IZx-OMV0005

Do not receive a moment force on the nozzle (Page 6). 9 Doc. no.IZ-OMV0005 1-2.Accessories Power supply cable IZN10E CP Z Symbol Type Nil 3m Z 10m Made-to-Order power supply cable Available from 1 to 20 m in 1 m increment (use standard for 3 m and 10 m).

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

G N T NPT NPTF (For type 20 manifold) 1 SYJ7 2 5 M 01 M 10 Body ported SYJ7 4 5 M 01 1 M 10 Base mounted CE-compliant Clean series Nil Q Manual override CE-compliant Thread type Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors 3 port Coil type F Nil Nil: Non-locking push type Rc Note) AC-type models that are CE-compliant have

VZS

M plug connector 2 position double: VZS2250-M(Z)-01 3 position closed center: VZS2350-M(Z)-01 3 position exhaust center: VZS2450-M(Z)-01 3 position pressure center: VZS2550-M(Z)-01 DIN terminal 2 position double: VZS2250-D(Z)-01 3 position closed center: VZS2350-D(Z)-01 3 position exhaust center: VZS2450-D(Z)-01 3 position pressure center: VZS2550-D(Z)-01 Applicable cable O.D.: 3.5 to 7 MAX

KQ2

(mm) Connection thread Rc 3.2 Note) Effective area (mm2) T (M) Mounting Mass (g) L1 L2 M hole Nylon Urethane Mounting plate thickness 7 mm or less 1 4 M12 x 1 13 31.5 15 15.5 3.4 2.9 17 14 13 1 8 KQ2E04-01 11 5.6 4 16 13 16 27.5 31 Connection thread 4 M12 x 1 14 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 3 8 1 2 3 8 1 2 KQ2E04-02 17 15 35 Applicable tubing KQ2E06-01 28 11 30 30 17 6 KQ2E06-02 15

ZP

J 04 4 06 6 08 8 G Model A B C D 2 E F G H J K L M Vacuum inlet direction q Pad dia.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

VZA4221-01 VZA4321-01 VZA4421-01 VZA4141-1-01 VZA4141-1-02 VZA4141-2-01 VZA4141-2-02 VZA4241-1-01 VZA4241-1-02 VZA4241-2-01 VZA4241-2-02 VZA4341-1-01 VZA4341-1-02 VZA4341-2-01 VZA4341-2-01 VZA4441-1-01 VZA4441-1-02 VZA4441-2-01 VZA4441-2-02 Single Double Closed center Exhaust center 0.44 0.44 0.44 0.44 0.25 0.25 0.25 0.25 1.7 1.7 1.7 1.7 0.49 0.49 0.47 0.47 0.14 0.14 0.15 0.15 2.0 2.0 1.9

CRB2/CRBU2/CRB1

(mm) Q1 = M Q1 = M Size Q1 = M Q1 = M 50 63 80 100 (mm) Shaft type Size K T K T K T K T L1 = L1 = 50 63 80 100 Thread L1 = Shaft type M5 x 0.8 L1 = J X Z J X Z J X Z J X Z 4.2 4.2 4.2 4.2 Thread M6 x 1 M5 x 0.8 5 5 5 5 4.2 4.2 4.2 4.2 M8 x 1.25 M6 x 1 6.8 6.8 L1 5 5 5 Q1 Q1 L1 M10 x 1.5 J axis Z axis Q1 Q1 M8 x 1.25 8.6 6.8 L1 L1 K axis T axis 81 Series CRB1 (Sizes: 50, 63, 80, 100)

Micro Mechanical Valve Series VM1000

P.T. 5.5 25 (L) (A) 3 port (A) 2 12 10 1 (P) 3 (R) 14.5 14.5 2 x 1/8 17 44 25.4 2 x 4.6 mounting hole * 0.5 MPa supply Model L A VM120-01-00A 32.5 7.5 F .O.F .* 26 N VM130-01-00A P .T. 1.5 mm VM121-01-00A 28.5 3.5 O.T. 1.5 mm VM131-01-00A T.T. 3 mm Roller lever VM121-01-01A VM131-01-01A VM121-01-01SA VM131-01-01SA Symbol 2 port 10 Polyacetal or hard steel roller (A) 2 12 10 1 (P) 29.2 45.5

