HRX-OM-X071

AL.01 to AL.32 D.OUT1 ALARM CODE No.15 screen Contact output signal 1 maintenance MT.01 MT.01 to MT.05 D.OUT1 MANT CODE No.16 screen Contact output signal 2 function RMT 1 D.OUT2 SEL No.17 screen Contact output signal 2 operation A A/B D.OUT2 TYPE No.18 screen Contact output signal 2 alarm AL.01 AL.01 to AL.32 D.OUT2 ALARM CODE No.19 screen Contact output signal 2 maintenance MT.01

SV

With External Pilot Specifications (Pitch) 24 P = 24 65.8 20 25 11 E 3/5 E 3/5 E 3 A E 3 A 4 A 4 A 4 A 4 A 4 4 A 4 A 4 A 4 A 4 13.7 14.5 35.8 35 58.3 74.8 P 1 P 1 B 2 B 2 B 2 B 2 B 2 P 1 P 1 B 2 B 2 B 2 B 2 B 2 One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 12 3/8" One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 8, 5/16" 10, 3/8" 12 X PE X PE Rc 3/8 [1(P), 3(E)

,

): 0.18kg Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G Size 02 NPTF Passage symbol Port size (A) 4 (B) 2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B) 2 Single Nil

VDW

Port size Coil type G Grommet / Tape winding Port size Symbol Series W Grommet / Molded 300 200 p p M5 01 02 p p M5 1/8 (6A) 1/4 (8A) Orifice diameter N.C. Orifice diameter (mm ) Symbol N.O.

V

Tube 01 Rc 18 02 Rc 14 07 1/4 Tube 11 3/8 Tube T01 1/8NPT T02 1/4NPT S Y M B O L S T Y P E I N L E T P O R T B Box type D Body type 06 6mm Tube 08 8mm Tube 01 Rc1/8 07 1/4 Tube 09 5/16 Tube T01 1/8NPT V A C U U M P R E S S U R E S 660mm Hg L 360mm Hg D I M E N S I O N S M A X I M U M S U C T I O N F L O W R AT E/ A I R C O N S U M P T I O N U N I T (ln/min) Nozzle Diameter mm Specifications

Series VQ Metal Seal/Rubber Seal Body Ported

L Series VQ1000 Plug lead Cassette Plug-in P.1.10-12 P.1.10-14 Series VQ0 P.1.10-44 P.1.10-36 P.1.10-40 Series VQ1000 P.1.10-36 P.1.10-40 P.1.10-44 C Series VQ2000 P.1.10-40 P.1.10-44 P.1.10-36 Series VQ1000 P.1.10-74 P.1.10-76 P.1.10-78 1.10-4 Manifold Variations C S L Port size SUP EXH port Cylinder port kit kit SY Lead wire Direct electrical entry style Serial transmission unit P, R A,

KF

P. 49 KFH P. 50 KFF Use to pipe from male thread such as pressure gauge. Straight union Bulkhead connector K P. 49 KFH P. 51 KFE Use to connect male thead and tube through a panel. Use to connect tubes in the same direction. M H D Male elbow Bulkhead union P. 49 KFL P. 51 KFE Use to pipe at right angles to female thread. Most general type. MS Use to connect tubes through a panel.

Standard Combinations

.4 ARG20/30/40 P .20 Filter Regulator with Built-in Pressure Gauge + Lubricator Regulator with Built-in Pressure Gauge with Back Flow Mechanism ACG20A/30A/40A P .7 ARG20K/30K/40K P .24 Air Filter + Regulator with Built-in Pressure Gauge Filter Regulator with Built-in Pressure Gauge ACG20B/30B/40B P .9 Filter Regulator with Built-in Pressure Gauge Air Filter + Mist Separator + Regulator with

Manifold Specifications

Rc 1 8 VVZS2000-P-01-1 VVZS2000-P-01-2 Body type Plug-in type VVZS2000-26A Non plug-in type Part no. Body type Plug-in type VVZS2000-22A-1 Non plug-in type VVZS2000-22A-2 Part no. Blanking plate It is used by attaching on the manifold block for being prepared for removing a valve for maintenance reasons or planning to mount a spare valve, etc.

Modular Type Regulator Series AR

Contact P/A when using the regulator between a solenoid valve and an actuator.

