VQ5000

, 4(A), 2(B) port M5 ground screw SMC 26.5 16 4(A), 2(B) port 31.5 37 41 50 98 G1/2 Electrical entry PE X P R1 R2 18.4 18 27.5 41 41 27.5 Rc 1/8 PE port Rc 1/8 External pilot port 5-Rc 1/2 1(P), 4(A), 2(B), 5(R1), 3(R2) port 3 position double check: VQ5600 1 2 position double: VQ5200 1 3 position closed center: VQ5300 1 3 position exhaust center: VQ5400 1 3 position pressure center:VQ5500

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

M4 mounting hole A B 1 0 A B 1 0 A B 1 0 A B 1 0 9 61.5 A A A A R4.5 26 62.5 97 = 4.5 (5.5) (35) (L3) (5.2) 52 (L4) Stations D side U side 1 2 3 4 5 6 7 8 n 2-C6 P(SUP) port P A P A A A A A A A 24.5 (11) 13.5 R B R B B B B B B B (7.5) 7 2-C6 R(EXH) port 19.2 P = 11 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 threads Broken

CL

The series and their stopping accuracy are as follows: CLJ series (p.3.1-10), CLM2 series (p.3.1-18), CLG1 (p.3.127), CLA series (p.3.1-35), and CL1 series (p.3.1-50). wWhen kinetic energy acts upon the cylinder, such as when effecting an intermediate stop: There are constraints in terms of the allowable kinetic energy that can be applied to the cylinder in a locked state.

REC

Lead wire length* (m) Load voltage Auto switch model Electrical entry Indicator Wiring (Output) 3 (L) 5 (Z) Applicable load Special function Style 0.5 () (N) AC DC P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P C76 IC circuit P P P P P p p p P p p p p p p p P P P P P P P P 3 wire (Equiv. to NPN) 5V Yes C73 100V 12V Relay PLC C80 IC circuit No 100V

3 Port Air Operated Valve Series SYJA300 1

x 0.5 (Mounting screw) M5 x 0.8 (P, A, R port) 44.5 1.8 (Breathing hole) With filter (80 mesh) 8.5 P R 6 1 1 .5 11 17 9 1.8 (Breathing hole) (P, A, R port) 1/8 42 With filter (80 mesh) Series SYJA700 Base mounted: SYJA74-01 02 Body ported: SYJA72-01 (-F) 2-3.2 25 25.5 (For manifold mounting) 12 1.5 13 A 18 1 23.5 11 M5 x 0.8 48.7 (Bracket) (Pilot port) (Pilot port) 2-3.2 M5 x 0.8 (For mounting

4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000

VQ VQ4 VQZ VQD VZS VFS VS VS7 1.13-9 Series VQD1000 Dimensions Plug lead unit manifold(VV4QD12-l) Lead wire length: 300mm 4-Rc(PT)1/8 (P, R port) Light 2-4.5 (Mounting hole) 57 50.5 5.3 5.3 52 0.6 1 3 P R 1 3 R P 30 17 6.5 15 7 10 P=11 0.5 0.5 2n-M5 (A, B port) L2 35 4 M5: M5 thread L1 38 42 M plug connector (M) Station 1 2 3 4 5 n D side U side Direct manual override (Non-locking) 24 15

LEC-OM02704CN

AC200230V AC100120V 40 AC100120V 6 AC200230V L 1 L 1 PE L 2 2-M5 2-M5 L 2 L 3 CNP1 CNP1 N N P 1 P 1 P 2 P 2 M4 1.2[Nm] P P C C CNP2 D CNP2 D L 11 L 11 L 21 L 21 U U CNP3 V CNP3 V M5 3.24[Nm] W W 11 2 11 (2) LECSC-S8 [mm] 40 6 5 6 6 (80) 170 CNP1 () CN1 CNP2 CNP3 6 (68) (25.5) MR-J3BA MR-J3BAT 1.0[kg] .

MY1

(Refer to P. 1365.)

Secondary Batteries

/Fixed Mounting Height Heavy Duty Stopper Cylinder Floating Joint /Standard Type /For Compact Cylinders /Stainless Steel Type Shock Absorber Rotary Table/Rack & Pinion Style P.33 P.34 Auto Switches D-M9BW(V)SDPC-900 D-M9BW(V)L-900 D-Y7BW(V)L-900 D-A90L-900 D-Z80L-900 P.62 P.63 P.64 P.65 P.65 P.66 Solid State Auto Switch Direct Mounting Style 90-JA 90-JB 90-JS 90-RB/RBC 92-MSQ P.35 P.35 P.35

Compact Vacuum Ejector Series ZQ

port (P port) Note 4) (M3 x 0.5, piping not required) (68.4) (M5 x 0.8) Vacuum port (V port) Note 4) 57.3 PE 29.4 (M5 x 0.8) 3 20.2 P 20.3 9.7 V Exhaust part 0.8 17.7 22.8 87.2 10 Note 1) The above dimensions are for ZQ11U-K2 L-F.

