Pin Clamp Cylinders

20 15 15 CKQ CLKQ Clamp arm position CK CLK CK CLK A Same as the port side B 90 from the port side C 180 from the port side D 270 from the port side 30 7.5 10.5 CKQ 2 x 6H7 Depth 10 D Clamp arm 4 x M8 x 1.25 Depth 12 Port side C A 2 x Rc1/8 B 45 49.5 Hole diameter of workpiece C D d K SR Q Model number Hole diameter of workpiece C D d K SR Q Model number Hole diameter of workpiece C D d

SYJ300/500/700

1) (Station n) (Light/Surge voltage suppressor) + + + + + 48.5 [55.5] + + + + + 33.1 20 A A 20 One-touch fitting (A, B port) Applicable tubing O.D.: 4, 5/32" A A 5 5 (Pitch) P=10.5 15.5 M5 x 0.8 (A port) (Pitch) P=10.5 15.5 Station n L1 L2 3 52 44 Station 20 230.5 222.5 6 83.5 75.5 8 104.5 96.5 10 125.5 117.5 Station 2 41.5 33.5 4 62.5 54.5 5 73 65 7 94 86 9 115 107 11 136 128 12 146.5 138.5

Vacuum System Peripherals:

(When port sizes for A, B ports are mixed, indicate C4 or C6 in cell .)

Applicable Auto Switch Model

(Tolerance 30%) 5.3-39 Solid State Switch/Direct Mounting D-Y59 /D-Y69 /D-Y7P(V) A B A B Applicable Actuator Series Grommet Series Bore size (mm) MGQ, MVGQ, MGP CXS MY1B MY1C, MY1M, CY1R MY1H, ML2B MGF CY1H RSH 12, 16, 20, 25, 32, 40, 50, 63, 80, 100 6, 10, 15, 20, 25, 32 25, 32, 40, 50, 63, 80, 100 25, 32, 40, 50, 63 25, 32, 40 40, 63, 100 10, 15, 20, 25, 32 20, 32, 50, 63, 80 Specifications

MXW

MXW A 16 12 X11 Change of adjuster assembly Option (-X11) Standard Changing the stroke adjustment range from 5 mm to 15 mm for one side A Replace W/o shock absorber 2 Applicable bore size (mm) Nil X11 Replace A B With shock absorber Adjustment range 4 5 mm 15 mm Standard Option MXW8 MXW12 MXW16 MXW20 MXW25 8 12 16 20 25 Changing to the one with shock absorber Add B 2 A B Replace Add Changing

Prevents Micro-Bubbles

B A B A B A PB PB Double acting N.C. N.O. N.O. Double acting Double acting With flow rate adjustment PA PA B A PB B A N.C. Double acting With bypass PA PA N.C. PB B A B A Double acting N.C. Double acting With flow rate adjustment & by-pass PA PA N.C. B A PB B A Double acting N.C. Double acting With indicator PA N.C. B A N.C. Manifold (5 stations max.)

42

Connector location on U side (FU) 3.5 163 10.7 47 106 71.7 9 9 U side 27 Manual override n X 12 12 2 B 4 A 8 2 B 4 A A A B A B A B A B A B A 7 SMC SMC SMC SMC SMC SMC SMC A A A A A A A B B B 2 B 4 A Indicator light 6 2 B 4 A 5 L2 L1 2 B 4 A 4 B B 2 B 4 A 3 2 B 4 A 2 P = 25 2 B 4 A 1 50.5 44 X Stations 38 27 Connector location on D side (FD) 11.7 16.2 139.9 (Single) 43.2 49.7 D side 148.9

CJ2X/CUX/CQSX/CQ2X/CM2X

Example Rail mounting style CDJ2XB10-45-A Band mounting style CDJ2XB16-60-B Applicable Auto Switch/Refer to page 10-20-1 for further information on auto switches.

CJ2X/CUX/CQSX/CQ2X/CM2X

Example Rail mounting style CDJ2XB10-45-A Band mounting style CDJ2XB16-60-B Applicable Auto Switch/Refer to page 10-20-1 for further information on auto switches.