Solenoid Valve (with M Connector) Conforming to ISO 15407-1 Series EVS1-01, 1-02

): 0.18kg Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G Size 02 NPTF Passage symbol Port size (A) 4 (B) 2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B) 2 Single Nil

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

01-01 ZH07BS-01-01 ZH07BL-01-01 ZH10BS-01-01 ZH10BL-01-01 ZH13BS-01-02 ZH13BL-01-02 I J K L M N O P Model 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 ZH05BS-01-01 ZH05BL-01-01 ZH07BS-01-01 ZH07BL-01-01 ZH10BS-01-01 ZH10BL-01-01 ZH13BS-01-02 ZH13BL-01-02 57 12 3.2 31.5 Rc 5.8 2 38.5 57 12 3.2 31.5 5.8 2 38.5 57 12 3.2 31.5 5.8 2 38.5 57 12 3.2 31.5 5.8 2 38.5 60 12 3.2 33.5 5.8 2

ARM10/11

AL SMC SMC SMC SMC SMC SMC 0.1 0.3 0.2 0.4 0.5 0.6 IS1000 MPa SMC SMC SMC K K K P P P C C C U U U O O O SMC SMC SMC SMC S S S L L L H H H MADE IN JAPAN K K K P P P C C C U U U O O O S S S L L L H H H Mixed manifold Mixed manifold Front handle/Bottom ported Front handle/Top ported Common exhaust type and individual exhaust type can be mounted on the same manifold base.

ARM10/11

AL SMC SMC SMC SMC SMC SMC 0.1 0.3 0.2 0.4 0.5 0.6 IS1000 MPa SMC SMC SMC K K K P P P C C C U U U O O O SMC SMC SMC SMC S S S L L L H H H MADE IN JAPAN K K K P P P C C C U U U O O O S S S L L L H H H Mixed manifold Mixed manifold Front handle/Bottom ported Front handle/Top ported Common exhaust type and individual exhaust type can be mounted on the same manifold base.

Transfer

Allowable load (N) Shock absorber ML2B40 Horizontal collision: P = 0.5 MPa 2. When the shock absorber is used within the air cushion stroke range, almost open the air cushion needle (about 1 turn from the fully closed position).

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

B Counterbore depth C T Y 0 -0.1 L Cylinder tube outer circumference: TC WP Hard chrome plated + special treatment X F GW 4 x LD GP D QW PW 2 x P (Piping port) 4 x 3.2 2 x 4 x MM Thread depth M W K Z + Stroke Q + Stroke WP G G 4 x 6.5 12-CY3R6 (mm) A 7 9 10.5 9 8.5 10.5 10 14 15 F 5.5 6.5 8 9 8.5 10.5 13 17 18 HC 18 25 31 38 43 54 66 84 96 HP 10.5 14 17 24 23.5 29 36 45 51 K 7 9 14 11 15

CXT

Operating pressure P (MPa) P 0.7 MPa MTS 4.

3 Port Air Operated Valve Series SYJA300 1

x 0.5 (Mounting screw) M5 x 0.8 (P, A, R port) 44.5 1.8 (Breathing hole) With filter (80 mesh) 8.5 P R 6 1 1 .5 11 17 9 1.8 (Breathing hole) (P, A, R port) 1/8 42 With filter (80 mesh) Series SYJA700 Base mounted: SYJA74-01 02 Body ported: SYJA72-01 (-F) 2-3.2 25 25.5 (For manifold mounting) 12 1.5 13 A 18 1 23.5 11 M5 x 0.8 48.7 (Bracket) (Pilot port) (Pilot port) 2-3.2 M5 x 0.8 (For mounting

Series VQ Base Mounted Metal Seal/Rubber Seal

VQ1000 Series P.1.10-124 P.1.10-128 P.1.10-132 Plug-in Plug lead VQ2000 Series P.1.10-124 P.1.10-128 P.1.10-132 VQ0 Series P.1.10-170 P.1.10-174 VQ1000 Series P.1.10-170 P.1.10-174 P.742 1.10-114 Manifold Variations T L C S Port size SUP EXH port Cylinder port kit kit kit Lead wire Direct electrical entry style Serial transmission unit Terminal box (Terminal block) SY P, R A, B Enables single-wire

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

(40.2) 20.5 0.8 14.7 1.55 (1.2) L 166.2 (Lead wire length) 89.4 3 x 1/8" {P (1), EA (5), EB (3) port} 1.6 (20) 15 EB P EA 2 x 2.2 (Positioning for manifold gasket) 27.2 (45) L plug connector with cover (LL) 3 52-SY5420-LL-01 (-F2) 5 L 156 (Lead wire length) Insulation: Red (+) Insulation: Black () 5.9 4.1 14.7 12 0.3 mm2 84.3 Cable type (TT) 3 52-SY5420-TT-01 (-F2) 5 Max.10 L (Lead wire