% increase) 23

Environment

Description Material Note 21 Belt 2 Ball screw (shaft) Alloy steel 22 Bearing stopper Aluminum alloy 3 Ball screw nut Resin/Alloy steel 23 Parallel pin Stainless steel 4 Piston Aluminum alloy 24 Scraper Nylon 5 Piston rod Stainless steel Hard chrome plating 25 Retaining ring Steel for spring Nickel plating 6 Rod cover Aluminum alloy 26 Motor 7 Housing Aluminum alloy 27 Lube-retainer Felt

IN20267

Studio 5000 Setup . 23 13. EDS file Rockwell Studio 5000. 23 13.1. Adding a device to Ethernet Rockwell Studio 5000 . 24 13.2. Setpoint . 27 14. Example: Convert the Position to Counts . 27 14.1. Example: Pseudo Code for 100mm MPC mm . 27 14.2. Ladder Logic Example . 27 14.3. LabVIEW Example . 28 14.4. Web Pages . 29 15. System Page . 29 15.1. Diagnostics Page . 30 15.2.

Digital Gap Checker

With 2 tapping screws (3 x 8) 16 ISA3 Series Dimensions ISA3-mm (Bracket mounting) 2 1 3 1.8 L1 (23) 7 (41.1) 38 (33.3) 4 77 15 66 H 25.6 11 5.5 When centralized lead wire is used. 17 Pin no.

KN Series Nozzles for Blowing

D L1 VMG KN KN 861 KN Series Nozzle for One-touch fitting/KN (mm) Model Nozzle size D Applicable fitting size d L1 A Weight (g) KN-Q06-100 KN-Q06-150 KN-Q06-200 KN-Q08-150 KN-Q08-200 KN-Q10-200 KN-Q10-250 KN-Q12-250 KN-Q12-300 5 5 5 9 9 16 16 23 23 18 18 18 20.5 20.5 22 22 24 24 35 35 35 39 39 43 43 45.5 45.5 6 6 6 8 8 10 10 12 12 1 1.5 2 1.5 2 2 2.5 2.5 3 D 10 A Connecting products with

Bag Filter

Weak alkali-based cleaning fluid, Industrial water (Vessel material: Stainless steel) Oil-based coolant, Cutting oil (Vessel material: Carbon steel) Cover Case Legs Seal Stainless steel 304 [FGFS/L] Stainless steel 304 Note 6) Material Carbon steel NBR or FKM Note 2) [FGFC/R] Carbon steel 100(4B)JIS10KFF Rc2 150(6B)JIS10KFF Port size Internal volume Weight Pressure gauge Note 4) Note 3) 23

Speed Controller with Uni One-touch Fitting AS Series

Note) Inch size Metric size KE 23 01 1 8" 3.2 4 6 8 10 12 Control type 5 32" 04 06 08 10 12 03 05 07 09 11 13 3 16" AS-FG Meter-out Meter-in 0 1 1 4" 5 16" AS-FP 3 8" 1 2" With One-touch fitting AS-FM Note) For applicable tubing O.D. selection, refer to the Model on page 630. Use 1/8" tube.

Compressed Air Preparation Filter

Dimensions [mm] Auto drain (1.0 MPa) Auto drain (1.6 MPa) Drain guide B C D E F G Bracket related dimensions Model Port size A H I J K L M N O P AFF70D, AM70D, AMD70D 1, 1 1/2 391.5 379.5 382 31.5 144 136 68 23 40 124 82 48.4 90 18 9 16 10 2.6 AFF80D, AM80D, AMD80D 1 1/2 404 392 394.5 38 170 160 80 23 40 148 93.5 58.5 110 22 11 20 12 3.2 AFF90D, AM90D, AMD90D 1 1/2, 2 470 458 460.5 38 170