High Power Cylinder:

1-B 1-C 2-A 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B CE2 6 1/8, 1/4 1.5 500 0 1,000 2,000 3,000 ML2B Max. speed Vmax (mm/s) 6 1/4, 3/8 3 1000 Graph 3:25 ML1C 10 1/4, 3/8 20 (1/4) 4.5 1500 20 10 1/4, 3/8 REA Composed effective area So (mm2) Composed effective area

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

Auto Switch Proper Mounting Position for Stroke End Detection MY1CW 16, 20 MY1MW 16, 20 B A Reed switch D-A90(V), D-A93(V), D-A96(V) Solid state switch D-F9N(V), D-F9P(V), D-F9B(V) D-F9NW(V), D-F9PW(V), D-F9BW(V) Mounting position 20 16 20 16 20 Mounting position Mounting position 16 A 90 70 93 73 94 A A 74 B 110 90 107 87 106 B B 86 Operating range Note) 7.5 11 6.5 8.5 6.5 Operating range

Floating Joint

and compression force (N) Center of sphere R Standard: Heavy Load Type Hydraulic: Up to 7 MPa M A Allowable eccentricity U Maximum thread depth P Weight (kg) B C D T J G H JAHF40-16-150 JAHF50-20-150 JAHF63-24-150 JAHF80-30-150 JAHF100-39-150 JAHF100-48-150 40 50 63 80 100 100 9000 14000 22000 36000 55000 55000 16 20 24 30 39 48 50 62 72 82 100 100 50 59.5 66 79 96 96 15 18 21 24 29 29 75

VZ100/300/500

VV4Z1 05 20 1 VP VG Option Thread type 02 2 stations A port F: With foot bracket VP Nil Rc G NPT 00F 20 20 stations R port 00N S070 Rc NPTF 00T VQ P port Rc Bracket is not mounted.

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

+0.4 +0.2 CW CX CZ L RR CT CZ -0.1 -0.3 CW B + Stroke L 10 15 6.5 12 8 6 RR CL + Stroke 16 18 8 16 10 9 A + Stroke 20 20 10 20 10 10 25 20 18 36 12 10 30 22 18 36 12 10 40 28 22 44 12 14 8 Series MQQ Accessory Dimensions Female-male thread conversion joint Rod end nut d NN Rod MM D C C B H E F A B H Applicable bore size (mm) Applicable bore size (mm) Part no.

LEH_C

1 1.5 1 40 40 3 3 3 3 5 5 5 K K 5 (mm) NPN NPN 10 LECP6 ( PNP PNP 4 4 10 LECP1 1 LECP1 ( 1 NPN NPN 6 6 16 16 1P 1P PNP PNP 20 10 20 10 25 14 25 14 AN LECPA ( AP AN LECPA NPN NPN A A 32 22 32 22 AP PNP PNP B B (m) 40 30 40 30 C C 8 8 8 8 A A 1.5 1 1.5 1 10 10 B B 3 3 3 3 15 15 ( C C 5 5 5 20 20 F F 5 () () R R S S A B C / P.42 7.3 (NPNPNP) 12 - 2.1.3 3 10 2 5 1 4 7 6

Thermo-con/Rack Mount Type

14 A Current consumption 5 A (100 V) to 2.5 A (240 V) 9 A (100 V) to 4 A (240 V) 10 A (100 V) to 4 A (240 V) 8 A (200 V) Power consumption 440 W*1 850 W*1 900 W*2 1500 W*2 Alarm Refer to Alarm.

Magnetically Coupled Rodless Cylinder

C D 15, 20 (mm) Applicable switch model Bore size (mm) D-A9 D-F9, D-A9W A B C D A B C D 15 56.5 17.5 76.5 21.5 72.5 60.5 87.5 67.5 20 39.5 19.5 23.5 83.5 35.5 71.5 Note 1) Auto switches cannot be installed in Area C in the case of 15.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

High Rigidity and High Precision Slider Type LEKFS Series LEKFS25, 32, 40 How to Order w y e r t u i q LEKFS 32 E A 300 R1 CD17T q Size w Motor mounting position e Motor type r Lead [mm] 25 32 40 Nil In-line R Right side parallel L Left side parallel Symbol LEKFS25 LEKFS32 LEKFS40 H 20 24 30 A 12 16 20 B 6 8 10 E Battery-less absolute (Step motor 24 VDC) y Motor option t Stroke*1 u Actuator

Bag Filter

FGF1 A -20 FGF1 B -20 When there is a large amount of contaminants in the fluid; When you want to reduce the frequency of replacements Select the filtration accuracy.

NCQ8

A B A HS 056 HS B A B A 075, 106 HS B A B A 150, 200, 250 Note 1) Figures in the table below are references for auto switch mounting positions in the stroke end detection.