ZQ

) S R U N L H L H k P a MOD E SET HYS Air supply port (P port) Note 4) (M3 x 0.5, piping not required) 71.9 66.9 (63.1) (M5 x 0.8) 57.3 Vacuum port (V port) Note 4) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com PE SMC (M5 x 0.8) 29.4 3 20.2 P 20.3 9.7 V Exhaust

Table of Contents

For low speed control Port size 0 1 Port size Symbol M5 U10/32 01 02 Applicable series AS120M-M5 AS120M-U10/32 AS220M-01 AS220M-02 M5 x 0.8 10-32 UNF 1/8 1/4 Thread type Cylinder side R Tube side Rc Symbol Nil Metric thread (M5) Unified thread (10-32 UNF) NPT P . 15-11-3 N Needle Valve/Flow Characteristics AS120M AS220M-01 AS220M-02 0.8 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet

VQ

SY SYJ (L5) Plug assembly (L4) VK 2-4.5Mounting hole 1 2 3 VVQ100-12A(L3) 88 (8.5) L2 VZ 48.7 L1 VT VT (45) (35) 33 25 (5.5) VP 23.5 12.3 VG R11 Manual override 21.5 (Min. bending inner radius) (29.3) VP 104 VQ VQZ Stations 1 2 3 4 5 n Dside Uside VZ 2-M5 X 0.8(E port) VS 2-M5 X 0.8(P port) 42.9 A A 20 (8.5) 1.5 5 n-M5 X 0.8 (A port) 5 (7.5) 15 P=10 38 Equation: L1=10n+32 L2=10n+43

PA300/500/700

1/8 (Mounting groove for M5 thread) 2-R2.7 PA 5 36 35 35 3.5 21.5 31 17.5 1.6 15 26.7 45 9 54.5 65.6 54.4 1(P) 3(R) 4.5 (Piping port) Rc 1/4,1/8 (Breathing port) M5 x 0.8 16.5 20.4 5-5-15 4 Series VPA300/500/700 Dimensions Base mounted: VPA344A B (A port) Rc 1/8,1/4 12 65.6 58.6 39 12 30 (PA port) Rc 1/8 (PA port) Rc 1/8 2(A) NO 26.5 35 43 PA PA Courtesy of Steven Engineering, Inc.-230 Ryan

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

Type 41R How to Order SS3YJ7-41R-05 --01 R port 1/4 Applicable solenoid valve SYJ714RSYJ724RX port (External pilot type) M5 x 0.8 Stations R P Applicable blanking plate assembly SYJ700-10-2A P, R port thread type X 02 : 20 2 stations : 20 stations P port 1/4 Nil 01 1/8 A port size Rc G NPT NPTF A A F N T A port 1/8 Note) For more than 9 stations, supply/exhaust air to/from both sides of P

Air Slide Table

M5 x 0.8 5.4 7.4 MXQ16B M5 x 0.8 5.4 10.3 MXQ20B M6 x 1 9.2 14.5 MXQ8C M3 x 0.5 1.1 6.3 MXQ12C M4 x 0.7 2.7 8.5 8.

LEC-OM02904

AC200230V AC100120V 40 M5 3.24[Nm] M5 3.24[Nm] 6 AC100120V AC200230V AC100120V AC200230V L1 L1 PE PE L2 2-M5 2-M5 L2 L3 CNP1 CNP1 N N P1 P1 M4 1.2[Nm] P2 P2 M4 1.2[Nm] P P C C CNP2 D CNP2 D L11 L11 L21 L21 U U CNP3 V CNP3 V W W 9 2 9 (2) LECSS-S8 [mm] 5 40 6 6 6 (80) (170) 6 6 () CN4 CN2L CN2 CN1B CN1A CN3 CN5 CNP1 L1 L2 L3 N P1 P2 P C D L11 L21 U V W L1 L2 () L3 N P1 CNP2 P2

MK

Mounting bolt M5 X 75l M5 X 85l M5 X 80l M5 X 90l M5 X 90l M5 X 100l M5 X 80l M5 X 90l M6 X 105l M6 X 135l M8 X 105l M8 X 135l D 75 85 80 90 90 100 80 90 105 135 105 135 Part No.

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

Thread type Rc G NPT Nil F N Voltage 1 2 3 4 5 6 100VAC (50/60Hz) 200VAC (50/60Hz) 110VAC (50/60Hz) 210VAC (50/60Hz) 24VDC 12VDC Port size Series Symbol Port size Consult P/A regarding other voltages. 300 200 M5 01 02 M5 1/8 (6A) 1/4 (8A) Electrical entry G Grommet Orifice size N.O. Orifice size mm N.C.

MHR2/MDHR2, MHR3/MDHR3 Rotary Actuated Air Gripper (2 Finger) (3 Finger)

Indicator light With Special function Applicable load Electrical entry Wiring (Output) Type 0.5 () 3 (L) Perpendicular In-line DC AC 3-wire (NPN) Solid state switch F9NV F9N P P 5V 12V IC _ _ Relay, PLC Grommet 3-wire (NPN) 24V F9PV F9P P P 2-wire 12V F9BV F9B P P Lead wire length: 0.5m.