4 @1 u q !3 !2 @6 t @4 w @8 r !1 @5 @3 @2 e !6 A A C B M(D)LUB25 y !9 i o !5 @0 Extension locking w q Section A-A !
For ejector system Nil L Grommet (0.6 m) S 0.3 to 0.7 B 0.5 to 1.2 Combination of supply valve and release valve Grommet (3 m) C Connector (0.6 m) CL Connector (3 m) CN Without connector Unit for replacement Pilot valve Voltage Manual operation Light/Surge voltage suppressor Electrical entry (2) Manifold base (5) Vacuum switch unit 15 C 0X ZSE2 D 05 ZZX1 R A C Piping specifications Stations
(C) Foot bracket (Except RBQ) RBQ1604(C) RBQ series Short type Basic type RBQ2007(C) Load RBQ2508(C) P.910 to 0.05 to 3 RBQ3009(C) RJ RJ Allowable eccentric angle RBQ3213(C) RB D-X 881 Shock Absorber RJ Series Model Selection 1 Model Selection Graph The model selection graphs q to !
(for F, L, S & T1 kits) VVQ5000 3A 1 VVQ5000 2A 1 Electrical entry Electrical entry T1, F, L, T, S kits F kit (connector side) C kit (plug lead type) T1, F, L, T, S kits F kit (connector side) C kit (plug lead type) L F Note1) L F Note1) C C Option Option Nil W Note 2) Standard IP65 enclosure Exhaust cleaner mounting Rc1 Exhaust cleaner mounting Rc1 1/2 Direct exhaust with silencer box Standard
o"o+ oeep 3 o Cross section C-C 3 l "!l Cross section C-C #i .. :: fl ffi -i+-sLJ rr Model D f G, I K L !,!
DttEl{StOlts DIMENSIONS A I c D E F o H 1,1f a r.36 (34.5) 0.874 @.4 1.10 t?f .c, 0.51 02.9t 0./(!3 fl0.91 o.12 (10.7) 0.31 a.s, Mlmelers In Pargnlheseg A I c D E F o H 1.75 (44.4) 1.25 (31.7t 0.gi e5.3) 1.11 {28.9) 0.75 (1s.1)0.6t1 (16.
Fixing method for protective covers WRF100-T200 WRF100-S200 WRF100-T240 WRF100-S240 WRF100-T270 WRF-C200 WRF-C240 w WRF-C270 Tightening torque for cover mounting bolts Location Tightening torque (N.m) t r e r y 3.0 to 4.0 5.0 to 7.0
Red flashes if the CPU is abnormal. q w e r t y u Green lights up when emitters require cleaning.
1 I N e C SM 2 OUT A A IN OUT t A-A BLEED w y Note Component Parts Material No.
C: With auto drain (N.C.)
RLQB Model C D Mounting bolt Example) Bolt M5 x 90l 2 pcs.
K ( across flats) H (With locking) 80 9 6.5 10 18 50 YB-03 32, 40 120 11 6.5 12 22 60 YB-05 50, 63 d2 d1 L UT C UA (mm) UA C d1 d2 H k L UT Weight (g) 25 Part No.
4 q !3 !3 !6 !6 t t !1 Component Parts !1 No. Description Material 1 Bracket Steel strip DIN Rail Mounting Bracket q w e q o !0 i y u q o !0 i y Component Parts No.
Construction L-Bracket w e r t w e r t q Component Parts No. Description Material 1 Bracket Steel strip DIN Rail Mounting Bracket q o !0 !1 i y u q o !0 !1 i y q w e Component Parts No. Description Material Note 1 Body A PBT 2 Knob POM 3 Body B PBT 4 Needle PBT 5 Needle guide Brass Electroless nickel plating 6 U-seal HNBR 7 Spacer PBT1 Component Parts No.
A Weight (g) L1 L2 M D Q Part No.
(mm) Model H Bracket mounting dimensions Q Weight (g) 1(P) R 2(A) 2(A) R 3(R)* L1 L2 L3 L4 L5 L6 M1 M2 Bracket assembly no.
: 10 or more The mean q Non-unidirectional airflow: at least two locations NL = A x 64/(10M) 0.5 q Number of sampling locations: 2 to 9 95% UCL of the mean and the mean of the averages w Number of sampling locations: 1, or 10 or more The mean Derive it from the area of the cleanroom or clean air controlled space.
D M 2 R A 40 150 C73 21 C D M 2 R A 40 150 C73 Number of auto switches Mounting style 2 pcs. 1 pc.
0 e r w o i e r w o i u y t q u y t q Component Parts No. Description Material Note Body A PBT q Body B Electroless nickel plated Brass w Needle Electroless nickel plated Brass e Spring Steel wire r U seal HNBR t Spacer POM (1) y Cassette POM, Stainless steel (2) u Seal NBR i O-ring NBR o Retaining ring for hole type C Tool steel !
+ Stroke) Q + Stroke CY1F 4 x MM thread depth ML (LL) LA 6 x YA recessed area Note 2) XAH7 PA Adjustment bolt Max. approx.