High Vacuum L Type Valve

Port 1(P) S K L M N B T Port 3(R) A G A Unit: mm Model A B C Fn Fd G J XLFV-16-2 40 108 38 30 17 41 XLFV-25-2 50 121 48 40 26 46 XLFV-40-2 65 171 66 55 41 54.5 XLFV-50-2 70 185 79 75 52 71 XLFV-63-2 88 212 100 87 95 70 80.5 XLFV-80-2 90 257 117 114 110 83 90.5 Model K L M N S T XLFV-16-2 17.2 10.2 3.6 3.6 M5 M5 XLFV-25-2 21.4 10.2 3.6 3.6 M5 M5 XLFV-40-2 33.9 10.2 3.6 3.6 M5 M5 XLFV-50-2

IZx-OMP0064

Intermediate brackets should be mounted at the same intervals. 3) Installation of the ionizer (when using brackets) M4 screw Tap (M5) screws at the bracket mounting positions for installation of the ionizer and fix the ionizer body and brackets with M5 screws.

VCA

35 + 33, L2 = n x 35 + 44 Front ported: L1 = n x 35 + 69, L2 = n x 35 + 80 VV2CA4 Side ported: L1 = n x 41 + 35, L2 = n x 41 + 46 Front ported: L1 = n x 41 + 79, L2 = n x 41 + 90 n (stations) PB IN port direction Model Dimensions 9 348 359 384 395 404 415 448 459 8 313 324 349 360 363 374 407 418 10 383 394 419 430 445 456 489 500 6 243 254 279 290 281 292 325 336 7 278 289 314 325 322 333

A_HEC-OM-K001

Draw a vertical line to the X axis from intersection B. The temperature at the intersection between this line and the X axis is the dew point (in this example, 13oC).

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

CL Bore size (mm) 20, 25, 32 40, 50, 63 80, 100 Thread size Pulling force Stroke (mm) MLGC M2.5 X 0.45 X 25l 4.9N 2 M3 X 0.5 X 3l 10N 3 CNA M5 X 0.8 X 40l 24.5N 3 Bolt should be detached under normal operation, otherwise it may cause malfunction of the locking feature. CB wThe lock piston is pushed further upward.

2/3 Port Valve

L K M N O P Q R S T U V M5 X 0.8 Depth 5.5 20 24 24 29 36 48 51 25 30 35 38 30 40 50 56 37 43 50.5 58.5 75 100 126 141 88 118 148 163 34 44.5 60.5 66.5 10.5 16 19.5 15.5 62 6 X 8 7 X 0 9 X 2 9 X 2 202.5 232 267 286.5 VNH1 -10A VNH2 -15A VNH3 -20A VNH4 -25A A B A B A B A B M6 X 1 Depth 6 70 92 109 M8 X 1.25 Depth 6 M8 X 1.25 Depth 6 4.2-34 2 Port Valve for Steam Steam Valve SeriesVND 2 Port

VCA

) n-3/8, 1/2 (VCA30) n-1/2, 3/4 (VCA40) OUT port J1 J3 2-1/2 (VCA30), 3/4 (VCA40) IN port (front ported) L dimensions (mm) Formulas VV2CA3 Side ported: L1 = n x 35 + 33, L2 = n x 35 + 44 Front ported: L1 = n x 35 + 69, L2 = n x 35 + 80 VV2CA4 Side ported: L1 = n x 41 + 35, L2 = n x 41 + 46 Front ported: L1 = n x 41 + 79, L2 = n x 41 + 90 n (stations) IN port direction Model Dimension 9 348

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

CL MLG Stroke (mm) Pulling force Bore size (mm) 20, 25, 32 40, 50, 63 80, 100 Thread size CNA 2 4.9N M2.5 X 25l 3 10N M3 X 3l CNG 3 24.5N M5 X 40l Bolt should be detached under normal operation, otherwise it may cause malfunction of the locking feature. MNB wThe lock piston is pushed further upward.

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

Drain cock Oil bowl B' C C Drain cock Drain guide (A) (B) Rc , NPT, G Mounting bracket Port size Model C B A Drain piping F G H J K L B' D E 6 6 1/4 female thread M3 x 0.5 1 4 2.3 15 12 20 50 73 AMC220 40 56 88 100 22 Depth 8 Body size A B C M3 x 0.5 71 88 101 101 121 55 63 83 96 96 116 1 4 3 8 , 56 75 102 118 135 153 AMC320 75 120.5 140.5 2.3 15 20 30 50 123.5 24 55 2 3 5 6 8 9 Depth

2/3 Port Valve for Various

Series VXA21/22 Dimensions (Orifice Size: 3 mm, 4.5 mm, 6 mm) VXA212/VXA213/VXA223/VXA224 Bracket Pilot port Spanner spout, hexagon Model Port size P Rc A B C D E F With bracket Port size G H I J 1 8 1 4 1 4 3 8 10 VXA21 VXA22 , , 18 21 9 10.5 40 45 21 27 55 62 64 71 11 13 36 46 46 56 11.5 Dimensions (Orifice Size: 8 mm, 10 mm) VXA225/VXA226 Thread fixed: (VXA2262 0-04 only) 2-M5 x 0.8 depth