Rotary Actuator/Vane Type

Applicable shaft types: J, K, T L2 = Q2 = M Q2 = M Applicable shaft types: J, K, T [mm] [mm] CRB2, CRBU2 Q1 J K T 10 Not available 15 M3 20 M3, M4 30 M3, M4, M5 40 M3, M4, M5 CRB2, CRBU2 Q2 J K T 10 Not available 15 M3 20 M3, M4 30 M3, M4, M5 40 M3, M4, M5 Shaft type Shaft type Size Size Symbol: A37 Symbol: A38 CA = C The long shaft can be further shortened by machining it into a stepped

reduces flow setting time

AS AS-FE A L5 D2 KE AS-FG AS-FP L2 L1 T H (Width across flats) AS-FM AS-D Metric Size [mm] AS-T Model d T H D1 D2 D3 L1 L2 L3 L4 L5 A M W1 Y Weight [g] Unlocked Locked Unlocked Locked AS231FS1-01-23 (S) 3.2 ASP 13.3 24 17.5 36 43.9 42.4 40.8 39.3 13.3 20 15 14 AS231FS1-01-04 (S) 4 8.2 13.9 25.1 AS231FS1-01-06 (S) 6 10.4 26.2 20.4 38.8 15 AS231FS1-01-08 (S) 8 13.2 10.2 16.4 30.1 21.5 40 14.2

KJ

(inch) Model H1 (Width across flats) H2 (Width across flats) T (M) Mounting hole M Min. port size Connection thread R Weight (g) L1 L2 Mounting plate thickness 7 mm or less 30 31 36 3 16 KQ2E07-02 KQ2E05-01 17 17 1 8 28 32.5 35 M16 x 1 17 11.5 14.5 15 14.5 14.5 18.5 M22 x 1 74 M14 x 1 M14 x 1 15 15 16.5 17 18.5 4.6 17 17 19 24 3.5 1 4 1 4 3 8 Applicable tubing 5 16 KQ2E09-03 19 6 3 8 21 KQ2E11

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

and lock override. 22.8 (GZ, GS: 23.8) [23.8] (Non-locking) Manual override 85.6 (GZ, GS: 87.6) [87.6] G: 300 H: 600 87.2 (GZ, GS: 88.6) [90.6] (Lead wire length) 51.5 [58] 48.6 8.5 45 39.1 32.5 21.5 6 6 10 4-Rc(PT)1/8 (Piping port) 17 17 15 45.5 24 32 [ ] for AC L plug connector (L): SYJ5240-lLll-01 M plug connector (M): SYJ5240-lMll-01 2-4.3 (Mounting holes) 2-4.3 (Mounting holes) 24

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

AS AS-FE A L5 D2 KE AS-FG AS-FG AS-FP L2 L1 T H (Width across flats) AS-FM AS-D Metric Size [mm] AS-T Model d T H D1 D2 D3 L1 L2 L3 L4 L5 A M W1 Y Weight [g] Unlocked Locked Unlocked Locked AS231FSG1-01-23 (S) 3.2 ASP 13.3 24 17.5 36 43.9 42.4 40.8 39.3 13.3 21.5 16.2 14 AS231FSG1-01-04 (S) 4 8.2 13.9 25.1 AS231FSG1-01-06 (S) 6 10.4 26.2 20.4 38.8 15 AS231FSG1-01-08 (S) 8 13.2 10.2 16.4 30.1

Air Fittings & Tubing

T (M) L2 L1 M Nylon Urethane 1 4 13 13 M12 X 1 3.2 KQ2E23-02 3.4 2.9 17 14 14 31.5 15 15.5 1 8 KQ2E04-01 11 5.6 4 16 13 16 27.5 31 M12 X 1 4 14 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 3 8 1 2 3 8 1 2 15 35 KQ2E04-02 17 KQ2E06-01 11 28 31.5 30 15 17 M14 X 1 19 KQ2E06-03 17 33.5 29 KQ2E06-02 15 6 13.1 10.4 17 17 17 KQ2E08-01 7.5 27.5 28 26.1 18.0 8 18.5 19 KQ2E08-02 13 33 27 17 M16 X 1 19 KQ2E08