-fl Seies

POTiS J inch(mm) n: stations L t 4 5 7 I 'to Equation L1=1.lOxn+1.85 (L r= 28 x n +47) Lr:1.1Oxn+2,2O (L,:28 x n +56) Lr (75) 4.06 (r03) 5.16 (131) 6,26 fl59) 7.36 (187) 8.46 (2|5) 9.57 \243) 10.67 (271) 11.77 (299) 12.87 (327) Lr 3.31 (84) 4.41 (112) (140) 6.61 (r68) 7.72 (196) s.a2 \224) 9.92 (252) 1t.02 (280) 12.13 (308) 13.23 (336) Series NVFRz000:Base Mounted Tlzpe Manifold Ptug-in Type

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

POTiS J inch(mm) n: stations L t 4 5 7 I 'to Equation L1=1.lOxn+1.85 (L r= 28 x n +47) Lr:1.1Oxn+2,2O (L,:28 x n +56) Lr (75) 4.06 (r03) 5.16 (131) 6,26 fl59) 7.36 (187) 8.46 (2|5) 9.57 \243) 10.67 (271) 11.77 (299) 12.87 (327) Lr 3.31 (84) 4.41 (112) (140) 6.61 (r68) 7.72 (196) s.a2 \224) 9.92 (252) 1t.02 (280) 12.13 (308) 13.23 (336) Series NVFRz000:Base Mounted Tlzpe Manifold Ptug-in

Rated Vacuum Range: -101 to 0 kPa, Output Specification: X (NPN Open Collector 2 Outputs + Copy Function), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: M5 (Female Thread), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: NPN Open Collector 2 Outputs + Copy Function, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: Female Thread, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Bracket: -, Operation Manual: -

Air Slide Table Series MXQ

is not available with shock absorber. x x BS x x x BT x x x x B x x x : Available, x: Not available Note 3) With the combination of buffer mechanism and extension end stroke adjuster, the buffer stroke decreases by the amount of stroke adjusted with the extension end stroke adjuster.

AWM20 to AWM40

B B B B B N.O.: Black Dimensions B B B N.C.: Gray O S O S 1/8 1/4 10 One-touch fitting Barb fitting Applicable tubing: T0604 M5 x 0.8 Width across flats 14 Width across flats 17 Model Standard specifications Optional specifications Square type pressure gauge Digital pressure gauge Round type pressure gauge P1 P2 A B Note) C D E G J F K H J H J H J AWM20/AWD20 28 27.8 1/8, 1/4 1/8 M28 x 1

AWM20 to AWM40

B B B B B N.O.: Black Dimensions B B B N.C.: Gray O S O S 1/8 1/4 10 One-touch fitting Barb fitting Applicable tubing: T0604 M5 x 0.8 Width across flats 14 Width across flats 17 Model Standard specifications Optional specifications Square type pressure gauge Digital pressure gauge Round type pressure gauge P1 P2 A B Note) C D E G J F K H J H J H J AWM20/AWD20 28 27.8 1/8, 1/4 1/8 M28 x 1

ø 40, ø 50, ø 63, ø 80, ø 100 Series CBA2 Standard type CA2 Standard type CA2W Standard/Non-rotating rod CA2K Standard/Non-rotating rod CA2KW Low friction CA2
Q End Lock Cylinder

Stroke (mm) Pulling force Bore size (mm) 40, 50, 63 80, 100 Thread size 3 10N M3 x 0.5 x 30l or more 3 24.5N M5 x 0.8 x 40lor more Remove the bolt for normal operation. It can cause lock malfunction or faulty release. Rubber cap wManual release lock type Push the M/O knob and turn it 90 counterclockwise.

Series MLGP

Lock specifications Bore size (mm) 20 25 32 40 50 63 80 100 Lock operation Spring locking (Exhaust locking) Unlocking pressure 0.2 MPa or more Lock starting pressure 0.05 MPa or less Locking direction One direction (Extension locking, Retraction locking) Maximum operating pressure 1.0MPa Unlocking port size (Rc, NPT, G) Port size (Rc, NPT, G) M5 x 0.8 1/8 1/4 Holding force (Maximum static

CRJ

EA) 25 1.4 32 5.5 (mm) EA EB HA Size CRJU05 CRJU 1 6.6 5.6 33.8 6.5 5.6 35.8 7.5 3.1 (mm) Rotation angle Q S JC JD BA BD A BH J BB D JB H BE BG BI JA SD BC DD UU N BF CB W CA Size 32.4 21.5 43 90 CRJB05 13.5 M4 x 0.7 5 30 11 19.5 20 M4 x 0.7 5g6 3.5 14.5 6.5 17.1 7 5.8 3.4 9.5 10h9 28 12.5 3.5 5.5 4.5 43.4 27 54 180 37.4 24 48 90 CRJB 1 16.5 M5 x 0.8 6 35 14 23.5 22 M5 x 0.8 6g6 4.5 15.5