Electric Actuators

Allowable lateral load (F) Allowable plate rotation torque (T) Load (N) Torque (Nm) Stroke 50 75 100 125 150 175 200 Stroke 50 75 100 125 150 175 200 L L 42 2.87 m m 42 2.47 40 2.17 42 2.38 32 2.16 24 1.98 17 1.82 50 to 200mm stroke F T 10 Load weight m (kg) F 125 to 200mm stroke Plate non-rotating accuracy () 50 to 100mm stroke Non-rotating accuracy () 0.09 1 + 0.1 10 50 100 Eccentric distance

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

ASD AS D2 L5 A AS-FE KE AS-FG AS-FG T AS-FP L2 L1 H (Width across flats) AS-FM AS-D Metric Size [mm] AS-T Model d T H D1 D2 D3 L1 L2 L3 L4 L5 Note 1) A Note 2) M Weight [g] Unlocked Locked Unlocked Locked AS23l1FG-01-23(S)A 3.2 13.3 24 17.5 36 30.6 29.2 27.5 26.1 13.3 10 (9) AS23l1FG-01-04(S)A 4 8.2 13.9 25.1 10 (10) AS23l1FG-01-06(S)A 6 10.4 26.2 20.4 38.8 AS23l1FG-01-08(S)A 8 13.2 10.2

KR

(mm) Connection thread Rc Model M Weight (g) Mounting hole T (M) L2 L1 Nylon Urethane Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Mounting plate thickness 7 mm or less KGE04-01 1 8 14 16 16 35 11 15 11 15 17 7.5 13 27.5 31 28 31.5 33.5 27.5 33 M12 x 1 13 4 5.6

HRX-OM-W002

Flow Sensor t t EV1 EV2 PTSensor PS1 PS2 PS3 PT FL WH WH BK BK DOUT2(temp) DOUT( flow) PM DC(+) DC(-) M M OUT OUT OUT + + + 3 3 3 2 2 2 1 1 1 3 2 3 2 1 1 4 2 1 2 3 1 4 Model /A /B A E E B 3 2 1 1 BK BR BR BR BR BR BR BL BL BL BL BL BL BL BL BL RS232C DIO RS485 FG 13 15 16 12 10 11 14 6 8 9 3 5 7 4 1 13 15 16 12 10 11 14 1 1 11 6 8 9 3 8 3 9 6 9 3 6 7 2 5 2 5 7 10 12 13 15 5 7 2 1 4 4 4 14

Battery-less

Model (L) B D E F G J K LES25DEm-30mm-m 214 48 4 133.5 81 4 19 121.5 LES25DEm-30Bmm-m 254.5 LES25DEm-50mm-m 240 42 6 159.5 87 4 39 147.5 LES25DEm-50Bmm-m 280.5 LES25DEm-75mm-m 274 55 6 193.5 96 4 64 181.5 LES25DEm-75Bmm-m 314.5 LES25DEm-100mm-m 347 50 8 266.5 144 4 89 254.5 LES25DEm-100Bmm-m 387.5 LES25DEm-125mm-m 372 55 8 291.5 144 6 57 279.5 LES25DEm-125Bmm-m 412.5 LES25DEm-150mm-m 397

Vacuum Pad

ZP3-T(10/13/16)UM;(J/K)3-@ ZP3-T(10/13/16)B;(J/K)3-@ ZP3-T(10/13/16)UM;(J/K)6-@ ZP3-T(10/13/16)B;(J/K)6-@ ZP3-T(10/13/16)UM;(J/K)10-@ ZP3-T(10/13/16)B;(J/K)10-@ ZP3-T(10/13/16)UM;(JB/K)15-@ ZP3-T(10/13/16)B;(JB/K)15-@ ZP3-T(10/13/16)UM;(JB/K)20-@ ZP3-T(10/13/16)B(JB/K)20-@ Buffer assembly part no. Note 3) Buffer assembly part no. Note 3) Pad unit part no.